Mask assembly apparatus

Abstract

The utility model relates to a mask plate assembly equipment, including assembly platform, installation frame and air extractor. Assembly platform is used for placing mask plate, and the through -hole for making the pattern area of mask plate overhang is set up on assembly platform. Installation frame sets up in the top of assembly platform, and installation frame is used for adsorbing mask plate, and the pipe joint is set up on installation frame. Air extractor includes first drive assembly and with clamping assembly, and first drive assembly is used for driving clamping assembly to draw near or far from pipe joint, and clamping assembly includes two open and close settings clamping block, and the lateral wall of pipe joint is provided with gas delivery hole, and the gas channel is set up on clamping block, and gas delivery hole and gas channel are selectively communicated. The equipment can avoid manual docking air extraction in the assembly process, and is favorable for improving operation efficiency. Automatic docking is carried out between air extractor and installation frame, avoids the movement of operating personnel in the surrounding area of mask plate, is favorable for improving the cleanliness of assembly environment, makes mask plate keep clean.

Description

Technical Field

[0001] This utility model relates to the field of display device manufacturing technology, and in particular to a mask assembly device. Background Technology

[0002] The exposure process is a crucial step in display panel manufacturing. It involves using ultraviolet light to transfer the pattern information from a photomask to a display panel coated with photoresist, causing the photoresist to deform. During exposure, a mounting frame is required to hold the photomask containing the image information, and the entire mounting frame is then placed between the light source and the display panel. Figure 1 As shown, an existing mounting frame 1' includes a frame 11', a light-transmitting cover plate 12', and a pipe connector 13'. The frame 11' is a rectangular structure, forming a cavity 14' inside. The light-transmitting cover plate 12' is installed at one end of the frame 11', and the end of the frame 11' facing away from the light-transmitting cover plate 12' is used to install a photomask 2'. After the photomask 2' is installed, the cavity 14' is sealed. The pipe connector 13' is installed on the side wall of the frame 11' and communicates with the cavity 14'. When assembling the mounting frame 1' and the photomask 2', the operator connects the pipe connector 13' to a vacuum device to evacuate air from the cavity 14'. This negative pressure in the cavity 14' keeps the photomask 2' horizontal, preventing it from sagging under its own weight and affecting exposure quality.

[0003] The existing technology has the following shortcomings: the efficiency of manual connection of the pipe joint 13′ is low. Foreign objects are easily stuck to the workers' bodies, which can easily damage the clean environment around the installation frame 1′ during the operation, increasing the risk of foreign objects falling onto the mask plate 2′. Utility Model Content

[0004] The purpose of this invention is to provide a mask assembly device that has high assembly efficiency and high mask cleanliness.

[0005] To achieve this objective, the present invention adopts the following technical solution:

[0006] A photomask assembly device is provided, comprising:

[0007] An assembly platform, the top surface of which is used to place a mask, and the assembly platform is provided with through holes for suspending the graphic area of ​​the mask.

[0008] The mounting frame is positioned above the assembly platform. The bottom surface of the mounting frame is used to adsorb the mask plate, and the side wall of the mounting frame is provided with a pipe joint for air extraction.

[0009] An air extraction device includes a first driving component and a clamping component connected to the first driving component. The first driving component is used to drive the clamping component to move closer to or away from the pipe joint. The clamping component includes two openable and closable clamping blocks for clamping the pipe joint. An air supply hole is provided on the side wall of the pipe joint. An air passage for air extraction is provided on the clamping blocks. The air supply hole is selectively connected to the air passage.

[0010] As a preferred embodiment of the mask assembly equipment, the end of the pipe joint facing the air extraction device is truncated cone-shaped.

[0011] As a preferred embodiment of the mask assembly equipment, the clamping block is provided with a groove for fitting against the outer wall of the pipe joint, one end of the air passage is located on the groove wall, a sealing gasket is provided in the groove, and the sealing gasket surrounds the air passage.

[0012] As a preferred embodiment of a mask assembly device, the first drive assembly includes a movably disposed base and a horizontally mounted plate rotatably disposed on the base. Two clamping blocks are spaced apart on the horizontally mounted plate. A second drive assembly is disposed on the horizontally mounted plate. At least one of the clamping blocks is connected to the second drive assembly. The second drive assembly is used to drive the two clamping blocks to clamp or release the pipe joint.

[0013] As a preferred embodiment of the mask assembly equipment, two guide wheels are spaced apart on the horizontal mounting plate. The guide wheels are located on the side of the clamping assembly facing the mounting frame, and the pipe joint can be confined between the two guide wheels.

[0014] As a preferred embodiment of the mask assembly equipment, the first drive assembly further includes a limiting member disposed on the horizontal mounting plate and located on the side of the clamping assembly away from the mounting frame, with the end of the pipe connector abutting against the limiting member.

[0015] As a preferred embodiment of the mask assembly equipment, the top surface of the assembly platform is provided with a number of suction cups, all of which surround the through hole.

[0016] As a preferred embodiment of the photomask assembly equipment, it further includes a detection device, which is disposed on the side of the through hole opposite to the photomask, and the detection device is used to detect the flatness of the photomask.

[0017] As a preferred embodiment of the mask assembly equipment, it further includes an air jetting device disposed on the side of the through-hole opposite to the mask, the air jetting device being used to jet air toward the mask.

[0018] As a preferred embodiment of the photomask assembly equipment, the mounting frame includes a frame and a light-transmitting cover plate disposed at one end of the frame. The end of the frame facing away from the light-transmitting cover plate is used to adsorb the photomask. The frame and the light-transmitting cover plate form a cavity. The pipe joint is disposed on the frame and communicates with the cavity.

[0019] The advantages of this utility model compared to the prior art are:

[0020] This invention relates to a mask assembly device. By using a first driving component to move a clamping component closer to or away from the pipe joint, and utilizing two openable clamping components to clamp or release the pipe joint, it achieves automated docking between the extraction device and the mounting frame. Compared to existing technologies, this eliminates the need for manual docking and extraction during mask assembly, thus improving assembly efficiency. Furthermore, the automatic docking between the extraction device and the mounting frame prevents personnel from moving around the mask, improving the cleanliness of the assembly environment and keeping the mask clean. Simultaneously, by providing through holes on the assembly platform, the graphic area of ​​the mask can be suspended, reducing the risk of foreign matter adhesion or wear on the graphic area and ensuring subsequent exposure quality. Attached Figure Description

[0021] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments.

[0022] Figure 1 This is a schematic diagram of an installation frame in the prior art.

[0023] Figure 2 This is a schematic diagram of a mask assembly device according to an embodiment of the present invention.

[0024] Figure 3 This is a top view of the assembly platform according to an embodiment of the present utility model.

[0025] Figure 4 This is a schematic diagram of the air extraction device according to an embodiment of the present invention.

[0026] Figure 5 This is a cross-sectional view of the air extraction device according to an embodiment of the present utility model.

[0027] Figure 1 middle:

[0028] 1′, Mounting frame; 11′, Frame body; 12′, Light-transmitting cover plate; 13′, Pipe connector; 14′, Chamber; 2′, Mask plate.

[0029] Figures 2 to 5 middle:

[0030] 1. Mounting frame; 11. Frame body; 12. Transparent cover plate; 13. Pipe connector; 131. Air inlet; 14. Chamber; 15. Lifting lug; 16. End plate; 2. Assembly platform; 21. Through hole; 22. Bearing surface; 23. Suction cup; 3. Air extraction device; 31. First drive assembly; 311. Base; 312. Horizontal mounting plate; 313. Mounting shaft; 314. Limiting component; 32. Second drive assembly; 321. Cylinder; 322. Vertical mounting plate; 323. Push plate; 33. Clamping assembly; 331. Clamping block; 332. Air passage; 333. Groove; 34. Sealing gasket; 35. Air inlet hose; 36. Guide wheel; 4. Detection device; 41. Distance sensor; 42. Controller; 5. Jet device; 51. Nozzle; 6. Mask plate. Detailed Implementation

[0031] The advantages and features of this invention, as well as methods of implementing them, will become apparent from the following detailed description of the embodiments in conjunction with the accompanying drawings. However, this invention is not limited to the embodiments disclosed below, but can be implemented in various different forms. These embodiments are provided merely to complete the disclosure of this invention and to enable those skilled in the art to fully understand its scope, which is defined only by the scope of the claims. The same reference numerals denote the same constituent elements throughout the specification.

[0032] The present invention will now be described in detail with reference to the accompanying drawings.

[0033] like Figure 2 and Figure 5 As shown, a photomask assembly device is provided for assembling and fixing a photomask 6 so that it can be transferred to an exposure station for exposure processing of a display panel. The photomask includes a transparent substrate and an opaque pattern layer disposed on the transparent substrate. During exposure, light can pass through the transparent substrate, while the opaque pattern layer blocks the light, thereby transferring the pattern information on the photomask 6 to the display panel. The photomask assembly device includes an assembly platform 2, a mounting frame 1, and a vacuum device 3. The mounting frame 1 is used to mount the photomask 6 and transfer it between stations. The mounting frame 1 uses negative pressure adsorption to fix the photomask 6 and maintains its flatness. The assembly platform 2 supports the mounting frame 1 and the photomask 6, and the mounting frame 1 and the photomask 6 are assembled on the assembly platform 2. The vacuum device 3 is detachably connected to the mounting frame 1 and is used to evacuate the mounting frame 1 to create a negative pressure state.

[0034] The assembly platform 2 is horizontally positioned, with its top surface serving as a support surface 22 on which the mask 6 is placed. The assembly platform 2 has a through-hole 21 that penetrates both its top and bottom surfaces. When placing the mask 6, its periphery overlaps the support surface 22. The area on the mask 6 with an opaque graphic layer is the graphic area, located in the center of the mask 6. The graphic area in the mask 6 is directly opposite the through-hole 21, meaning its vertical projection lies within the through-hole 21, allowing it to be suspended. A mounting frame 1 is positioned above the assembly platform 2, with its bottom surface used to adhere the mask 6. A pipe connector 13 is located on the side wall of the mounting frame 1 for evacuating air from the frame. The evacuation device 3 includes a first drive assembly 31 and a clamping assembly 33. The first driving assembly 31 is connected to the clamping assembly 33, and the first driving assembly 31 is used to drive the clamping assembly 33 to move closer to or away from the pipe connector 13. The clamping assembly 33 includes two openable and closable clamping blocks 331, which can clamp or release the pipe connector 13 by opening and closing the clamping assembly 33. An air inlet 131 is provided on the side wall of the pipe connector 13, and an air passage 332 for evacuation is provided on the clamping block 331. When the clamping assembly 33 clamps the pipe connector 13, the air passage 332 is aligned with and connected to the air inlet 131. In this state, air is evacuated from the mounting frame 1 by evacuating the air passage 332.

[0035] Understandably, by setting the first driving component 31 to drive the clamping component 33 to move closer to or away from the pipe connector 13, and by using the two openable clamping components 33 to clamp or release the pipe connector 13, automated docking between the vacuum device 3 and the mounting frame 1 is achieved. Compared to existing technologies, manual docking and vacuuming during the assembly of the mask 6 can be avoided, which is beneficial to improving assembly efficiency. Furthermore, the automatic docking between the vacuum device 3 and the mounting frame 1 avoids the movement of personnel around the mask 6, which helps to improve the cleanliness of the assembly environment and keep the mask 6 clean. Simultaneously, by providing through holes 21 on the assembly platform 2, the graphic area of ​​the mask 6 can be suspended, thereby reducing the risk of foreign matter adhering to the graphic area or wear, and ensuring the quality of subsequent exposures.

[0036] Specifically, refer to Figure 2 and Figure 3As shown, the mounting frame 1 includes a frame 11, a light-transmitting cover 12, a pipe connector 13, and a lifting lug 15. The light-transmitting cover 12 is made of transparent glass or transparent resin material, which has good light transmission performance. The frame 11 has a square frame structure, and the light-transmitting cover 12 is located at one end of the frame 11. The end of the frame 11 facing away from the light-transmitting cover 12 is used to abut against the photomask 6. To improve the sealing performance between the frame 11 and the photomask 6, a sealing ring is also provided at the end of the frame 11 facing away from the light-transmitting cover 12. The frame 11 abuts against the peripheral area of ​​the photomask 6 to avoid obstructing the graphic area. A cavity 14 is formed between the frame 11 and the light-transmitting cover 12, and the pipe connector 13 is located on the frame 11 and communicates with the cavity 14. During assembly, the photomask 6 is first placed on the assembly platform 2, and then the mounting frame 1 is placed on the side of the photomask 6 facing away from the assembly platform 2. Air is evacuated from chamber 14 through pipe joint 13 to create a negative pressure state. Under this negative pressure, the mask 6 is adhered to the bottom surface of the mounting frame 1, preventing it from sagging under its own weight and keeping it straight. Multiple lifting lugs 15 are provided on the frame 11, serving to connect with lifting equipment for the lifting and transportation of the entire mounting frame 1.

[0037] The through-hole 21 in the assembly platform 2 is a square hole. The size of the through-hole 21 is designed to match the size of the graphic area of ​​the mask 6 so that the graphic area can be located within the corresponding area of ​​the through-hole 21. Several suction cups 23 are provided on the bearing surface 22 of the assembly platform 2. These suction cups 23 are existing technology; they use vacuum adsorption to adhere and fix the mask 6 placed on the assembly platform 2, preventing movement and friction of the mask 6 during the movement of the vacuum device 3. All the suction cups 23 surround the through-hole 21, meaning the contact point between the mounting frame 1 and the mask 6 is located at the edge of the mask 6.

[0038] To prevent the photomask 6 from sagging before being held in place by the mounting frame 1, the photomask assembly equipment also includes an air jetting device 5. The air jetting device 5 is located below the assembly platform 2, on the side of the through-hole 21 opposite to the photomask 6. The air jetting device 5 is used to spray air onto the photomask 6. The air jetting device 5 has multiple nozzles 51, spaced apart along its circumference. The air jetting device 5 is positioned directly opposite the center of the through-hole 21, so that it sprays air towards the central region of the photomask 6. During the placement of the photomask 6, the air jetting device 5 creates an upward lifting force in the central region of the photomask 6, preventing sagging and ensuring that the photomask 6 can be placed flat on the assembly platform 2.

[0039] Specifically, refer to Figure 4 and Figure 5As shown, the first drive assembly 31 includes a base 311, a horizontal mounting plate 312, a mounting shaft 313, a limiting member 314, and a drive member. The base 311 is slidably disposed on the assembly platform 2, and the sliding direction of the base 311 is parallel to the axial direction of the pipe joint 13. That is, the first drive assembly 31 can drive the clamping assembly 33 to move along the axial direction of the pipe joint 13, so that the clamping assembly 33 moves closer to or away from the pipe joint 13. The mounting shaft 313 is disposed on the top of the base 311 and passes through the horizontal mounting plate 312, so that the horizontal mounting plate 312 is rotatably connected to the base 311 through the mounting shaft 313. The horizontal mounting plate 312 can rotate around the mounting shaft 313. The clamping assembly 33 and the limiting member 314 are both mounted on the horizontal mounting plate 312, and the limiting member 314 is located on the side of the clamping assembly 33 opposite to the mounting frame 1. When the vacuum device 3 is connected to the mounting frame 1, the end of the pipe connector 13 abuts against the limiting member 314, so as to use the limiting member 314 to position the relative position between the clamping assembly 33 and the pipe connector 13. In practical applications, a sensor is provided on the limiting member 314 to detect whether the limiting member 314 and the pipe connector 13 are in contact. When they are in contact, the clamping assembly 33 can be activated to clamp the pipe connector 13. The driving member is connected to the base 311 so that the driving member can drive the base 311 to move axially along the pipe connector 13. The driving member is existing technology and can be a commonly used linear drive device such as a cylinder, hydraulic cylinder, linear motor or lead screw mechanism.

[0040] The clamping assembly 33 includes two clamping blocks 331 spaced apart horizontally, which are used to clamp the pipe connector 13. A groove 333 is provided on one side of each clamping block 331 facing each other, which fits against the outer wall of the pipe connector 13. Each clamping block 331 has an air passage 332, one end of which is connected to an air delivery hose 35, which is connected to an air pump. The other end of the air passage 332 is located on the groove wall of the groove 333, and the port of the air passage 332 is located in the middle of the groove 333. A sealing gasket 34 is provided inside the groove 333 to improve the airtightness between the clamping block 331 and the pipe connector 13. The sealing gasket 34 surrounds the port of the air passage 332 to ensure airtightness between the air passage 332 and the pipe connector 13 during evacuation. Correspondingly, both sides of the pipe connector 13 are provided with air inlets 131, and each air inlet 131 corresponds to an air passage 332. When the clamping assembly 33 clamps the pipe connector 13, the air inlets 131 communicate with the corresponding air passages 332. In this embodiment, an end plate 16 is provided at the end of the pipe connector 13 to seal the end of the pipe connector 13, so that the gas in the pipe connector 13 can only flow through the air inlets 131.

[0041] The suction device 3 also includes a second drive assembly 32, which is mounted on the horizontal mounting plate 312. The second drive assembly 32 is connected to the clamping blocks 331, enabling it to drive the two clamping blocks 331 to clamp or release the pipe connector 13. The second drive assembly 32 can be a single assembly connected to one of the clamping blocks 331, allowing both clamping blocks 331 to open and close. Alternatively, two second drive assemblies can be connected to two clamping blocks 331 respectively, allowing the two clamping blocks 331 to open and close. The second drive assembly 32 includes a drive element, a vertical mounting plate 322, and a push plate 323. The drive element is a cylinder 321, or a hydraulic cylinder, linear motor, or lead screw mechanism, or other commonly used linear drive devices. The vertical mounting plate 322 is mounted on the horizontal mounting plate 312, and the cylinder 321 is mounted on the vertical mounting plate 322. A push plate 323 is mounted on the output end of a cylinder 321, and a clamping block 331 is mounted on the push plate 323. The extension and retraction of the cylinder 321 drives the push plate 323 to translate, which in turn drives the clamping block 331 to translate. Two second drive components 32 are symmetrically arranged to drive the two clamping blocks 331 to move closer or further apart.

[0042] Specifically, refer to Figure 4As shown, the suction device 3 also includes guide wheels 36. Two guide wheels 36 are provided, spaced apart on the horizontal mounting plate 312, with the guide wheels 36 located on the side of the clamping assembly 33 facing the mounting frame 1. The distance between the two guide wheels 36 is matched to the diameter of the pipe connector 13, so that the pipe connector 13 can be confined between the two guide wheels 36. The guide wheels 36 are rotatably connected to the horizontal mounting plate 312. When the pipe connector 13 moves between the two guide wheels 36, the guide wheels 36 can rotate accordingly to reduce friction. It is understood that during assembly, when the position of the mounting frame 1 is misaligned, the axial direction of the pipe connector 13 forms a certain angle with the moving direction of the base 311. At this time, when the clamping assembly 33 clamps the pipe connector 13, a gap can easily form between them, leading to air leakage, or the pipe connector 13 may be bent by the clamping assembly 33. To facilitate smooth docking of the pipe connector 13, the end of the pipe connector 13 facing the air extraction device 3 is truncated into a frustum shape, meaning the end of the pipe connector 13 facing the air extraction device 3 has an unequal diameter, with the smaller end being more suitable for easy insertion between the two guide wheels 36. This also ensures that the pipe connector 13 can be smoothly inserted between the two clamping blocks 331. Since the base 311 is rotatably connected to the horizontal mounting plate 312, when the pipe connector 13 is inserted between the two guide wheels 36, the pipe connector 13 can apply a force to the horizontal mounting plate 312 through the guide wheels 36, causing the horizontal mounting plate 312 to rotate automatically and aligning the clamping assembly 33 with the pipe connector 13, thus preventing the pipe connector 13 from being bent or leaking air at the docking point. A coil spring is also provided between the base 311 and the horizontal mounting plate 312. When the horizontal mounting plate 312 rotates relative to the base 311, the horizontal mounting plate 312 can return to its initial position under the rebound action of the coil spring.

[0043] Specifically, refer to Figure 2 As shown, the mask assembly equipment also includes a detection device 4, which is located on the side of the through hole 21 opposite to the mask 6. The detection device 4 is used to detect the flatness of the mask 6. The detection device 4 includes a controller 42 and multiple distance sensors 41, all of which are electrically connected to the controller 42. The controller 42 is existing technology and is used to collect, process, and transmit detection data, etc. The working principle of the controller 42 will not be described in detail here. By setting multiple distance sensors 41, the distance data detected by each distance sensor 41 is used to determine whether the mask 6 is in a flat state. During the evacuation process, when the flatness of the mask 6 meets the exposure process requirements, the evacuation of the mounting frame 1 can be stopped.

[0044] Although embodiments of the present invention have been described above with reference to the accompanying drawings, the present invention is not limited to the above embodiments, but can be made in various forms, and those skilled in the art will understand that the present invention can be implemented in other specific forms without changing the technical spirit or essential characteristics of the present invention. Therefore, it should be understood that the above embodiments are exemplary in all respects and not restrictive.

Claims

1. A photomask assembly device, characterized in that, include: An assembly platform, the top surface of which is used to place a mask, and the assembly platform is provided with through holes for suspending the graphic area of ​​the mask. The mounting frame is positioned above the assembly platform. The bottom surface of the mounting frame is used to adsorb the mask plate, and the side wall of the mounting frame is provided with a pipe joint for air extraction. An air extraction device includes a first driving component and a clamping component connected to the first driving component. The first driving component is used to drive the clamping component to move closer to or away from the pipe joint. The clamping component includes two openable and closable clamping blocks for clamping the pipe joint. An air supply hole is provided on the side wall of the pipe joint. An air passage for air extraction is provided on the clamping blocks. The air supply hole is selectively connected to the air passage.

2. The photomask assembly equipment according to claim 1, characterized in that, The end of the pipe joint facing the air extraction device is truncated cone-shaped.

3. The photomask assembly equipment according to claim 1, characterized in that, The clamping block is provided with a groove for fitting against the outer wall of the pipe joint. One end of the air passage is located on the groove wall. A sealing gasket is provided in the groove and surrounds the air passage.

4. The photomask assembly equipment according to claim 1, characterized in that, The first drive assembly includes a movably disposed base and a horizontally mounted plate rotatably disposed on the base. Two clamping blocks are disposed at a distance along the horizontal direction on the horizontally mounted plate. A second drive assembly is disposed on the horizontally mounted plate. At least one of the clamping blocks is connected to the second drive assembly. The second drive assembly is used to drive the two clamping blocks to clamp or release the pipe joint.

5. The photomask assembly equipment according to claim 4, characterized in that, Two guide wheels are spaced apart on the horizontal mounting plate. The guide wheels are located on the side of the clamping assembly facing the mounting frame, and the pipe joint can be confined between the two guide wheels.

6. The photomask assembly equipment according to claim 4, characterized in that, The first drive assembly further includes a limiting member disposed on the horizontal mounting plate and located on the side of the clamping assembly opposite to the mounting frame, with the end of the pipe connector abutting against the limiting member.

7. The photomask assembly equipment according to claim 1, characterized in that, The top surface of the assembly platform is provided with several suction cups, all of which surround the through hole.

8. The photomask assembly equipment according to any one of claims 1 to 7, characterized in that, It also includes a detection device, which is disposed on the side of the through hole away from the photomask, and the detection device is used to detect the flatness of the photomask.

9. The photomask assembly equipment according to any one of claims 1 to 7, characterized in that, It also includes an air jetting device disposed on the side of the through-hole opposite to the photomask, the air jetting device being used to jet air toward the photomask.

10. The photomask assembly equipment according to any one of claims 1 to 7, characterized in that, The mounting frame includes a frame and a light-transmitting cover plate disposed at one end of the frame. The end of the frame facing away from the light-transmitting cover plate is used to adsorb the mask plate. The frame and the light-transmitting cover plate form a cavity. The pipe joint is disposed on the frame and communicates with the cavity.

Images