A kind of diffusion automated quartz boat insertion machine top tooth buffer gasket, top tooth structure and insertion machine

Abstract

The utility model discloses a kind of top tooth buffer gasket of diffusion automatic quartz boat insert chip machine, top tooth structure and insert chip machine, belong to solar silicon wafer production and manufacturing technical field, including the main body of plane I-shaped structure;Two groups of tail portions for increasing the contact stress area with silicon wafer are extended symmetrically on the left and right sides of main body, the width of tail portion is less than the width of boat top tooth installed, and tail portion is extended 2mm to 2.5mm on both sides of top tooth in installation state. By optimizing top tooth structure and adopting novel I-shaped epitaxial buffer gasket, the comprehensive technical effects of reducing silicon wafer damage, easily cleaning debris, enhancing component durability and improving production efficiency are realized.

Description

Technical Field

[0001] This utility model relates to the field of solar silicon wafer manufacturing technology, specifically to a top tooth buffer pad, top tooth structure, and wafer insertion machine for an automated diffusion quartz boat wafer insertion machine. Background Technology

[0002] With the increasing global demand for renewable energy, the solar photovoltaic industry has developed rapidly, and silicon wafer manufacturing technology has been continuously optimized. In the production of solar silicon wafers, the diffusion process is a crucial step in forming the PN junction, and its quality directly affects the cell's conversion efficiency. Diffusion equipment typically uses automated devices to load and unload wafers from quartz boats. The wafer inserter is a core component, responsible for accurately and stably inserting silicon wafers into the quartz boat before they enter the high-temperature diffusion furnace. The boat top teeth in the inserter, as the component that directly contacts the monocrystalline silicon wafer, are critically important in their structural design and material selection. Currently, most widely used top teeth are made of ceramic, which features high hardness, high temperature resistance, and good chemical stability. The top teeth are usually designed with an open structure and a buffer pad at their bottom to avoid damage to the silicon wafer caused by rigid contact. Common buffer pad shapes include V-shaped, U-shaped, or planar straight structures, which absorb the impact energy of the falling silicon wafer through localized elastic deformation, thereby protecting the edges and surface of the silicon wafer.

[0003] However, existing buffer pads still have significant drawbacks in practical applications. First, the V-shaped or U-shaped structure, due to its groove shape, easily accumulates silicon chips, dust, and other impurities. These debris are not only difficult to remove completely through conventional cleaning methods, but may also gradually accumulate during high-frequency use, leading to wafer insertion misalignment or even jamming. Second, the contact area between these pads and the silicon wafer is limited, mostly point or line contact, causing stress concentration. During frequent wafer insertion and assembly operations, this can easily cause edge chipping, corner breakage, or microcracks on the silicon wafer edges, severely affecting wafer yield. Furthermore, existing pads are mostly installed using embedded or snap-on methods, which are inconvenient to install and remove. Cleaning often requires the use of blades or other tools to scrape off debris, which is not only inefficient but also easily damages the pad itself or the surface of the top teeth, shortening its service life and increasing maintenance costs and downtime.

[0004] Furthermore, existing top-tooth opening structures are prone to deformation under continuous stress during long-term wafer insertion operations, causing the opening to gradually enlarge and further exacerbating issues such as inaccurate wafer positioning and friction damage. Although some solutions attempt to reduce friction by chamfering or locally polishing the tooth tips, they do not fundamentally improve the problems of debris accumulation and stress concentration. Therefore, a new top-tooth structure is needed that can significantly improve the problems of easy debris accumulation and difficult cleaning while ensuring wafer insertion accuracy and efficiency, effectively dispersing the stress on the wafer, reducing the risk of fragmentation, and improving the overall performance and uptime of the wafer insertion machine. Utility Model Content

[0005] The purpose of this utility model is to overcome the shortcomings of the existing technology and provide a novel diffusion automated boat top tooth buffer pad, top tooth structure, and wafer insertion machine to solve the problems of existing buffer pads easily trapping debris, being difficult to clean, and easily causing damage to silicon wafers. Specifically, as follows: In a first aspect, this application provides a top tooth buffer pad for an automated diffusion quartz boat inserter, comprising a main body with a planar I-shaped structure; two sets of tails extending symmetrically from the left and right sides of the main body to increase the contact area with the silicon wafer, wherein the width of the tails is smaller than the width of the boat top tooth on which they are installed, and the tails extend 2mm to 2.5mm beyond the sides of the top tooth in the installed state.

[0006] Preferably, the main body and the tail are integrally formed, and their mounting contact surface is a planar structure.

[0007] Preferably, the buffer pad is made of a material that is wear-resistant, high-temperature resistant and has good cushioning performance, preferably polyetheretherketone, silicone rubber or fluororubber.

[0008] Secondly, this application provides a top tooth structure for an automated quartz boat inserter, including a ceramic boat top tooth, which is flat and has an opening at its free end. The opening has a height difference on both sides, with a first inclined surface facing each other and a second inclined surface facing away from each other. Both free ends of the opening are rounded and chamfered. The application also includes a buffer pad as described above, which is horizontally installed at the bottom of the opening of the boat top tooth using an adhesive.

[0009] Preferably, the lower side length of the opening of the boat top tooth is greater than half of the higher side length.

[0010] Preferably, the height of the first inclined plane is 8mm and the height of the second inclined plane is 2mm.

[0011] Thirdly, this application provides a quartz boat inserter, including a gear seat, on which a plurality of slots for assembling top teeth are provided, characterized in that the top teeth structure described above is installed in the slots.

[0012] Preferably, the slot on the tooth holder is a blind rectangular slot, and each slot has two screw holes on its side, so that the boat top tooth is fastened to the tooth holder by fixing screws.

[0013] The beneficial effects of adopting the technical solution of this utility model are as follows: (1) The top of the tooth opening is rounded and beveled, and combined with the height difference design, the tooth is not easily deformed, which can effectively reduce friction with the silicon wafer and avoid scratches and fragmentation. The symmetrical extension tail design on both sides of the I-shaped buffer pad not only improves the stability after installation, but more importantly, it significantly increases the contact area with the silicon wafer. This reduces the risk of edge chipping, corner missing, edge microcracks and boat positioning clipping caused by local stress concentration on the silicon wafer.

[0014] (2) The buffer pad is installed horizontally and extends outward at the tail, making it difficult for debris to accumulate in the top tooth area. Even if there is debris, it is very easy to find and can be removed simply by sweeping with a brush. There is no need to use sharp tools such as blades, thus avoiding damage to the pad and top tooth during the cleaning process. This reduces maintenance difficulty and time, and improves the uptime of the inserter and the service life of the pad.

[0015] (3) The buffer pad has a simple structure and can be firmly installed at the bottom of the top tooth opening with a small amount of adhesive. The top tooth is installed on the tooth seat by screw fastening. The overall structure is easy to assemble and disassemble and the connection is reliable. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a front view of the buffer pad of this utility model; Figure 2 This is a top view of the buffer pad of this utility model; Figure 3 This is a front view of the utility model boat top tooth structure; Figure 4 This is a side view of the utility model boat top tooth structure; Figure 5 This is a diagram showing the installation and usage status of a utility model buffer pad; In the diagram, 1. Main body; 2. Tail; 3. Boat top tooth; 4. First inclined plane; 5. Second inclined plane; 6. Buffer pad; 7. Tooth seat; 8. Fixing screw. Detailed Implementation

[0018] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions in the embodiments of this utility model will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this utility model, not all of them. Therefore, the following detailed description of the embodiments of this utility model provided in the accompanying drawings is not intended to limit the scope of the claimed utility model, but merely to represent selected embodiments of this utility model. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without inventive effort are within the scope of protection of this utility model.

[0019] This embodiment achieves a comprehensive technical effect by optimizing the top tooth structure and adopting a novel I-shaped epitaxial buffer pad, thereby reducing silicon wafer damage, facilitating debris removal, enhancing component durability, and improving production efficiency. The specific implementation method is as follows: Reference Figures 1-5 As shown, a top tooth buffer pad for an automated diffusion quartz boat inserter includes a main body 1 with a planar I-shaped structure; two sets of tails 2 extend symmetrically from the left and right sides of the main body 1 to increase the contact area with the silicon wafer. The width of the tails 2 is smaller than the width of the boat top tooth 3 on which they are installed, and the tails 2 extend 2mm to 2.5mm beyond the sides of the top tooth in the installed state.

[0020] Here, the planar I-shaped structure and the symmetrically extending tails 2 on both sides increase the actual contact area between the buffer pad 6 and the silicon wafer. This avoids stress concentration, thereby effectively reducing damage to the silicon wafer such as edge chipping, corner breakage, and edge microcracks. The larger buffer area provided by the epitaxial tails 2 can prolong the impact process time, thereby reducing the average impact force and making the silicon wafer dropping process gentler.

[0021] The tail section 2 extends to both sides of the top tooth, making it easier to observe debris stuck at the opening of the top tooth. Its planar extended structure also makes cleaning simple and quick, eliminating the need for sharp tools that may damage the pad or the top tooth, thus solving the core problem of debris being difficult to find and clean.

[0022] As a preferred embodiment, the main body 1 and the tail 2 are integrally formed, and their mounting contact surface is a planar structure.

[0023] Here, the one-piece molding process ensures the connection strength between the main body 1 and the tail 2, avoiding problems such as detachment or failure due to weak connection, and improving the service life and reliability of the gasket.

[0024] As a preferred embodiment, the cushioning pad is made of a material that is wear-resistant, heat-resistant, and has good cushioning properties, preferably polyetheretherketone, silicone rubber, or fluororubber.

[0025] Here, these materials all possess high elasticity, wear resistance, high temperature resistance, and chemical corrosion resistance, ensuring that the gaskets can maintain excellent cushioning performance for a long time in the high-temperature environment of the diffusion process, and are not prone to aging, wear, or deformation, further extending their replacement cycle.

[0026] This embodiment also provides a top tooth structure for an automated quartz boat inserter, including a ceramic boat top tooth 3, which is flat and has an opening at its free end. The opening of the boat top tooth 3 has a height difference on both sides. A first inclined surface 4 is provided on the two sides of the opening facing each other, and a second inclined surface 5 is provided on the opposite side. The tops of the two free ends of the opening of the boat top tooth 3 are rounded and chamfered. It also includes a buffer pad 6 as described above, which is horizontally installed at the bottom of the opening of the boat top tooth 3 by an adhesive.

[0027] Here, the height difference, chamfer, and bevel design of the top teeth primarily address friction scratches and opening deformation, while the buffer pad 6 mainly addresses impact damage and debris removal. Together, they significantly reduce the probability of silicon wafer scratches, edge chipping, corner defects, microcracks, and chipping. The height difference design enhances the structural strength of the top tooth opening and extends the service life of the top teeth themselves.

[0028] In a preferred embodiment, the lower side length of the opening of the scaphoid tooth 3 is greater than half of the higher side length.

[0029] Here, the specific proportional relationship of the height difference is clarified. This dimensional optimization ensures that the height difference structure can provide the best structural support, effectively preventing opening deformation without excessively weakening the mechanical strength of the top tooth.

[0030] In a preferred embodiment, the height of the first inclined plane 4 is 8 mm, and the height of the second inclined plane 5 is 2 mm.

[0031] Here, the first inclined surface 4, 8mm on both sides of the opening of the boat top tooth 3, provides a gentler guiding surface, which facilitates the smooth sliding of the silicon wafer and reduces collisions; the second inclined surface 5, 2mm on the opposite side, mainly plays a role in reducing frictional resistance when the silicon wafer is straightened or removed, preventing microcracks or scratches caused by friction.

[0032] This embodiment also provides a quartz boat inserter, including a toothed seat 7, which has a plurality of slots for assembling top teeth, and the boat top teeth 3 structure as described above are installed in the slots.

[0033] Here, the boat top tooth structure of this utility model is applied to a quartz boat inserter, directly improving the inserting quality and operating efficiency of the entire machine. By reducing the breakage rate and carding rate, the production efficiency of the machine is increased, and the costs incurred due to downtime for cleaning, tooth replacement, and maintenance are reduced.

[0034] As a preferred embodiment, the slots on the gear seat 7 are blind rectangular slots, and each slot has two screw holes on its side. The boat top tooth 3 is fastened to the gear seat 7 by fixing screws 8.

[0035] Here, the rectangular blind slot matches the shape of the top tooth, serving as initial positioning and preventing rotation. Two screw holes apply balanced tightening force through two screws, ensuring that each top tooth can be firmly and accurately installed on the tooth holder 7, preventing loosening during high-speed operation and guaranteeing the accuracy of the insert position.

[0036] During installation, insert the boat top tooth 3 into the blind hole slot of the tooth base 7, and then use two screws to pass through the screw holes on the side and tighten them to precisely fasten the boat top tooth 3 onto the tooth base 7.

[0037] During the wafer insertion process, as the silicon wafer falls, it first contacts the widened plane of the buffer pad 6 and the epitaxial tail 2, increasing the contact area and effectively buffering the impact force. Subsequently, during the orderly translation of the silicon wafer, thanks to the beveled surface, chamfer, and height difference design of the top teeth, its movement space is relatively larger and the frictional resistance is smaller, thus greatly avoiding damage such as scratches, microcracks, and edge chipping. At the same time, the structure of the epitaxial tail 2 makes it difficult for debris to accumulate in this area, and the cleaning work becomes very simple.

[0038] The present invention has been further described above with reference to specific embodiments. However, it should be understood that the specific description herein should not be construed as limiting the substance and scope of the present invention. Those skilled in the art can make their own interpretations of the above embodiments after reading this specification. All modifications thereof fall within the scope of protection of this utility model.

Claims

1. A top tooth buffer pad for an automated diffusion quartz boat inserter, characterized in that, It includes a main body (1) with a planar I-shaped structure; two sets of tails (2) extend symmetrically from the left and right sides of the main body (1) to increase the contact area with the silicon wafer. The width of the tails (2) is smaller than the width of the boat top teeth (3) on which they are installed, and the tails (2) extend 2 mm to 2.5 mm beyond the sides of the top teeth in the installed state.

2. The top tooth buffer pad of the automated diffusion quartz boat inserter according to claim 1, characterized in that, The main body (1) and the tail (2) are integrally formed, and their mounting contact surface is a planar structure.

3. The top tooth buffer pad of an automated diffusion quartz boat inserter according to claim 1 or 2, characterized in that, The material of the buffer pad is one of polyetheretherketone, silicone rubber or fluororubber.

4. A top tooth structure for an automated diffusion quartz boat inserter, characterized in that, The material includes a ceramic boat-top tooth (3), which is flat. The free end of the boat-top tooth (3) has an opening, and there is a height difference on both sides of the opening. The two sides of the opening have a first inclined surface (4) facing each other and a second inclined surface (5) facing each other. The top of the two free ends of the opening of the boat-top tooth (3) is rounded and chamfered. It also includes a buffer pad (6) as described in claim 1 or 2, the buffer pad (6) being horizontally attached to the bottom of the opening of the boat top tooth (3) by an adhesive.

5. The top tooth structure of the diffusion automated quartz boat inserter according to claim 4, characterized in that, The lower side length of the opening of the boat top tooth (3) is greater than half of the higher side length.

6. The top tooth structure of the diffusion automated quartz boat inserter according to claim 4, characterized in that, The height of the first inclined plane (4) is 8mm, and the height of the second inclined plane (5) is 2mm.

7. A quartz boat inserter, comprising a gear holder (7), wherein the gear holder (7) has a plurality of slots for assembling top teeth, characterized in that, The slot is equipped with a boat top tooth (3) structure as described in any one of claims 4-6.

8. A quartz boat inserter according to claim 7, characterized in that, The slot on the tooth base (7) is a blind rectangular slot, and each slot has two screw holes on its side. The boat top tooth (3) is fastened to the tooth base (7) by fixing screws (8).

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