Graphite boat and coating apparatus

Abstract

This utility model discloses a graphite boat and a coating equipment. The graphite boat includes: a boat body for placing silicon wafers, the bottom of which is rectangular; and supporting feet, each supporting foot including two insulated feet and two conductive feet. The two insulated feet are respectively located at a pair of diagonally opposite corners of the bottom of the boat body, and the two conductive feet are respectively located at a pair of non-insulated corners of the bottom of the boat body. The two conductive feet are respectively connected to the positive and negative terminals of a power supply. The coating equipment includes: a furnace body forming a coating cavity; two support rods respectively located at the bottom of the coating cavity; a support block located on the support rods, used to support the supporting feet of the graphite boat, the support block having a support surface adapted to the shape of the conductive feet, the supporting feet being supported on the support surface; and a power supply, the positive and negative terminals of which are respectively connected to the two conductive support blocks.

Description

Technical Field

[0001] This application relates to the field of battery production equipment technology, and more particularly to a graphite boat and coating equipment. Background Technology

[0002] In semiconductor manufacturing, photovoltaic industry, and optical component processing, coating is a crucial step, used to impart specific optical, electrical, or protective properties to substrates such as silicon wafers. Existing coating equipment uses a circular solid support rod to support a graphite boat during the coating process. Electrode blocks are fitted around the outer periphery of the support rod. The electrode blocks are connected to an external power supply via an external power electrode line and are connected to the graphite boat, so that the power supply and the graphite boat are electrically connected, allowing the coating material to be deposited on the surface of the silicon wafer supported by the graphite boat to form a thin film.

[0003] However, the four legs of the graphite boat are all made of graphite. When a silicon wafer fragment accidentally lands on the support rod, the fragment can easily cause the positive and negative electrodes on the same support rod to conduct. Once this happens, it will cause frequent rework, which will not only seriously interfere with the normal operation of the coating process and reduce production efficiency, but may also negatively affect the coating quality, resulting in products that do not meet expectations and increasing production costs. Utility Model Content

[0004] This utility model discloses a graphite boat and a coating device. By setting one of the boat feet at one diagonal position as a conductive foot and the other diagonal position as an insulating foot, the problem of positive and negative electrode continuity that occurs after long-term use is avoided, and the high-frequency rework problem is prevented.

[0005] To achieve the above objectives, the first aspect of this utility model discloses a graphite boat, which includes:

[0006] A boat body for placing silicon wafers, the bottom of which is rectangular;

[0007] The support boat feet include two insulating boat feet and two conductive boat feet. The two insulating boat feet are respectively disposed at a pair of diagonally arranged apex corners at the bottom of the boat body. The two conductive boat feet are respectively disposed at a pair of apex corners at the bottom of the boat body where the insulating boat feet are not disposed. One of the two conductive boat feet is used to connect to the positive terminal of the power supply, and the other of the two conductive boat feet is used to connect to the negative terminal of the power supply.

[0008] The power source is used to supply power to the graphite boat so that the graphite boat forms an electric field.

[0009] As an optional implementation, the boat body includes: a plurality of first boat sheets and a plurality of second boat sheets, the plurality of first boat sheets being arranged at intervals along the width direction of the graphite boat, a second boat sheet being disposed between every two first boat sheets, the plurality of first boat sheets being connected to one of two conductive boat feet, and the plurality of second boat sheets being connected to the other of the two conductive boat feet.

[0010] As an optional implementation, the first boat leaf is provided with a first connecting hole, and the second boat leaf is provided with a second connecting hole. The boat body further includes: a plurality of first connecting blocks, each first connecting block being used to connect two adjacent first boat leaves, and each first connecting block being provided with a first through hole, the first through hole corresponding to the first connecting hole; a first connecting rod, the first connecting rod extending along the width direction of the graphite boat, the first connecting rod sequentially passing through the plurality of first connecting holes and the plurality of first through holes, so that the plurality of first boat leaves are connected to the conductive boat foot through the first connecting rod; a plurality of second connecting blocks, each second connecting block being used to connect two adjacent second boat leaves, each second connecting block being provided with a second through hole, the plurality of second through holes corresponding to the plurality of second connecting holes; and a second connecting rod, the second connecting rod extending along the width direction of the graphite boat, the second connecting rod passing through the plurality of second connecting holes and the plurality of second through holes, so that the plurality of second boat leaves are connected to the conductive boat foot through the second connecting rod.

[0011] As an optional implementation, the first boat leaf is provided with a first insulating hole, the second boat leaf is provided with a second insulating hole, and an insulating element is provided between each first boat leaf and each second boat leaf. Each insulating element abuts against the adjacent first boat leaf and second boat leaf. The boat body also includes an insulating rod that extends along the width direction of the graphite boat and passes through multiple first insulating holes, multiple second insulating holes, and multiple insulating elements.

[0012] A second aspect of this utility model provides a coating apparatus, the coating apparatus comprising:

[0013] A furnace body having a coating cavity for accommodating the graphite boat described in the first aspect;

[0014] Two support rods are respectively disposed at the bottom of the coating cavity. The support rods extend along the length direction of the furnace body, and the two support rods are arranged at intervals along the width direction of the furnace body.

[0015] A support block is disposed on the support rod and is used to support the support foot of the graphite boat. The support block has a support surface adapted to the shape of the conductive boat foot, and the support foot is supported on the support surface.

[0016] A power source, electrically connected to at least a portion of the support block, is provided to supply power to the support block to energize the graphite boat supported by the support block.

[0017] As an optional implementation, the supporting feet of the graphite boat have contact surfaces, the supporting surface of the supporting block is a plane, and the supporting surface is configured to fit against the contact surface.

[0018] As an optional implementation, the support block includes two conductive support blocks and two insulating support blocks. The conductive support blocks support the conductive boat feet. The positive terminal of the power supply is connected to one of the two conductive support blocks, and the negative terminal of the power supply is connected to the other of the two conductive support blocks. The insulating support blocks support the insulating boat feet. When the graphite boat is located in the coating cavity, the conductive support blocks support the conductive boat feet, and the insulating support blocks support the insulating boat feet. Both the conductive support blocks and the insulating support blocks have the supporting surface to support the supporting boat feet.

[0019] As an optional implementation, the support rod is a quadrangular prism, the side of the support rod that contacts the support block is a plane, and the side of the support block that contacts the support rod is a plane, with the corresponding planes of the support rod and the support block fitting together.

[0020] As an optional implementation, the support rod is an insulated support rod.

[0021] As an optional implementation, the coating equipment further includes multiple conductive leads. The conductive support block is connected to the positive terminal of the power supply via conductive leads, and the conductive support block is also connected to the negative terminal of the power supply via conductive leads. The support rod is provided with a cavity and a connecting hole. The cavity extends through the support rod along its extension direction, and the connecting hole is provided corresponding to the conductive support block and communicates with the cavity, so that the conductive leads are connected to the conductive support block through the cavity and the connecting hole.

[0022] Compared with the prior art, the beneficial effects of this application are:

[0023] The graphite boat provided in this application effectively solves the problem of positive and negative electrode conductivity caused by silicon wafer fragments by rationally arranging insulating and conductive boat feet, significantly improving the stability and safety of the coating process. Simultaneously, it can form a stable electric field. This stable electric field formation mechanism helps improve coating quality, reduce high-frequency rework and other problems, thereby improving production efficiency and product quality, and reducing production costs.

[0024] The coating equipment provided in this application significantly improves the stability and reliability of the coating process by employing an optimized graphite boat support structure. The tight fit between the support surface and the boat feet effectively reduces swaying and ensures the stability of the coating quality. Attached Figure Description

[0025] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0026] Figure 1 This is a schematic diagram of the structure of the graphite boat provided in the embodiments of this application;

[0027] Figure 2 This is a schematic diagram of the structure of the graphite boat placed inside the coating equipment according to an embodiment of this application;

[0028] Figure 3 This is a schematic diagram of the structure of the graphite boat and the support block in cooperation according to an embodiment of this application;

[0029] Figure 4 This is a schematic diagram of the connection structure of the support rod, support block and power supply provided in the embodiments of this application.

[0030] Explanation of reference numerals in the attached figures:

[0031] 100-Graphite boat; 101-Supporting boat foot; 1011-Insulating boat foot; 1012-Conductive boat foot; 102-First boat blade; 103-Second boat blade; 1041-First connecting block; 1042-First connecting rod; 1051-Second connecting block; 1052-Second connecting rod; 1061-Insulating component; 1062-Insulating rod; 200-Coating equipment; 201-Furnace body; 202-Supporting rod; 203-Supporting block; 2031-Conductive support block; 2032-Insulating support block; 204-Power supply; 205-Conductive lead. Detailed Implementation

[0032] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0033] In this application, the terms "upper," "lower," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are primarily for the purpose of better describing this application and its embodiments, and are not intended to limit the indicated devices, elements, or components to having a specific orientation, or to be constructed and operated in a specific orientation.

[0034] Furthermore, in addition to indicating location or positional relationship, some of the aforementioned terms may also have other meanings. For example, the term "above" may also be used in some cases to indicate a certain dependency or connection relationship. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.

[0035] Furthermore, the terms "setup" and "connection" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral structure; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium, or an internal connection between two devices, components, or parts. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.

[0036] Furthermore, the terms "first," "second," etc., are primarily used to distinguish different devices, elements, or components (which may be the same or different in specific type and construction), and are not intended to indicate or imply the relative importance or quantity of the indicated devices, elements, or components. Unless otherwise stated, "a plurality of" means two or more.

[0037] In the fields of semiconductor manufacturing, photovoltaic industry and optical component processing, the coating process is a key step. Existing coating equipment uses a circular solid support rod to support a graphite boat during the coating process. Electrode blocks are fitted around the outer periphery of the support rod. The electrode blocks are connected to the radio frequency power supply through an external power supply electrode line and are connected to the graphite boat so that the power supply is electrically connected to the graphite boat, so that the coating material is deposited on the surface of the silicon wafer supported by the graphite boat to form a thin film.

[0038] Currently, most coating equipment uses a solid circular support rod to support the graphite boat. Electrode blocks are fitted around the outer periphery of this support rod, and these electrodes are connected to an external power supply via an external power electrode line, which in turn connects to the graphite boat, thus establishing an electrical connection between the power supply and the graphite boat. However, the four legs of the graphite boat are typically made of graphite, a material with excellent conductivity. During the coating process, silicon wafer fragments may accidentally fall onto the support rod. Since the support rod has positive and negative electrodes, these fragments can easily cause continuity between the positive and negative electrodes on the same support rod. Once this happens, it can lead to high-frequency rework issues, which not only severely disrupts the normal operation of the coating process and reduces production efficiency, but may also negatively impact coating quality, resulting in products that do not meet expectations and increasing production costs.

[0039] Furthermore, such unintended conduction can damage the coating equipment itself, affecting its lifespan and stability. Frequent rework and maintenance of the coating equipment not only consume significant time and resources but can also lead to production delays, further increasing production costs.

[0040] In view of this, embodiments of this application disclose a graphite boat and a coating device. By setting one pair of boat feet at the apex of the graphite boat as conductive boat feet and the other pair of boat feet at the apex as insulating boat feet, the problem of positive and negative electrodes on the same side being conductive after long-term use is avoided, and the high-frequency rework problem is prevented.

[0041] The technical solution of this application will be further described below with reference to the embodiments and accompanying drawings.

[0042] Please see Figure 1 , Figure 1 This is a schematic diagram of the structure of a graphite boat 100 provided in an embodiment of this application. A first aspect of this application provides a graphite boat 100, comprising: a boat body for placing a silicon wafer, the bottom of which is rectangular; and supporting feet 101, each supporting foot 101 including two insulating feet 1011 and two conductive feet 1012. The two insulating feet 1011 are respectively disposed at a pair of diagonally arranged apex corners at the bottom of the boat body, and the two conductive feet 1012 are respectively disposed at a pair of apex corners at the bottom of the boat body where no insulating feet 1011 are provided. One of the two conductive feet 1012 is used to connect to the positive terminal of a power supply 204, and the other of the two conductive feet 1012 is used to connect to the negative terminal of the power supply 204. The power supply 204 supplies power to the graphite boat 100 to generate an electric field within the graphite boat 100.

[0043] The graphite boat 100 has a rectangular bottom for holding the silicon wafer, providing stable support. During the coating process, the silicon wafer needs to remain completely still to ensure uniform deposition of the coating material on its surface. The rectangular bottom of the boat maximizes stability, reducing the likelihood of displacement or tilting due to external forces or vibrations during coating, thus ensuring uniformity and quality of the coating.

[0044] Meanwhile, the rectangular structure at the bottom of the graphite boat 100 also has good symmetry and regularity, which facilitates the integration of the graphite boat 100 with other equipment components, improving the integration and work efficiency of the entire silicon wafer production and processing process.

[0045] It can be understood that the supporting feet 101 of the graphite boat 100 include two insulating feet 1011 and two conductive feet 1012. The two insulating feet 1011 are respectively located at a pair of diagonally opposite corners of the bottom of the boat body, and the two conductive feet 1012 are respectively located at a pair of diagonally opposite corners of the bottom of the boat body where the insulating feet 1011 are not located. When the graphite boat 100 is placed inside the coating equipment 200, the coating equipment 200 has two support rods 202 arranged along the width direction of the coating equipment 200. The two insulating feet 1011 of the graphite boat 100 are respectively located at a pair of diagonally opposite corners of the bottom of the boat body, and the two conductive feet 1012 are respectively located at a pair of diagonally opposite corners of the bottom of the boat body where the insulating feet 1011 are not located. This means that the two conductive feet 1012 of the graphite boat 100 are respectively placed on the two support rods 202, that is, each support rod 202 only supports one conductive foot 1012. By placing the conductive boat feet 1012 diagonally, the problem of positive and negative terminals being connected on the same support rod 202 can be effectively avoided.

[0046] Specifically, in actual production, when silicon wafer fragments accidentally land on the support rod 202, the positive and negative electrodes are located at opposite corners of the bottom of the boat. This arrangement increases the distance between the positive and negative electrodes, reducing the possibility of broken silicon wafers or other conductive materials connecting to the positive and negative electrodes of the graphite boat 100. Furthermore, when each support rod 202 supports only one conductive leg, even if silicon wafer fragments land on the support rod 202, it will not cause continuity between the positive and negative electrodes on the same support rod 202. Therefore, this arrangement reduces the risk of continuity between the positive and negative electrodes due to unexpected situations such as silicon wafer fragments, effectively improving the stability and safety of the coating process, reducing high-frequency rework caused by short circuits, and lowering production costs.

[0047] One of the two conductive boat feet 1012 is used to connect to the positive terminal of the power supply 204, and the other is used to connect to the negative terminal of the power supply 204. This ensures that the graphite boat 100 forms a stable and uniform electric field during the coating process. The stable and uniform electric field can guide the coating material to be deposited on the silicon wafer surface in a uniform manner, thereby improving the quality and consistency of the coating.

[0048] Meanwhile, the connection method of using one of the two conductive boat feet 1012 to connect to the positive terminal of the power supply 204 and the other to connect to the negative terminal of the power supply 204 is also beneficial to controlling the intensity and distribution of the electric field inside the graphite boat 100. Operators can flexibly adjust the electric field parameters according to different coating requirements and silicon wafer characteristics, thereby achieving precise control of the coating process and further improving the performance of the silicon wafer.

[0049] Optionally, the conductive foot 1012 can be made of graphite, and the insulating foot 1011 can be made of alumina ceramic, which has excellent insulation properties, high hardness, wear resistance, and good chemical stability. The insulating foot 1011 can also be made of silicon nitride ceramic, which has excellent insulation properties, high strength, high hardness, and good thermal shock resistance. Alternatively, the insulating foot 1011 can be made of quartz glass, which has good insulation properties, high transparency, low coefficient of thermal expansion, and excellent high-temperature resistance. This application does not limit the material of the insulating foot 1011 in its embodiments.

[0050] Thus, the graphite boat 100 provided in this embodiment effectively solves the problem of positive and negative electrode conduction caused by silicon wafer fragments by rationally arranging the insulating boat feet 1011 and conductive boat feet 1012, significantly improving the stability and safety of the coating process. Simultaneously, it can form a stable electric field. A stable electric field formation mechanism helps improve coating quality, reduce high-frequency rework and other problems, thereby improving production efficiency and product quality, and reducing production costs.

[0051] Please see Figure 1 In some embodiments, the boat body includes: a plurality of first boat sheets 102 and a plurality of second boat sheets 103. The plurality of first boat sheets 102 are arranged at intervals along the width direction of the graphite boat 100, and a second boat sheet 103 is disposed between every two first boat sheets 102. The plurality of first boat sheets 102 are all connected to one of two conductive boat feet 1012, and the plurality of second boat sheets 103 are all connected to the other of the two conductive boat feet 1012.

[0052] The first boat 102 and the second boat 103 are respectively connected to different conductive boat feet 1012, which can optimize the electric field distribution within the graphite boat 100 and allow for more precise control over the electric field distribution. This makes the electric field more uniform across the entire width of the graphite boat 100, thereby facilitating more uniform deposition of the coating material on the silicon wafer surface.

[0053] Furthermore, a uniform electric field helps enhance the uniformity and consistency of the coating. During the coating process, a uniform electric field distribution can reduce the phenomenon of excessively strong or weak local electric fields, thereby avoiding inconsistent coating thickness or incomplete coating. This is of great significance for improving the coating quality consistency of the entire production batch, and can significantly reduce the rework rate and scrap rate caused by coating quality problems.

[0054] Furthermore, connecting the first boat 102 and the second boat 103 to different conductive feet 1012 can improve production efficiency. On the one hand, a uniform coating process reduces rework or scrap caused by uneven electric field, thereby directly improving production efficiency. On the other hand, by rationally arranging the number and spacing of the first boat 102 and the second boat 103, as many silicon wafers as possible can be accommodated while ensuring coating quality, thereby increasing the yield per coating cycle and further improving production efficiency.

[0055] Please see Figure 1 In some embodiments, the first boat leaf 102 is provided with a first connecting hole, and the second boat leaf 103 is provided with a second connecting hole. The boat body also includes: a plurality of first connecting blocks 1041, the first connecting blocks 1041 being used to connect two adjacent first boat leaves 102, each first connecting block 1041 being provided with a first through hole, the first through hole corresponding to the first connecting hole; and a first connecting rod 1042, the first connecting rod 1042 extending along the width direction of the graphite boat 100, the first connecting rod 1042 sequentially passing through the plurality of first connecting holes and the plurality of first through holes, so that the plurality of first boat leaves 102... 2. Connected to the conductive boat foot 1012 via the first connecting rod 1042; multiple second connecting blocks 1051, the second connecting blocks 1051 are used to connect two adjacent second boat leaves 103, each second connecting block 1051 is provided with a second through hole, the multiple second through holes are provided corresponding to the multiple second connecting holes; second connecting rod 1052, the second connecting rod 1052 extends along the width direction of the graphite boat 100, the second connecting rod 1052 passes through the multiple second connecting holes and the multiple second through holes, so that the multiple second boat leaves 103 are connected to the conductive boat foot 1012 via the second connecting rod 1052.

[0056] Specifically, the first boat leaf 102 is provided with a first connecting hole, and the second boat leaf 103 is provided with a second connecting hole. The boat body also includes a plurality of first connecting blocks 1041 for connecting two adjacent first boat leaves 102. Each first connecting block 1041 is provided with a first through hole, and the first through hole is provided corresponding to the first connecting hole. A first connecting rod 1042 extends along the width direction of the graphite boat 100 and passes through the plurality of first connecting holes and the plurality of first through holes in sequence, thereby connecting the plurality of first boat leaves 102 to the conductive boat foot 1012 through the first connecting rod 1042. Similarly, a plurality of second connecting blocks 1051 are used to connect two adjacent second boat leaves 103. Each second connecting block 1051 is provided with a second through hole, and a second connecting rod 1052 extends along the width direction of the graphite boat 100 and passes through the plurality of second connecting holes and the plurality of second through holes, thereby connecting the plurality of second boat leaves 103 to another conductive boat foot 1012 through the second connecting rod 1052.

[0057] Through the ingenious cooperation of corresponding connecting blocks and connecting rods, a stable connection is achieved between adjacent first boat leaf 102 or second boat leaf 103, resulting in a more integrated structure in the width direction of the boat body. This not only improves the stability and durability of the graphite boat 100 under high temperature and chemical corrosion environments, but also effectively prevents the first boat leaf 102 or second boat leaf 103 from shifting or loosening due to external forces or vibrations during the coating process, thereby ensuring the smooth progress of the coating process.

[0058] The use of the first connecting block 1041 and the first connecting rod 1042, as well as the second connecting block 1051 and the second connecting rod 1052, makes the connection between the first leaf 102 and the second leaf 103 more convenient, eliminating the need for complex welding or other fixing methods. This simplifies the manufacturing and maintenance process of the graphite boat 100, reducing production costs and maintenance difficulty. Simultaneously, it allows for quick disassembly and reassembly when it is necessary to replace a damaged first leaf 102 or second leaf 103 for adjustment, improving the maintainability and flexibility of the graphite boat 100.

[0059] Optionally, by adjusting the number, position, and size of the first connecting block 1041, the second connecting block 1051, the first connecting rod 1042, and the second connecting rod 1052, the structure and size of the graphite boat 100 can be easily changed to adapt to silicon wafers of different sizes and specifications, as well as different coating process requirements. This enables the graphite boat 100 to meet diverse production needs, improving its versatility and market competitiveness.

[0060] Please see Figure 1In some embodiments, a first insulating hole is provided on the first boat leaf 102, and a second insulating hole is provided on the second boat leaf 103. An insulating element 1061 is provided between each first boat leaf 102 and each second boat leaf 103. Each insulating element 1061 abuts against the adjacent first boat leaf 102 and second boat leaf 103. The boat body also includes an insulating rod 1062, which extends along the width direction of the graphite boat 100 and passes through multiple first insulating holes, multiple second insulating holes, and multiple insulating elements 1061.

[0061] It is understood that by setting an insulating element 1061 between adjacent boats and using an insulating rod 1062 to pass through multiple insulating holes and the insulating element 1061, electrical conduction between adjacent first boats 102 and second boats 103 can be effectively prevented, electric field distribution disorder can be avoided, and the stability and uniformity of the electric field can be ensured, thereby providing a more reliable electric field environment for silicon wafer coating and improving the quality and consistency of the coating.

[0062] Secondly, the penetrating function of the insulating rod 1062 not only connects and fixes the first boat 102 and the second boat 103, but also cooperates with the insulating component 1061 to form a stable frame structure, making the boat body more robust and stable in the width direction. This effectively resists external impacts and vibrations that may occur during the coating process, reduces the displacement or loosening of the boat, and ensures the smooth progress of the coating process.

[0063] Furthermore, the use of insulating components 1061 and insulating rods 1062 simplifies the assembly and disassembly process of the boat hull, eliminating the need for complex welding or other fixing methods and reducing production costs. Simultaneously, when maintenance requires replacement of damaged first boat leaf 102 or second boat leaf 103, disassembly and reassembly can be performed quickly, improving the maintainability and flexibility of the graphite boat 100.

[0064] Finally, this structural design enhances the adaptability and flexibility of the graphite boat 100. By adjusting the size and position of the insulating component 1061 and the insulating rod 1062, the structure and size of the boat can be easily changed to accommodate silicon wafers of different sizes and specifications, as well as different coating process requirements. This allows the graphite boat 100 to meet diverse production needs, improving its versatility and market competitiveness.

[0065] Please see Figure 2 and Figure 3 , Figure 2 This is a schematic diagram of the graphite boat 100 provided in this application embodiment placed inside the coating equipment 200; Figure 3This is a schematic diagram of the structure of the graphite boat 100 and the support block 203 provided in the embodiments of this application. A second aspect of this application provides a coating apparatus 200, comprising: a furnace body 201 having a coating cavity for accommodating a graphite boat 100 as described in the first aspect; two support rods 202 respectively disposed at the bottom of the coating cavity, the support rods 202 extending along the length of the furnace body 201 and spaced apart along the width of the furnace body 201; a support block 203 disposed on the support rods 202, the support block 203 supporting a support foot 101 of the graphite boat 100, the support block 203 having a support surface adapted to the shape of the conductive foot 1012, the support foot 101 being supported on the support surface; and a power supply 204 electrically connected to at least a portion of the support block 203, the power supply 204 supplying power to the support block 203 to energize the graphite boat 100 supported by the support block 203.

[0066] Specifically, the furnace body 201 of the coating equipment 200 forms a coating chamber to accommodate the graphite boat 100, providing a sealed environment for the coating process and ensuring that it is carried out under controllable temperature, pressure, and gas atmosphere. Two support rods 202 are respectively set at the bottom of the coating chamber, extending along the length of the furnace body 201 and spaced apart along the width, providing a stable support base for the graphite boat 100 and ensuring that the graphite boat 100 remains horizontal and stable during the coating process.

[0067] Support blocks 203 are mounted on support rods 202 to support the support feet 101 of the graphite boat 100. The support surface of the support feet 101 is adapted to the shape of the conductive feet 1012, which can accurately support the feet of the graphite boat 100 and ensure stability and conductivity. The positive and negative terminals of the power supply 204 are connected to the two conductive support blocks 2031 respectively, supplying power to the support blocks 203 to energize the graphite boat 100 and form a uniform electric field to ensure uniform deposition of the coating material.

[0068] The furnace body 201 provides the necessary sealed environment for the coating process, ensuring that the coating process takes place under stable conditions. The arrangement of the support rods 202 provides a stable support base for the graphite boat 100, ensuring that the graphite boat 100 remains horizontal and stable during the coating process. This arrangement not only improves the stability of the equipment but also enhances the reliability of the coating process.

[0069] Furthermore, the support block 203 has a support surface adapted to the shape of the conductive boat foot 1012, making the contact between the support surface and the boat foot more stable. Compared with the circular support rod 202 in the prior art, the contact between the support surface and the boat foot reduces the swaying of the graphite boat 100 on the support rod 202, thereby improving the stability of the coating process. The stable support surface ensures that the graphite boat 100 will not affect the coating quality due to swaying during the coating process, thereby improving the product yield and consistency.

[0070] Furthermore, by adjusting the position and size of the support rod 202 and the support block 203, graphite boats 100 of different sizes and specifications can be accommodated, thereby meeting diverse production needs. This not only improves the versatility of the coating equipment 200 but also reduces the cost of silicon wafers.

[0071] Thus, the coating equipment 200 provided in this application significantly improves the stability and reliability of the coating process by employing an optimized graphite boat 100 support structure. The tight fit between the support surface and the boat feet effectively reduces swaying and ensures the stability of the coating quality.

[0072] Please see Figure 3 In some embodiments, the support foot 101 of the graphite boat 100 has a contact surface, and the support surface of the support block 203 is a plane, which is configured to fit against the contact surface.

[0073] The contact surface of the support foot 101 fits tightly against the support surface of the support block 203, improving the stability of the graphite boat 100. Compared with the circular support rod 202 in the prior art, the tight fit between the planar support surface and the contact surface effectively reduces the swaying of the graphite boat 100, ensuring a smooth coating process. Stable support not only improves the consistency of coating quality but also reduces coating defects caused by instability of the coating equipment 200, thereby increasing the yield of silicon wafers.

[0074] Please see Figure 4 , Figure 4 This is a schematic diagram of the connection structure of the support rod 202, support block 203, and power supply 204 provided in an embodiment of this application. In some embodiments, the support block 203 includes two conductive support blocks 2031 and two insulating support blocks 2032. The conductive support blocks 2031 are used to support the conductive boat foot 1012. The positive terminal of the power supply 204 is connected to one of the two conductive support blocks 2031, and the negative terminal of the power supply 204 is connected to the other of the two conductive support blocks 2031. The insulating support blocks 2032 are used to support the insulating boat foot 1011. When the graphite boat 100 is located in the coating cavity, the conductive support blocks 2031 support the conductive boat foot 1012, and the insulating support blocks 2032 support the insulating boat foot 1011. Both the conductive support blocks 2031 and the insulating support blocks 2032 have supporting surfaces to support the supporting boat foot 101.

[0075] Specifically, the support block 203 is divided into two conductive support blocks 2031 and two insulating support blocks 2032. The conductive support blocks 2031 support the conductive boat feet 1012, while the insulating support blocks 2032 support the insulating boat feet 1011. When the graphite boat 100 is located in the coating cavity, the conductive support blocks 2031 support the conductive boat feet 1012, and the insulating support blocks 2032 support the insulating boat feet 1011. Both the conductive support blocks 2031 and the insulating support blocks 2032 have supporting surfaces to support the boat feet 101.

[0076] By dividing the support block 203 into two types, conductive support block 2031 and insulating support block 2032, it is possible to more accurately match the different functional feet on the graphite boat 100. The conductive support block 2031 provides a stable electrical connection for the conductive foot 1012, ensuring a uniform distribution of the electric field, which is crucial for the uniform deposition of the coating material during the coating process.

[0077] Meanwhile, the insulating support block 2032 provides reliable mechanical support for the insulating boat foot 1011, effectively preventing accidental conduction between different potentials, avoiding possible short circuit risks, and improving the safety and reliability of the coating equipment 200.

[0078] Please see Figure 3 In some embodiments, the support rod 202 is a quadrangular prism, the side of the support rod 202 that contacts the support block 203 is a plane, and the side of the support block 203 that contacts the support rod 202 is a plane, and the corresponding planes of the support rod 202 and the support block 203 fit together.

[0079] It is understandable that the support rod 202 is designed as a quadrangular prism, and the contact surface of the support block 203 that cooperates with the support rod 202 is also a plane. The two fit together. As the load-bearing foundation of the support block 203, the quadrangular prism structure of the support rod 202 provides a larger plane contact area compared with the circular support rod 202, which significantly enhances the stability of the support.

[0080] In this way, the planar fit design of the support block 203 and the support rod 202 not only improves the installation accuracy of the support block 203, but also enhances the overall stability of the support structure, ensuring that the support block 203 will not shake or shift on the support rod 202, thus providing a stable support platform for the graphite boat 100.

[0081] In some embodiments, the support rod 202 is an insulated support rod 202. In the coating apparatus 200, the support rod 202 serves as the load-bearing foundation for the support block 203. The insulated support rod 202 effectively prevents current leakage or conduction on the support rod 202, ensuring that the electrical energy from the power supply 204 can be accurately delivered to the conductive feet 1012 of the graphite boat 100. This not only improves the accuracy and stability of the electric field distribution but also enhances the safety of the coating apparatus 200, preventing the risk of accidental short circuits or electric shocks that may result from the conductivity of the support rod 202.

[0082] Please see Figure 3 and Figure 4 In some embodiments, the coating equipment 200 further includes a plurality of conductive leads 205. The conductive support block 2031 is connected to the positive terminal of the power supply 204 through the conductive leads 205, and the conductive support block 2031 is connected to the negative terminal of the power supply 204 through the conductive leads 205. The support rod 202 is provided with a cavity and a connecting hole. The cavity extends through the support rod 202 along the extension direction of the support rod 202, and the connecting hole is provided corresponding to the conductive support block 2031 and communicates with the cavity, so that the conductive leads 205 are connected to the conductive support block 2031 through the cavity and the connecting hole.

[0083] Specifically, the coating equipment 200 connects the conductive support block 2031 to the positive and negative terminals of the power supply 204 via multiple conductive leads 205. The support rod 202 has a cavity and a connecting hole inside. The cavity extends through the support rod 202 along its extension direction. The connecting hole is provided corresponding to the conductive support block 2031 and communicates with the cavity, so that the conductive leads 205 can be connected to the conductive support block 2031 through the cavity and the connecting hole.

[0084] In this way, the conductive lead 205 is concealed inside the support rod 202, which effectively protects the conductive lead 205 from mechanical damage, chemical corrosion or interference in the external environment, thereby improving the service life and reliability of the conductive lead 205.

[0085] Meanwhile, hiding the conductive lead 205 inside the support rod 202 helps reduce the space occupied by the external space, making the structure of the coating equipment 200 more compact and optimizing the overall layout of the equipment.

[0086] In addition, the fact that the conductive lead 205 is hidden inside the support rod 202 helps to prevent the current in the conductive lead 205 from affecting the coating effect of the silicon wafer, reduces the safety hazards that may be caused by messy wires, and improves the safety of the coating equipment 200 operation.

[0087] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. A graphite boat, characterized in that, The graphite boat includes: A boat body for placing silicon wafers, the bottom of which is rectangular; The support boat feet include two insulating boat feet and two conductive boat feet. The two insulating boat feet are respectively disposed at a pair of diagonally arranged apex corners at the bottom of the boat body. The two conductive boat feet are respectively disposed at a pair of apex corners at the bottom of the boat body where the insulating boat feet are not disposed. One of the two conductive boat feet is used to connect to the positive terminal of the power supply, and the other of the two conductive boat feet is used to connect to the negative terminal of the power supply. The power source is used to supply power to the graphite boat so that the graphite boat forms an electric field.

2. The graphite boat according to claim 1, characterized in that, The hull includes: The graphite boat has multiple first boat pages and multiple second boat pages. The multiple first boat pages are arranged at intervals along the width direction of the graphite boat. A second boat page is disposed between every two first boat pages. The multiple first boat pages are all connected to one of the two conductive boat feet, and the multiple second boat pages are all connected to the other of the two conductive boat feet.

3. The graphite boat according to claim 2, characterized in that, The first boat leaf is provided with a first connecting hole, the second boat leaf is provided with a second connecting hole, and the boat body further includes: Multiple first connecting blocks are provided, each first connecting block is used to connect two adjacent first boat pages, and each first connecting block is provided with a first through hole, the first through hole being provided in correspondence with the first connecting hole; A first connecting rod extends along the width of the graphite boat and passes through a plurality of first connecting holes and a plurality of first through holes in sequence, so that a plurality of first boat sheets are connected to the conductive boat feet through the first connecting rod. Multiple second connecting blocks are provided, each second connecting block is used to connect two adjacent second boats, and each second connecting block is provided with a second through hole, and the multiple second through holes are correspondingly provided with the multiple second connecting holes; The second connecting rod extends along the width direction of the graphite boat and passes through a plurality of second connecting holes and a plurality of second through holes, so that a plurality of second boat sheets are connected to the conductive boat feet through the second connecting rod.

4. The graphite boat according to claim 2, characterized in that, The first boat leaf is provided with a first insulating hole, and the second boat leaf is provided with a second insulating hole. An insulating element is provided between each first boat leaf and each second boat leaf. Each insulating element abuts against the adjacent first boat leaf and second boat leaf. The boat body also includes an insulating rod that extends along the width direction of the graphite boat and passes through multiple first insulating holes, multiple second insulating holes, and multiple insulating elements.

5. A coating apparatus, characterized in that, The coating equipment includes: A furnace body having a coating cavity for accommodating a graphite boat as described in any one of claims 1 to 4; Two support rods are respectively disposed at the bottom of the coating cavity. The support rods extend along the length direction of the furnace body, and the two support rods are arranged at intervals along the width direction of the furnace body. A support block is disposed on the support rod and is used to support the support foot of the graphite boat. The support block has a support surface adapted to the shape of the support foot, and the support foot is supported on the support surface. A power source, electrically connected to at least a portion of the support block, is provided to supply power to the support block to energize the graphite boat supported by the support block.

6. The coating equipment according to claim 5, characterized in that, The supporting feet of the graphite boat have contact surfaces, and the supporting surface of the supporting block is a plane, which is configured to fit against the contact surfaces.

7. The coating equipment according to claim 6, characterized in that, The support block includes two conductive support blocks and two insulating support blocks. The conductive support blocks support the conductive boat feet. The positive terminal of the power supply is connected to one of the two conductive support blocks, and the negative terminal of the power supply is connected to the other of the two conductive support blocks. The insulating support blocks support the insulating boat feet. When the graphite boat is located in the coating cavity, the conductive support blocks support the conductive boat feet, and the insulating support blocks support the insulating boat feet. Both the conductive support block and the insulating support block have the support surface to support the support boat feet.

8. The coating equipment according to claim 6, characterized in that, The support rod is a quadrangular prism, and the side of the support rod that contacts the support block is a plane, as is the side of the support block that contacts the support rod. The corresponding planes of the support rod and the support block are in contact with each other.

9. The coating equipment according to claim 7, characterized in that, The support rod is an insulated support rod.

10. The coating equipment according to claim 9, characterized in that, The coating equipment also includes multiple conductive leads. The conductive support block is connected to the positive terminal of the power supply through the conductive leads, and the conductive support block is connected to the negative terminal of the power supply through the conductive leads. The support rod is provided with a cavity and a connecting hole. The cavity extends through the support rod along its extension direction. The connecting hole is provided corresponding to the conductive support block and communicates with the cavity, so that the conductive lead can be connected to the conductive support block through the cavity and the connecting hole.

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