A TEM sample rod

Abstract

The utility model discloses a TEM sample rod, including the rod body, be equipped with the sample groove on the rod body, be equipped with the limit structure in the sample groove, divide into first sample groove and second sample groove with the symmetry of the sample groove, first sample groove with second sample groove are used respectively to place the copper screen correspondingly, and limit copper screen rotates in first sample groove with second sample groove. Through setting up bridge type limit structure in the sample groove, divide into double -groove layout with the symmetry, promote single -time sample sample capacity, improve the detection efficiency, sample groove shape and copper screen shape accurate cooperation have realized the quick positioning of copper screen, have limited its axial rotation simultaneously, have ensured sample orientation's consistency, make test result more standard, furthermore, this design makes the installation process not to need the complicated angle adjustment, further simplifies the operation process, and the sample efficiency is improved greatly.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductors, and in particular relates to a TEM sample holder. Background Technology

[0002] The resolution of a transmission electron microscope (TEM) can reach... The sample holder is an important tool for observing and measuring micro / nano structures in the field of semiconductor metrology and failure analysis. Conventional double-tilt sample holder operation requires placing the copper mesh carrying the sample into the sample slot of the sample holder and then clamping it in place.

[0003] However, limited by the single sample holder design, only one copper mesh can typically be installed at a time, restricting the sample throughput per load. This necessitates frequent replacements when multiple regions or samples need to be compared, reducing detection efficiency. Secondly, installing two copper meshes may cause interference between them, potentially leading to sample damage or detachment. Furthermore, the lack of an effective restraining structure between the sample holder and the standard circular copper mesh in traditional designs allows the mesh to rotate during installation, resulting in inconsistent orientation between the sample and the sample holder. Careful manual adjustment of the copper mesh angle is required during loading to ensure the sample is in the predetermined position. This process relies heavily on operational experience, has poor repeatability, and is prone to errors. The inconsistent orientation between the sample and the sample holder ultimately leads to inconsistent orientation in the captured TEM images.

[0004] Based on the above problems, there is an urgent need to provide a TEM sample holder to improve the analytical efficiency and the reliability of measurement data. Utility Model Content

[0005] The purpose of this invention is to solve all or part of the above-mentioned problems by providing a TEM sample rod. By setting a limiting structure in the sample slot, the sample slot is symmetrically divided into a double-slot structure, which increases the sample capacity and improves the detection efficiency. The shape of the sample slot formed after the division matches the shape of the copper mesh, which facilitates the positioning of the slot and the copper mesh, restricts the axial rotation of the copper mesh, and makes the test results more standardized. At the same time, there is no need to adjust the angle relationship between the copper mesh and the slot when installing the copper mesh, which improves the sample changing efficiency.

[0006] This invention provides a TEM sample holder, including a rod body with a sample groove. A limiting structure is provided within the sample groove, symmetrically dividing it into a first sample groove and a second sample groove. The first and second sample grooves are respectively used to place copper mesh and restrict the rotation of the copper mesh within them. By setting a limiting structure in the sample groove to symmetrically divide it into a first and second sample groove, the sample capacity is increased, and the detection efficiency is improved. The shape of the sample groove after division matches the shape of the copper mesh, facilitating the positioning of the groove and the copper mesh, and simplifying the installation and replacement of the copper mesh.

[0007] The copper mesh includes a first copper mesh and a second copper mesh; both the first and second copper meshes are semi-circular in shape, as are the first and second sample slots; the first and second copper meshes are respectively placed in the first and second sample slots. Two copper meshes can be placed simultaneously for testing, improving testing efficiency.

[0008] The first and second sample slots are semi-circular in shape; the first and second copper meshes are also semi-circular in shape. This design, using semi-circular limiting slots and semi-circular copper meshes, prevents the copper mesh from rotating within the sample slots, ensuring the sample orientation remains fixed.

[0009] The first and second copper meshes are equipped with identification structures. These structures allow for quick and accurate identification of the front and back sides and the vertical installation direction of the copper meshes, preventing problems such as sample obstruction and misalignment caused by incorrect or reversed installation.

[0010] The identification structure consists of identification holes, and the arrangement of these holes on the first copper mesh differs from that on the second copper mesh. By setting identification holes in different positions or numbers on the first and second copper meshes, it is easier to determine the installation position and orientation of the copper mesh, thus simplifying the sample loading process.

[0011] Multiple sample posts for welding samples are provided along the straight edges of the first and second copper meshes. This allows the tiny samples prepared by FIB to be stably fixed on the copper meshes, facilitating imaging.

[0012] The number of sample posts on each copper grid is 3-4, evenly spaced along the straight edge to form a serrated structure. This provides even welding points for the sample, ensuring sufficient support strength and preventing loosening or displacement during operation or electron beam scanning.

[0013] The upper layer of the sample tank is provided with a fixing groove, in which a copper mesh fixing assembly is placed. The copper mesh is fixed by the fixing assembly to prevent it from moving.

[0014] The thickness of the copper mesh is greater than the thickness of the sample groove, and part of the copper mesh extends into the fixing groove to facilitate fixing the copper mesh.

[0015] The copper mesh fixing assembly includes a washer and a nut, which are sequentially placed over the copper mesh. The inner wall of the fixing groove has an internal thread, and the outer wall of the nut has an external thread that matches the internal thread. Tightening the nut compresses and fixes the washer to secure the copper mesh. The compression and fixing by the washer and nut prevents displacement or loosening of the copper mesh during testing, ensuring test stability.

[0016] The washer has a ring-shaped structure and simultaneously presses and fixes the arc-shaped edge areas of the first and second copper meshes. The nut has a through hole at its center, which is axially aligned with and connected to the center hole of the washer, forming an observation channel for the electron beam to pass through, exposing the sample carried by the sample column. The copper mesh is uniformly pressed and fixed, while leaving an unobstructed channel to ensure that the electron beam transmission is not interfered with.

[0017] Compared with the prior art, the beneficial effects of this utility model are as follows: by setting a bridge-shaped limiting structure in the sample cell, it is symmetrically divided into a double-cell layout, which increases the sample capacity for a single loading and improves the detection efficiency; this structure makes the shape of the cell and the shape of the copper mesh form a precise fit, which not only realizes the rapid positioning of the copper mesh, but also restricts its axial rotation, ensuring the consistency of the sample orientation and making the test results more standardized; in addition, this design eliminates the need for cumbersome angle adjustment during installation, further simplifying the operation process and greatly improving the sample changing efficiency. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the specific embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is a schematic diagram of the TEM sample rod structure provided by this utility model.

[0020] Figure 2 A schematic diagram of the copper mesh structure provided for this utility model.

[0021] Reference numerals: 1-rod, 2-sample groove, 21-first sample groove, 22-second sample groove, 23-limiting structure, 3-first copper mesh, 4-second copper mesh, 5-washer, 6-nut, 7-sample column, 8-identification structure. Detailed Implementation

[0022] The technical solutions in specific embodiments of this utility model will be clearly and completely described below. Obviously, the described embodiments are only a part of the embodiments of this utility model, and not all of them. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0023] Example

[0024] This embodiment provides a TEM sample holder, such as Figure 1 As shown, it includes a rod body 1, with a circular sample groove 2 at the front end of the rod body. A bridge-type limiting structure 23 is provided in the sample groove 2. The limiting structure 23 symmetrically divides the sample groove 2 into two independent semi-circular sample grooves, namely the first sample groove 21 and the second sample groove 22. The shapes of the first sample groove 21 and the second sample groove 22 match the shape of the copper mesh, fixing the installation position of the copper mesh and restricting the axial rotation of the copper mesh.

[0025] The copper meshes are semi-circular in shape, and are designated as a first copper mesh 3 and a second copper mesh 4, respectively installed in the first sample groove 21 and the second sample groove 22. The thickness of the copper mesh is greater than the depth of the sample groove 2, causing part of the copper mesh to protrude from the sample groove 2 after installation, which facilitates subsequent fixation. Identification structures 8 are provided on both the first copper mesh 3 and the second copper mesh 4. By observing the difference in the number or position of the identification structures 8, the type and orientation of the copper mesh can be quickly and accurately determined during installation, improving operational efficiency. In this embodiment, the identification structure 8 is an identification hole; two identification holes are provided on the first copper mesh 3, and one identification hole is provided at a corresponding position on the second copper mesh 4.

[0026] like Figure 2 As shown, multiple sample posts 7 are arranged along the straight edges of the first copper mesh 3 and the second copper mesh 4 for welding samples and providing stable support for the samples. Each copper mesh has 3-4 sample posts, and the sample posts 7 are evenly spaced along the straight edges to form a serrated structure.

[0027] To ensure reliable fixation of the copper mesh, a fixing groove is provided on the upper layer of sample cell 2. This fixing groove houses the copper mesh fixing assembly. The copper mesh fixing assembly includes an annular washer 5 and a nut 6. The washer 5 and nut 6 are sequentially installed within the fixing groove and cover the copper mesh. The inner wall of the fixing groove has internal threads, and the outer wall of the nut has external threads that match the internal threads. Tightening the nut compresses and fixes the washer, securing the copper mesh. The washer 5 has an annular structure, simultaneously compressing and fixing the arc-shaped edge areas of the first copper mesh 3 and the second copper mesh 4. The nut 6 has a through hole in its center, which is axially aligned with and connected to the central hole of the washer 6, forming an observation channel for the electron beam to pass through, exposing the sample carried by the sample column.

[0028] The workflow of this embodiment is as follows: Based on the characteristics of the identification hole, the type and installation direction of the copper mesh are identified. The first copper mesh 3 and the second copper mesh 4, which are welded with samples, are placed into the first sample slot 21 and the second sample slot 22 respectively. The washer 5 is placed on the two copper meshes, covering and pressing the arc-shaped area of ​​the edge of the two copper meshes, exposing the sample column 7 and the sample in the middle, ensuring that there is no obstruction. The nut 6 is used to fix the two copper meshes in the sample slots, so that the washer 5 presses and fixes the two copper meshes in the sample slots, thus completing the sample loading.

[0029] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. A TEM sample holder, characterized in that, Includes a rod body, on which a sample groove is provided; The sample cell is provided with a limiting structure, which symmetrically divides the sample cell into a first sample cell and a second sample cell. The first sample cell and the second sample cell are respectively used to place copper mesh, and the copper mesh is restricted from rotating within the first sample cell and the second sample cell.

2. The TEM sample holder according to claim 1, characterized in that, The copper mesh includes a first copper mesh and a second copper mesh; the first copper mesh and the second copper mesh are semi-circular in shape, and the first sample groove and the second sample groove are semi-circular in shape; the first copper mesh and the second copper mesh are respectively placed in the first sample groove and the second sample groove.

3. The TEM sample holder according to claim 2, characterized in that, The first and second copper meshes are provided with identification structures.

4. The TEM sample holder according to claim 3, characterized in that, The identification structure is an identification hole, and the arrangement of the identification holes on the first copper wire mesh is different from that on the second copper wire mesh.

5. The TEM sample holder according to claim 2, characterized in that, Multiple sample columns for welding samples are provided along the straight edges of the first copper mesh and the second copper mesh.

6. The TEM sample holder according to claim 5, characterized in that, The number of sample columns on each copper grid is 3-4, and they are evenly spaced along the straight edge to form a serrated structure.

7. The TEM sample holder according to claim 5, characterized in that, The upper layer of the sample tank is provided with a fixing groove, and a copper mesh fixing component is placed in the fixing groove.

8. The TEM sample holder according to claim 7, characterized in that, The thickness of the copper mesh is greater than the thickness of the sample groove, and a portion of the copper mesh extends into the fixing groove.

9. The TEM sample holder according to claim 7, characterized in that, The copper mesh fixing assembly includes a washer and a nut, which are sequentially placed on the copper mesh. The inner wall of the fixing groove is provided with an internal thread, and the outer wall of the nut is provided with an external thread that matches the internal thread. By tightening the nut, the washer is pressed and the copper mesh is fixed.

10. The TEM sample holder according to claim 9, characterized in that, The washer has a ring structure and simultaneously presses and fixes the edge arc-shaped areas of the first copper mesh and the second copper mesh; the nut has a through hole in the center, which is axially aligned with and connected to the center hole of the washer, forming an observation channel for the electron beam to pass through, exposing the sample carried by the sample column.

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