boat and graphite boat

Abstract

Embodiments of the present application provide a boat piece and a graphite boat, and relate to the technical field of solar cells. The boat piece is used for the graphite boat. The boat piece comprises a boat piece body. The boat piece body comprises a boat page and two boat ears. The two boat ears are located on both sides of the boat page along the length direction of the boat page and are connected with the boat page respectively. The two boat ears are arranged at intervals along the width direction of the boat page. At least one boat ear has a thickness greater than that of the boat page. In addition, the boat piece further comprises a conductive wire arranged in the boat piece body. In the embodiments of the present application, the thickness of at least one boat ear is greater than that of the boat page, which can increase the mechanical strength of the boat ear, reduce the risk of cracking of the boat ear, and improve the service life of the boat piece and the graphite boat. The conductive wire is arranged in the boat piece body, so that the conductive wire can conduct electricity after the boat piece body is broken, reducing the influence of the broken boat piece body on the electrical conductivity of the graphite boat, and prolonging the service life of the boat piece and the graphite boat.

Description

Technical Field

[0001] Embodiments of this application relate to the technical field of solar cells, and more particularly to a solar cell wafer and a graphite boat. Background Technology

[0002] A graphite boat can include multiple boat sheets, which are spaced apart. A silicon wafer can be placed between two adjacent boat sheets, and the graphite boat serves to support the silicon wafer.

[0003] During use, the lugs of the boat sheet often break, affecting the service life of the boat sheet and the graphite boat. Utility Model Content

[0004] The embodiments of this application disclose a boat sheet and a graphite boat, which can reduce the risk of boat sheet breakage and improve the service life of the boat sheet and the graphite boat.

[0005] On one hand, embodiments of this application provide a boat sheet. The boat sheet is used for a graphite boat. The boat sheet includes a boat sheet body. The boat sheet body includes a boat leaf and two boat ears. The two boat ears are located on both sides of the boat leaf along its length direction and are respectively connected to the boat leaf. The two boat ears are spaced apart along the width direction of the boat leaf. At least one boat ear has a thickness greater than the thickness of the boat leaf.

[0006] In some possible implementations, the thickness of at least part of the scaphoid ear gradually increases along the direction from the scaphoid leaf to the scaphoid ear.

[0007] In some possible implementations, the boat ear includes a first sub-section and a second sub-section connected together, with the end of the first sub-section away from the second sub-section connected to the boat leaf. Along the direction from the boat leaf towards the boat ear, the thickness of at least a portion of the first sub-section gradually increases.

[0008] In some possible implementations, the boat ear also includes a third sub-section, with the first sub-section surrounding a portion of the third sub-section, and both the first and third sub-sections connected to the boat leaf. The thickness of the third sub-section is less than the thickness of the first sub-section.

[0009] In some possible implementations, the second sub-part is cylindrical in shape.

[0010] In some possible implementations, the boat also includes conductive wires disposed within the boat body.

[0011] In some possible implementations, a portion of the conductive wire located within the scaphoid ear is arranged in a columnar shape.

[0012] In some possible implementations, there are multiple conductive wires connected together.

[0013] In some possible implementations, the material of the conductive wire includes molybdenum.

[0014] On the other hand, embodiments of this application provide a graphite boat. The graphite boat includes a connecting rod and a plurality of boat sheets as described above. Each boat sheet has two lugs, a first lug and a second boat sheet, and each boat sheet includes a first edge and a second edge disposed opposite to each other along the width direction of the boat sheet. The plurality of boat sheets includes a plurality of first boat sheets and a plurality of second boat sheets. Along the width direction of the boat sheet, the first lug of the first boat sheet is near the first edge, and the second lug of the first boat sheet is near the second edge. Along the width direction of the boat sheet, the first lug of the second boat sheet is near the second edge, and the second lug of the second boat sheet is near the first edge. The plurality of first boat sheets and the plurality of second boat sheets are alternately spaced along the thickness direction of the boat sheet. The connecting rod connects the plurality of boat sheets.

[0015] In summary, the embodiments of this application have at least the following beneficial effects:

[0016] In the embodiments of this application, at least one boat ear is provided with a thickness greater than that of the boat sheet. This increases the area of ​​the boat ear on the cross section (the plane containing the width and thickness directions of the boat sheet), thereby dispersing stress and reducing the risk of stress concentration at one point leading to boat ear breakage. This extends the service life of the boat sheet and the graphite boat.

[0017] In addition, reducing the risk of scaphoid cracking can also improve the coating quality of silicon wafers by graphite boats, thereby increasing production efficiency and yield. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is a schematic diagram of the structure of the boat piece provided in some embodiments of this application;

[0020] Figure 2 This is a schematic diagram of the structure of the boat piece provided in other embodiments of this application;

[0021] Figure 3 A front view of the boat page provided for some embodiments of this application;

[0022] Figure 4 Top view of the boat page provided for some embodiments of this application;

[0023] Figure 5 This is a schematic diagram showing the positional relationship between the hull and the silicon wafer provided in some embodiments of this application;

[0024] Figure 6Front view of the scaphoid ear provided for some embodiments of this application;

[0025] Figure 7 Top view of the scaphoid ear provided for some embodiments of this application;

[0026] Figure 8 A left view of the scaphoid ear provided for some embodiments of this application;

[0027] Figure 9 Right view of the scaphoid ear provided for some embodiments of this application.

[0028] Explanation of reference numerals in the attached figures:

[0029] 100-Ship, 1001-First Ship, 1002-Second Ship, 110-Ship Body, 111-Ship, 112-Ship Ear, 112a-First Ship Ear, 112b-Second Ship Ear, 1121-First Sub-part, 1122-Second Sub-part, 1123-Third Sub-part, 120-Conductive Wire, 121-First Conductive Wire, 122-Second Conductive Wire, 301-Silicon Wafer, M1-Connecting Through Hole, M2-Surface Mount Through Hole, X-Length Direction of Ship 111, X1-First Sub-Direction, Y-Width Direction of Ship 111, Z-Thickness Direction of Ship 111, L1-First Edge, L2-Second Edge. Detailed Implementation

[0030] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0031] In this application, the terms "upper," "left," "right," "front," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are primarily for the purpose of better describing this application and its embodiments, and are not intended to limit the indicated device, element, or component to having a specific orientation, or to be constructed and operated in a specific orientation.

[0032] Furthermore, in addition to indicating location or positional relationship, some of the aforementioned terms may also have other meanings. For example, the term "above" may also be used in some cases to indicate a certain dependency or connection relationship. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.

[0033] Furthermore, the terms "installation," "setup," "equipped with," and "connection" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral structure; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium, or an internal connection between two devices, components, or parts. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.

[0034] Furthermore, the terms "first," "second," etc., are primarily used to distinguish different devices, elements, or components (which may be the same or different in specific type and construction), and are not intended to indicate or imply the relative importance or quantity of the indicated devices, elements, or components. Unless otherwise stated, "a plurality of" means two or more.

[0035] In the fabrication process of solar cells, such as the fabrication process of N-type tunnel oxide passivating contacts (TOPCon) solar cells, silicon wafers typically need to undergo coating and annealing crystallization treatment.

[0036] For example, during the coating process, low-pressure chemical vapor deposition (LPCVD) can be used to deposit doped amorphous silicon on the surface of a silicon wafer. Alternatively, other processes can be used during the coating process, or other films can be deposited on the surface of the silicon wafer. The embodiments of this application do not further limit this.

[0037] In the process of coating and annealing silicon wafers, graphite boats serve as an important tool for supporting the silicon wafers. For example, a graphite boat can carry the silicon wafer into a furnace tube, and the electrode rods inside the furnace tube can supply power to the graphite boat, thereby creating an electric field to achieve the coating and annealing treatment of the silicon wafer.

[0038] Figure 1 The diagram shows the structure of the boat piece provided in some embodiments of this application. Figure 2 The diagram shows the structure of the boat piece provided in some other embodiments of this application.

[0039] In some examples, the graphite boat comprises multiple boat pieces 100, such as Figure 1 and Figure 2 As shown, the boat piece 100 includes a boat piece body 110, which includes a boat leaf 111 and two boat ears 112.

[0040] Two boat ears 112 are located on both sides of the boat leaf 111 along the length direction X and are connected to the boat leaf 111 respectively. The two boat ears 112 are spaced apart along the width direction Y of the boat leaf 111.

[0041] The boat leaf 111 can be a sheet-like structure, and its outline can be rectangular or approximately rectangular. Two boat ears 112 are located on either side of the boat leaf 111 along its length direction X, and are spaced apart along its width direction Y. That is, as... Figure 1 and Figure 2 As shown, the two lugs 112 can be spaced apart along the diagonal direction of the leaf 111. For example, the lugs 112 and the leaf 111 can be an integrally formed structure to improve the reliability of their connection.

[0042] In some examples, such as Figure 1 and Figure 2 As shown, the two lugs 112 of the boat piece 100 include a first lug 112a and a second lug 112b, and the boat leaf 111 includes a first edge L1 and a second edge L2 disposed opposite to each other along the width direction Y of the boat leaf 111. Understandably, both the first edge L1 and the second edge L2 extend along the length direction X of the boat leaf 111.

[0043] The graphite boat may include multiple first boat pieces 1001 and multiple second boat pieces 1002. For example... Figure 1 As shown, along the width direction Y of the first boat piece 1001, the first boat ear 112a of the first boat piece 1001 is close to the first edge L1, and the second boat ear 112b of the first boat piece 1001 is close to the second edge L2.

[0044] like Figure 2 As shown, along the width direction Y of the boat sheet 111, the first boat ear 112a of the second boat sheet 1002 is close to the second edge L2, and the second boat ear 112b of the second boat sheet 1002 is close to the first edge L1. For example, the first boat sheet 1001 can be rotated 180 degrees along the length direction X of the boat sheet 111 to form the second boat sheet 1002.

[0045] In some examples, a plurality of first boat sheets 1001 and a plurality of second boat sheets 1002 are alternately spaced along the thickness direction Z of the boat sheet 111.

[0046] Understandably, the thickness direction Z of the boat 111 is perpendicular or approximately perpendicular to the plane containing the length direction X and the width direction Y of the boat 111. In other words, the angle between the thickness direction Z of the boat 111 and the plane containing the length direction X and the width direction Y of the boat 111 can be 90°, 88°, or 89°, etc.

[0047] Multiple first boat pieces 1001 and multiple second boat pieces 1002 are alternately spaced along the thickness direction Z of the boat piece 111, such that the second boat ears 112b of the multiple first boat pieces 1001 can be close to the second edge L2, and the first boat ears 112a of the multiple second boat pieces 1002 can be close to the second edge L2.

[0048] After the silicon wafers are carried into the furnace tube by the graphite boat, the positive electrode rod inside the furnace tube can be connected to the positive terminal of the radio frequency power supply and multiple first boat wafers 1001, and the negative electrode rod inside the furnace tube can be connected to the negative terminal of the radio frequency power supply and multiple second boat wafers 1002. In this way, one of the first boat wafers 1001 and the second boat wafers 1002 can be connected to the positive terminal of the radio frequency power supply, and the other can be connected to the negative terminal of the radio frequency power supply, thereby forming an electric field between the first boat wafers 1001 and the second boat wafers 1002 to ionize the reactive gas, thereby realizing the coating and annealing processes of the silicon wafers.

[0049] In some examples, the graphite boat also includes connecting rods that connect multiple boat segments 100.

[0050] For example, the connecting rod can extend along the thickness direction Z of the boat sheet 111, allowing the connecting rod to connect multiple boat sheets 100. By connecting multiple boat sheets 100 with the connecting rod, the multiple boat sheets 100 can be relatively fixed together, reducing the risk of wobbling or shifting between the multiple boat sheets 100 and improving the reliability of the graphite boat.

[0051] For example, the connecting rod may include an insulating material to provide electrical isolation and reduce the risk of a short circuit between the first piece 1001 and the second piece 1002. For instance, the connecting rod may be made of ceramic, or it may include other insulating materials such as rubber.

[0052] The number of connecting rods can be multiple, with multiple connecting rods spaced apart and each connecting to multiple boat pieces 100, to improve the fixing effect of the connecting rods on the multiple boat pieces 100. For example, the number of connecting rods can be six, eight, or ten, etc., and the embodiments of this application do not further limit the number of connecting rods.

[0053] For example, the graphite boat may also include a nut, which is set on the connecting rod to lock the connecting rod in order to reduce the risk of the connecting rod wobbling or shifting relative to the multiple boat pieces 100.

[0054] Figure 3 A front view of a page provided for some embodiments of this application. Figure 4 A top view of the page provided for some embodiments of this application. Figure 5 This is a schematic diagram illustrating the positional relationship between the hull and the silicon wafer provided in some embodiments of this application. It can be understood that... Figure 4The positional relationship between the connecting through-hole M1 and the patch through-hole M2 is shown in the top view of page 111, and Figure 4 Conductive wire 120 is not shown.

[0055] In some examples, such as Figure 3 and Figure 4 As shown, a connecting through hole M1 may be provided on the boat leaf 111, and the connecting through hole M1 penetrates the boat leaf 111 along the thickness direction Z. The connecting through hole M1 can be circular or approximately circular.

[0056] Understandably, the shape and size of the connecting through hole M1 are adapted to the shape and size of the connecting rod, so that the connecting rod can pass through the connecting through hole M1 on multiple boat sheets 111 to connect multiple boat pieces 100.

[0057] Understandably, when there are multiple connecting rods, multiple connecting through holes M1 can be opened on the boat 111, and multiple connecting rods pass through the multiple connecting through holes M1 opened on the boat 111 in a corresponding manner.

[0058] Continue to refer to Figure 3 and Figure 4 In some examples, a patch through-hole M2 may also be provided on the boat 111, and the patch through-hole M2 penetrates the boat 111 along the thickness direction of the boat 111.

[0059] For example, there can be multiple surface mount vias M2, which can be spaced apart along the length X of the slide 111. There can also be multiple connecting vias M1, which can be spaced apart along the length of the slide 111 and located between the surface mount vias M2 and the first edge L1, and can also be located between the surface mount vias M2 and the second edge L2. This allows the surface mount vias M2 and connecting vias M1 to avoid each other.

[0060] For example, the patch via M2 can be square or approximately square. Alternatively, the patch via M2 can also be of other shapes; the embodiments of this application do not further limit the shape of the patch via M2.

[0061] The graphite boat may also include bolts (not shown in the figure), and there may be multiple bolts. These bolts are disposed on the surface of the boat 111 in the thickness direction Z and are connected to the boat 111 respectively. The multiple bolts surround the patch through-hole M2. Understandably, the bolts serve to fix the silicon wafer, allowing the silicon wafer to adhere to the surface of the boat 111 in the thickness direction Z.

[0062] For example, the boat leaf 111 includes two surfaces disposed opposite to each other along the thickness direction Z of the boat leaf 111. Multiple bolts can be disposed on each of these two surfaces, such as... Figure 5As shown, this allows two silicon wafers 301 to be bonded to these two surfaces respectively, so as to achieve processes such as coating and annealing of the silicon wafers.

[0063] During the use of the graphite boat, the robotic arm typically grips the boat lugs 112. When the robotic arm grips the lugs 112, the graphite boat experiences an upward pulling force. Under the combined influence of its own weight and the weight of the silicon wafer, the graphite boat experiences a downward pulling force. Normally, when the graphite boat experiences both upward and downward pulling forces, the stress is concentrated on the lugs 112.

[0064] In some possible cases, the lug 112 is a sheet-like structure, and the thickness of the lug 112 is the same as the thickness of the leaf 111. This results in a smaller area of ​​the lug 112 in the cross section (the plane containing the width direction Y and the thickness direction Z of the leaf 111), which reduces the mechanical strength of the lug 112 and increases the risk of breakage.

[0065] Understandably, graphite boats play a crucial role in the coating quality, production efficiency, and production yield of silicon wafers.

[0066] After the scaphoid lug 112 breaks, it causes a localized loss of power to the graphite boat, resulting in electrical isolation. This affects the coating effect on the silicon wafers, leading to a decrease in production yield and a high likelihood of producing batches of uncoated silicon wafers requiring rework, thus impacting production efficiency. Furthermore, the localized loss of power to the graphite boat can also cause continuous arcing during the coating process, resulting in coating failure.

[0067] Based on this, in the embodiments of this application, the thickness of at least one boat ear 112 is greater than or equal to the thickness of the boat leaf 111.

[0068] For example, the thickness of one of the first lug 112a and the second lug 112b may be greater than the thickness of the leaf 111, or the thickness of both the first lug 112a and the second lug 112b may be greater than the thickness of the leaf 111.

[0069] The thickness of the lug 112 can be the same or different at different locations. Taking the different thicknesses of the lug 112 at different locations as an example, the thickness of the lug 112 at different locations can be greater than the thickness of the leaf 111, or the thickness of the lug 112 at some locations can be greater than the thickness of the leaf 111.

[0070] In the embodiments of this application, at least one lug 112 is provided with a thickness greater than that of the boat sheet 111. This increases the area of ​​the lug 112 on the cross section (the plane containing the width direction Y and the thickness direction Z of the boat sheet 111), thereby dispersing stress and reducing the risk of stress concentration at one point causing the lug 112 to break. This extends the service life of the boat sheet 100 and the graphite boat.

[0071] In addition, reducing the risk of cracking of the 112 lugs can also improve the coating quality of silicon wafers by the graphite boat, thereby increasing production efficiency and yield.

[0072] In some examples, the direction along the boat leaf 111 points towards the boat ear 112 (e.g.) Figure 1 and Figure 2 As shown in the first sub-direction X1), the thickness of at least part of the scaphoid 112 gradually increases.

[0073] For example, in the first sub-direction X1, the thickness of the partial boat lug 112 can gradually increase, or the thickness of the entire boat lug 112 can gradually increase.

[0074] Along the first sub-direction X1, the thickness of at least part of the boat lug 112 gradually increases, so that the thickness of the boat lug 112 can be gradually changed, thereby improving the structural regularity of the boat lug 112 and thus improving the structural regularity of the graphite boat.

[0075] Furthermore, by setting the thickness of at least part of the boat lug 112 to gradually increase along the first sub-direction X1, the surface area of ​​the boat lug 112 can be increased, thereby dispersing stress and reducing the risk of stress concentration causing the boat lug 112 to break.

[0076] Furthermore, compared to a larger and constant thickness of the lug 112 along the first sub-direction X1, setting the thickness of at least a portion of the lug 112 along the first sub-direction X1 to gradually increase can reduce the weight of the lug 112, thereby reducing the weight of the graphite boat. This reduces the downward pull force on the graphite boat under its own weight after the robotic arm grasps it, thereby reducing the stress on the lug 112, lowering the risk of lug 112 breakage, and extending the service life of the boat sheet 100 and the graphite boat.

[0077] Figure 6 A front view of the scaphoid ear provided for some embodiments of this application. Figure 7 A top view of the scaphoid ear provided for some embodiments of this application.

[0078] Understandably, in the accompanying drawings of this application, the following characters are used... Figure 6 and Figure 7 For example, in order to clearly show the positional relationship between the first sub-part 1121, the second sub-part 1122 and the third sub-part 1123, the connection position of the first sub-part 1121 and the third sub-part 1123, as well as the connection position of the first sub-part 1121 and the second sub-part 1122, are shown by dashed lines.

[0079] In some examples, such as Figure 6 and Figure 7As shown, the boat ear 112 includes a first sub-part 1121 and a second sub-part 1122 connected together. The end of the first sub-part 1121 away from the second sub-part 1122 is connected to the boat leaf 111. Along the direction from the boat leaf 111 towards the boat ear 112 (e.g.) Figure 6 and Figure 7 As shown in the first sub-direction X1), the thickness of at least part of the first sub-part 1121 gradually increases.

[0080] For example, the first sub-part 1121 and the second sub-part 1122 can be integrally molded to improve the reliability of their connection.

[0081] Along the first sub-direction X1, the thickness of at least a portion of the first sub-part 1121 gradually increases, allowing the thickness of at least a portion of the first sub-part 1121 to vary gradually, thereby improving the structural regularity of the boat lug 112 and thus improving the structural regularity of the graphite boat. For example, the end of the first sub-part 1121 furthest from the boat leaf 111 and the thickness of the second sub-part 1122 can be the same or approximately the same to improve the structural regularity of the boat lug 112.

[0082] Furthermore, by setting the thickness of at least part of the first sub-part 1121 to gradually increase along the first sub-direction X1, the surface area of ​​the boat lug 112 can be increased, thereby dispersing stress and reducing the risk of stress concentration causing the boat lug 112 to break.

[0083] Furthermore, compared to a larger and constant thickness of the first sub-part 1121 along the first sub-direction X1, setting the thickness of at least a portion of the first sub-part 1121 along the first sub-direction X1 to gradually increase can reduce the weight of the lug 112, thereby reducing the weight of the graphite boat, reducing the magnitude of the downward pull force on the graphite boat under its own weight after the robot grips the graphite boat, thereby reducing the stress on the lug 112, reducing the risk of breakage of the lug 112, and extending the service life of the boat sheet 100 and the graphite boat.

[0084] For example, along the first sub-direction X1, the thickness of the first sub-part 1121 can gradually change from 4 mm to 10 mm. That is, the minimum thickness of the first sub-part 1121 can be 4 mm and the maximum thickness can be 10 mm. Alternatively, the minimum and maximum thickness of the first sub-part 1121 can also be other values. The embodiments of this application do not further limit the values ​​of the minimum and maximum thickness of the first sub-part 1121.

[0085] For example, along the length direction X of the boat ear 111, the thickness of the second sub-part 1122 can remain unchanged to improve the structural regularity of the boat ear 112.

[0086] In some examples, such as Figure 6 and Figure 7As shown, the boat ear 112 also includes a third sub-part 1123, with the first sub-part 1121 surrounding a portion of the third sub-part 1123, and the first sub-part 1121 and the third sub-part 1123 respectively connected to the boat leaf 111. The thickness of the third sub-part 1123 is less than the thickness of the first sub-part 1121.

[0087] For example, the first sub-part 1121, the second sub-part 1122, and the third sub-part 1123 can be an integrally molded structure to improve the connection reliability of the three.

[0088] like Figure 6 As shown, the third sub-part 1123 is connected between the first sub-part 1121 and the boat page 111. The first sub-part 1121 can be a "C" shape or a near "C" shape structure, so that the first sub-part 1121 can surround a part of the third sub-part 1123, and the first sub-part 1121 and the third sub-part 1123 can be connected to the boat page 111 respectively.

[0089] For example, the first sub-part 1121 and the second sub-part 1122 can form a "Y" shape or a near "Y" shape structure, and the third sub-part 1123 can be located in the middle area of ​​the top of the "Y" shape.

[0090] For example, the thickness of the third sub-part 1123 may be the same as or approximately the same as the thickness of the leaf 111, and the thickness of the third sub-part 1123 may be less than the thickness of the first sub-part 1121. Understandably, the thickness of the first sub-part 1121 gradually increases along the first sub-direction X1, and the thickness of the third sub-part 1123 may be less than the thickness of the first sub-part 1121 at any position.

[0091] Understandably, setting the thickness of the third sub-part 1123 to be less than the thickness of the first sub-part 1121 can reduce the weight of the lug 112, thereby reducing the weight of the graphite boat. This reduces the downward pull on the graphite boat under its own weight after the robotic arm grasps it, thereby reducing the stress on the lug 112, lowering the risk of breakage, and extending the service life of the boat sheet 100 and the graphite boat.

[0092] Figure 8 A left view of the scaphoid ear provided for some embodiments of this application. Figure 9 Right view of the scaphoid ear provided for some embodiments of this application.

[0093] In some examples, the second sub-part 1122 is cylindrical in shape. For instance, the second sub-part 1122 can be cylindrical or approximately cylindrical, such as... Figure 8 and Figure 9 As shown, the second sub-part 1122 can be circular in the left or right view.

[0094] Alternatively, the shape of the second sub-part 1122 can also be prismatic or approximately prismatic, such as a square prism, hexagonal prism, or octagonal prism. The embodiments of this application do not further limit the shape of the second sub-part 1122.

[0095] For example, the graphite boat may include a conductive block located between two adjacent boat lugs 112, and the boat feet are connected to the boat plate 100 via the conductive block.

[0096] Understandably, the shape of the conductive block is adapted to the shape of the lug 112. For example, when the shape of the second sub-part 1122 is cylindrical, the outer surface of the conductive block may include a concave arc surface, and the second sub-part 1122 can be embedded in the concave arc surface, so that the conductive block can be located between two adjacent lugs 112.

[0097] Alternatively, when the shape of the second sub-part 1122 is prism-shaped, such as a quadrangular prism, the shape of the conductive block can be a cube, so that the conductive block can be located between two adjacent boat ears 112.

[0098] Setting the second sub-part 1122 to a columnar shape can improve the mechanical strength of the scaphoid lug 112 and reduce the risk of breakage. It can also improve the structural regularity of the scaphoid lug 112.

[0099] Understandably, during the use of a graphite boat, it will undergo rapid cooling and heating. These processes cause the boat body 110 to become brittle, making both the boat blade 111 and the boat lug 112 prone to breakage. Furthermore, factors such as broken connecting rods or missing nuts can also lead to the breakage of the boat blade 111 and the boat lug 112.

[0100] Typically, after the boat body 110 breaks, the graphite boat needs to be disassembled, the broken boat piece 100 removed and discarded, replaced with an undamaged boat piece 100, and then reassembled. This process is time-consuming, labor-intensive, wastes resources, and increases production costs.

[0101] Refer again as follows Figure 1 and Figure 2 As shown in the embodiments of this application, the boat 100 further includes a conductive wire 120, which is disposed within the boat body 110.

[0102] Understandably, in the accompanying drawings of this application, the following characters are used... Figure 1 and Figure 2 For example, in order to clearly show the structure and setting position of the conductive wire 120, the conductive wire 120 set in the boat body 110 is shown, which does not mean that the conductive wire 120 is set on the surface of the boat body 110.

[0103] For example, the material of the conductive wire 120 may include metals, such as gold, silver, copper, etc., to improve the conductivity of the conductive wire 120. Alternatively, the conductive wire 120 may also include other non-metallic conductive materials.

[0104] For example, the boat body 110 can be formed by injection molding. In some examples, conductive wires 120 can be placed in the injection mold between the injection molded boat bodies 110, and then injection molding material can be added into the injection mold so that the conductive wires 120 are located within the boat bodies 110. In other examples, the conductive wires 120 can be placed in the injection mold after the injection molding material is added and before the injection molding material is fixed, so that the conductive wires 120 are located within the boat bodies 110.

[0105] Understandably, by placing the conductive wire 120 within the boat body 110, in the event of a breakage in the boat leaf 111 or the boat lug 112, the conductive wire 120 can connect the broken parts, achieving a "connected thread after breakage" effect. The broken parts can conduct electricity through the conductive wire 120, thus eliminating the need to disassemble the graphite boat and discard the broken boat sheet 100. This extends the service life of the boat sheet 100 and the graphite boat, reduces resource waste, and lowers production costs. Furthermore, it improves the process integrity during operations such as silicon wafer coating and annealing, reducing the risk of batch silicon wafer coating failure due to breakage of the boat body 110.

[0106] Furthermore, by placing the conductive wire 120 inside the boat body 110, the impact of the conductive wire 120 on the appearance of the boat 100 can be reduced.

[0107] In some examples, the conductive wires 120 disposed within the leaf 111 are arranged in a mesh pattern and are without bends, thereby reducing the risk of the conductive wires 120 within the leaf 111 being stretched and deformed, and facilitating the shaping of the conductive wires 120 within the leaf 111. Examples include... Figure 3 As shown, the conductive wire inside the boat 111 can surround the patch via M2.

[0108] In some examples, the material of the conductive wire 120 includes molybdenum.

[0109] Understandably, molybdenum has advantages such as high melting point, low coefficient of thermal expansion, excellent mechanical properties, and good electrical conductivity. The use of molybdenum as the material for the conductive wire 120 can improve the fracture resistance of the boat body 110, reduce the risk of breakage, increase the mechanical strength and durability of the boat body 110, and extend the service life of both the boat body 110 and the graphite boat.

[0110] Furthermore, after the boat body 110 breaks, the conductive wire 120 can provide good conductivity, reducing the impact of the boat body 110 breakage on the silicon wafer's coating and annealing processes, and improving the reliability of the graphite boat.

[0111] Alternatively, the material of the conductive wire 120 may also include other metals or alloys with advantages such as high melting point, low coefficient of thermal expansion, excellent mechanical properties, and good electrical conductivity.

[0112] In some examples, a portion of the conductive wire 120 located within the scaphoid 112 is arranged in a columnar shape.

[0113] For example, the conductive wires 120 located within the scaphoid 112 can be arranged in a cylindrical shape or in a prismatic shape, such as a quadrangular prism, a hexagonal prism, or an octagonal prism.

[0114] For example, such as Figure 6 As shown, the conductive wires 120 located in the first sub-part 1121 and the second sub-part 1122 can be arranged in a columnar shape. Alternatively, the conductive wires 120 located in the second sub-part 1122 can be arranged in a columnar shape, while the conductive wires 120 located in the first sub-part 1121 can not be arranged in a columnar shape. Or, the conductive wires 120 located in the second sub-part 1122 and a portion of the conductive wires 120 located in the first sub-part 1121 can be arranged in a columnar shape.

[0115] The conductive wire 120 located in the third sub-part 1123 may not be arranged in a columnar shape, so as to reduce the space occupied by the conductive wire 120 along the thickness direction Z of the boat leaf 111, thereby reducing the thickness of the third sub-part 1123 and reducing the weight of the boat ear 112.

[0116] For example, the columnar shape formed by the portion of the conductive wire 120 located within the scaphoid 112 and the shape of the second sub-part 1122 may be the same or approximately the same.

[0117] For example, when the second sub-part 1122 is cylindrical, the portion of the conductive wire 120 located within the boat ear 112 can be arranged in a cylindrical shape. When the second sub-part 1122 is prismatic, the portion of the conductive wire 120 located within the boat ear 112 can be arranged in a prismatic shape.

[0118] By setting a portion of the conductive wire 120 located within the scaphoid lug 112 into a columnar shape, the mechanical strength of the conductive wire 120 located within the scaphoid lug 112 can be improved, thereby enhancing the fracture resistance and mechanical strength of the scaphoid lug 112 and reducing the risk of scaphoid lug 112 fracture.

[0119] In some examples, there are multiple conductive wires 120 connected together.

[0120] For example, the number of conductive wires 120 can be two, three, or four, etc. The embodiments of this application do not further limit the value of the number of conductive wires 120.

[0121] like Figure 1 , Figure 2 and Figure 6 As shown, the plurality of conductive wires 120 may include a first conductive wire 121 and a second conductive wire 122, and there are multiple first conductive wires 121 and multiple second conductive wires 122. It can be understood that the number of first conductive wires 121 and multiple second conductive wires 122 may be equal or unequal.

[0122] Multiple first conductive wires 121 are arranged in a cylindrical shape within the first sub-parts 1121 and 1122 of the lug 112. These wires then converge at the end of the lug 112 furthest from the leaf 111 and extend together to the third sub-part 1123. The multiple first conductive wires 121 within the third sub-part 1123 can each extend to the leaf 111. The multiple first conductive wires 121 extending to the leaf 111 can extend along the length direction X of the leaf 111, and the multiple first conductive wires 121 can be spaced apart within the leaf 111.

[0123] The second conductive wire 122 is disposed inside the boat leaf 111, extends along the width direction Y of the boat leaf 111, and connects to a plurality of first conductive wires 121 that are spaced apart. In this way, the conductive wires 120 can be arranged in a mesh pattern inside the boat leaf 111.

[0124] Understandably, having multiple conductive wires 120 serves two purposes: firstly, it improves the mechanical strength and fracture resistance of the wafer body 110, reducing the risk of fracture; secondly, it ensures the conductivity of the conductive wires 120 in the event of a fracture of the wafer body 110, minimizing the impact of the fracture on silicon wafer deposition and annealing processes, and improving the reliability of the graphite boat.

[0125] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. A type of boat-shaped piece, characterized in that, For use in graphite boats; the boat sheet includes a boat sheet body; the boat sheet body includes: Boat page; Two boat ears are located on both sides of the boat sheet along the length direction of the boat sheet and are respectively connected to the boat sheet; the two boat ears are spaced apart along the width direction of the boat sheet; In this embodiment, the thickness of at least one of the boat ear is greater than the thickness of the boat leaf.

2. The boat piece according to claim 1, characterized in that, Along the direction from the boat leaf to the boat ear, the thickness of at least a portion of the boat ear gradually increases.

3. The boat piece according to claim 2, characterized in that, The boat ear includes a first sub-part and a second sub-part connected together, with the end of the first sub-part away from the second sub-part connected to the boat leaf; Along the direction from the boat leaf to the boat ear, the thickness of at least a portion of the first sub-part gradually increases.

4. The boat piece according to claim 3, characterized in that, The boat ear further includes a third sub-part, the first sub-part surrounds a portion of the third sub-part, and the first sub-part and the third sub-part are respectively connected to the boat leaf; The thickness of the third sub-part is less than the thickness of the first sub-part.

5. The boat piece according to claim 3, characterized in that, The second sub-part is columnar in shape.

6. The boat piece according to claim 1, characterized in that, It also includes conductive wires disposed within the boat body.

7. The boat piece according to claim 6, characterized in that, The conductive wires located inside the scaphoid ear are arranged in a columnar shape.

8. The boat piece according to claim 6, characterized in that, The number of conductive wires is multiple, and the multiple conductive wires are connected together.

9. The boat piece according to any one of claims 6 to 8, characterized in that, The conductive wire is made of molybdenum.

10. A graphite boat, characterized in that, include: A plurality of boat pieces as described in any one of claims 1 to 9; each boat piece has two boat ears comprising a first boat ear and a second boat piece, and each boat sheet comprises a first edge and a second edge disposed opposite to each other along the width direction of the boat sheet; the plurality of boat pieces comprises a plurality of first boat pieces and a plurality of second boat pieces; along the width direction of the boat sheet, the first boat ear of the first boat piece is close to the first edge, and the second boat ear of the first boat piece is close to the second edge; along the width direction of the boat sheet, the first boat ear of the second boat piece is close to the second edge, and the second boat ear of the second boat piece is close to the first edge; the plurality of first boat pieces and the plurality of second boat pieces are alternately spaced along the thickness direction of the boat sheet; A connecting rod connects multiple of the boat segments.

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