Galvanometer mirror device

Abstract

This application provides a galvanometer-reflector device, comprising: a reflector; a drive mechanism including multiple drive motors disposed below the reflector, the output shaft of each drive motor being hinged to the bottom surface of the reflector; multiple displacement detection mechanisms disposed below the reflector for detecting the displacement of corresponding parts of the reflector; and a controller for controlling the extension and retraction of the drive mechanism based on the displacement changes of the reflector detected by the displacement detection mechanisms, thereby compensating for the deflection angle of the reflector. The galvanometer-reflector device provided in this application uses drive motors to drive the reflector to deflect, thereby achieving laser beam emission deflection. Simultaneously, displacement detection mechanisms detect the displacement changes of the reflector. After receiving the detection data from the displacement detection mechanisms, the controller feeds back the deflection angle to the drive motors and adjusts the drive motors, thereby compensating for the deflection angle of the reflector, achieving high-precision angle deflection. The overall structure is simple and easy to maintain.

Description

Technical Field

[0001] This application belongs to the field of galvanometer structure technology, and more specifically, relates to a galvanometer reflector device. Background Technology

[0002] Galvanometer processing is commonly used in laser marking, laser welding, laser cutting, and laser scanning. With the development of industrial technology, modern scanning instrument technology is becoming increasingly sophisticated. Laser scanning galvanometers now require servo motors to drive the lens movement for positioning. Existing galvanometer motors can only control one lens; if the equipment has multiple lenses, multiple servo motors are needed for control, requiring more internal space to accommodate them. Secondly, the light-collecting device of optical scanning instruments requires a variable laser scanning galvanometer. Existing laser scanning galvanometers have complex structures, making them difficult to maintain in case of malfunction.

[0003] Existing galvanometers mostly use a two-piece design to reflect the light spot. The advantage of this approach is that each mirror is controlled by a separate galvanometer motor, resulting in a relatively fast scanning speed, but the accuracy is relatively low. Furthermore, the accuracy information is only available after calibration using the reflected laser. After a certain period of use, the coordinate values ​​need to be recalibrated to correct the deflection accuracy, which may lead to accuracy deviations during processing. Utility Model Content

[0004] The purpose of this application is to provide a galvanometer reflector device with a simple structure that can achieve high-precision angle deflection.

[0005] To achieve the above objectives, the technical solution adopted in this application is: to provide a galvanometer-reflector device, comprising:

[0006] Reflector;

[0007] The driving mechanism includes a plurality of driving motors disposed below the reflector, the output shaft of each driving motor being hinged to the bottom surface of the reflector, and the number of driving motors being greater than or equal to 2.

[0008] Multiple displacement detection mechanisms are arranged below the reflector to detect the displacement of corresponding parts of the reflector, and the number of displacement detection mechanisms is greater than or equal to 3.

[0009] A controller electrically connected to the drive mechanism and the displacement detection mechanism is used to control the extension and retraction movement of the drive mechanism based on the displacement change of the reflector detected by the displacement detection mechanism, so as to compensate for the deflection angle of the reflector.

[0010] In one embodiment, the number of both the drive motor and the displacement detection mechanism is four.

[0011] In one embodiment, each of the drive motors is arranged in a uniform circumferential pattern with the center of the reflector as the center.

[0012] In one embodiment, each of the displacement detection mechanisms is arranged uniformly in a circumferential direction with the center of the reflector as the center.

[0013] In one embodiment, a base is fixed to the bottom surface of the reflector, and the output shaft of the drive motor is hinged to the bottom surface of the base.

[0014] In one embodiment, the galvanometer reflector device further includes a support base, and each of the displacement detection mechanisms is fixed on the support base.

[0015] In one embodiment, the displacement detection mechanism is a photoelectric displacement sensor, and the bottom surface of the reflector is provided with a reflector corresponding to the position of each photoelectric displacement sensor. The photoelectric displacement sensor has an emitting light source and a photoelectric element, and the reflector is used to reflect the light beam emitted by the emitting light source of the corresponding photoelectric displacement sensor to the photoelectric element.

[0016] In one embodiment, the displacement detection mechanism is a laser interferometer or a spectral confocal displacement sensor.

[0017] In one embodiment, the drive motor is a linear motor.

[0018] In one embodiment, the drive motor is a voice coil motor.

[0019] The beneficial effects of the galvanometer-reflector device provided in this application are as follows: Compared with the prior art, the galvanometer-reflector device of this application, by setting multiple drive motors and multiple displacement detection mechanisms below the reflector, drives the reflector to deflect, thereby realizing the emission deflection of the laser beam. Simultaneously, the displacement detection mechanisms detect the displacement change of the reflector. After the controller obtains the detection data from the displacement monitoring mechanism, it feeds back the deflection angle to the drive motor and adjusts the drive motor, thereby compensating for the deflection angle of the reflector. This can achieve high-precision angle deflection, and no recalibration is required after a certain period of use. The overall structure is simple and easy to maintain. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1A perspective view of the galvanometer-reflector device provided in the embodiments of this application;

[0022] Figure 2 for Figure 1 A bottom view of the galvanometer-reflector assembly shown;

[0023] Figure 3 for Figure 1 Side view of the galvanometer-reflector assembly shown;

[0024] Figure 4 This is a partial structural schematic diagram of a galvanometer-reflector device provided in another embodiment of this application;

[0025] The following are the labeling elements in the figure:

[0026] 1-Laser beam; 10-Reflector; 20-Drive mechanism; 30-Displacement detection mechanism; 40-Reflector; 21-Drive motor; 31-Photoelectric displacement sensor; 32-Beam. Detailed Implementation

[0027] To make the technical problems, technical solutions, and beneficial effects to be solved by this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and are not intended to limit the scope of this application.

[0028] It should be noted that when a component is referred to as being "fixed to" or "set on" another component, it can be directly on or indirectly on that other component. When a component is referred to as being "connected to" another component, it can be directly connected to or indirectly connected to that other component.

[0029] It should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0030] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0031] Please refer to the following: Figures 1 to 3 The galvanometer-reflector device provided in this application embodiment will now be described. This galvanometer-reflector device includes a reflector 10, a drive mechanism 20, multiple displacement detection mechanisms 30, and a controller (not shown). The reflector 10 may have a rectangular structure, with its front surface (top surface) forming a reflective surface for the laser beam 1. The drive mechanism 20 includes multiple drive motors 21 disposed below the reflector 10. The output shaft of each drive motor 21 is hinged to the bottom surface of the reflector 10, and when the output shaft of the drive motor 21 performs a telescopic movement, it causes the reflector 10 to deflect. Each displacement detection mechanism 30 is disposed below the reflector 10 and is used to detect the displacement of corresponding parts of the reflector 10. The number of drive motors 21 is set to be greater than or equal to two, specifically two, three, four, five, or more; the number of displacement detection mechanisms 30 is set to be greater than or equal to three, specifically three, four, five, or more.

[0032] Each drive motor 21 and displacement detection mechanism 30 of the drive mechanism 20 is electrically connected to the controller. The extension and retraction of the output shaft of the drive motor 21 drives the reflector 10 to deflect, thus deflecting the laser beam 1. The displacement detection mechanism 30 detects the displacement change of the reflector 10. After receiving the detection data from the displacement detection mechanism, the controller feeds back the deflection angle to the drive motor 21 and adjusts the drive motor 21, specifically adjusting the extension and retraction of its output shaft, thereby compensating for the deflection angle of the reflector 10. This achieves high-precision angle deflection, avoiding the need for recalibration of coordinate values ​​after a certain period of use, as is the case with traditional fast reflectors that require calibration based on the reflected laser. In other words, the galvanometer-reflector device provided in this embodiment is suitable for long-term use without requiring recalibration of coordinate values ​​after a certain period, ensuring high-precision angle deflection even with long-term use.

[0033] Compared with the prior art, the galvanometer reflector device provided in this application sets multiple drive motors 21 and multiple displacement detection mechanisms 30 below the reflector 10. The drive motors 21 drive the reflector 10 to deflect, thereby realizing the emission deflection of the laser beam 1. Simultaneously, the displacement detection mechanisms 30 detect the displacement change of the reflector 10. After the controller obtains the detection data from the displacement monitoring mechanism, it feeds back the deflection angle to the drive motors 21 and adjusts the drive motors 21 to compensate for the deflection angle of the reflector 10. This can achieve high-precision angle deflection, and no recalibration is required after a certain period of use. The overall structure is simple and easy to maintain.

[0034] Please see Figure 1 , Figure 2The number of drive motors 21 and displacement detection mechanisms 30 is four. Understandably, the number of drive motors 21 and displacement detection mechanisms 30 can also be set to other identical numbers.

[0035] See Figure 1 and Figure 2 Each drive motor 21 is evenly arranged in a circumferential manner with the center of the reflector 10 as the center. That is to say, two adjacent drive motors 21 are evenly arranged in a circumferential manner with an included angle of 90 degrees below the reflector 10.

[0036] Each displacement detection mechanism 30 is evenly arranged circumferentially around the center of the reflector 10. That is, adjacent displacement detection mechanisms 30 are evenly arranged circumferentially below the reflector 10 at 90-degree intervals. Each drive motor 21 and each displacement detection mechanism 30 can be arranged alternately in the horizontal direction. From a bottom view, the drive motors 21 and displacement detection mechanisms 30 are arranged alternately in the circumferential direction, with adjacent drive motors 21 and displacement detection mechanisms 30 being staggered. This ensures that the drive motors 21 do not obstruct the space between the displacement detection mechanism 30 and the reflector 10, and does not affect the detection function of the displacement detection mechanism 30. (See reference...) Figure 1 and Figure 2 Understandably, the projection of the drive motor 21 in the vertical direction may partially overlap with the displacement detection mechanism 30, but the overlapping part is small and the drive motor 21 will not affect the detection of the displacement detection mechanism 30.

[0037] The galvanometer reflector device also includes a support base (not shown in the figure). Each displacement detection mechanism 30 is fixed on the support base. Specifically, the displacement detection mechanism 30 can be fixed on the support base by means of adhesive bonding, snap-fitting, or connecting components. The top surface of the support base may be provided with a fixing groove of a size and shape suitable for the displacement detection mechanism 30, as well as a rotatable locking member. When the locking member is closed, tightening it can lock the displacement detection mechanism 30 onto the support base.

[0038] A base (not shown) is fixed to the bottom surface of the reflector 10, and the output shaft of the drive motor 21 is hinged to the bottom surface of the base. The size and shape of the base can be the same as that of the reflector 10, or the size can be slightly larger than that of the reflector 10. The reflector 10 and the base can be assembled and fixed together by adhesive, snap-fit, or connecting components.

[0039] See Figure 4The displacement detection mechanism can employ photoelectric displacement sensors 31, which are low-cost, have a large measurement range, and fast response speed. Reflectors 40 are respectively provided on the bottom surface of the reflector 10 at positions corresponding to each photoelectric displacement sensor 31; that is, the number of reflectors 40 is equal to the number of photoelectric displacement sensors 31, and their positions are also one-to-one. Each photoelectric displacement sensor 31 has an emitting light source and a photoelectric element. The reflectors 40 reflect the light beam 32 emitted by the emitting light source of the corresponding photoelectric displacement sensor 31 to the photoelectric element, thus enabling displacement detection of corresponding parts of the reflector 10. The reflectors 40 improve measurement accuracy. Understandably, the displacement detection mechanism can also employ spectral confocal displacement sensors, which have even higher measurement accuracy than photoelectric displacement sensors.

[0040] Understandably, a laser interferometer can also be used for displacement detection mechanisms. Laser interferometers have the advantages of high measurement accuracy, high speed, and large measurement range, and can maintain high resolution even at high measurement speeds. Since laser interferometers can perform long-distance measurements, the distance between them and the reflector 10 can be set larger, thus improving the adaptability of the galvanometer-reflector device to the application environment.

[0041] The drive motor 21 is a linear motor. The linear motor mainly consists of a stator and a mover that can move relative to the stator. The mover is driven by a magnetic field to perform linear reciprocating motion. The linear motor has the advantages of high precision, high response speed, simple structure, good operation stability and strong adaptability.

[0042] Understandably, the drive motor 21 can also be a voice coil motor. Voice coil motors have the advantages of simple structure, small size, high speed, high acceleration, and fast response. In addition, the control of voice coil motors is simple and reliable, requires no commutation device, and has a long service life.

[0043] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A galvanometer-reflector device, characterized in that: include: Reflector; The driving mechanism includes a plurality of driving motors disposed below the reflector, the output shaft of each driving motor being hinged to the bottom surface of the reflector, and the number of driving motors being greater than or equal to 2. Multiple displacement detection mechanisms are arranged below the reflector to detect the displacement of corresponding parts of the reflector, and the number of displacement detection mechanisms is greater than or equal to 3. A controller electrically connected to the drive mechanism and the displacement detection mechanism is used to control the extension and retraction movement of the drive mechanism based on the displacement change of the reflector detected by the displacement detection mechanism, so as to compensate for the deflection angle of the reflector.

2. The galvanometer-reflector device as described in claim 1, characterized in that: The number of drive motors and displacement detection mechanisms are both four.

3. The galvanometer-reflector device as described in claim 2, characterized in that: Each of the drive motors is arranged evenly in a circumferential pattern with the center of the reflector as the center.

4. The galvanometer-reflector device as described in claim 2, characterized in that: Each displacement detection mechanism is arranged evenly in a circumferential direction with the center of the reflector as the center.

5. The galvanometer-reflector device as described in claim 1, characterized in that: The bottom surface of the reflector is fixed to a base, and the output shaft of the drive motor is hinged to the bottom surface of the base.

6. The galvanometer-reflector device as described in claim 1, characterized in that: The galvanometer reflector device also includes a support base, and each of the displacement detection mechanisms is fixed on the support base.

7. The galvanometer-reflector device as described in any one of claims 1-6, characterized in that: The displacement detection mechanism is a photoelectric displacement sensor. The bottom surface of the reflector is provided with a reflector corresponding to the position of each photoelectric displacement sensor. The photoelectric displacement sensor has an emitting light source and a photoelectric element. The reflector is used to reflect the light beam emitted by the emitting light source of the corresponding photoelectric displacement sensor to the photoelectric element.

8. The galvanometer-reflector device as described in any one of claims 1-6, characterized in that: The displacement detection mechanism is a laser interferometer or a spectral confocal displacement sensor.

9. The galvanometer-reflector device as described in any one of claims 1-6, characterized in that: The drive motor is a linear motor.

10. The galvanometer-reflector device according to any one of claims 1-6, characterized in that: The drive motor is a voice coil motor.

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