Optical path deviation correction system
Patent Information
- Application Number
- CN202522019565.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-09-19
- Publication Date
- 2026-09-08
- Estimated Expiration
- 2035-09-19
AI Technical Summary
量产过程中，激光设备需要24h不停机工作，受多方面影响，整形光斑会出现一定程度的劣化，进而影响太阳能电池的工艺效果
Smart Images
Figure CN224732256U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of laser processing technology, and in particular to an optical path correction system. Background Technology
[0002] With the development of solar cell technology, laser processing technology is being used more and more widely. Laser processing typically uses homogenization and shaping of the laser spot to meet higher processing requirements.
[0003] The morphology and energy distribution uniformity of the laser beam shaping are affected by many factors, such as the stability of the laser itself, the design and manufacturing process of optical components, the ambient temperature and humidity near the optical path, and the optical path adjustment methods. During mass production, the laser equipment needs to operate 24 hours a day without interruption. Due to various factors, the shaped laser beam will deteriorate to some extent, which in turn affects the process effect of solar cells.
[0004] In traditional techniques, restoring deteriorated optical paths requires disassembling the sealed optical path enclosure and manually adjusting the path. This process is highly susceptible to introducing external contaminants. Once these contaminants accumulate on the lenses, they not only interfere with light propagation and degrade beam quality, but they can also melt upon laser irradiation, damaging the microstructure and coatings on the lens surface and causing permanent damage to the optical components. Furthermore, manual adjustment requires experienced professionals, resulting in high labor costs and lengthy adjustment times, significantly impacting production capacity. Utility Model Content
[0005] Therefore, it is necessary to provide an optical path correction system that can improve the above-mentioned problems.
[0006] An optical path correction system, comprising:
[0007] A laser, used to emit laser light;
[0008] A beam shaper and a beam splitter are sequentially arranged along the propagation path of the laser; the beam shaper is used to change the shape of the laser beam, and the beam splitter is used to split the laser beam into transmitted light and reflected light.
[0009] The monitoring module is used to acquire the actual spot parameters of the transmitted light or the reflected light;
[0010] A driving mechanism is provided, wherein the beam shaper is connected to the driving mechanism; the driving mechanism is configured to drive the beam shaper to move when the actual beam parameters are different from the preset beam parameters, and adjust the center of the beam shaper to be coaxial with the laser, so that the actual beam parameters are aligned with the preset beam parameters.
[0011] The aforementioned optical path correction system's monitoring module can acquire the actual spot parameters of transmitted or reflected light in real time. When the actual spot parameters differ from the preset spot parameters, it indicates that the center of the beam shaper is off-axis, and the laser cannot enter from the center of the beam shaper. The driving mechanism drives the beam shaper to move, adjusting its center to be coaxial with the laser, thus bringing the actual spot parameters to the preset spot parameters. Therefore, the optical path correction system provided in this application allows the driving mechanism to move the beam shaper and automatically adjust its center to be coaxial with the optical axis, reducing the occurrence of spot degradation. Compared to the manual adjustment of the optical path in the prior art, this method avoids introducing external contamination, ensures beam quality, and prevents damage to optical components. Furthermore, the optical path adjustment in this application is convenient and quick, without increasing labor costs or affecting production capacity.
[0012] In one embodiment, the laser passes through the beam shaper along a first direction perpendicular to the first plane in which the beam shaper is located;
[0013] The driving mechanism is used to drive the beam shaper to move along a second direction and a third direction located in the first plane;
[0014] The first direction, the second direction, and the third direction intersect each other.
[0015] In one embodiment, the driving mechanism includes a first driving member and a second driving member, the second driving member being connected to the first driving member, and the beam shaper being connected to the second driving member;
[0016] The second driving member is used to drive the beam shaper to move along the third direction, and the first driving member is used to drive the second driving member and the beam shaper to move along the second direction.
[0017] In one embodiment, the drive mechanism includes a drive assembly and an adapter ring, the adapter ring being connected to the drive assembly, and the beam shaper being disposed within the adapter ring;
[0018] The drive assembly is used to drive the transition ring and the beam shaper to move. The transition ring can drive the beam shaper to rotate relative to the drive assembly in the first plane where the beam shaper is located.
[0019] In one embodiment, the drive mechanism includes a drive assembly and a multidimensional adjustment frame, the multidimensional adjustment frame being connected to the drive assembly, and the beam shaper being mounted on the multidimensional adjustment frame;
[0020] The drive assembly is used to drive the movement of the multidimensional adjustment frame and the beam shaper, the multidimensional adjustment frame being configured to adjust the beam shaper in multiple dimensions.
[0021] In one embodiment, the monitoring module includes a CCD camera.
[0022] In one embodiment, the optical path correction system further includes a first beam expander;
[0023] In the propagation path of the laser, the first beam expander is located upstream of the beam shaper.
[0024] In one embodiment, the optical path correction system further includes a rotating component and a half-wave plate, the half-wave plate being connected to the rotating component;
[0025] In the propagation path of the laser, the half-wave plate is located upstream of the beam splitter;
[0026] The rotating component can adjust the rotation angle of the half-wave plate according to the different power of the laser, so that the monitoring module can receive light with a fixed power.
[0027] In one embodiment, the optical path correction system further includes a reflector located in the propagation path of the laser, so that the laser is transmitted from an upstream optical element to a downstream optical element.
[0028] In one embodiment, the optical path correction system further includes a controller, and both the monitoring module and the drive mechanism are electrically connected to the controller;
[0029] The controller is used to control the drive mechanism to move the beam shaper when the actual spot parameters are different from the preset spot parameters. Attached Figure Description
[0030] Figure 1 This is a partial structural diagram of an optical path correction system provided in an embodiment of this application;
[0031] Figure 2 for Figure 1 A partial structural diagram of the optical path correction system shown in the figure;
[0032] Figure 3 A graph showing the power of the laser and the curves formed by the half-wave plate in an optical path correction system provided in an embodiment of this application.
[0033] Explanation of reference numerals in the attached figures:
[0034] 100. Optical path correction system; 10. Laser; 20. Beam shaper; 30. Beam splitter; 40. Monitoring module; 50. Drive mechanism; 51. Drive assembly; 511. First drive component; 512. Second drive component; 52. Adapter ring; 60. First beam expander; 70. Mirror; 80. Half-wave plate; 200. Product. Detailed Implementation
[0035] To make the above-mentioned objects, features, and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a full understanding of this utility model. However, this utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this utility model. Therefore, this utility model is not limited to the specific embodiments disclosed below.
[0036] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.
[0037] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.
[0038] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.
[0039] In this utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.
[0040] It should be noted that when an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.
[0041] See Figure 1 One embodiment of this application provides an optical path correction system 100, including a laser 10, a beam shaper 20, and a beam splitter 30. The laser 10 is used to emit laser light, and the beam shaper 20 and the beam splitter 30 are arranged sequentially in the propagation path of the laser light. That is, the laser light can be transmitted to the beam shaper 20 first and then to the beam splitter 30.
[0042] The beam shaper 20 is used to change the shape of the laser beam. Optionally, the beam shaper 20 employs diffractive optical elements (DOEs), also known as binary optical devices, which are mainly used for laser beam shaping, such as homogenization, collimation, focusing, and forming specific patterns.
[0043] The laser beam, shaped by beam shaper 20, enters beam splitter 30 for splitting into transmitted and reflected light. Specifically, beam splitter 30 is a polarizing beam splitter (PBS), which can split the incident unpolarized light into two perpendicular linearly polarized beams. The P-polarized beam passes through completely to form transmitted light, while the S-polarized beam is reflected at a 45° angle to form reflected light, with the outgoing direction forming a 90° angle with the P-beam.
[0044] In this process, one of the transmitted light and the reflected light is used to process product 200. Specifically, in this application, the product 200 processed by the laser is a solar cell. Of course, in other embodiments, the type of product 200 processed by the laser is not limited.
[0045] The monitoring module 40 is used to acquire the actual spot parameters of the transmitted or reflected light formed by the beam splitter 30. Specifically, when the transmitted light is directed towards the product 200 for processing, the monitoring module 40 acquires the actual spot parameters of the reflected light. When the reflected light is directed towards the product 200 for processing, the monitoring module 40 acquires the actual spot parameters of the transmitted light. Optionally, in this specific embodiment, when the transmitted light is directed towards the product 200 for processing, the monitoring module 40 acquires the actual spot parameters of the reflected light.
[0046] See Figure 2 The optical path correction system 100 also includes a drive mechanism 50, with a beam shaper 20 connected to the drive mechanism 50. The drive mechanism 50 is configured to move the beam shaper 20 when the actual beam parameters differ from the preset beam parameters, adjusting the center of the beam shaper 20 to be coaxial with the laser, so that the actual beam parameters are the same as the preset beam parameters. The actual beam parameters are the laser beam parameters acquired in real time by the monitoring module 40, and the preset beam parameters are the beam parameters corresponding to when the center of the beam shaper 20 is coaxial with the laser. Generally, the initial beam parameters after the optical path correction system 100 is adjusted are consistent with the preset beam parameters.
[0047] The light spot parameters may include the uniformity of the light spot energy distribution, the light spot shape (morphology), etc. In some specific embodiments, the light spot parameters include the light spot shape. When the actual light spot parameters differ from the preset light spot parameters, it proves that the shape of the light spot monitored by the monitoring module 40 is different from the preset light spot shape. Adjusting the actual light spot parameters to the preset light spot parameters means adjusting the light spot shape at the current moment to be the same as the preset light spot shape.
[0048] The optical path correction system 100 provided in this application embodiment has a monitoring module 40 that can acquire the actual spot parameters of transmitted or reflected light in real time. When the actual spot parameters differ from the preset spot parameters, it indicates that the center of the beam shaper 20 is off-axis, and the laser cannot be incident from the center of the beam shaper 20. The driving mechanism 50 drives the beam shaper 20 to move, adjusting the center of the beam shaper 20 to be coaxial with the laser, so that the actual spot parameters are equal to the preset spot parameters. Therefore, the optical path correction system 100 provided in this application embodiment, with its driving mechanism 50, can drive the beam shaper 20 to move and automatically adjust the center of the beam shaper 20 to be coaxial with the optical axis, reducing the occurrence of spot degradation problems. Furthermore, compared to the manual adjustment of the optical path in the prior art, it does not introduce external contamination, ensuring beam quality and preventing damage to optical components. Moreover, the optical path adjustment in this application is convenient and quick, without increasing labor costs or affecting production capacity.
[0049] Furthermore, the optical path correction system 100 also includes a controller (not shown in the figure), and the monitoring module 40 and the drive mechanism 50 are both electrically connected to the controller. The controller is used to control the drive mechanism 50 to move the beam shaper 20 when the actual beam parameters are different from the preset beam parameters, thereby adjusting the actual beam parameters to the preset beam parameters. That is, the controller can acquire the actual beam parameters monitored by the monitoring module 40 and compare them to determine whether the actual beam parameters are the same as the preset beam parameters. When the actual beam parameters are different from the preset beam parameters, the controller controls the drive mechanism 50 to move, and the drive mechanism 50 drives the beam shaper 20 to move, so that the center of the beam shaper 20 is coaxial with the laser.
[0050] Optionally, the controller can use an algorithm to fit and compare the actual spot parameters with the preset spot parameters. The algorithm used is not limited here; it can be a direct quantization calculation of the spot energy distribution and coordinate position, a pre-translated and recorded morphology for feature comparison, or an iterative algorithm fitting with multiple corrections and comparison confirmations.
[0051] In some embodiments, the laser passes through the beam shaper 20 along a first direction perpendicular to a first plane, where the first plane is the plane containing the beam shaper 20. A driving mechanism 50 drives the beam shaper 20 to move along a second direction and a third direction located within the first plane. The first direction, the second direction, and the third direction intersect each other. Specifically, the first direction, the second direction, and the third direction are perpendicular to each other. Figure 1 The X-direction is the first direction. Figure 2 The Y-direction is the second direction. Figure 2 The Z-direction is the third direction. If we define the plane containing the first direction as the second plane, then... Figure 1 The plane containing the first plane is the second plane. The direction of the line of intersection between the first and second planes is the second direction, and the direction of the normal to the second plane is the third direction. Of course, the second direction and the third direction can be interchanged.
[0052] The aforementioned drive mechanism 50 adjusts the setting of the center of the beam shaper 20 to be coaxial with the laser by driving the beam shaper 20 to move along the intersecting second and third directions, which simplifies the control logic of the controller controlling the drive mechanism 50.
[0053] Of course, in other embodiments, the drive mechanism 50 may be configured to move in more than two directions within the first plane to adjust the position of the beam shaper 20, which is not limited here.
[0054] Further reading Figure 2The drive mechanism 50 includes a drive assembly 51, which includes a first drive member 511 and a second drive member 512. The second drive member 512 is connected to the first drive member 511, and the beam shaper 20 is connected to the second drive member 512. The second drive member 512 drives the beam shaper 20 to move in a third direction, and the first drive member 511 drives the second drive member 512 and the beam shaper 20 to move in a second direction. Optionally, the first drive member 511 and the second drive member 512 can be a motor or a cylinder, etc.
[0055] The drive assembly 51 also includes a first guide and a second guide. The first guide is used to guide the second drive 512 when it moves in a second direction, and the second guide is used to guide the beam shaper 20 when it moves in a third direction.
[0056] Both the first driving component 511 and the second driving component 512 are linear motors. Specifically, the linear motors have a stroke ≥ 1 mm, a single displacement < 100 μm, a unidirectional positioning accuracy < 100 μm, a repeatability positioning accuracy < ± 100 μm, a straightness < 50 μm, a load capacity > 50 g, and a maximum speed > 0.1 mm / s.
[0057] Among them, unidirectional positioning accuracy is the error between the specified movement and the actual movement of the motor. Repeatability is the most basic indicator reflecting the stability of motion accuracy. Repeatability refers to the difference in working accuracy for each reciprocating motion at the ideal value of positioning accuracy.
[0058] Using the position coaxial with the laser as a reference point (0,0), two linear motors corresponding to the second and third directions are adjusted sequentially, with a single displacement of 50μm and a stroke of ±0.5mm in the second and third directions, respectively. The monitoring module 40 collects and records the light spot at (y, z) as a calibration set. When the optical path deviates (the center of the beam shaper 20 deviates from the laser optical axis), the uniformity of the light spot changes. After collecting the current light spot, the monitoring module 40 compares the grayscale of the light spot with the light spot recorded in the calibration set and automatically adjusts the y and z linear motors to restore the uniformity of the light spot.
[0059] Continue reading Figure 2 The drive mechanism 50 also includes an adapter ring 52, which is connected to the second drive component 512. The beam shaper 20 is disposed within the adapter ring 52. The yaw angle of the beam shaper 20 is ensured by the machining and installation accuracy of the machined parts, with an angle deviation of <3°, which has no significant impact on the shaping effect. The adapter ring 52 can drive the beam shaper 20 to rotate relative to the drive component 51 in the first plane to adjust the angle of the beam spot.
[0060] Furthermore, the drive mechanism 50 also includes a multi-dimensional adjustment frame, which is connected to the second drive element 512, and the beam shaper 20 is mounted on the multi-dimensional adjustment frame. Specifically, the adapter ring 52 is directly connected to the multi-dimensional adjustment frame, and the beam shaper 20 is installed within the adapter ring 52. The multi-dimensional adjustment frame is configured to adjust the beam shaper 20 in multiple dimensions. By including the multi-dimensional adjustment frame in the drive mechanism 50, it is convenient for commissioning personnel to perform initial commissioning of the beam shaper 20.
[0061] It is conceivable that the multi-dimensional adjustment frame and the adapter ring 52 may be omitted from the drive mechanism 50. In this case, the beam shaper 20 is directly connected to the second drive member 512 or the beam shaper 20 is connected to the second drive member 512 through other intermediate connecting members. No limitation is made here.
[0062] In some embodiments, the monitoring module 40 includes a CCD camera, which is used for imaging and monitoring of light spots and can acquire actual light spot parameters by taking pictures.
[0063] It should be understood that in other embodiments, the monitoring module 40 may be configured in other ways, as long as it can obtain the actual spot parameters, and no limitation is made here.
[0064] In some embodiments, see further reference. Figure 1 The optical path correction system 100 also includes a first beam expander 60, which is located upstream of the beam shaper 20 in the laser propagation path. The first beam expander 60 is used to change the laser beam diameter and divergence angle. The first beam expander 60 can be mounted upright to enlarge the beam waist size, or it can be mounted upside down to reduce the beam waist size.
[0065] The optical path correction system 100 ensures that the beam waist radius and divergence angle of the light meet the incident requirements of the beam shaper 20 by setting a first beam expander 60.
[0066] It should be noted that in some other embodiments, the optical path correction system 100 may also include a second beam expander located downstream of the beam shaper 20, which is not limited here.
[0067] Further reading Figure 1 The optical path correction system 100 also includes a reflector 70, which is located in the propagation path of the laser, so that the laser can be transmitted from the upstream optical element to the downstream optical element. The reflector 70 can change the propagation direction of the laser to facilitate the transmission of the laser between the various optical elements.
[0068] There can be multiple reflectors 70. Some reflectors 70 are located upstream of the beam splitter 30 to reflect the laser emitted by the laser 10 to the beam splitter 30. Some reflectors 70 are located downstream of the beam splitter 30 to indirectly guide the transmitted or reflected light split by the beam splitter 30 to the monitoring module 40.
[0069] It should be noted that in this application, the number of reflectors 70 included in the optical path correction system 100 is not limited, and the upstream and downstream relationship between the first beam expander 60 and the reflectors 70 is not limited.
[0070] In some embodiments, the optical path correction system 100 further includes a rotating component and a half-wave plate 80, the half-wave plate 80 being connected to the rotating component. The half-wave plate 80 is located upstream of the beam splitter 30 in the laser propagation path. The rotating component can adjust the rotation angle of the half-wave plate 80 according to the different power of the laser, enabling the monitoring module 40 to receive light of a fixed power.
[0071] Specifically, the rotating component is an electrically controlled rotating component, and its rotation is controlled by a motor. Data can be collected manually or automatically to record the absolute value of the rotation angle of the half-wave plate 80 corresponding to each power level, and a curve can be fitted. More specifically, the half-wave plate 80 is located between the beam shaper 20 and the beam splitter 30.
[0072] With the above setup, the rotation angle of the half-wave plate 80 can be adjusted in real time according to the output power of the laser 10, ensuring that the light split by the beam splitter 30 can be received by the monitoring module 40 at a stable and fixed power. This avoids the monitoring module 40 needing to repeatedly adjust the attenuator, exposure value, etc., based on the output power, thus ensuring the reliability of the comparison data. Meanwhile, the power required by the monitoring module 40 is generally less than a hundred milliwatts, far less than the tens or even hundreds of watts required in actual processing (taking current photovoltaic laser processing applications as an example). By using the beam splitter 30 and the half-wave plate 80 for beam splitting, and the monitoring module 40 monitoring the light spot, there is no significant impact on the actual processing power. Furthermore, actual processing will be tested according to the actual power on the processing stage, thereby ensuring the accuracy of the processing parameters.
[0073] In some specific embodiments, the power of the light received by the CCD camera is 0.2W. The power of the laser 10 and the angle of the half-wave plate 80 can be set according to the following table, and the fitting curve of the power of the laser 10 and the angle of the half-wave plate 80 is as follows. Figure 3 As shown.
[0074] 5 44.20 0.2 10 40.60 0.2 15 39.40 0.2 20 38.80 0.2 30 38.20 0.2 40 37.90 0.2 50 37.72 0.2 60 37.60 0.2 70 37.51 0.2 80 37.45 0.2 90 37.40 0.2 100 37.36 0.2 110 37.33 0.2 120 37.30 0.2
[0075] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.
[0076] The embodiments described above are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.
Claims
1. An optical path correction system, characterized in that, include: Laser (10), used to emit laser light; A beam shaper (20) and a beam splitter (30) are arranged sequentially on the propagation path of the laser; the beam shaper (20) is used to change the shape of the laser spot, and the beam splitter (30) is used to split the laser into transmitted light and reflected light; The monitoring module (40) is used to acquire the actual spot parameters of the transmitted light or the reflected light; A drive mechanism (50) is connected to the beam shaper (20); the drive mechanism (50) is configured to drive the beam shaper (20) to move when the actual beam parameters are different from the preset beam parameters, and adjust the center of the beam shaper (20) to be coaxial with the laser so that the actual beam parameters are aligned with the preset beam parameters.
2. The optical path correction system according to claim 1, characterized in that, The laser passes through the beam shaper (20) along a first direction perpendicular to the first plane where the beam shaper (20) is located; The drive mechanism (50) is used to drive the beam shaper (20) to move along a second direction and a third direction located in the first plane; The first direction, the second direction, and the third direction intersect each other.
3. The optical path correction system according to claim 2, characterized in that, The driving mechanism (50) includes a first driving member (511) and a second driving member (512), the second driving member (512) being connected to the first driving member (511), and the beam shaper (20) being connected to the second driving member (512). The second driving member (512) is used to drive the beam shaper (20) to move along the third direction, and the first driving member (511) is used to drive the second driving member (512) and the beam shaper (20) to move along the second direction.
4. The optical path correction system according to claim 1, characterized in that, The drive mechanism (50) includes a drive assembly (51) and a transition ring (52), the transition ring (52) being connected to the drive assembly (51), and the beam shaper (20) being disposed within the transition ring (52); The drive assembly (51) is used to drive the transition ring (52) and the beam shaper (20) to move. The transition ring (52) can drive the beam shaper (20) to rotate relative to the drive assembly (51) in the first plane where the beam shaper (20) is located.
5. The optical path correction system according to claim 1, characterized in that, The drive mechanism (50) includes a drive assembly (51) and a multi-dimensional adjustment frame. The multi-dimensional adjustment frame is connected to the drive assembly (51), and the beam shaper (20) is mounted on the multi-dimensional adjustment frame. The drive assembly (51) is used to drive the movement of the multidimensional adjustment frame and the beam shaper (20), the multidimensional adjustment frame being configured to adjust the beam shaper (20) in multiple dimensions.
6. The optical path correction system according to claim 1, characterized in that, The monitoring module (40) includes a CCD camera.
7. The optical path correction system according to claim 1, characterized in that, The optical path correction system also includes a first beam expander (60); In the propagation path of the laser, the first beam expander (60) is located upstream of the beam shaper (20).
8. The optical path correction system according to claim 1, characterized in that, The optical path correction system also includes a rotating component and a half-wave plate (80), wherein the half-wave plate (80) is connected to the rotating component; In the propagation path of the laser, the half-wave plate (80) is located upstream of the beam splitter (30); The rotating component can adjust the rotation angle of the half-wave plate (80) according to the different power of the laser (10), so that the monitoring module (40) can receive light with a fixed power.
9. The optical path correction system according to claim 1, characterized in that, The optical path correction system also includes a reflector (70) located on the propagation path of the laser, so that the laser is transmitted from the upstream optical element to the downstream optical element.
10. The optical path correction system according to any one of claims 1-9, characterized in that, The optical path correction system also includes a controller, and the monitoring module (40) and the drive mechanism (50) are both electrically connected to the controller; The controller is used to control the drive mechanism (50) to drive the beam shaper (20) to move when the actual beam parameters are different from the preset beam parameters.