Wafer access magazine

Abstract

The utility model discloses an access wafer with material box, include: base, mounting panel, solid set in the base, storehouse, including buckle fixed on mounting panel's card solid board, solid set on the first material frame and second material frame of card solid board, two material frame inner wall left and right symmetrical horizontal opening multiple pairs of opening big bottom small taper type recess, same horizontal position corresponds two opening distance less than the diameter of wafer, corresponding two bottom distance is greater than the diameter of wafer. Through being provided with multiple symmetrical taper type recess in material frame, taper type recess upper and lower face is in the inclined state, opening height is greater than the thickness of wafer, makes wafer when passing through opening not to take place touch, when storage, reduced contact area and friction, effectively avoided the generation of scratch and micro crack, promoted the access efficiency and finished product yield of wafer.

Description

Technical Field

[0001] This utility model relates to the field of glass production, manufacturing and processing, and in particular to a wafer storage box. Background Technology

[0002] In the glass production and processing, the storage, handling, and temporary storage of glass wafers are core processes. In existing technologies, glass storage boxes mostly adopt fixed-size vertical slots or flat tray structures. However, traditional glass wafers often come into contact with the slot openings during storage and retrieval, resulting in scratches or micro-cracks, which affects the yield of finished products. Utility Model Content

[0003] The technical problem to be solved by this utility model embodiment is to provide a wafer storage box, which solves the technical problems of wafers being difficult to store and retrieve and easily damaged during the storage and retrieval process in the prior art.

[0004] To address the aforementioned technical problems, this utility model provides a wafer storage and retrieval box, comprising: a base; a mounting plate fixedly disposed on the base; and a storage bin, including a locking plate fastened to the mounting plate, and a first and a second storage rack fixedly disposed on the locking plate. Multiple pairs of tapered grooves with large openings and small bottoms are symmetrically and horizontally opened on the inner sidewalls of the two storage racks. At the same horizontal position, the distance between two openings is less than the diameter of the wafer, and the distance between two bottoms is greater than the diameter of the wafer.

[0005] Furthermore, the horizontal distance between the opening and bottom positions of the same tapered groove is greater than the diameter difference between the first and second wafers.

[0006] Furthermore, the mating edge of the mounting plate or the fastening plate is provided with an inwardly extending snap-fit ​​step, and the snap-fit ​​step and the base form a snap-fit ​​groove. Correspondingly, the cross-sectional shape of the mating edge of the fastening plate or the mounting plate forms an interference fit with the snap-fit ​​groove.

[0007] Furthermore, it also includes a connecting frame, which includes: a connecting plate fixed to the top of the two material racks, and a horizontal plate and a vertical plate connected between the two connecting plates, with a reinforcing rib provided in the middle of the horizontal plate along the length direction.

[0008] Furthermore, the hopper has a symmetrical structure, and the tops of the two racks are also fixed with clamping plates.

[0009] Furthermore, the hopper also includes a receiving cavity located at the rear, the horizontal distance of which is less than the wafer diameter and less than the distance between two openings at the same horizontal position.

[0010] Furthermore, the rear of the accommodating cavity is an open structure, with a corresponding horizontal distance greater than the width of the external robotic arm.

[0011] Furthermore, the mounting plate has countersunk holes, through which screws are passed to fix the mounting plate to the base.

[0012] Furthermore, the base has waist-shaped holes at its four corners.

[0013] Furthermore, the slope angle corresponding to the tapered groove is 2° to 30°, and the bottom arc radius is 0.5MM to 10MM.

[0014] This utility model embodiment proposes a wafer storage box with multiple symmetrical tapered grooves in the rack. The upper and lower surfaces of the tapered grooves are inclined, and the opening height is greater than the thickness of the wafer. This prevents the wafer from touching when passing through the opening, reduces the contact area and friction during storage, effectively avoids the generation of scratches and microcracks, and improves wafer storage efficiency and finished product yield. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the overall structure of an embodiment of the present utility model.

[0016] Figure 2 This is a schematic diagram of the structure of the base, mounting plate and hopper in an embodiment of this utility model.

[0017] Figure 3 This is a schematic diagram of the structure of the accommodating cavity in an embodiment of this utility model.

[0018] Figure 4 This is a schematic diagram of the waferless structure of an embodiment of the present invention.

[0019] Figure 5 This is a bottom view of the fixing plate of this utility model embodiment.

[0020] Explanation of icon numbers

[0021] Detailed Implementation

[0022] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0023] like Figures 1-5 As shown, this embodiment provides a wafer storage and retrieval box through the following examples.

[0024] Example 1

[0025] This utility model embodiment provides a wafer storage and retrieval box, including a base 1, a mounting plate 2, and a storage bin 3. The base 1 is square, with stepped waist-shaped holes at its four corners, and is fixedly connected to external equipment by bolts. The mounting plate 2 is fixedly mounted on the top surface of the base 1, and the storage bin 3 for placing wafers 4 is provided on the mounting plate 2. The storage bin 3 includes a retaining plate 31, a first rack 32, and a second rack 33. The retaining plate 31 fits into the corresponding position of the mounting plate 2, and its two ends are connected to the first rack 32 and the second rack 33.

[0026] The first rack 32 and the second rack 33 are arc-shaped, and their spacing gradually decreases from the side of the corresponding clamping plate 31 inward, forming a structure that is wider on the outside and narrower on the inside. The first rack 32 and the second rack 33 are provided with multiple tapered grooves 34 on their inner sidewalls. The tapered grooves 34 are horizontally symmetrical structures with openings that gradually narrow inward from the inner sidewall. The opening height of the tapered grooves 34 is greater than the thickness of the wafer 4, so that the wafer 4 avoids contact with the opening during storage and retrieval, reduces friction damage, and facilitates smooth storage and retrieval of the wafer 4. The spacing between the openings of the tapered grooves 34 on the same horizontal plane is less than the diameter of the wafer 4, and the distance between the inner walls of two opposite tapered grooves 34 is greater than the diameter of the wafer 4, so that the wafer 4 can be stably placed in the groove. The wafer 4 is subjected to a small clamping force to ensure that it is stably placed in the tapered grooves 34 and avoids sliding, thereby facilitating quick storage and retrieval of the wafer 4.

[0027] In another embodiment, since the depth of the tapered groove 34 is greater than the diameter difference between the first wafer and the second wafer, and the tapered groove 34 of different depths can accommodate wafers 4 of various specifications, the versatility and ease of operation of the cassette are improved while ensuring stable storage and retrieval of the wafers 4.

[0028] Example 2

[0029] Based on the above embodiment 1, the mounting plate 2 has an inwardly concave arc-shaped structure in the opening direction of the hopper 3. Since the hopper 3 has a structure that is wider on the outside and narrower on the inside, the locking plate 31 is a semi-elliptical structure that is easy to install or disassemble. The two ends of the arc of the semi-ellipse are perpendicularly connected to the reference axis through orthogonal straight line segments to form a closed semi-elliptical mounting plate 2. The reference axis of the semi-ellipse is a common superimposed axis. The difference in size between the two semi-ellipses forms a locking step, which is the locking step formed by the area difference between the two sides of the mounting plate 2. The locking step is embedded in the arc-shaped edge of the mounting plate 2, so that the locking plate 31 is tightly connected to the mounting plate 2, enhancing the stability of the overall structure.

[0030] The combination of the mounting plate 2 and the locking plate 31 is not limited to the above embodiments. The aforementioned locking step can also be provided on the mounting plate 2, extending inward along the arc-shaped edge of the top surface of the mounting plate 2 to form a locking step that matches the arc-shaped edge of the locking plate 31. By embedding the arc-shaped edge of the locking plate 31 into this locking step, the top step surface of the locking step abuts against the top surface of the locking plate 31, achieving a tight fixation between the locking plate 31 and the mounting plate 2. The interference fit between the locking plate 31 and the mounting plate 2 not only improves the overall stability of the material box but also enables mutual locking between the locking plate 31 and the mounting plate 2, ensuring that the material box is not easily loosened during handling and operation, thus improving safety.

[0031] Example 3

[0032] Based on Embodiment 1, the material box further includes a connecting frame 5, located at the top of the material bin 3. The connecting frame 5 includes connecting plates 51 fixed to the tops of two material racks, and a horizontal plate 52 and a vertical plate 53 connecting the two connecting plates 51. The connecting plates 51 extend downwards from the bottom at the middle position, forming a vertical plane perpendicular to the connecting plates 51. The horizontal plate 52 is vertically connected to the bottom of this vertical plane. The horizontal plate 52 also has a reinforcing rib welded along its length in the middle of its top surface. A groove formed by the connecting plate 51 and its vertical plane is opened at the tail of the connecting plate 51. The vertical plate 53 of the same height is embedded at the end of the groove. The vertical plate 53 is suspended above the mounting plate 2. The horizontal plate 52 and the vertical plate 53 connect the connecting plates 51 at the top of the material racks to form a complete support structure, enhancing the overall rigidity and stability of the material box and ensuring the safety of the wafers 4 during handling and storage.

[0033] Example 4

[0034] Based on Embodiment 2, a wafer storage and retrieval cassette is also provided. In this embodiment, the top connecting frame 5 is eliminated, and the same mounting plate 2 and snap-fit ​​plate as the bottom are fixed on the top. At the same time, the top and bottom structures of the cassette 3 are the same, and grooves are provided at the upper and lower ends near the opening of the cassette 3. The grooves match the snap-fit ​​steps on the orthogonal straight line segment of the snap-fit ​​plate 31, so that the cassette is symmetrical from top to bottom. Installation can be achieved without distinguishing between the upper and lower parts of the cassette 3. At the same time, the mounting plate 2 and the cassette 3 are tightly connected by the snap-fit ​​steps. The above technical solution realizes a one-way installation method in which the cassette and the mounting plate 2 and snap-fit ​​plate 31 can be freely rotated, which simplifies the installation steps and improves the assembly efficiency and the stability and flexibility of the cassette.

[0035] Example 5

[0036] Based on Embodiment 1, the hopper 3 also includes a rear receiving cavity, which is a cavity structure formed by the hopper 3 extending inward to be wider on the outside and narrower on the inside. A tapered groove 34 extends inward along the arc-shaped surface of the rack to the receiving cavity. Through holes corresponding to the tapered groove 34 are opened in the middle of the rack and on the outer side of the receiving cavity. The distance between the tapered groove 34 and the opening in the receiving cavity is less than the diameter of the wafer 4, thus preventing the wafer 4 from entering the receiving cavity from the hopper 3. The receiving cavity has an opening structure on the side away from the wafer 4, and the distance of this opening is greater than the width of the external robotic arm. Because the ends of the robotic arm will be larger than the diameter of the wafer 4 when picking up and placing it, if the opening were smaller than or equal to the width of the robotic arm, the portion of the robotic arm larger than the wafer 4 would not be able to pass through the outside of the receiving cavity. Therefore, the width of the opening in the receiving cavity is greater than the width of the robotic arm to avoid collisions within the receiving cavity. The opening of the accommodating cavity creates a two-way transparent structure in the cassette, making it easy for manual observation to ensure that the cassette is full and neat. This allows the wafers to be pushed from the opening of the accommodating cavity toward the hopper 3, ensuring that the wafers 4 are neatly arranged on the cassette, thus improving the ease of operation and safety.

[0037] Example 6

[0038] Based on Embodiment 1, the mounting plate 2 is further provided with a countersunk hole 311. The countersunk hole 311 is located at the center of the top surface of the mounting plate 2 near the straight edge. The hole has a conical groove and penetrates the mounting plate 2. The mounting plate 2 is fixed to the base 1 by a countersunk screw that matches the countersunk hole 311. The conical head of the countersunk screw fits tightly with the conical groove of the countersunk hole 311 to ensure that the screw head does not protrude from the surface of the mounting plate 2 and avoids scratching the wafer 4.

[0039] Example 7

[0040] Based on Embodiment 1, the tapered groove 34 has a structure that is wider on the outside and narrower on the inside, with the height of the opening being greater than the height of the inside. Its inclined angle is 2° to 30°, and the bottom of the opening is formed by the upper and lower inclined surfaces to form an arc surface with a radius of 0.5MM-10MM. This avoids direct contact between the wafer 4 and the groove when the wafer 4 enters the groove, so that only the circumferential edge of the wafer 4 contacts the groove, reducing the contact area between the wafer 4 and the tapered groove 34, and effectively reducing the risk of wear and tear on the wafer 4 during storage and transportation.

[0041] Working principle:

[0042] During storage, an external robotic arm carries wafer 4 into the storage bin 3. Wafer 4 is aligned with the tapered groove 34 on the rack. The robotic arm slowly moves wafer 4 through the tapered groove 34 until the diameter of wafer 4 is completely inside the tapered groove 34 and is held by the inclined surface in the groove. At this point, the robotic arm moves downward back to the initial position. This process is repeated until the storage bin is full of wafer 4. Then, the operator manually observes whether wafer 4 is full and neat. If wafer 4 is not neatly stacked in the same position in the storage bin, wafer 4 is pushed towards the storage bin 3 to ensure that wafer 4 is neatly arranged for easy retrieval later.

[0043] During the retrieval process, the external robotic arm is aligned with the bottom of the wafer 4 to be retrieved and the gap between it and other wafers 4. The robotic arm extends from the front end of the hopper 3, slowly moves to the bottom of the wafer 4, moves upward to lift the wafer 4, and then exits along the tapered groove 34 to avoid contact with other wafers 4, ensuring that it is retrieved separately, improving operational efficiency and the integrity of the wafer 4.

[0044] The above description is a specific embodiment of the present utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the principle of the present utility model, and these improvements and modifications are also considered to be within the protection scope of the present utility model.

Claims

1. A wafer storage and retrieval box, characterized in that, include: Base (1); Mounting plate (2) is fixed on the base (1); The hopper (3) includes a clamping plate (31) fixed to the mounting plate (2), a first rack (32) and a second rack (33) fixed on the clamping plate. The inner sidewalls of the two racks are symmetrically horizontally opened with multiple pairs of tapered grooves (34) with large openings and small bottoms. The distance between the two openings at the same horizontal position is less than the diameter of the wafer (4), and the distance between the two bottoms is greater than the diameter of the wafer (4).

2. The wafer storage and retrieval box as described in claim 1, characterized in that, The horizontal distance between the opening and bottom positions of the same tapered groove (34) is greater than the diameter difference between the first wafer and the second wafer.

3. The wafer storage and retrieval box as described in claim 1, characterized in that, The mating edge of the mounting plate (2) or the fastening plate (31) is provided with a snap-fit ​​step extending inward. The snap-fit ​​step and the base (1) form a snap-fit ​​groove. Correspondingly, the cross-sectional shape of the mating edge of the fastening plate (31) or the mounting plate (2) forms an interference fit with the snap-fit ​​groove.

4. The wafer storage and retrieval box as described in claim 1, characterized in that, It also includes a connecting frame (5), which includes a connecting plate (51) fixed to the top of the two material racks, and a horizontal plate (52) and a vertical plate (53) connected between the two connecting plates (51), with a reinforcing rib provided in the middle of the horizontal plate along the length direction.

5. The wafer storage and retrieval box as described in claim 1, characterized in that, The hopper (3) has a symmetrical structure, and the top of the two racks is also fixed with a clamping plate (31).

6. The wafer storage and retrieval box as described in claim 1, characterized in that, The hopper (3) also includes a accommodating cavity located at the rear. The horizontal distance of the accommodating cavity is less than the diameter of the wafer (4) and less than the distance between the two openings at the same horizontal position.

7. The wafer storage and retrieval box as described in claim 6, characterized in that, The rear of the accommodating cavity is an open structure, with a corresponding horizontal distance greater than the width of the external robotic arm.

8. The wafer storage and retrieval box according to claim 1, characterized in that, The mounting plate (2) has a countersunk hole (311), and screws pass through the countersunk hole (311) to fix the mounting plate to the base (1).

9. The wafer storage and retrieval box according to claim 1, characterized in that, The base (1) has waist-shaped holes at its four corners.

10. The wafer storage and retrieval cassette according to any one of claims 1 to 9, characterized in that, The slope angle corresponding to the tapered groove (34) is 2° to 30°, and the bottom arc radius is 0.5MM to 10MM.

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