holding device, holding devices

Abstract

The exemplary embodiments of the present application provide a holding device (100) configured to hold a component carrier structure during handling and / or movement of the component carrier structure. The holding device (100) comprises at least one clamping unit (110) configured to hold the component carrier structure (200). At least one of the clamping units (110) of the holding device (100) comprises a pair of clamping members (120) configured to be opposingly abutted against the component carrier structure (200) to hold the component carrier structure. At least one of the clamping members of the pair of clamping members (120) comprised by the at least one clamping unit (110) is provided with at least one recess structure (126). The at least one recess structure (126) extends at least partially over a portion of the clamping member (120) to be abutted against the component carrier structure (200), thereby forming a fluid passage.

Description

Technical Field

[0001] This application relates to the field of semiconductor device manufacturing, and in particular to a holding device. Background Technology

[0002] This section provides background information relating to this application, but such information does not necessarily constitute prior art.

[0003] With the increasing functionality of products equipped with component carrier structures (such as printed circuit boards) containing one or more electronic components, the miniaturization of these electronic components, and the rising number of electronic components to be mounted on component carrier structures, increasingly robust array-shaped components or packages with several electronic components are being adopted. These array-shaped components or packages have multiple contacts or connections, and the spacing between these contacts or connections is becoming increasingly smaller. Such component carrier structures must possess mechanical robustness and electrical reliability to operate even under harsh conditions.

[0004] In certain manufacturing processes of component carrier structures, fixtures are required to hold the component carrier structure for processing its surface or the material on its surface. However, existing fixtures, due to design flaws, are prone to causing mechanical or electrical damage to the component carrier structure and cannot adequately meet the manufacturing requirements of the component carrier structure. Utility Model Content

[0005] This section provides a general overview of the application, rather than a full disclosure of the entire scope or all features of the application.

[0006] According to an exemplary embodiment of this application, a holding device is provided, the holding device being configured to hold a component carrier structure during handling and / or movement of the component carrier structure, the holding device including at least one clamping unit configured to hold the component carrier structure; wherein at least one clamping unit includes a pair of clamping members configured to abut against the component carrier structure to hold the component carrier structure; and wherein at least one of the pair of clamping members included in at least one of the clamping units is provided with at least one recessed structure, the at least one recessed structure extending at least partially on the portion of the clamping member to abut against the component carrier structure, thereby forming a fluid channel.

[0007] In the context of this application, the term "component carrier structure" may specifically refer to a prefabricated component carrier currently being manufactured. Specifically, a component carrier structure may include multiple component carriers or prefabricated components that remain integrally connected, and these component carriers or prefabricated components may be manufactured in a batch process prior to individualization. In particular, a component carrier structure may be a panel (e.g., having a size of 18 inches × 24 inches or larger) or an array (e.g., an array of six component carriers currently being manufactured).

[0008] In the context of this application, the term "component carrier" may specifically refer to any support structure capable of accommodating one or more components thereon and / or therein to provide mechanical support and / or electrical connection. In other words, a component carrier can be constructed as a mechanical and / or electronic carrier of a component. In particular, a component carrier can be one of a printed circuit board, an organic interposer, and an IC (integrated circuit) substrate. A component carrier can also be a hybrid board combining different carriers of the above types of component carriers.

[0009] In the context of this application, the term "processing and / or moving of component carrier structure" may specifically refer to the physical and / or chemical processing of component carrier structure (e.g., vertical electroplating process, exposure-development process), and / or the handling and transfer process between different processing steps.

[0010] In the context of this application, the term "pair of clamping members abutting against the component carrier structure" can specifically mean that one of the pair of clamping members is positioned on one side of the component carrier structure, and the other of the pair of clamping members is positioned on the opposite side of the component carrier structure, thereby clamping the component carrier structure between the two clamping members.

[0011] In the context of this application, the term "recessed structure" can specifically refer to a groove-like structure that extends at least partially on a portion of the component carrier structure (particularly the main surface of the component carrier structure) that abuts against a clamping member, the groove-like structure having a certain depth, width, and length. In some embodiments, at least a portion of the recessed structure extends on the surface of the clamping member that will contact and abut against the component carrier structure. In some embodiments, at least one end of the recessed structure extends to the periphery of a corresponding portion of the component carrier structure that abuts against the clamping member. In some embodiments, at least two ends of the recessed structure extend to the periphery of a corresponding portion of the component carrier structure that abuts against the clamping member in substantially opposite directions. In some embodiments, the sidewalls and / or bottom walls defining the recessed structure may be at least partially straight. In some embodiments, the sidewalls and / or bottom walls defining the recessed structure may be at least partially curved. In some embodiments, the recessed structure is a continuously extending structure. In some embodiments, the recessed structure is a discontinuously extending structure. In some embodiments, at least one clamping member in the retaining device is provided with two or more recessed structures, wherein some or all of the two or more recessed structures are continuously extending structures, or wherein some or all of the two or more recessed structures are discontinuously extending structures.

[0012] In the context of this application, the term "forming a fluid channel" may specifically refer to a flow channel through which fluid (such as plating fluid or cleaning fluid) can pass when the clamping member abuts against the component carrier structure, defined by the recessed structure and the abutted portion of the component carrier structure opposite the recessed structure.

[0013] An exemplary embodiment provides a retaining device including at least one clamping unit configured to retain a component carrier structure. At least one of the at least one clamping unit includes a pair of clamping members configured to abut against the component carrier structure to securely clamp the component carrier structure between the two clamping members. At least one of the clamping units provided with the pair of clamping members includes at least one clamping member provided with a recessed structure. The recessed structure extends at least partially on a corresponding portion of the component carrier structure to be abutted by the clamping member. The number of recessed structures on the clamping member may be one or more.

[0014] The exemplary embodiments of this application provide a holding device by providing a recessed structure with a certain extension range on the portion of the component carrier structure to be abutted by at least one clamping member in at least one clamping unit. This allows the corresponding clamping unit to have an appropriate contact area with the component carrier structure when holding it, thereby making it less likely that the contact pressure generated during abutment will cause mechanical damage (such as cracks) to the component carrier structure. At the same time, it allows sufficient fluid (such as plating liquid, or cleaning fluid such as chemical liquid for removing dry film) to flow more fully into the space between the clamping member and the component carrier structure through the fluid channel defined by the recessed structure on the clamping member and the clamped component carrier structure, thereby achieving more sufficient contact with the component carrier structure.

[0015] In some optional embodiments, each clamping unit in the retaining device is provided with a pair of clamping members. In some optional embodiments, each clamping member in a clamping unit with paired clamping members is provided with a recessed structure. In some optional embodiments, the two clamping members in a pair of clamping members within the same clamping unit may have different shapes, different constructions, and / or different numbers of recessed structures. In some optional embodiments, the clamping members in different clamping units may have recessed structures with different shapes, different constructions, and / or different numbers.

[0016] In some alternative embodiments, the clamping member having at least one recessed structure includes at least a textured surface on the surface configured to contact the component carrier structure. Exemplarily, the textured surface is formed as one or any combination of a ribbed surface, a knurled surface, and a dotted surface. The clamping member is configured to include a textured surface such that it can clamp the component carrier structure while reducing the direct contact area with the component carrier structure, thereby avoiding damage to the component carrier structure or preventing the fluid from adequately treating the surface of the component carrier structure.

[0017] In addition to having at least one recessed structure, the surface of the clamping member that contacts and abuts against the component carrier structure when the component carrier structure is held (e.g., clamped) may also at least partially include a textured surface area. The textured surface allows fluid to enter the corresponding channels, thereby further promoting sufficient contact between the fluid and the component carrier structure.

[0018] In some alternative embodiments, at least one of the paired clamping members is pivotally movable. This pivotal movement of the clamping members allows for easy picking, clamping, and removal of the component carrier structure.

[0019] In some alternative implementations, two of the pair of clamping members can be connected to each other. This facilitates an integrated design of the device.

[0020] In some alternative embodiments, the clamping distance between the two clamping members in a pair when clamping the component carrier structure is adjustable. This adjustable clamping distance helps to achieve a more reasonable distribution of contact pressure between the clamping members and the component carrier structure, preventing localized overpressure that could lead to deformation or damage to the component carrier structure. Furthermore, the adjustable clamping distance allows for adaptation to component carrier structures of different thicknesses and / or shapes.

[0021] In some alternative embodiments, the retaining device includes at least two clamping units, wherein the at least two clamping units are spaced apart from each other at a regular interval.

[0022] In some alternative embodiments, the retaining device includes at least two clamping units and at least one common base, wherein the at least two clamping units are connected to each other via the common base. Connecting two or more clamping units to each other via the common base allows for a simplified structural design of the retaining device.

[0023] In some alternative embodiments, the common base connects at least a portion of the clamping members of each clamping unit to each other on the same side relative to at least two clamping units. This facilitates maintaining a stable relative position between the clamping members of different clamping units and allows for the simultaneous installation, adjustment, and / or maintenance of multiple clamping units. Furthermore, the integrated design of the common base reduces the number of separate supports and connectors.

[0024] In some alternative embodiments, the retaining device includes a first common base and a second common base, wherein first clamping members of each of at least two clamping units are connected to each other via the first common base, and second clamping members of each of at least two clamping units are connected to each other via the second common base. In some alternative embodiments, at least one of the first common base and the second common base is pivotally movable.

[0025] The first clamping member and the second clamping member in different clamping units are connected by different first common bases and second common bases, which is beneficial to the consistency of operation in picking up, clamping and removing component carrier structures between different clamping units.

[0026] In some alternative embodiments, the retaining device includes at least two clamping units, wherein at least one clamping member of each of the at least two clamping units is provided with a recessed structure; or, at least one of the at least two clamping units is not provided with a recessed structure in its clamping member. Such a structure allows for flexible adjustment of the clamping area of ​​the clamping units on the surface of the component carrier structure to meet the usage requirements in different situations.

[0027] In some alternative embodiments, at least one clamping unit is configured to hold the component carrier structure by acting on an edge portion of the component carrier structure. This can promote sufficient contact between the fluid and the surface portions of the component carrier structure, especially those containing circuit traces to provide electrical connections to the component carrier structure.

[0028] In some alternative embodiments, at least one of the paired clamping members includes at least two recessed structures to form at least two fluid channels. Multiple fluid channels facilitate greater fluid entry between the clamping member and the clamped component carrier structure, thereby allowing for more thorough fluid contact with the component carrier structure.

[0029] In some alternative embodiments, at least two of the at least two recessed structures are fluidly connected. Fluid communication between the different recessed structures can facilitate fluid flow in different directions between the clamping member and the clamped component carrier structure.

[0030] In some alternative embodiments, at least one of the at least two recessed structures includes at least one extended recess along the length direction of the recessed structure, the extended recess having a greater extent in the width direction and / or in the vertical direction perpendicular to the length and width directions than the rest of the recessed structure. The extended recess allows for the reception of more fluid, which facilitates more thorough contact between the fluid and the component carrier structure. Furthermore, the extended recess helps to facilitate the smooth flow of fluid over the surface of the component carrier structure after processing, rather than leaving residue on the surface of the component carrier structure that could cause contamination or product defects.

[0031] In some alternative implementations, at least two extended recesses on different recess structures at least partially overlap.

[0032] In some alternative embodiments, at least two of the at least two recessed structures are cross-connected to form a cross channel for fluid flow, and at at least one cross-connection location, an extended recess that is at least partially shared by the two corresponding recessed structures is formed around the cross-connection location.

[0033] At least partial overlap between extended recesses on different recessed structures, especially at least partial overlap between extended recesses on cross-connected recessed structures, can further promote effective contact between the fluid and the component carrier structure.

[0034] In some alternative embodiments, at least one of the recessed structures includes at least one extended recess along the length direction of the recessed structure, the extended recess having a greater extent of extension in the width direction of the recessed structure and / or in a vertical direction perpendicular to the length direction and the width direction than the rest of the recessed structure.

[0035] In some alternative embodiments, on a clamping member with a recessed structure, the planar extension of the recessed structure occupies at least 70% of the planar extension of the portion of the component carrier structure to be abutted by the clamping member. The larger extension of the recessed structure allows a greater amount of fluid to enter the space between the clamping member and the clamped component carrier structure through the recessed structure.

[0036] In some alternative embodiments, at least one of the paired clamping members includes a tapered portion, such as a truncated conical portion, configured as a carrier structure of the component to be abutted.

[0037] In some alternative embodiments, at least one of the paired clamping members includes a cylindrical portion configured as a carrier structure of the component to be abutted.

[0038] In some alternative embodiments, two of the pair of clamping members are configured such that portions of the bearing structure of the component to be abutted by the clamping members have different or the same shape as each other.

[0039] In some alternative embodiments, two of the pair of clamping members are configured such that the surfaces of the clamping members to contact the component carrier structure have different planar extensions from each other.

[0040] In some alternative implementations, the paired clamping members are configured such that the contact area between one clamping member and the component carrier structure is smaller than the contact area between the other clamping member and the component carrier structure.

[0041] In some alternative embodiments, at least one of the paired clamping members is detachably attached to the body of the retaining device, or is integrally formed with the body of the retaining device.

[0042] In some alternative implementations, the paired clamping members protrude from the body of the retaining device.

[0043] In some alternative embodiments, one of the pair of clamping members protrudes from the body of the retaining device by a greater length than the other clamping member protrudes from the body of the retaining device.

[0044] In an embodiment, the component carrier structure comprises a stack of at least one electrically insulating layer structure and at least one electrically conductive layer structure. For example, the component carrier structure can be a laminate of the aforementioned electrically insulating and electrically conductive layer structures, particularly a laminate formed by applying mechanical pressure and / or heat. The aforementioned stack can provide a plate-like component carrier that provides a large mounting surface for other components while remaining very thin and compact.

[0045] In this implementation, the component carrier structure is shaped as a plate. This contributes to a compact design, where the component carrier structure still provides a large base for mounting components. Furthermore, in particular, bare wafers, as an example of embedded electronic components, can be easily embedded in thin sheet materials such as printed circuit boards due to their small thickness.

[0046] In an embodiment, the component carrier structure or its preform is configured as one of a printed circuit board, a substrate (particularly an IC substrate), and an interposer.

[0047] In the context of this application, the term "printed circuit board" (PCB) can specifically refer to a sheet-like component carrier formed by laminating multiple electrically conductive layer structures with multiple electrically insulating layer structures, for example by applying pressure and / or providing heat. As preferred materials for PCB technology, the electrically conductive layer structures are made of copper, while the electrically insulating layer structures may include resin and / or glass fiber, i.e., so-called prepreg or FR4 material. Various electrically conductive layer structures can be connected to each other in a desired manner by forming holes through the laminates, for example by laser drilling or mechanical drilling, and by partially or completely filling the holes with an electrically conductive material (particularly copper), thereby forming vias such as through-hole connections. In addition to embedding one or more components, printed circuit boards are generally configured to accommodate one or more components on one or two opposite surfaces of a sheet-like printed circuit board. They can be soldered to the respective main surfaces. The dielectric portion of the PCB may consist of resin with reinforcing fibers (such as glass fiber).

[0048] In the context of this application, the term "substrate" can specifically refer to a component carrier. A substrate can be a relatively small component carrier associated with a PCB, on which one or more components can be mounted, and which can act as a connection medium between one or more chips and another PCB. For example, a substrate can have a size substantially the same as the component (particularly electronic components) to be mounted thereon (e.g., in the case of a chip-scale package (CSP)). More specifically, a substrate can be understood as a carrier for electrical connections or electrical networks and a component carrier equivalent to a printed circuit board (PCB), but with a considerably high density of lateral and / or vertically arranged connectors. Lateral connectors are, for example, electrical conduction paths, while vertical connectors can be, for example, drilled holes. These lateral and / or vertical connectors are arranged within the substrate and can be used to provide electrical, thermal, and / or mechanical connections, particularly for enclosed or unenclosed components (such as bare wafers) of IC chips, to the printed circuit board or intermediate printed circuit board. Therefore, the term "substrate" also includes "IC substrate." The dielectric portion of the substrate can be composed of resin with reinforcing particles (such as reinforcing spheres, especially glass spheres).

[0049] The substrate or interlayer may include or consist of layers of at least the following substances: glass; silicon and / or photosensitive or dry-etchable organic materials, such as epoxy-based laminated materials (e.g., epoxy-based laminated films); or polymer compounds (polymer compounds may include or may not include photosensitive and / or thermosensitive molecules).

[0050] In embodiments, at least one electrical insulating layer structure comprises at least one of the following: resin (e.g., reinforced or unreinforced resin, such as epoxy resin or bismaleimide-triazine resin), cyanate ester resin, polyphenylene derivative, glass (especially glass fiber, multilayer glass, glass-like materials), prepreg material (e.g., FR-4 or FR-5), polyimide, polyamide, liquid crystal polymer (LCP), epoxy resin-based laminated film, polytetrafluoroethylene (PTFE, Teflon), ceramics, and metal oxides. Reinforcing structures made of glass (multilayer glass), such as meshes, fibers, or spheres, may also be used. While prepreg, particularly FR4, is generally preferred for rigid PCBs, other materials, particularly epoxy resin-based laminated films or photo-imageable dielectric materials, may also be used. For high-frequency applications, high-frequency materials such as PTFE, liquid crystal polymers and / or cyanate ester resins, low-temperature co-fired ceramics (LTCC), or other low, very low, or ultra-low DK materials may be applied as the electrical insulating layer structure in the component carrier.

[0051] In embodiments, at least one electrically conductive layer structure comprises at least one of the following materials: copper, aluminum, nickel, silver, gold, palladium, and tungsten. While copper is generally preferred, other materials or coated versions thereof are also possible, particularly those coated with superconducting materials such as graphene.

[0052] The foregoing limitations and other aspects of the present invention will become apparent from the examples of embodiments to be described below, and will be explained with reference to these examples of embodiments. Attached Figure Description

[0053] The features and advantages of embodiments of this application will become more readily understood from the following description with reference to the accompanying drawings, which are not drawn to scale and some features are enlarged or reduced to show details of specific components.

[0054] Figure 1 A schematic plan view of a holding device according to an exemplary embodiment of this application is provided.

[0055] Figure 2 A schematic perspective view of a holding device according to an exemplary embodiment of this application is provided.

[0056] Figure 3 A plan view of a clamping unit in a clamping state according to an exemplary embodiment of this application is provided.

[0057] Figure 4 A three-dimensional structural schematic diagram of a clamping member according to an exemplary embodiment of this application is provided.

[0058] Figures 5A to 5C A plan view of a clamping member with a recessed structure according to an exemplary embodiment of this application is provided. Detailed Implementation

[0059] The present application will now be described in detail with reference to the accompanying drawings and exemplary embodiments thereof. It should be noted that the following detailed description is for illustrative purposes only and is not intended to limit the scope of the application. Furthermore, the same reference numerals are used to denote the same parts in the various drawings.

[0060] It should also be noted that, for clarity, not all features of the actual specific embodiments are described and shown in the specification and drawings. In addition, in order to avoid unnecessary details from obscuring the technical solutions of interest in this application, only the arrangement structure closely related to the technical content of this application is described and shown in the specification and drawings, while other details that are not closely related to the technical content of this application and are known to those skilled in the art are omitted.

[0061] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the various embodiments of this application will be described in detail below with reference to the accompanying drawings. However, those skilled in the art will understand that many technical details have been presented in the various embodiments of this application to facilitate the reader's better understanding of this application. However, the technical solutions claimed in this application can be implemented even without these technical details and with various changes and modifications based on the following embodiments. The division of the various embodiments below is for the convenience of description and should not constitute any limitation on the specific implementation of this application. The various embodiments can be combined with and referenced by each other without contradiction.

[0062] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence, nor should they be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. It should be understood that such terms can be used interchangeably where appropriate so that the embodiments of this application described herein can be implemented in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0063] In this application, terms such as "upper," "lower," "outer," and "inner" used to describe orientation are for descriptive purposes only and should not be considered limiting. Furthermore, although this application has been described with reference to exemplary embodiments, it should be understood that this application is not limited to the specific embodiments described and shown herein. Various modifications to the exemplary embodiments can be made by those skilled in the art without departing from the scope defined by the claims of this application.

[0064] Reference Figures 1 to 5C The present application describes a holding device 100 configured to hold the component carrier structure 200 during processing and / or movement, according to an exemplary embodiment of the present application.

[0065] like Figures 1 to 3As shown, the holding device 100 includes at least one clamping unit 110. The clamping unit 110 is configured to clamp the component carrier structure 200 during processing or movement of the component carrier structure. For example, during manufacturing processes such as vertical plating or exposure-development of the component carrier structure 200, the clamping unit 110 can securely clamp the component carrier structure 200.

[0066] At least one clamping unit of the clamping unit 110 of the holding device 100 includes a pair of clamping members 120. The pair of clamping members 120 are configured to act together on the component carrier structure 200 to hold it, particularly on the edge portion of the component carrier structure 200. Specifically, the pair of clamping members 120 are configured such that when the component carrier structure 200 is held, one clamping member 120 abuts against one side of the component carrier structure 200, and the other clamping member 120 abuts against the opposite side of the component carrier structure 200, thereby clamping the component carrier structure 200 between the pair of clamping members 120.

[0067] In the holding device 100, at least one clamping unit 110 is provided such that at least one of the paired clamping members 120 is provided with at least one recessed structure 126. The recessed structure 126 extends at least partially on the portion of the clamping member 120 that abuts against the component carrier structure 200, thereby defining, together with the component carrier structure 200, a fluid passage for fluid to pass between the clamping member 120 and the component carrier structure 200 when the paired clamping members 120 clamp the component carrier structure 200.

[0068] The exemplary embodiment of this application provides a retaining device 100 with one or more recessed structures 126 having a certain extension range on the portion of the component carrier structure 200 to be abutted by at least one clamping member 120 (in particular each clamping member) in at least one clamping unit 110 (in particular each clamping unit). This configuration allows the clamping unit 110 of the retaining device 100 to apply a retaining force to the component carrier structure 200 over an appropriate contact area when retaining the component carrier structure 200, thereby preventing the contact pressure generated by abutment from causing mechanical damage (such as cracks) to the component carrier structure 200. Furthermore, this configuration allows sufficient fluid (such as plating liquid or cleaning fluid) to flow into the space between the clamping member 120 and the component carrier structure 200 through the fluid channel defined by the recessed structure 126 on the clamping member 120 and the clamped component carrier structure 200, thereby achieving more adequate contact with the component carrier structure 200. For example, as... Figure 3As shown, the pair of clamping members 120 in the clamping unit 110 clamp the component carrier structure 200 with a dry film 300 attached to its surface. When a chemical liquid 350 for removing the dry film 300 is applied toward the clamped component carrier structure 200 (e.g., sprayed), the chemical liquid 350 can easily contact the surface portion of the component carrier structure 200 not covered by the clamping members 120, and can also easily enter the space between the clamping members 120 and the component carrier structure 200 through the recessed structure 126 to remove the dry film 300 at the corresponding portion.

[0069] The retaining device 100 may include two or more clamping units 110, particularly three or more clamping units 110, particularly six or more clamping units 110, and more particularly nine or more clamping units 110. It will be understood that, in addition to the clamping units 110 described in the context of this application, the retaining device 100 may also include other known types of retaining elements for holding the component carrier structure 200 during handling and / or movement.

[0070] In some embodiments, one or more clamping units 110 of the retaining device 100 include paired clamping members 120. In some embodiments, one or more additional clamping units 110 of the retaining device 100 include clamping elements of the non-paired clamping member type, such as a single gripping member.

[0071] At least one of the pair of clamping members 120 is pivotally movable; in particular, each of the pair of clamping members 120 is pivotally movable.

[0072] The two clamping members in the pair of clamping members 120 can be connected to each other or set separately from each other.

[0073] In some embodiments, the multiple clamping units 110 may be spaced apart from each other at regular intervals. For example, every two adjacent clamping units 110 may be spaced apart at equal intervals. In some embodiments, the multiple clamping units 110 may comprise two or more groups, each group comprising one or more clamping units 110. The different groups may be spaced apart at regular intervals.

[0074] In the implementation method, such as Figure 2As shown, two or more clamping units 110 of the retaining device 100 can be connected to each other via a common base 130. In particular, the multiple clamping units 110 can be spaced apart from each other at regular intervals along the common base 130. In particular, the common base 130 can connect at least part (especially all) of the clamping members of each clamping unit to each other on the same side relative to the two or more clamping units 110.

[0075] Still refer to Figure 2 The common base 130 of the retaining device 100 includes a first common base 130-1 and a second common base 130-2. The first clamping members 120-1 (one of a pair of clamping members) of each clamping unit 110 can be connected to each other through the first common base 130-1. The second clamping members 120-2 (the other of a pair of clamping members) of each clamping unit 110 can be connected to each other through the second common base 130-2.

[0076] In some embodiments, at least one of the first common base 130-1 and the second common base 130-2 may be pivotally movable. In some embodiments, the first common base 130-1 and the second common base 130-2 may be movable relative to each other in the vertical and / or lateral direction, and / or the first common base 130-1 and the second common base 130-2 may be movable linearly relative to each other.

[0077] It is understood that when at least some clamping units in the clamping units 110 of the retaining device 100 are not connected to the common base 130, but are combined to the body of the retaining device 100 by separate supports and / or connectors, the respective separate supports and / or connectors of the clamping units 110 may be pivotally movable, or may be movable in the vertical and / or horizontal direction.

[0078] In one embodiment, when the retaining device 100 includes two or more clamping units 110, at least one of the paired clamping members 120 in each of the two or more clamping units 110 (particularly each of the paired clamping members) is provided with a recessed structure 126. Alternatively, in the two or more clamping units 110, at least one clamping member 120 in at least one clamping unit 110 is provided with a recessed structure 126, and no clamping member 120 in at least one additional clamping unit 110 is provided with a recessed structure 126.

[0079] In one embodiment, the clamping member 120, in the portion (particularly surface 122) configured to contact and abut against the component carrier structure 200, may, in addition to having a recessed structure 126, at least partially include a textured surface 124, such as... Figure 4As shown. The textured surface 124 can be formed as any one or a combination of a ribbed surface, a knurled surface, or a dotted surface.

[0080] In some embodiments, the clamping member 120 may include at least two recessed structures 126 on a portion of the component carrier structure 200 to be abutted. In some embodiments, the at least two recessed structures 126 may be arranged substantially parallel to each other, such as... Figure 5A As shown. In some embodiments, at least two recessed structures 126 may be arranged in an alternating manner, such as... Figure 5B As shown. In some embodiments, at least two of the at least two recessed structures 126 may be in fluid communication.

[0081] In the implementation method, such as Figure 5A As shown, at least one recessed structure 126 includes at least one extended recessed portion 128 along its length direction. The extended recessed portion 128 has a greater extension range than the rest of the recessed structure 126 in the width direction and / or in the vertical direction perpendicular to the length and width directions.

[0082] When the clamping member 120 includes two or more recessed structures 126, at least two extended recesses 128 on different recessed structures 126 may at least partially overlap to form fluid communication, for example, between two recessed structures 126.

[0083] At least two of the two or more recessed structures 126 may be cross-connected to form a cross channel for fluid flow. At at least one cross-connection location, an extended recess 128, at least partially shared by the two corresponding recessed structures 126, may be formed around that cross-connection location. Figure 5C As shown, two recessed structures 126 are intersected, and at the intersection, an extended recess 128 shared by the two recessed structures 126 is formed around the intersection. Figure 5C In this case, the shared extended recess 128 is basically in the center position, and therefore can also be called the central extended recess.

[0084] In an embodiment, on a clamping member 120 provided with at least one recessed structure 126, the total planar extension of the at least one recessed structure 126 may account for at least 40%, particularly at least 50%, particularly at least 60%, and more particularly at least 70% of the planar extension of the portion of the clamping member 120 that is abutted against the support structure 200.

[0085] In the implementation, the parameters of the recessed structure 126 and the corresponding portion of the clamping member 120 containing the recessed structure 126 can be set according to actual needs. For example, such as... Figure 5C As shown, the width w of the recessed structure 126 can be from 0.5 to 2 mm, particularly 1 mm. The first width w1 of the extended recess 128 can be from 2 to 4 mm, particularly 3 mm. The second width w2 of the extended recess 128 can be from 2 to 5 mm, particularly 3.56 mm. The first width w3 of the corresponding surface portion of the clamping member 120 with the recessed structure 126 can be from 4 to 6 mm, particularly 5 mm. The second width w4 of the corresponding surface portion of the clamping member 120 with the recessed structure 126 can be from 5 to 8 mm, particularly 6 mm.

[0086] In some embodiments, a portion of the bearing structure 200 of the clamping member 120 that is to be abutted is formed in a tapered shape, such as a truncated cone. In some embodiments, a portion of the bearing structure 200 of the clamping member 120 that is to be abutted is formed in a cylindrical shape.

[0087] In one embodiment, the two clamping members in the pair of clamping members 120 may be configured such that the corresponding portions of the bearing structure 200 of the clamping member to be abutted have different or the same shape as each other.

[0088] In some embodiments, the two clamping members of the pair of clamping members 120 may be configured such that the surfaces of the clamping members to contact the component carrier structure 200 have different planar extensions from each other.

[0089] In some embodiments, the paired clamping members 120 may be configured such that the contact area between one clamping member and the component carrier structure 200 is smaller than the contact area between the other clamping member and the component carrier structure 200. In some embodiments, the paired clamping members 120 may be configured such that the contact area of ​​one clamping member with the component carrier structure 200 (particularly excluding the recessed structure 126) on the abutting surface in a direction perpendicular to the abutting surface of the component carrier structure 200 (also referred to as the projection direction) is completely within the projection area of ​​the contact area of ​​the other clamping member with the component carrier structure 200 (particularly including the recessed structure 126) on the abutting surface along the same projection direction.

[0090] In some embodiments, the clamping member 120 may be detachably attached to a portion of the body of the retaining device 100, for example, detachably attached to the common base 130 of the retaining device 100. In other embodiments, the clamping member 120 may be integrally formed with the body of the retaining device 100, for example, integrally formed with the common base 130 of the retaining device 100.

[0091] The clamping member 120 may be configured to protrude beyond the body of the retaining device 100. Depending on the position and / or height of the attached body portion, the two clamping members of the pair of clamping members 120 may protrude from the corresponding body portion by different lengths. For example, the length by which one clamping member of the pair of clamping members 120 protrudes from the body of the retaining device 100 may be greater than the length by which the other clamping member protrudes from the body of the retaining device 100.

[0092] Although this application has been described with reference to exemplary embodiments, it should be understood that this application is not limited to the specific embodiments described and shown herein. Various changes can be made to the exemplary embodiments by those skilled in the art without departing from the scope defined by the claims of this application.

[0093] The features mentioned and / or shown in the above description of exemplary embodiments of this application may be combined in the same or similar manner with one or more other embodiments, combined with features in other embodiments, or substituted for corresponding features in other embodiments. Such combinations or substitutions should also be considered as including within the scope of protection of this application.

Claims

1. A retaining device (100) configured to retain the component carrier structure (200) during handling and / or movement, characterized in that: The holding device (100) includes at least one clamping unit (110) configured to hold the component carrier structure (200); At least one of the clamping units (110) includes a pair of clamping members (120) configured to abut against the component carrier structure (200) to hold the component carrier structure; and In this clamping unit (110), at least one of the paired clamping members (120) is provided with at least one recessed structure (126), which extends at least partially on the portion of the clamping member (120) to be abutted against the component carrier structure (200), thereby forming a fluid channel.

2. The holding device (100) according to claim 1, characterized in that, The clamping member (120) having at least one recessed structure (126) includes at least a textured surface (124) on the surface (122) configured to contact the component carrier structure (200).

3. The holding device (100) according to claim 2, characterized in that, The textured surface (124) is formed as one of the following or any combination thereof: a ribbed surface; a knurled surface; and a dotted surface.

4. The holding device (100) according to claim 1, characterized in that: At least one of the paired clamping members (120) is pivotally movable; and / or Two of the pair of clamping members (120) are connected to each other.

5. The holding device (100) according to any one of claims 1 to 4, characterized in that, The holding device (100) includes at least two clamping units (110) that are spaced apart from each other at regular intervals.

6. The holding device (100) according to any one of claims 1 to 4, characterized in that, The retaining device (100) includes at least two clamping units (110) and at least one common base (130), wherein, The at least two clamping units (110) are connected to each other via the common base (130).

7. The holding device (100) according to claim 6, characterized in that, The common base (130) connects at least a portion of the clamping members of each clamping unit to each other on the same side relative to the at least two clamping units (110).

8. The holding device (100) according to claim 6, characterized in that, The retaining device (100) includes a first common base (130-1) and a second common base (130-2), wherein the first clamping member (120-1) of each of the at least two clamping units (110) is connected to each other through the first common base (130-1), and the second clamping member (120-2) of each of the at least two clamping units (110) is connected to each other through the second common base (130-2).

9. The holding device (100) according to claim 8, characterized in that, At least one of the first common base (130-1) and the second common base (130-2) is pivotally movable.

10. The holding device (100) according to any one of claims 1 to 4, characterized in that, The retaining device (100) includes at least two clamping units (110), wherein, At least one clamping member of each of the at least two clamping units (110) is provided with the recessed structure (126); or The clamping member (120) of at least one of the at least two clamping units (110) is not provided with the recessed structure (126).

11. The holding device (100) according to any one of claims 1 to 4, characterized in that, At least one of the clamping units (110) is configured to hold the component carrier structure (200) by acting on the edge portion of the component carrier structure (200).

12. The holding device (100) according to any one of claims 1 to 4, characterized in that, At least one of the paired clamping members (120) includes at least two recessed structures (126) to form at least two fluid channels.

13. The holding device (100) according to claim 12, characterized in that: At least two of the at least two recessed structures (126) are fluidly connected; and / or At least one of the at least two recessed structures (126) includes at least one extended recess (128) along the length direction of the recessed structure (126), the extended recess (128) having a greater extension range than the rest of the recessed structure (126) in the width direction of the recessed structure (126) and / or in the vertical direction perpendicular to the length direction and the width direction.

14. The holding device (100) according to claim 13, characterized in that, At least two of the extended recesses (128) located on different recessed structures (126) at least partially overlap.

15. The holding device (100) according to claim 14, characterized in that, At least two of the at least two recessed structures (126) are cross-connected to form a cross channel for fluid flow, and an extended recess (128) is formed around the cross-connection location that is at least partially shared by the two corresponding recessed structures (126).

16. The holding device (100) according to any one of claims 1 to 4, characterized in that, At least one of the at least one recessed structure (126) includes at least one extended recess (128) along the length direction of the recessed structure (126), the extended recess (128) having a greater extension range than the rest of the recessed structure (126) in the width direction of the recessed structure (126) and / or in the vertical direction perpendicular to the length direction and the width direction.

17. The holding device (100) according to any one of claims 1 to 4, characterized in that, On the clamping member (120) with the recessed structure (126), the planar extension of the recessed structure (126) accounts for at least 70% of the planar extension of the portion of the clamping member (120) to be abutted against the component carrier structure (200).

18. The holding device (100) according to any one of claims 1 to 4, characterized in that, At least one of the paired clamping members (120) includes a tapered portion configured to abut against the component carrier structure (200).

19. The holding device (100) according to any one of claims 1 to 4, characterized in that, At least one of the paired clamping members (120) includes a cylindrical portion configured to abut against the component carrier structure (200).

20. The holding device (100) according to any one of claims 1 to 4, characterized in that: Two of the pair of clamping members (120) are configured such that the portions of the clamping members that abut against the component carrier structure (200) have different or the same shape as each other. and / or Two of the pair of clamping members (120) are configured such that the surfaces of the clamping members to contact the component carrier structure (200) have different planar extension ranges from each other. and / or The paired clamping members (120) are configured such that the contact area between one clamping member and the component carrier structure (200) is smaller than the contact area between the other clamping member and the component carrier structure (200).

21. The holding device (100) according to any one of claims 1 to 4, characterized in that, At least one of the paired clamping members (120) is detachably attached to the body of the retaining device (100); or At least one of the paired clamping members (120) is integrally formed with the body of the retaining device (100).

22. The holding device (100) according to any one of claims 1 to 4, characterized in that, The paired clamping members (120) protrude from the body of the retaining device (100).

23. The holding device (100) according to claim 22, characterized in that, One of the pair of clamping members (120) protrudes from the body of the retaining device (100) by a greater length than the other clamping member protrudes from the body of the retaining device (100).

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