A mask measuring machine support device

Abstract

The utility model relates to mask detection technical field discloses a kind of mask measuring machine supporting device, including support piece, micro motion part, trigger part and inductive switch, micro motion part is in response to the slip along the length direction of support piece that the pressure perpendicular to support piece surface generates, and trigger part is synchronously displaced to the inductive area of inductive switch in parallel motion.The utility model, with small contact area of mask, supporting device is provided with the micro animal material in position detection function mechanism of mechanical light electric combination, realizes that mask measuring machine supporting device is thin, contact area is small and can accurately sensitive detection Mask material in position.

Description

Technical Field

[0001] This utility model relates to the field of mask detection technology, specifically a mask measuring machine support device. Background Technology

[0002] The glass used to make photomasks is smooth, fragile, and comes in various sizes. Different support devices are used when processing photomasks on different equipment. The diversity of photomask products, safety requirements, and limited operating space of the equipment place high demands on the support devices. When photomasks are measured on a measuring machine (MMT), the support devices on the MMT also require high precision. Existing MMT support devices have several problems: First, the contact area between the support components and the photomask is large, making it easy for marks to remain on the photomask surface. Second, due to the different reflectivity and transmittance of materials in different products, ordinary material detection sensors cannot accurately cover the in-situ detection of all types of materials, both in terms of installation space and sensing capability. Third, high-precision MMT equipment has a complex structure, and the gap between the moving measuring lens and the photomask surface is very small. When the lens measures the edge of the photomask, the thickness of the support device component must be lower than the height of the supported photomask; otherwise, it will interfere with the lens movement. Ordinary support devices cannot meet this requirement.

[0003] To address the aforementioned problems, the present invention aims to provide a support device for a mask measuring machine. This support device features a compact design with a small supporting contact surface. The thickness of the component plane is lower than the height of the supported mask plane, ensuring a safe clearance between the moving lens and the mask surface. Secondly, the support device is equipped with a mask material in-situ detection component. This component employs a touch-type mechanical micro-motion structure combined with a photoelectric sensor, unaffected by different product specifications and materials, enabling accurate mask placement and detection. Simultaneously, the small contact area between the material micro-motion detection device and the mask product minimizes the contact area while ensuring safe and accurate product in-situ detection, thereby reducing product contamination. This not only meets the structural requirements of the support device and the accuracy of workpiece in-situ detection but also ensures the safety of the relative movement between the measuring equipment lens and the product being measured. Utility Model Content

[0004] To address the shortcomings of existing technologies, this utility model provides a support device for a mask measuring machine, which solves the problems of interference between conventional measuring machine support devices and the measuring machine lens due to their size and thickness, the inability to install material detection sensors due to spatial interference, and the insensitivity of traditional material sensors in detecting mask plates.

[0005] To achieve the above objectives, this utility model provides the following technical solution:

[0006] A mask measuring machine support device includes a support member, a micro-motion part, a trigger part, and an inductive switch. The micro-motion part responds to pressure perpendicular to the surface of the support member and slides along the length direction of the support member, and is simultaneously displaced to the sensing area of ​​the inductive switch in conjunction with the trigger part.

[0007] Preferably, the micro-motion part is a right-angled triangular block, with the right-angled surface slidably connected to the end face of the support member. When the inclined surface is pressed, the entire micro-motion part slides along the length direction of the support member.

[0008] Preferably, a mounting base is fixedly provided on the support member, the micro-motion part is slidably connected to the inner cavity of the mounting base, and a limiting opening is arranged on the mounting base to limit the sliding of the micro-motion part, and the trigger part is slidably arranged in the inner cavity of the mounting base.

[0009] Preferably, the mounting base is provided with a first slot and a second slot respectively. The micro-motion part slides in the first slot, and the trigger part slides in the second slot and is fixedly connected to the trigger part in the second slot by a connecting spring. The trigger part and the micro-motion part are fixedly connected by a transmission rod.

[0010] Preferably, the support member includes a connecting part and a supporting part, the mounting base is fixedly disposed on the supporting part, and the connecting part is detachably mounted on the external support frame.

[0011] Preferably, the inductive switch is a slotted photoelectric switch and is fixedly mounted on the support, and the support has a groove that matches the inductive switch.

[0012] This utility model has the following beneficial effects:

[0013] This mask measuring machine support device works by pressing the mask down perpendicular to the support. The pressure on the micro-motion part simultaneously moves the trigger part to the sensing area of ​​the inductive switch, causing the switch to generate a signal indicating that the mask is in place, ensuring precise execution of subsequent processes. The entire in-situ detection structure has a small support contact surface, reducing product contamination. This micro-material in-situ detection structure can achieve in-situ detection of products of different specifications and materials, with accurate sensing signals. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0015] Figure 2 This is a schematic diagram of the mounting base layout structure of this utility model;

[0016] Figure 3 This is a schematic diagram of the layout structure of the micro-motion part and the trigger part of this utility model;

[0017] Figure 4This is a schematic diagram of the layout structure of the micro-motion part, trigger part and mounting base of this utility model.

[0018] In the figure: 1. Support component; 11. Connecting part; 12. Support component; 2. Mounting base; 21. Limiting opening; 22. First slot; 23. Second slot; 3. Micro-motion part; 31. Transmission rod; 4. Inductive switch; 5. Trigger part; 6. Connecting spring; 7. Wire groove. Detailed Implementation

[0019] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0020] Example 1

[0021] A mask measuring machine support device includes a support member 1, a micro-motion part 3, a trigger part 5, and an inductive switch 4. The micro-motion part 3 responds to pressure perpendicular to the surface of the support member 1 and slides along the length direction of the support member 1, and is simultaneously displaced to the sensing area of ​​the inductive switch 4 in conjunction with the trigger part 5.

[0022] like Figure 1 As shown, in the above technical solution, when the mask is pressed down along the direction perpendicular to the support 1, the micro-motion part 3 is pressed, which in turn drives the trigger part 5 to move to the sensing area of ​​the inductive switch 4. The inductive switch 4 then generates a signal indicating that the mask is in place, enabling precise execution of subsequent processes. The entire in-situ detection structure has a small support contact surface, reducing product contamination. The micro-feed in-situ detection structure can achieve in-situ detection of products of different specifications and materials, with accurate sensing signals.

[0023] The micro-motion part 3 is a right-angled triangular block, with its right-angled surface slidably connected to the end face of the support member 1. When the inclined surface is compressed, the entire micro-motion part 3 slides along the length direction of the support member 1. Figure 1 As shown, in this technical solution, by using a right-angled triangular block as the micro-motion part 3, it can quickly respond to the pressure acting on the inclined surface, thereby enabling the entire micro-motion part 3 to perform high-sensitivity in-situ detection of the mask.

[0024] A mounting base 2 is fixedly mounted on the support member 1. The micro-motion part 3 is slidably connected to the inner cavity of the mounting base 2, and a limiting opening 21 is arranged on the mounting base 2 to limit the sliding of the micro-motion part 3. The trigger part 5 is slidably arranged in the inner cavity of the mounting base 2, as shown in Figure 2. In this technical solution, the limiting opening 21 can ensure the stability of the sliding of the micro-motion part 3 before and after resetting, and avoid the trajectory of the micro-motion part 3 from deviating, thereby affecting the stable operation of the subsequent trigger part 5.

[0025] Example 2

[0026] To facilitate the installation of the trigger and the micro-motion part, in this embodiment, the inner cavity of the mounting base 2 is provided with a first slot 22 and a second slot 23, respectively. The micro-motion part 3 slides in the first slot 22, and the trigger part 5 slides in the second slot 23. The trigger part 5 is fixedly connected to the trigger part 5 in the second slot 23 by a connecting spring 6. The trigger part 5 and the micro-motion part 3 are fixedly connected by a transmission rod 31. Specifically, as shown below... Figure 3 and Figure 4 As shown.

[0027] In the above technical solution, through the connecting spring 6, when the mask is fully inserted into the support device, the edge of the mask will push the micro-motion part 3 to move. The micro-motion part 3 will overcome the tension of the connecting spring 6 and push the sensing part into the sensing area of ​​the induction switch 4, thereby triggering the signal of the induction switch 4 to display the mask in place signal. When the mask is detached from the support device, the micro-motion part 3 will return to its original position by the tension of the connecting spring 6, the sensing part will leave the sensing area of ​​the induction switch 4, the photoelectric sensing signal will disappear, and it will indicate that there is no mask in the support device. The entire micro-motion in-place detection part is attached to the surface of the support device body and the width dimension is consistent, which reasonably avoids the interference space of the support device movement. This micro-motion structure is reasonably designed, lightweight and compact, and has stable detection performance.

[0028] In this embodiment, the support member 1 includes a connecting part 11 and a supporting part 12. The mounting base 2 is fixedly disposed on the supporting part 12, and the connecting part 11 is detachably mounted on the external support frame.

[0029] The inductive switch 4 is a slotted photoelectric switch and is fixedly mounted on the support 12. The support 12 has a wire groove 7 that matches the inductive switch 4. For example... Figure 1 As shown, in this technical solution, the wire groove 7 facilitates the installation of the data cable for the induction switch 4 and effectively limits the data cable, preventing the wire harness from being piled up messily.

[0030] It should be noted that, in this document, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, the phrase "comprising an element defined as..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0031] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A mask metrology machine support apparatus, characterized by, It includes a support member, a micro-motion part, a trigger part, and an inductive switch. The micro-motion part responds to pressure perpendicular to the surface of the support member and slides along the length of the support member, and moves synchronously to the sensing area of ​​the inductive switch in conjunction with the trigger part.

2. The mask measurement machine support apparatus of claim 1, wherein: The micro-motion part is a right-angled triangular block, with the right-angled surface slidingly connected to the end face of the support. When the inclined surface is pressed, the entire micro-motion part slides along the length direction of the support.

3. The mask measurement machine support apparatus of claim 2, wherein: A mounting base is fixedly installed on the support member. The micro-motion part is slidably connected to the inner cavity of the mounting base, and a limiting opening is arranged on the mounting base to limit the sliding of the micro-motion part. The trigger part is slidably arranged in the inner cavity of the mounting base.

4. The mask measurement machine support apparatus of claim 3, wherein: The mounting base is provided with a first slot and a second slot respectively. The micro-motion part slides in the first slot, and the trigger part slides in the second slot. The trigger part is fixedly connected to the trigger part in the second slot by a connecting spring. The trigger part and the micro-motion part are fixedly connected by a transmission rod.

5. The mask measurement machine support apparatus of any of claims 1-4, wherein: The support component includes a connecting part and a supporting part. The mounting base is fixedly mounted on the supporting part, and the connecting part is detachably mounted on the external support frame.

6. The mask measurement machine support apparatus of claim 5, wherein: The inductive switch is a slotted photoelectric switch and is fixedly mounted on the support. The support has a groove that matches the inductive switch.

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