A silver wire bonding sulfurization detection device
Patent Information
- Application Number
- CN202521320421.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-06-26
- Publication Date
- 2026-09-08
- Estimated Expiration
- 2035-06-26
AI Technical Summary
[0004]本实用新型的目的是为了解决现有技术中气体分布不均匀,上料不便的问题,而提出的一种键合银丝抗硫化检测设备
[0015] 1. This bonding silver wire anti-sulfurization testing equipment, driven by the output end of an electric telescopic rod, connects the sealing cylinder and the testing cylinder to the annular insert plate one and annular insert plate two respectively, achieving double sealing. Utilizing multiple independent testing stations combined with corresponding independent testing cylinders, it achieves the division of corresponding testing areas, realizing one testing space per bonding silver wire, thereby improving testing accuracy. Each testing cylinder is also equipped with an independent H2S concentration sensor and temperature and humidity sensor to detect the gas concentration, temperature, and humidity in the testing area, further ensuring the safety of the testing environment.
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Figure CN224731939U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of sulfur resistance testing technology, and in particular to a sulfur resistance testing device for bonded silver wire. Background Technology
[0002] Silver bonding wires are widely used in wire bonding processes in integrated circuit packaging. However, silver is prone to react with gases such as hydrogen sulfide (H2S) in sulfur-containing environments to form silver sulfide (Ag2S), which leads to increased resistance, degradation of mechanical properties, and affects device reliability. Therefore, it is necessary to test the performance of silver bonding wires.
[0003] Existing testing methods are mostly static exposure tests, which may have certain drawbacks. For example, during the testing process, the gas may be unevenly distributed, leading to differences in the test data of bonded silver wires in some areas. Since bonded silver wires are produced in batches, when multiple batches of bonded silver wires need to be tested, most equipment only has a single test tray. Therefore, after the previous batch of bonded silver wires is tested, the new batch of bonded silver wires needs to be placed and tested again, which significantly affects the testing efficiency. Therefore, we urgently need a bonded silver wire sulfur resistance testing device to solve the above problems. Utility Model Content
[0004] The purpose of this invention is to solve the problems of uneven gas distribution and inconvenient feeding in the prior art, and to propose a bonding silver wire anti-sulfurization testing device.
[0005] To achieve the above objectives, the present invention adopts the following technical solution:
[0006] A device for testing the anti-sulfurization of bonded silver wire includes a processing table and an annular guide rail installed on the processing table. It also includes a connecting frame rotatably connected inside the processing table. A test plate is symmetrically installed on the connecting frame. A plurality of test stations are provided on the test plates. Elastic sheets for fixing the bonded silver wire are provided on the plurality of test stations.
[0007] A sealing cylinder is installed on the processing table and lifted. Inside the sealing cylinder is a detection cylinder corresponding to the detection table. An air supply device is installed on the top of the sealing cylinder and is connected to the detection cylinder. When the sealing cylinder descends to a preset position, the detection cylinder seals the opening end of the detection table, forming a sealed test space.
[0008] To reduce gas leakage, preferably, the processing table is fixedly installed with a drive motor and a connecting frame, and an annular insert plate is fixedly installed on the detection plate. The annular insert plate is also slidably connected to a slider on the annular guide rail. When the sealing cylinder descends to the preset position, the sealing cylinder and the annular insert plate are inserted to form a sealed space.
[0009] To reduce gas leakage, preferably, an annular insert plate two is fixedly installed on the testing platform, and a silicone gasket is fixedly installed inside the annular insert plate two. An electric telescopic rod is fixedly installed on the processing platform, and the output end of the electric telescopic rod is fixedly installed with the sealing cylinder. When the sealing cylinder descends to the preset position, the sealing cylinder is inserted into the annular insert plate two to form a sealed testing space.
[0010] To facilitate the feeding of bonding silver wires, preferably, the testing table includes a hydraulic cylinder installed inside the testing table, wherein the output end of the hydraulic cylinder is fixedly installed with a testing table surface, and the elastic sheet is symmetrically installed on the testing table surface.
[0011] In order to allow for zoned gas delivery, preferably, the gas supply device includes a gas storage tank installed on a sealed cylinder, wherein a vacuum pump is fixedly installed on the gas storage tank, an inlet valve is fixedly installed at the top of the detection cylinder, the inlet end of the vacuum pump is connected to the gas storage tank, and the outlet end of the vacuum pump is connected to the inlet valve.
[0012] In order to detect the gas concentration and temperature and humidity in the area, preferably, an H2S concentration sensor and a temperature and humidity sensor are fixedly installed in the detection cylinder. The H2S concentration sensor is used to detect the H2S gas concentration in the detection cylinder, and the temperature and humidity sensor is used to detect the temperature and humidity in the detection cylinder.
[0013] To improve the testing environment, preferably, the processing table is covered with a protective cover, which is used to protect the processing table during the testing process.
[0014] Compared with the prior art, this utility model provides a testing device for the anti-sulfurization of bonded silver wire, which has the following beneficial effects:
[0015] 1. This bonding silver wire anti-sulfurization testing equipment, driven by the output end of an electric telescopic rod, connects the sealing cylinder and the testing cylinder to the annular insert plate one and annular insert plate two respectively, achieving double sealing. Utilizing multiple independent testing stations combined with corresponding independent testing cylinders, it achieves the division of corresponding testing areas, realizing one testing space per bonding silver wire, thereby improving testing accuracy. Each testing cylinder is also equipped with an independent H2S concentration sensor and temperature and humidity sensor to detect the gas concentration, temperature, and humidity in the testing area, further ensuring the safety of the testing environment.
[0016] 2. This bonding silver wire anti-sulfurization testing equipment further improves testing efficiency by setting up two testing discs and switching between a pair of testing discs with a drive motor.
[0017] The parts of this device not covered herein are the same as or can be implemented using existing technologies. This invention ensures that during testing, the amount of gas in each testing cylinder is equal and the temperature and humidity are consistent, thereby ensuring an equal testing environment in the divided areas. The rotation method of the drive motor allows the two testing stations to be switched. Attached Figure Description
[0018] Figure 1 This is a schematic diagram of the overall structure of a bonding silver wire anti-sulfurization testing device proposed in this utility model;
[0019] Figure 2 This is a half-section structural diagram of a bonding silver wire anti-sulfurization testing device proposed in this utility model;
[0020] Figure 3 This utility model proposes a testing device for the anti-sulfurization of bonded silver wire. Figure 2 Enlarged structural diagram at point A in the middle;
[0021] Figure 4 This utility model proposes a testing device for the anti-sulfurization of bonded silver wire. Figure 2 Enlarged structural diagram at point B;
[0022] Figure 5 This is a partial cross-sectional view or structural schematic diagram of a bonding silver wire anti-sulfurization testing device proposed in this utility model;
[0023] Figure 6 This is a partial cross-sectional view of the structure of a bonding silver wire anti-sulfurization testing device proposed in this utility model.
[0024] In the diagram: 1. Processing table; 2. Circular guide rail; 3. Connecting frame; 4. Detection plate; 41. Circular insert plate one; 5. Detection table; 51. Circular insert plate two; 52. Silicone gasket; 511. Hydraulic cylinder; 512. Detection table surface; 6. Elastic sheet; 7. Sealing cylinder; 8. Detection cylinder; 81. H2S concentration sensor; 82. Temperature and humidity sensor; 9. Gas storage tank; 10. Air pump; 11. Drive motor; 12. Electric telescopic rod; 13. Air inlet valve; 14. Protective cover. Detailed Implementation
[0025] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.
[0026] In the description of this utility model, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.
[0027] Example:
[0028] Reference Figures 1-6 A device for testing the sulfur resistance of bonded silver wire includes a processing table 1 and an annular guide rail 2 mounted on the processing table 1, and further includes:
[0029] The connecting frame 3 is rotatably connected inside the processing table 1. The connecting frame 3 is fixedly installed inside the processing table 1 via the drive motor 11. The detection plate 4 is symmetrically installed on the connecting frame 3. The annular insert plate 41 is fixedly installed on the detection plate 4. The annular insert plate 41 is also slidably connected to the slider on the annular guide rail 2.
[0030] The annular insert plate 41 and the annular guide rail 2 are used to detect the stability of the switching of the detection disk 4 when the drive motor 11 is rotating, which effectively improves the switching stability.
[0031] A sealing cylinder 7 is installed on the processing table 1. An electric telescopic rod 12 is fixedly installed on the processing table 1. The output end of the electric telescopic rod 12 is fixedly installed with the sealing cylinder 7. Inside the sealing cylinder 7, there is a detection cylinder 8 corresponding to the detection table 5. An H2S concentration sensor 81 and a temperature and humidity sensor 82 are fixedly installed inside the detection cylinder 8. The H2S concentration sensor 81 is used to detect the H2S gas concentration inside the detection cylinder 8, and the temperature and humidity sensor 82 is used to detect the temperature and humidity inside the detection cylinder 8. When the sealing cylinder 7 descends to the preset position, the sealing cylinder 7 is inserted into the annular insert plate 41 to form a sealed space.
[0032] The test plate 4 is equipped with several test platforms 5. A second annular insert plate 51 is fixedly installed on the test platform 5. A silicone gasket 52 is fixedly installed inside the second annular insert plate 51. When the sealing cylinder 7 descends to the preset position, the sealing cylinder 7 is inserted into the second annular insert plate 51 to form a sealed test space.
[0033] The design of the second annular insert 51 and the first annular insert 41 can provide a double sealing effect with the sealing cylinder 7 and the detection cylinder 8, thereby reducing the possibility of gas leakage. In conjunction with the H2S concentration sensor 81 and the temperature and humidity sensor 82, it can effectively detect the gas concentration and temperature and humidity in the detection cylinder 8, ensuring that the gas concentration and temperature and humidity values in the independent zone are equal.
[0034] A gas supply device is installed on the top of the sealing cylinder 7. The gas supply device is connected to the detection cylinder 8. The gas supply device includes a gas storage box 9 installed on the sealing cylinder 7. A vacuum pump 10 is fixedly installed on the gas storage box 9. An air inlet valve 13 is fixedly installed on the top of the detection cylinder 8. The air inlet end of the vacuum pump 10 is connected to the gas storage box 9, and the air outlet end of the vacuum pump 10 is connected to the air inlet valve 13.
[0035] The gas supply device is designed to distribute gas by using four air pumps 10 to supply gas in separate zones, combined with an independent detection cylinder 8.
[0036] When the sealing cylinder 7 descends to the preset position, the detection cylinder 8 seals the opening end of the detection platform 5, forming a sealed test space.
[0037] Several testing tables 5 are provided with elastic plates 6 for fixing the bonded silver wires. The testing table 5 includes a hydraulic cylinder 511 installed inside the testing table 5. The output end of the hydraulic cylinder 511 is fixedly installed with a testing table surface 512, and the elastic plates 6 are symmetrically installed on the testing table surface 512.
[0038] A protective cover 14 is provided on the processing table 1 to protect the processing table 1 during the inspection process.
[0039] In this invention, the operator places the bonded silver wire on the detection platform 512 and fixes it with the elastic sheet 6. The output end of the hydraulic cylinder 511 drives the detection platform 512 to retract. At this time, the detection platform 5 on the detection disc 4 below the sealing cylinder 7 corresponds to the detection cylinder 8. The output end of the electric telescopic rod 12 drives the sealing cylinder 7 to move downward, so that the sealing cylinder 7 is inserted and limited with the annular insert plate 41, and the detection cylinder 8 is inserted and limited with the corresponding annular insert plate 51. At this time, the H2S concentration sensor 81 and the temperature and humidity sensor 82 in the detection cylinder 8 are both in the open state. At this time, the air pump 10 in the gas storage tank 9 starts to transfer H2S gas to the inlet valve 13. Then, the inlet valve 13 is opened, and H2S gas enters each detection cylinder 8. The gas concentration is detected by H2S concentration sensor 81, and the temperature and humidity inside the detection cylinder 8 are detected by temperature and humidity sensor 82. When the gas concentration reaches the standard, the inlet valve 13 is closed. At this time, the bonding silver wire is detected by the external detection equipment connected to the processing table 1. The detection equipment includes necessary detection modules such as the protection implementation detection module. This is existing technology in the equipment and will not be described in detail here. After the detection is completed, the electric telescopic rod 12 moves upward, and the sealing cylinder 7 and the detection cylinder 8 move simultaneously, exposing the detection disk 4. At this time, the drive motor 11 starts and moves the detection disk 4 that has been detected out of the position of the sealing cylinder 7, and moves the detection disk 4 waiting to be detected to below the sealing cylinder 7, completing the switching of the detection disk 4. The above operation is repeated to detect the next batch of bonding silver wire.
[0040] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.
Claims
1. A device for testing the sulfur resistance of bonded silver wire, comprising a processing table (1) and an annular guide rail (2) mounted on the processing table (1), characterized in that, Also includes: A connecting frame (3) is rotatably connected inside the processing table (1). A detection plate (4) is symmetrically installed on the connecting frame (3). A plurality of detection stations (5) are provided on the detection plate (4). An elastic sheet (6) for fixing the bonding silver wire is provided on the plurality of detection stations (5). The sealing cylinder (7) is lifted and installed on the processing table (1). The sealing cylinder (7) is equipped with a detection cylinder (8) corresponding to the detection platform (5). The top of the sealing cylinder (7) is equipped with an air supply device, which is connected to the detection cylinder (8). When the sealing cylinder (7) descends to the preset position, the detection cylinder (8) seals the opening end of the detection platform (5) to form a sealed test space.
2. The bonding silver wire anti-sulfurization testing device according to claim 1, characterized in that, The processing table (1) is fixedly installed with the connecting frame (3) via the drive motor (11). The detection plate (4) is fixedly installed with an annular insert plate (41). The annular insert plate (41) is also slidably connected to the slider on the annular guide rail (2). When the sealing cylinder (7) descends to the preset position, the sealing cylinder (7) is inserted into the annular insert plate (41) to form a sealed space.
3. The bonding silver wire anti-sulfurization testing device according to claim 1, characterized in that, An annular insert plate two (51) is fixedly installed on the testing table (5), and a silicone gasket (52) is fixedly installed inside the annular insert plate two (51). An electric telescopic rod (12) is fixedly installed on the processing table (1). The output end of the electric telescopic rod (12) is fixedly installed with the sealing cylinder (7). When the sealing cylinder (7) descends to the preset position, the sealing cylinder (7) is inserted into the annular insert plate two (51) to form a sealed testing space.
4. The bonding silver wire anti-sulfurization testing device according to claim 1, characterized in that, The testing station (5) includes a hydraulic cylinder (511) installed inside the testing station (5). The output end of the hydraulic cylinder (511) is fixedly mounted with a test platform (512), and the elastic sheet (6) is symmetrically mounted on the test platform (512).
5. The bonding silver wire anti-sulfurization testing device according to claim 1, characterized in that, The gas supply device includes a gas storage tank (9) installed on the sealing cylinder (7). Among them, an air pump (10) is fixedly installed on the air storage tank (9), and an air inlet valve (13) is fixedly installed on the top of the detection cylinder (8). The air inlet end of the air pump (10) is connected to the air storage tank (9), and the air outlet end of the air pump (10) is connected to the air inlet valve (13).
6. The bonding silver wire anti-sulfurization testing device according to claim 1, characterized in that, An H2S concentration sensor (81) and a temperature and humidity sensor (82) are fixedly installed inside the detection cylinder (8). The H2S concentration sensor (81) is used to detect the H2S gas concentration inside the detection cylinder (8), and the temperature and humidity sensor (82) is used to detect the temperature and humidity inside the detection cylinder (8).
7. The bonding silver wire anti-sulfurization testing device according to claim 1, characterized in that, The processing table (1) is covered with a protective cover (14), which is used to protect the processing table (1) during the inspection process.