A microscope and blade defect detection apparatus

Abstract

The utility model discloses a microscope and blade defect detection device, its microscope includes camera and camera lens, and camera lens forms the image field of camera acquisition target object, it still includes sliding mechanism, and sliding mechanism includes connecting plate, sliding plate and mirror group, and connecting plate rotationally arranged below camera lens, along the radial of camera lens, and sliding plate has first slide and second slide on the connecting plate, be equipped with the field of view window on the sliding plate to form the first light path of vertical orientation image field by the upper surface of target object in first slide, and mirror group is carried below the sliding plate to form the second light path of reflection to image field by the side of target object in second slide, the microscope of the utility model makes camera lens can switch between first light path and second light path to obtain the image of the upper end surface and the side of target object respectively, and mirror group can rotate around camera lens to obtain continuous, complete side image, and the collection quality of side image is improved.

Description

Technical Field

[0001] This utility model relates to the field of microscopic image detection technology, specifically to a device for detecting defects in microscopes and blades. Background Technology

[0002] When using a microscope to inspect a target object, in a single inspection process, only defects on the upper surface of the target object can usually be detected. When it comes to detecting defects on the side, the inspection results are often poor due to the poor field of view of the image. This brings a lot of inconvenience to the inspection of target objects that need to simultaneously inspect the upper surface and the side surface.

[0003] For example, blades are a typical example of such targets. Common defects in blades, such as chipping, holes, cracks, material adhesion, and burrs, can appear not only on the top surface of the blade but also on its sides and edges. Therefore, it is necessary to propose a device that can simultaneously detect both the blade surface image and the edge image. Utility Model Content

[0004] One of the objectives of this invention is to provide a microscope that can simultaneously acquire images of the upper surface and the side surface of a target object, while improving the quality of the acquired side surface image.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] A microscope includes a lens and a camera, the lens forming an image field of view for the camera to acquire of a target object, and further includes:

[0007] A sliding mechanism includes a connecting plate, a sliding plate, and a reflector assembly. The connecting plate is rotatably disposed below the lens along the radial direction of the lens. The sliding plate has a first sliding position and a second sliding position on the connecting plate. A field of view window is provided on the sliding plate to form a first optical path vertically from the upper surface of the target object toward the image field of view at the first sliding position. The reflector assembly is mounted below the sliding plate to form a second optical path reflected from the side of the target object to the image field of view at the second sliding position.

[0008] Furthermore, the sliding plate is slidably disposed on the connecting plate via a slider groove structure or a slide rail structure.

[0009] Furthermore, the sliding mechanism also includes a pusher having a push rod located on the side of the sliding plate, the push rod pushing the sliding plate to switch between the first sliding position and the second sliding position.

[0010] Furthermore, the reflector assembly includes a pair of tilted planar reflectors, which are arranged parallel to each other on both sides of the viewing window.

[0011] Furthermore, it also includes a rotating mechanism, which includes a rotating drive that drives the connecting plate to rotate along the axis of the lens.

[0012] Furthermore, the rotation drive is mounted on the lens or its mounted body, and drives the connecting plate to rotate via gears or a timing belt.

[0013] Furthermore, it also includes a three-axis transfer mechanism for driving the lens to move in the XYZ axis direction; or, it also includes a worktable for carrying the target object and moving it in the XYZ axis direction.

[0014] Another object of this disclosure is to provide a blade defect detection device, including the microscope as described above. Furthermore, it also includes a line laser 3D profilometer, which is disposed at the front end of the microscope, collects surface depth information of the blade, and sends it to the microscope for the microscope to adjust its positional relationship with the blade.

[0015] Furthermore, it also includes a transfer mechanism, which includes a conveyor belt or a robotic arm, to transfer the blade from below the line laser 3D profilometer to below the microscope.

[0016] By adopting the above technical solution, this utility model has the following advantages compared with the prior art:

[0017] 1. The microscope of this invention uses a sliding mechanism to allow the lens to switch between the first optical path and the second optical path, thereby obtaining images of the upper surface and the side surface of the target object respectively; at the same time, the connecting plate is rotatably set below the lens, so that the reflecting mirror group can rotate around the lens, thereby obtaining continuous and complete side images and improving the acquisition quality of side images.

[0018] 2. The blade defect detection device of this invention can not only acquire images of the blade surface to identify blade surface defects, but also acquire images of the blade edges to identify edge defects. Furthermore, it automatically acquires the focusing depth information required by the microscope and the contour information required to acquire blade edge images using a line laser three-dimensional profilometer, eliminating the need for manual focusing and improving detection efficiency. Automatic focusing along the contour ensures that the blade edges are always within the depth of field of the lens, improving the quality of the acquired blade edge images.

[0019] 3. The blade defect detection device of this utility model can realize the assembly line operation of the blades to be tested through the transfer mechanism, thereby improving the detection efficiency. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the blade defect detection device of this utility model;

[0021] Figure 2 This is a schematic diagram of the planar structure of the sliding mechanism of the microscope described in this utility model;

[0022] Figure 3 This is a schematic diagram of the first optical path of the microscope described in this utility model;

[0023] Figure 4 This is a schematic diagram of the second optical path of the microscope described in this utility model;

[0024] Figure 5 This is a three-dimensional structural diagram of the rotating mechanism of the microscope described in this utility model;

[0025] Figure 6 This is a schematic diagram of the separation structure of the sliding mechanism of the microscope described in this utility model;

[0026] Figure 7 This is a three-dimensional structural diagram of the connecting plate of the microscope described in this utility model;

[0027] Figure 8 This is a three-dimensional structural diagram of the sliding plate of the microscope described in this utility model.

[0028] Explanation of reference numerals in the attached figures;

[0029] 100. Microscope; 110. Lens; 120. Camera; 200. Sliding mechanism; 300. First optical path; 400. Second optical path; 500. Rotation mechanism; 600. Three-axis transfer mechanism; 700. Worktable; 800. Line laser 3D profilometer; 900. Transfer mechanism;

[0030] 210. Connecting plate; 220. Sliding plate; 230. Mirror assembly; 221. Viewing window; 240. Pusher; 241. Push rod; 231. Plane mirror; 510. Rotation drive component. Detailed Implementation

[0031] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only for explaining the present utility model and are not intended to limit the present utility model. Furthermore, it should be noted that:

[0032] The terms “up,” “down,” “left,” “right,” “vertical,” “horizontal,” “inner,” and “outer” are based on the orientation or positional relationship shown in the accompanying drawings and are used only for the convenience of describing this utility model and simplifying the description. They are not intended to indicate or imply that the device or element of this utility model must have a specific orientation and therefore should not be construed as a limitation on this utility model.

[0033] When an element is referred to as "fixed to," "set on," or "located on" another element, it can be directly on or indirectly on that other element. When an element is referred to as "connected to," it can be directly connected to or indirectly connected to that other element.

[0034] Unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0035] Example 1

[0036] Cooperate Figures 2-8 As shown, this utility model discloses a microscope 100, including a lens 110 and a camera 120. The lens 110 forms an image field of view for acquiring a target object. It also includes a sliding mechanism 200, which includes a connecting plate 210, a sliding plate 220, and a mirror assembly 230. The connecting plate 210 is rotatably disposed below the lens 110. Along the radial direction of the lens 110, the sliding plate 220 has a first sliding position and a second sliding position on the connecting plate 210. The sliding plate 220 is provided with a field of view window 221, which provides a viewing window for the lens, so as to form a first light path 300 vertically from the upper surface of the target object toward the image field of view in the first sliding position. The mirror assembly 230 is mounted below the sliding plate 220, so as to form a second light path 400 reflected from the side of the target object to the image field of view in the second sliding position.

[0037] like Figure 2 As shown, in one example of this utility model, the sliding plate 220 is slidably disposed on the connecting plate 210 by means of a slider groove structure or a slide rail structure.

[0038] The sliding components include, but are not limited to, sliding and movable structures such as slider and slide rail structures, slide rail structures, and electric slide rails. The rotating parts and the sliding plate 220 achieve precise and stable movement through the sliding components, enabling the lens 110 to switch working states quickly and accurately.

[0039] As attached Figure 2 As shown, in one example of this utility model, the sliding mechanism 200 further includes a pusher 240, which has a push rod 241 located on the side of the sliding plate 220. The push rod 241 pushes the sliding plate 220 to switch between a first sliding position and a second sliding position. (See attached diagram) Figure 3As shown, push rod 241 pushes sliding plate 220 to the first sliding position, at which point the first optical path is formed; as shown in the attached figure. Figure 4 As shown, push rod 241 pushes sliding plate 220 to the second sliding position, at which point the second optical path is formed;

[0040] The pusher 240 can be a linear motor, which can push the push rod 241 to move back and forth, thereby allowing the lens 110 to switch between the first optical path 300 and the second optical path 400.

[0041] As attached Figure 2 As shown, in one example of this utility model, the reflector group 230 includes a pair of inclined plane reflectors 231, which are arranged in parallel on both sides of the viewing window 211.

[0042] The plane mirror 231 refers to an optical lens with a specific reflection angle. In a specific example of this utility model, it is a 45° plane mirror 231. Through the optical path of the deflecting lens 110, the side profile is imaged onto the field of view of the microscope 100, thereby acquiring the image of the edge of the tool on the side.

[0043] When the plane mirror 231 works with the lens 110 to obtain a 45° viewing angle, its core function is to change the direction and angle of the light path, reflect the light from the target object into the lens 110, so that the microscope 100, which is moved above the blade, can obtain a viewing angle at a 45° angle to the direct line of sight, and obtain the blade's lateral viewing angle information.

[0044] In some of the above-described solutions of this utility model, the edge side image of the blade is obtained by rotating the plane mirror 231.

[0045] As attached Figure 2 As shown, in one example of this utility model, a rotating mechanism 500 is also included. The rotating mechanism 500 includes a rotating drive 510, which drives the connecting plate 210 to rotate along the axis of the lens 110.

[0046] As attached Figure 2 As shown, in one example of this utility model, the rotary drive 510 is mounted on the lens 110 or its mounted body, and drives the connecting plate 210 to rotate via gears or a timing belt. At this time, the push rod 241 is not connected to the sliding plate; that is, the push rod only has a pushing function, and its direction is reversed via the rotary sliding mechanism 200. The push rod 241 can have two pushing strokes to accommodate the length difference between the starting points of the two strokes.

[0047] Furthermore, the rotary drive can be a servo motor or a stepper motor, whose output shaft is connected to a transmission assembly, such as a gear drive, a synchronous belt drive, or a worm gear drive.

[0048] In one example of this utility model, the rotary drive is a gear transmission, with its driving wheel connected to the output shaft of the rotary drive and its driven wheel connected to the sliding mechanism 200 of the plane mirror 231, driving the plane mirror 231 to rotate around the microscope 100, as shown in the attached figure. Figure 2 As shown, the rotary drive can be connected to the stage mounted on the microscope 100, as illustrated in the attached diagram. Figure 2 As shown, the sliding mechanism 200 can also be directly connected to the barrel of the lens 110 of the microscope 100.

[0049] In one example of this utility model, a three-axis transfer mechanism 600 is also included. The three-axis transfer mechanism 600 is used to drive the lens 110 to move in the XYZ axis directions. It can be as follows: Figure 1 The three-axis transfer mechanism shown can also be other robotic arms that include XYZ axis degrees of freedom; or it can also include a worktable 700, which carries the target object and moves in the XYZ axis direction.

[0050] Example 2

[0051] like Figure 1 As shown, the present invention also discloses a blade defect detection device for detecting defects on the upper end face and side face of a blade, which includes a microscope 100 as described in Example 1.

[0052] like Figure 1 As shown, the blade defect detection device also includes a line laser three-dimensional profilometer 800, which is located at the front end of the microscope 100. The line laser three-dimensional profilometer 800 collects the surface depth information of the blade and sends it to the microscope so that the microscope 100 can adjust its positional relationship with the blade.

[0053] Specifically, the line laser 3D profilometer 800 scans the blade surface and generates 3D topographic data, while simultaneously outputting the blade profile scanning path and the blade face scanning path. The generated scanning path contains depth information for each field of view, and this parameter is converted into an autofocus command for the microscope. Thus, with the microscope positioned at the rear of the line laser 3D profilometer 800 and equipped with a plane mirror 231 that can rotate around the lens 110, the camera 120 automatically performs microscopic imaging based on the blade face scanning path to acquire the blade face image, eliminating the need for manual focusing and improving inspection efficiency. Furthermore, the three-axis transfer mechanism 600 positions the lens 110 on the side of the blade based on the profile scanning path, allowing the lens 110 to move along the blade's profile. Simultaneously, the rotation mechanism 500 rotates the mirror assembly 230, and the camera 120 acquires images of the blade's edge from the side.

[0054] In a more preferred embodiment, the present invention further proposes to use a transfer mechanism 900 to transfer the cutting tool from below the line laser three-dimensional profilometer 800 to below the microscope 100, thereby enabling uninterrupted assembly line inspection.

[0055] In one example of this invention, the transfer mechanism 900 can be a conveyor belt or a displacement stage. The transfer mechanism 900 transfers the target object from below the line laser 3D profilometer 800 to below the microscope to improve efficiency. When the transfer mechanism 900 is a conveyor belt, the belt surface transports the blade, and its path is configured to sequentially pass through the detection stations directly below the line laser 3D profilometer 800 and the microscope. A certain distance is set between the two stations, the belt transport speed is configured, and the belt surface running direction is perpendicular or parallel to the scanning direction of the detection equipment. The conveyor belt drive system can be equipped with a servo motor and encoder to improve transmission accuracy.

[0056] Specifically, after the conveyor belt starts, the blade is placed at the beginning of the belt surface and moves at a constant speed with the belt surface to below the line laser 3D profilometer 800 to complete the 3D scanning. It is then transported to the microscope for microscopic imaging. Since the conveyor belt path has been pre-calibrated, the distance between the two stations is known, and the belt drive speed is known, the movement of the blade between the two detection stations does not require secondary positioning. The microscope 100 can determine the time it takes for the blade currently scanned at the line laser 3D profilometer 800 to reach the subsequent station.

[0057] The above are merely preferred embodiments of this utility model, but the scope of protection of this utility model is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the scope of protection of this utility model. Therefore, the scope of protection of this utility model should be determined by the scope of the claims.

Claims

1. A microscope, comprising a lens and a camera, wherein the lens forms an image field of view for the camera to acquire a target object, characterized in that, Also includes: A sliding mechanism includes a connecting plate, a sliding plate, and a reflector assembly. The connecting plate is rotatably disposed below the lens along the radial direction of the lens. The sliding plate has a first sliding position and a second sliding position on the connecting plate. A field of view window is provided on the sliding plate to form a first optical path vertically from the upper surface of the target object toward the image field of view at the first sliding position. The reflector assembly is mounted below the sliding plate to form a second optical path reflected from the side of the target object to the image field of view at the second sliding position.

2. The microscope as described in claim 1, characterized in that: The sliding plate is slidably mounted on the connecting plate via a slider groove structure or a slide rail structure.

3. The microscope as described in claim 1, characterized in that: The sliding mechanism further includes a pusher having a push rod located on the side of the sliding plate, the push rod pushing the sliding plate to switch between the first sliding position and the second sliding position.

4. The microscope as described in claim 1, characterized in that: The mirror assembly includes a pair of tilted plane mirrors, which are arranged parallel to each other on both sides of the viewing window.

5. The microscope as described in claim 1, characterized in that: It also includes a rotating mechanism, which includes a rotating drive that drives the connecting plate to rotate along the axis of the lens.

6. The microscope as described in claim 5, characterized in that: The rotation drive is mounted on the lens or its mounted body, and drives the connecting plate to rotate via gears or a timing belt.

7. The microscope as described in claim 1, characterized in that: It also includes a three-axis transfer mechanism for driving the lens to move in the XYZ axis direction; or, it also includes a worktable for carrying the target object and moving it in the XYZ axis direction.

8. A blade defect detection device, characterized in that: Includes the microscope as described in any one of claims 1-7.

9. The blade defect detection device as described in claim 8, characterized in that: It also includes a line laser 3D profilometer, which is located at the front end of the microscope to collect surface depth information of the blade and send it to the microscope so that the microscope can adjust its positional relationship with the blade.

10. The blade defect detection device as described in claim 8, characterized in that: It also includes a transfer mechanism, which includes a conveyor belt or a robotic arm, to transfer the target object from below the line laser 3D profilometer to below the microscope.

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