An angle-adjustable probe card

Abstract

The utility model relates to probe card adjusting technical field discloses an angle adjustable probe card, including base, the top of base is equipped with adjusting mechanism, the adjusting mechanism is used for quick adjusting probe, the top of base is equipped with support mechanism, the support mechanism is used for supporting the movement of probe card, the adjusting mechanism includes telescopic link, a plurality of telescopic links are installed respectively in the top of base four all around, the top of telescopic link is fixedly connected with connecting plate no.

Description

Technical Field

[0001] This utility model relates to the field of probe card adjustment technology, and in particular to an adjustable-angle probe card. Background Technology

[0002] Probe cards are key tools in semiconductor manufacturing and testing. Their main function is to establish a temporary electrical connection between the chip and the testing equipment to perform electrical performance testing on the chip. They are an indispensable tool, and therefore, an adjustable-angle probe card is required.

[0003] Probe cards are in long-term contact with chip pads and bumps, which can easily lead to tip wear, oxidation, bending, or even breakage, resulting in increased contact resistance and unstable signal transmission. Frequent replacements also increase costs. Existing technologies use modular probe designs, which only require replacing worn probe tips instead of the entire probe card, thus reducing maintenance costs. However, existing probe cards use traditional fixed angles, which leads to insufficient adaptability in complex testing scenarios. Utility Model Content

[0004] To overcome the above shortcomings, this utility model provides an adjustable-angle probe card, which aims to improve the problem of insufficient adaptability of probe cards in complex testing scenarios in the prior art.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: an adjustable probe clip, comprising a base, an adjustment mechanism installed on the top of the base for quickly adjusting the probe, a support mechanism installed on the top of the base for supporting the movement of the probe clip, the adjustment mechanism comprising telescopic rods, a plurality of telescopic rods respectively installed around the top of the base, a connecting plate fixedly connected to the top of the telescopic rods, screws threadedly connected to the bottom of the connecting plate, a base threadedly connected to the top of the connecting plate, and locking pins slidably connected to the four corners of the top of the base, a spring fixedly connected to the bottom of the locking pin, and a second locking pin fixedly connected to the outer bottom of the spring.

[0006] As a further description of the above technical solution: The support mechanism includes a bearing seat, which is installed at the top center of the base. A spherical bearing is rotatably connected to the top of the bearing seat. Connecting columns are fixedly connected to the top four sides of the spherical bearing. A connecting plate is fixedly connected to the top of the connecting columns. Support plates are installed on the top four sides of the base. A clamping plate is fixedly connected to the top four sides of the support plate. A roller is rotatably connected to the inner center of the clamping plate.

[0007] As a further description of the above technical solution: The base has four threaded corners at the top, each connected to a connecting plate three, and each connecting plate three has two screws threaded around its top.

[0008] As a further description of the above technical solution: A support leg is fixedly connected to the top center of the connecting plate three, and a top plate is fixedly connected to the top of the support leg.

[0009] As a further description of the above technical solution: The top of the top plate is threadedly connected to a base plate, and screws are threadedly connected to the four corners of the top of the base plate.

[0010] As a further description of the above technical solution: The top of the connecting plate 2 is fixedly connected to the base plate 2, the bottom of the base plate 2 is provided with a sliding groove, and the bottom of the support plate is fixedly connected to the base plate.

[0011] As a further description of the above technical solution: The top left and right sides of the substrate 2 are slidably connected to baffle 1, the top front and rear sides of the substrate 2 are slidably connected to baffle 2, and the top of the base is fixedly connected to reinforcing plate 1.

[0012] As a further description of the above technical solution: Multiple probes are fixedly connected at equal intervals to the top of the substrate, and reinforcing plates are fixedly connected to the middle of the left and right sides of the substrate.

[0013] This utility model has the following beneficial effects: 1. In this utility model, according to the testing requirements, the telescopic rod connected to the substrate 2 is adjusted. The change in its length will cause the connecting plate 1 connected to it to reciprocate in the horizontal direction. The base connected to the connecting plate 1 will also tilt in any direction under the action of the telescopic rod. During the tilting of the base, the position and angle of the probe 1 can be adjusted. The position and angle of the probe 1 can be adjusted arbitrarily according to the requirements in different environments, which effectively increases the adaptability of the probe card in complex testing scenarios.

[0014] 2. In this utility model, during the use of the probe card, the ball bearing in the bearing seat can rotate within the bearing seat, simultaneously driving the connecting column and the connecting plate 2 connected to the connecting column to rotate together. At this time, since multiple support plates are fixed above the base plate 1 through the base plate, the entire probe card will rotate together during the rotation of the connecting plate 2 and the base plate 2. The rollers above the support plates roll in the groove. The cooperation of the two can effectively prevent the base plate 2 from tilting during the rotation, thereby affecting the use of the entire probe card. Attached Figure Description

[0015] Figure 1This is a front view of an adjustable-angle probe card proposed in this utility model; Figure 2 This is a perspective view of an adjustable-angle probe card proposed in this utility model; Figure 3 This is a schematic diagram of the adjustment mechanism of an adjustable angle probe card proposed in this utility model; Figure 4 This is a partial structural diagram of an adjustable-angle probe card proposed in this utility model; Figure 5 This is a partial exploded view of the adjustable-angle probe card proposed in this utility model. Figure 6 This is a partial structural diagram of an adjustable-angle probe card proposed in this utility model.

[0016] Legend: 1. Base; 2. Adjustment mechanism; 201. Telescopic rod; 202. Base body; 203. Connecting plate one; 204. Screw one; 205. Locking pin one; 206. Spring; 207. Locking pin two; 3. Support mechanism; 301. Bearing seat; 302. Ball bearing; 303. Connecting column; 304. Connecting plate two; 305. Support plate; 306. Locking plate; 307. Roller; 4. Connecting plate three; 5. Screw two; 6. Support leg; 7. Top plate; 8. Base plate one; 9. Screw three; 10. Base plate two; 11. Baffle one; 12. Reinforcing plate one; 13. Probe one; 14. Baffle two; 15. Reinforcing plate two; 16. Slide groove; 17. Base plate. Detailed Implementation

[0017] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0018] Reference Figure 2 , Figure 3 and Figure 5An embodiment of this utility model provides: an adjustable angle probe card, including a base 1, an adjustment mechanism 2 installed on the top of the base 1, the adjustment mechanism 2 being used for quick adjustment of the probe, a support mechanism 3 installed on the top of the base 1, the support mechanism 3 being used to support the movement of the probe card, the adjustment mechanism 2 including telescopic rods 201, multiple telescopic rods 201 being respectively installed around the top of the base 1, a connecting plate 203 being fixedly connected to the top of the telescopic rods 201, screws 204 being threadedly connected to the bottom of the connecting plate 203 around the bottom, a base 202 being threadedly connected to the top of the connecting plate 203, a locking pin 205 being slidably connected to the four corners of the top of the base 202, a spring 206 being fixedly connected to the bottom end of the locking pin 205, and a locking pin 207 being fixedly connected to the outer bottom of the spring 206; Specifically, before using the probe card, it must be installed on the probe table. Use screw three 9 to firmly fix the substrate one 8 and the top plate 7 together. After fixing the probe card, you can start adjusting the probe card. First, adjust the angle of the probe card according to the test requirements. First, adjust the telescopic rod 201 connected to the substrate two 10. When the telescopic distances of the four telescopic rods 201 are different, the change in the length of the telescopic rod 201 will cause the connecting plate one 203 connected to it to reciprocate synchronously in the horizontal direction. The base 202 connected to the connecting plate one 203 will also tilt in any direction under the action of the telescopic rod 201. During the tilting process of the base 202, the position and angle of the probe one 13 can be flexibly adjusted. When you stop using the probe card, remove the probe card. At this time, the base 202 can be restored to the horizontal state by the spring 206 connected to the locking pin one 205 and the locking pin two 207.

[0019] Reference Figure 1 , Figure 4 and Figure 6 The support mechanism 3 includes a bearing seat 301, which is installed at the top center of the base 1. A ball bearing 302 is rotatably connected to the top of the bearing seat 301. Connecting columns 303 are fixedly connected to the top of the ball bearing 302 around its perimeter. A connecting plate 304 is fixedly connected to the top of the connecting column 303. Support plates 305 are installed around the top of the base 1. A clamping plate 306 is fixedly connected to the top of the support plate 305 around its perimeter. A roller 307 is rotatably connected to the inner center of the clamping plate 306. Specifically, during the use of the probe card, the ball bearing 302 inside the bearing seat 301 can rotate within the bearing seat 301, simultaneously driving the connecting post 303 and the connecting plate 304 connected to the connecting post 303 to rotate together. At this time, multiple support plates 305 are fixed above the base plate 8 via the base plate 17. During the rotation of the connecting plate 304 together with the base plate 10, the entire probe card will rotate synchronously. The rollers 307 above the support plates 305 roll in the groove 16. The two work together to effectively prevent the base plate 10 from tilting during rotation, thereby affecting the use of the entire probe card.

[0020] Reference Figure 1 , Figure 2 and Figure 6 The base 1 has a connecting plate 3 4 threaded at the top four corners, and screws 2 5 threaded around the top of the connecting plate 3 4. The top of the connecting plate 3 4 is fixedly connected to the support leg 6, and the top of the support leg 6 is fixedly connected to the top plate 7. The top of the top plate 7 is threadedly connected to the base plate 1 8, and screws 3 9 threaded at the top four corners of the base plate 1 8. The top of the connecting plate 2 304 is fixedly connected to the base plate 2 10, and a sliding groove 16 is provided in the middle of the bottom end of the base plate 2 10. The bottom end of the support plate 305 is fixedly connected to the bottom plate 17. The top of the base plate 2 10 is slidably connected to the left and right sides of the top of the base plate 2 10, and the top of the base plate 2 10 is slidably connected to the front and rear sides of the top of the base plate 2 10. The top of the base 202 is fixedly connected to the reinforcing plate 1 12, and multiple probes 1 13 are fixedly connected at equal intervals on the top of the base 202. The middle of the left and right sides of the base 202 is fixedly connected to the reinforcing plate 2 15. Specifically, connecting plates 3 and 4 are threaded to the four corners of the top of base 1. Each connecting plate 3 and 4 is located at one of the four corners of the top of base 1. Screws 2 and 5 are threaded to the four sides of the top of each connecting plate 3 and 4. A support leg 6 is fixedly connected to the center of the top of the connecting plate 3 and 4. The support leg 6 is located at the center of the top of the connecting plate 3 and 4. A top plate 7 is fixedly connected to the top of the support leg 6. A base plate 1 and 8 are threaded to the top of the top of the top plate 7. The two are tightly engaged and do not wobble after connection. Screws 3 and 9 are threaded to the four corners of the top of the base plate 1 and 8. A base plate 2 and 10 are fixedly connected to the top of connecting plate 2 and 304. The bottom end of the base plate 2 and 10 is fixedly attached to the top surface of the connecting plate 2 and 304. A groove 16 is provided in the center of the bottom end of the base plate 2 and 10. At the center of the bottom end of substrate 2 10, the groove edge is flat and the inside is smooth. The bottom end of support plate 305 is fixedly connected to base plate 17. Baffle 11 is slidably connected to the left and right sides of the top of substrate 2 10. The bottom end of baffle 11 is adapted to the sliding track on the left and right sides of the top of substrate 2 10, and can slide smoothly along the track. Baffle 2 14 is slidably connected to the front and rear sides of the top of substrate 2 10. Reinforcing plate 12 is fixedly connected to the top of base 202. Multiple probes 13 are fixedly connected to the top of base 202 at equal intervals. Each probe 13 is evenly distributed along the top of base 202. Reinforcing plate 2 15 is fixedly connected to the middle of the left and right sides of base 202. Reinforcing plate 2 15 is located in the middle of the left and right sides of base 202, and one end is fixedly attached to the side wall of base 202, which can enhance the stability of the structure.

[0021] Working principle: Before using the probe card, the probe card should be installed on the probe table. Use screw three 9 to firmly fix the substrate one 8 and the top plate 7 together. After fixing the probe card, you can start to adjust the probe card. First, adjust the angle of the probe card according to the test requirements. First, adjust the telescopic rod 201 connected to the substrate two 10. When the telescopic distance of the four telescopic rods 201 is different, the change in the length of the telescopic rod 201 will cause the connecting plate one 203 connected to it to reciprocate in the horizontal direction. The base 202 connected to the connecting plate one 203 will also tilt in any direction under the action of the telescopic rod 201. During the tilting process of the base 202, the position and angle of the probe one 13 can be adjusted at will. When you stop using the probe card, remove the probe card. At this time, the spring 206 connected to the locking pin one 205 and the locking pin two 207 can make the base 202 return to the horizontal state. During the use of the probe card, the ball bearing 302 inside the bearing housing 301 can rotate within the bearing housing 301, which will drive the connecting post 303 and the connecting plate 304 connected to the connecting post 303 to rotate together. At this time, since multiple support plates 305 are fixed above the base plate 8 through the base plate 17, the entire probe card will rotate together as the connecting plate 304 rotates along with the base plate 10. The rollers 307 above the support plates 305 roll in the groove 16. The cooperation between the two can effectively prevent the base plate 10 from tilting during rotation, thereby affecting the use of the entire probe card.

[0022] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. An adjustable-angle probe card, comprising a base (1), characterized in that: An adjustment mechanism (2) is installed on the top of the base (1), which is used to quickly adjust the probe. A support mechanism (3) is installed on the top of the base (1), which is used to support the movement of the probe card. The adjustment mechanism (2) includes telescopic rods (201), and multiple telescopic rods (201) are respectively installed around the top of the base (1). A connecting plate (203) is fixedly connected to the top of the telescopic rod (201). Screws (204) are threaded around the bottom of the connecting plate (203). A base (202) is threaded to the top of the connecting plate (203). A locking pin (205) is slidably connected to the four corners of the top of the base (202). A spring (206) is fixedly connected to the bottom of the locking pin (205). A locking pin (207) is fixedly connected to the outer side of the bottom of the spring (206).

2. The adjustable angle probe card according to claim 1, characterized in that: The support mechanism (3) includes a bearing seat (301), which is installed at the top center of the base (1). A ball bearing (302) is rotatably connected to the top of the bearing seat (301). A connecting column (303) is fixedly connected to the top of the ball bearing (302). A connecting plate (304) is fixedly connected to the top of the connecting column (303). A support plate (305) is installed on the top of the base (1). A clamping plate (306) is fixedly connected to the top of the support plate (305). A roller (307) is rotatably connected to the inner center of the clamping plate (306).

3. The adjustable angle probe card according to claim 1, characterized in that: The base (1) has four corners at the top that are threaded with connecting plates three (4), and the top of the connecting plates three (4) is threaded with screws two (5).

4. The adjustable angle probe card according to claim 3, characterized in that: The top center of the connecting plate three (4) is fixedly connected to a support leg (6), and the top of the support leg (6) is fixedly connected to a top plate (7).

5. The adjustable angle probe card according to claim 4, characterized in that: The top of the top plate (7) is threadedly connected to a base plate (8), and screws (9) are threadedly connected to the four corners of the top of the base plate (8).

6. The adjustable angle probe card according to claim 2, characterized in that: The top end of the connecting plate 2 (304) is fixedly connected to the base plate 2 (10), the bottom end of the base plate 2 (10) is provided with a groove (16), and the bottom end of the support plate (305) is fixedly connected to the base plate (17).

7. The adjustable angle probe card according to claim 6, characterized in that: The top left and right sides of the substrate 2 (10) are slidably connected to baffle 1 (11), the top front and rear sides of the substrate 2 (10) are slidably connected to baffle 2 (14), and the top of the base (202) is fixedly connected to reinforcing plate 1 (12).

8. The adjustable angle probe card according to claim 1, characterized in that: Multiple probes (13) are fixedly connected at equal intervals to the top of the substrate (202), and reinforcing plates (15) are fixedly connected to the middle of the left and right sides of the substrate (202).

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