Cavity structure and carrier plate

Abstract

The application provides a cavity structure for accommodating a carrier plate, and the carrier plate can move in a transmission direction in the cavity structure, and the cavity structure comprises: a cavity provided with a chamber for accommodating the carrier plate, the cavity comprises a bottom wall, a first side wall, a second side wall and a top wall, and the bottom wall, the first side wall, the second side wall and the top wall jointly form the chamber; at least two transmission assemblies, the two transmission assemblies are rotatably connected to the first side wall and the second side wall respectively, and the transmission assemblies are partially located in the chamber, the part of the transmission assemblies located in the chamber is used for receiving the carrier plate, and the transmission assemblies are used for rotating to transmit the carrier plate; a support assembly is arranged in the chamber and connected to the bottom wall, the support assembly is located in the middle of the bottom wall along a first direction, the support assembly can cooperate with a guide structure of the carrier plate, and the guide structure can move relative to the support assembly along the transmission direction, so that the support assembly provides support for the carrier plate during movement of the carrier plate along the transmission direction.

Description

Technical Field

[0001] This application relates to the technical field of photovoltaic and semiconductor product manufacturing, and in particular to a cavity structure and carrier plate. Background Technology

[0002] In the manufacturing process of photovoltaic and semiconductor products, wafers and other sheet materials need to be placed on a carrier plate. The carrier plate is then used to transfer the sheet materials so that they can enter the corresponding processing equipment for processing. For example, the processing equipment can use physical vapor deposition (PVD) to process the sheet materials on the carrier plate.

[0003] Currently, the two sides of the bottom of the carrier plate can be supported by transfer wheels, which can drive the carrier plate to move while supporting it. However, the middle of the carrier plate lacks support. Under the influence of gravity and the pressure of the sheet material, the middle of the carrier plate is at risk of denting, deformation, or breakage after long-term use, affecting the service life of the carrier plate. Utility Model Content

[0004] In view of the above, it is necessary to provide a cavity structure and carrier plate to solve the above-mentioned defects.

[0005] In a first aspect, embodiments of this application provide a cavity structure for accommodating a carrier plate, wherein the carrier plate is movable within the cavity structure along a transmission direction. The cavity structure includes: a cavity having a chamber for accommodating the carrier plate; the cavity including a bottom wall, a first side wall, a second side wall, and a top wall, the bottom wall, the first side wall, the second side wall, and the top wall together forming the chamber; at least two transmission components, the two transmission components being rotatably connected to the first side wall and the second side wall respectively, and a portion of the transmission components being located within the cavity, the portion of the transmission components within the cavity being used to receive the carrier plate, the transmission components being used to rotate to transmit the carrier plate; and a support component disposed within the cavity and connected to the bottom wall, wherein the support component is located at the middle of the bottom wall along a first direction, the first direction being perpendicular to the transmission direction, the support component being able to cooperate with a guide structure of the carrier plate, and the guide structure being able to move relative to the support component along the transmission direction, so that the support component provides support for the carrier plate during the movement of the carrier plate along the transmission direction.

[0006] Optionally, the support assembly includes a base and a support wheel, the base is connected to the bottom wall, the support wheel is rotatably connected to the base, and the guide structure includes a guide strip located at the bottom of the carrier plate and extending along the transmission direction. The outer peripheral surface of the support wheel can abut against the guide strip, and the guide strip can move relative to the support wheel along the transmission direction. Alternatively, the support assembly includes a base and a support wheel, the base is connected to the bottom wall, the support wheel is rotatably connected to the base, and the guide structure includes a guide groove located at the bottom of the carrier plate and extending along the transmission direction. The outer peripheral surface of the support wheel can abut against the inner wall of the guide groove. Alternatively, the support assembly includes a base and a guide member, the base is connected to the bottom wall, the guide member is connected to the base, and the guide structure includes a pulley located at the bottom of the carrier plate. The outer peripheral surface of the pulley can abut against the guide member, and the pulley can move relative to the guide member along the transmission direction.

[0007] Optionally, the base includes: a bracket connected to the cavity; a connector disposed on the bracket, the connector having a storage groove, the support wheel portion being stored in the storage groove, and the top of the support wheel protruding from the top of the connector through the storage groove.

[0008] Optionally, the connector is provided with a mounting shaft, which passes through the connector and the support wheel in a first direction and through the receiving groove, and the support wheel is rotatably connected to the mounting shaft; the connector has a mounting groove on one side in the first direction, and one end of the mounting shaft is located in the mounting groove.

[0009] Optionally, the carrier plate includes a plate body, the guide structure includes a guide strip disposed at the bottom of the plate body and the guide strip extends along the transmission direction, and the support assembly further includes: at least two guide wheels rotatably connected to the base, the two guide wheels are arranged along a first direction and a gap space is provided between the two guide wheels for the guide strip to pass through, wherein the rotation center axis of the guide wheel is perpendicular to the rotation center axis of the support wheel, and the outer peripheral surface of the guide wheel is used to abut against the side of the guide strip in the first direction to limit the offset of the carrier plate in the first direction.

[0010] Optionally, the base includes: a bracket connected to the cavity; a connector disposed on the bracket, a guide wheel rotatably connected to the top of the connector, a storage groove provided on the connector, a support wheel portion stored in the storage groove, and the top of the support wheel protruding from the top of the connector through the storage groove.

[0011] Optionally, the transmission assembly includes: a synchronous pulley, located outside the cavity and for connecting to a drive member or a synchronous belt, the drive member or synchronous belt being used to drive the synchronous pulley to rotate; a transmission shaft, connected to the synchronous pulley and located inside the cavity, with a transmission bearing receiving plate, the transmission shaft being used to rotate synchronously with the synchronous pulley; and a magnetic fluid seat, disposed on the side of the cavity in a first direction and connected to the synchronous pulley and the transmission shaft, the magnetic fluid seat being used to realize the transmission between the synchronous pulley and the transmission shaft.

[0012] Optionally, a flexible ring is fitted on the transmission shaft, which is used to abut against the bottom of the carrier plate; a positioning groove is provided on the peripheral wall of the transmission shaft, which is used to accommodate part of the flexible ring, and the flexible ring protrudes from the peripheral wall of the transmission shaft.

[0013] Secondly, embodiments of this application provide a carrier plate applied to a cavity structure, capable of moving within the cavity structure along the transmission direction. The cavity structure includes a cavity and a support assembly. The cavity is provided with a chamber, and the support assembly is disposed within the chamber and connected to the bottom wall of the cavity. The support assembly is located at the center of the bottom wall along a first direction, which is perpendicular to the transmission direction. The carrier plate includes: a plate body; and a guide structure disposed at the bottom of the plate body, extending along the transmission direction, and located at the center of the bottom of the plate body in the first direction. The guide structure can cooperate with the support assembly and can move relative to the support assembly along the transmission direction, so that the support assembly provides support for the carrier plate during its movement along the transmission direction.

[0014] Optionally, the support assembly includes a base and a support wheel. The base is connected to the bottom wall, and the support wheel is rotatably connected to the base. The guide structure includes a guide strip disposed at the bottom of the plate and extending along the transmission direction. The outer peripheral surface of the support wheel can abut against the guide strip, and the guide strip can move relative to the support wheel along the transmission direction. Alternatively, the support assembly includes a base and a support wheel. The base is connected to the bottom wall, and the support wheel is rotatably connected to the base. The guide structure includes a guide groove disposed at the bottom of the plate and extending along the transmission direction. The outer peripheral surface of the support wheel can abut against the inner wall of the guide groove. Alternatively, the support assembly includes a base and a guide member. The base is connected to the bottom wall, and the guide member is connected to the base. The guide structure includes a pulley disposed at the bottom of the plate. The outer peripheral surface of the pulley can abut against the guide member, and the pulley can move relative to the guide member along the transmission direction.

[0015] Optionally, the cavity includes a bottom wall, a first side wall, a second side wall, and a top wall, which together form a chamber. The cavity structure also includes at least two transmission components, which are rotatably connected to the first side wall and the second side wall, respectively, and the transmission components are partially located within the chamber. The plate includes a body portion extending along a first direction and an overlapping portion connected to the body portion. The bottom of the overlapping portion can be received by the portion of the transmission component located within the chamber, so that the plate can be transmitted when the transmission component rotates. The body portion and the overlapping portion form an L-shaped structure.

[0016] With the cavity structure and carrier plate provided in this application, when the carrier plate is transported by the transmission component, the support component supports the middle part of the carrier plate, which can reduce the probability of the middle part of the carrier plate being dented, deformed or broken due to gravity or the weight of the sheet material it supports, and increase the service life of the carrier plate. Attached Figure Description

[0017] Figure 1This is a schematic diagram of the cavity structure in an embodiment of this application.

[0018] Figure 2 This is a schematic diagram of the structure of the support component in the embodiments of this application.

[0019] Figure 3 yes Figure 1 Enlarged view of section III.

[0020] Figure 4 This is a top view of the support component in an embodiment of this application.

[0021] Figure 5 It is along Figure 4 A cross-sectional view of VV.

[0022] Figure 6 This is a schematic diagram of the structure of the transmission component in an embodiment of this application.

[0023] Figure 7 This is a partial cross-sectional view of the transmission component in an embodiment of this application.

[0024] Explanation of key component symbols: 100. Cavity structure; 10. Cavity; 11. Chamber; 12. First side wall; 13. Second side wall; 14. Bottom wall; 15. Top wall; 20. Transmission assembly; 21. Synchronous wheel; 22. Transmission shaft; 221. Positioning groove; 222. Flexible ring; 23. Magnetofluid seat; 30. Support assembly; 31. Base; 311. Bracket; 312. Connector; 313. Storage groove; 314. Mounting shaft; 315. Mounting groove; 32. Support wheel; 33. Guide wheel; 200. Carrier plate; 201. Plate body; 2011. Main body; 2012. Overlapping part; 202. Guide structure; 2021. Guide strip; X, First direction; Y, Second direction; Z, Third direction. Detailed Implementation

[0025] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of the embodiments.

[0026] The term "multiple" in this application refers to two or more. Furthermore, it should be understood that the terms "first," "second," etc., used in the description of this application are used only for descriptive purposes and should not be construed as indicating or implying relative importance, nor as indicating or implying order.

[0027] In the description of the embodiments in this application, the words "exemplary" or "for example" are used to indicate that they are examples, illustrations, or descriptions. Any embodiment or design that is described as "exemplary" or "for example" in the embodiments of this application should not be construed as being more preferred or advantageous than other embodiments or design options. Specifically, the use of the words "exemplary" or "for example" is intended to present the relevant concepts in a specific manner.

[0028] Please see Figure 1 , Figure 1 The illustration shows a cavity structure 100 and a carrier plate 200 provided in an embodiment of this application. The carrier plate 200 may be located within the cavity structure 100 and may carry one or more sheet materials. The cavity structure 100 may transport the carrier plate 200 along a transport direction to simultaneously transport the sheet materials, allowing the sheet materials to enter a processing apparatus (not shown) for processing.

[0029] In the embodiments of this application, the type of sheet material is not specifically limited. For example, the sheet material may be, but is not limited to, silicon wafers, silicon carbide wafers, or wafers.

[0030] In the embodiments of this application, the type of processing equipment for sheet materials is not specifically limited. For example, the processing equipment can perform film coating processing on sheet materials using physical vapor deposition (PVD) technology.

[0031] In some cases, the cavity structure 100 and the carrier plate 200 can be two separate structures, and the operator can choose different carrier plates 200 to support the sheet material depending on the processing requirements. In other cases, the cavity structure 100 and the carrier plate 200 are both components of the same transmission device. The embodiments of this application do not limit this.

[0032] In embodiments of this application, the width, length, and height directions of the cavity structure 100 can be defined to be located in the first direction X, the second direction Y, and the third direction Y, respectively. Figure 2 (As shown in the diagram) and a third direction Z, the first direction X, the second direction Y, and the third direction Z are all perpendicular to each other. The transmission direction can coincide with the second direction Y.

[0033] Please refer to the following: Figure 2 and Figure 3 In one embodiment, the cavity structure 100 may include a cavity 10, a transmission component 20, and a support component 30. The carrier plate 200 may include a plate body 201 and a guide structure 202, the guide structure 202 being disposed at the bottom of the plate body 201 in the third direction Z.

[0034] The cavity 10 can extend along the second direction Y. A chamber 11 is formed within the cavity 10. The carrier plate 200 can be located within the chamber 11. The cavity 10 may include a first sidewall 12, a second sidewall 13, a bottom wall 14, and a top wall 15. The first sidewall 12 and the second sidewall 13 are arranged opposite each other in the first direction X. The bottom wall 14 and the top wall 15 are arranged opposite each other in the third direction Z. The first sidewall 12, the second sidewall 13, the bottom wall 14, and the top wall 15 together form the chamber 11.

[0035] The transmission components 20 can be arranged in two rows, symmetrically arranged along the first direction X. The two rows of transmission components 20 are rotatably connected to the first sidewall 12 and the second sidewall 13, respectively. Each row of transmission components 20 can contain multiple transmission components 20, which can be spaced apart along the second direction Y. Each transmission component 20 can extend into the chamber 11 along the first direction X. The two rows of transmission components 20 can support the plate 201 from both sides along the first direction X, allowing the plate 201 to rest flat on the two rows of transmission components 20. The axial direction of the rotation center axis of the transmission component 20 is parallel to the first direction X. The transmission component 20 can rotate to transmit the plate 201 along the second direction Y, and the supporting structure 202 can be transmitted synchronously with the plate 201.

[0036] The support assembly 30 can be located within the chamber 11, specifically at the center of the chamber 11 in the first direction X. The support assembly 30 is positioned between two rows of transmission assemblies 20. The support assembly 30 can be located at the bottom of the guide structure 202. The guide structure 202 can include a guide bar 2021. The support assembly 30 can include a base 31 and a support wheel 32. The height direction of the base 31 is parallel to the third direction Z. The base 31 can be fixedly connected to the inner wall of the chamber 10. The support wheel 32 is rotatably connected to the base 31, and its outer peripheral surface protrudes from the top of the base 31. The outer peripheral surface of the support wheel 32 can abut against the bottom of the carrier plate 200, allowing the support assembly 30 to support the carrier plate 200. The axial direction of the rotation center axis of the support wheel 32 is parallel to the first direction X. When the carrier plate 200 is transmitted along the second direction Y, the support wheel 32 can rotate to reduce the friction between the carrier plate 200 and the support assembly 30.

[0037] It is understood that a rotatable connection can be achieved through a rotating connector 312, allowing the two components to rotate relative to each other. In the embodiments of this application, the type of rotating connector 312 is not specifically limited. For example, the rotating connector 312 can be, but is not limited to, a bearing, a pin, or a hinge.

[0038] In the embodiments of this application, the fixing method during fixed connection and fixed installation is not specifically limited. For example, the fixing method may include, but is not limited to, bolt fixing, screw fixing, integral molding fixing, welding fixing, and interference fixing.

[0039] It is understood that the two rows of transmission components 20 can support the two sides of the carrier plate 200, while the support component 30 can support the guide structure 202. This allows the support component 30 to provide support for the middle of the carrier plate 200 during transmission, thereby reducing the probability of the carrier plate 200 denting or breaking in the middle due to gravity and the weight of the sheet material, and improving the service life of the carrier plate 200.

[0040] When the carrier plate 200 is transported along the second direction Y, the support wheel 32 can rotate as the carrier plate 200 moves, thereby maintaining support for the carrier plate 200 while reducing friction between the support assembly 30 and the carrier plate 200, reducing the impact of friction on the transport speed and direction of the carrier plate 200, and improving the stability of the transport of the carrier plate 200 and the sheet material carried by the carrier plate 200.

[0041] In the embodiments of this application, the number of support components 30 is not specifically limited. For example, the number of support components 30 can be one, and the support component 30 can be located in the middle of the first direction X and the second direction Y within the chamber 11. Alternatively, the number of support components 30 can be multiple, and multiple support components 30 can be arranged in a row along the second direction Y, and all can be located in the middle of the first direction X within the chamber 11. Yet another example is that multiple rows of support components 30 can be arranged within the chamber 11, and multiple rows of support components 30 can be arranged in the first direction X, with each row containing one or more support components 30; when each row contains multiple support components 30, the multiple support components 30 can be arranged along the second direction Y.

[0042] In the embodiments of this application, the mounting position of the base 31 is not specifically limited. For example, as Figure 1 As shown, the base 31 can be fixedly installed on the bottom wall 14. For example, the base 31 can extend along the first direction X or the second direction Y, and can be fixedly installed on the first side wall 12, the second side wall 13 and / or other side walls of the chamber 11.

[0043] Please refer to the following: Figure 4 and Figure 5 In some embodiments, the base 31 may include a bracket 311 and a connector 312. The height direction of the bracket 311 may be parallel to the third direction Z. The bracket 311 is fixedly connected to the cavity 10. The connector 312 may be fixedly installed on the top of the bracket 311. A storage groove 313 may be formed on the connector 312, which may penetrate the connector 312 along the third direction Z and penetrate one side of the connector 312 in the second direction Y. A mounting groove 315 is formed on one side of the connector 312 in the first direction X, and the mounting groove 315 is spaced apart from the storage groove 313.

[0044] A mounting shaft 314 is fixedly connected to the connector 312. The mounting shaft 314 can enter the mounting groove 315, pass through the inner wall of the mounting groove 315 along the second direction Y, and pass through the receiving groove 313. One end of the mounting shaft 314 can be located inside the mounting groove 315.

[0045] The support wheel 32 can be partially housed in the storage groove 313, and the support wheel 32 protrudes from the top of the connector 312. The mounting shaft 314 can pass through the support wheel 32. A through hole can be formed on the support wheel 32 along the first direction X, through which the mounting shaft 314 passes and there is a gap between the mounting shaft 314 and the inner wall of the through hole, so that the support wheel 32 can rotate relative to the mounting shaft 314, and the support wheel 32 is rotatably connected to the base 31; or, the support wheel 32 can be rotatably connected to the mounting shaft 314 through a rotating connector 312 such as a bearing, so that the support wheel 32 is rotatably connected to the base 31.

[0046] For example, one end of the mounting shaft 314 can be threaded and threaded to the connector 312 to achieve fixation with the connector 312; the other end of the mounting shaft 314 is located in the mounting groove 315 and can be provided with a head. The head can have a slot for mating with a screwdriver head, or the cross-section of the head can be adapted to the jaw on the wrench to facilitate the operator to tighten the mounting shaft 314.

[0047] In some embodiments, the support component 30 may further include guide wheels 33. Two rows of guide wheels 33 may be arranged, spaced apart in the first direction X, and each row may contain one or more guide wheels 33. When each row includes multiple guide wheels 33, these multiple guide wheels 33 may be spaced apart along the second direction Y. Each guide wheel 33 is rotatably connected to the connector 312, and the axial direction of the rotation center axis of the guide wheel 33 is parallel to the third direction Z. The two rows of guide wheels 33 are located on opposite sides of the support wheel 32 in the first direction X. A gap space is formed between the two rows of guide wheels 33, the width of which is greater than or equal to the width of the guide bar 2021 in the first direction X. The guide bar 2021 can pass through the gap space in the second direction Y, and the two rows of guide wheels 33 can respectively abut against the two sides of the guide bar 2021 in the first direction X to limit the offset of the guide bar 2021 in the first direction X during transmission, thus maintaining the transmission of the guide bar 2021 along the second direction Y.

[0048] It is understood that by blocking the guide strip 2021 from both sides in the first direction X by the guide wheel 33, when the transmission direction of the carrier plate 200 deviates from the second direction Y or has a tendency to deviate from the second direction Y, the transmission direction of the carrier plate 200 can be adjusted by the contact between the guide wheel 33 and the guide strip 2021. When the carrier plate 200 moves to transmit sheet material, the probability of sheet material being bumped or falling off the carrier plate 200 due to the deviation of the transmission trajectory can be reduced, thereby improving the reliability of the cavity structure 100.

[0049] When the carrier plate 200 is being transported, the outer peripheral surfaces of the guide wheels 33 located on both sides of the guide bar 2021 can maintain contact with the guide bar 2021 and can rotate with the transport of the carrier plate 200, thereby reducing the friction between the guide wheels 33 and the guide bar 2021, reducing the impact of friction on the transport speed and direction of the carrier plate 200, and improving the stability of the transport of the carrier plate 200 and the sheet material carried by the carrier plate 200.

[0050] It is understood that the number of guide wheels 33 can be adjusted according to the specific situation of the cavity structure 100. In other embodiments, the guide wheels 33 can be arranged in a row, and the guide wheels 33 block the guide strip 2021 from one side in the first direction X.

[0051] In another embodiment, the guide structure 202 may include a guide groove (not shown), which may be formed at the bottom of the plate 201 and located at the middle of the plate 201 in the first direction X. The guide groove may extend along the second direction Y. The support assembly 30 may include a base 31 and a support wheel 32, which is rotatably connected to the base 31. The support wheel 32 can enter the positioning groove, and the outer peripheral surface of the support wheel 32 can abut against the top wall of the positioning groove, so that the support assembly 30 can support the middle of the plate 200 during the transmission of the plate 200.

[0052] The width of the guide groove in the first direction X can be greater than the width of the support wheel 32 in the first direction X. The inner walls on both sides of the guide groove in the first direction X can block the support wheel 32 in the first direction X to limit the offset of the carrier plate 200 in the first direction X during transmission, so that the carrier plate 200 can be continuously transmitted along the second direction Y.

[0053] In yet another embodiment, the guide structure 202 may include a pulley (not shown) rotatably connected to the bottom of the plate 201 and located at the center of the plate 201 in the first direction X. The axial direction of the pulley's rotation center axis may coincide with the first direction X. The support assembly 30 may include a base 31 and a guide member (not shown), the guide member may be located on top of the base 31, and the outer peripheral surface of the pulley may abut against the guide member, so that the support assembly 30 provides support for the center of the plate 200 during the transport of the plate 200.

[0054] In some cases, the guide can be a strip-shaped structure extending along the second direction Y, and the guide can be fixedly mounted on the top of the base 31. During the transmission of the carrier plate 200 along the second direction Y, the pulleys can be transmitted synchronously in the same direction, and the outer circumferential surface of the pulleys can abut against the guide during the transmission process and rotate synchronously.

[0055] In other cases, the guide can be a groove formed on the top of the base 31, extending along the second direction Y. A pulley can partially enter this groove. During the transport of the carrier plate 200 along the second direction Y, the pulley can be transported synchronously in the same direction, with its outer circumferential surface abutting against the bottom wall of the groove and rotating synchronously. Furthermore, the width of the groove in the first direction X can be greater than the width of the pulley in the first direction X, and the inner walls on both sides of the groove in the first direction X can block the pulley in the first direction X to limit the offset of the carrier plate 200 during transport in the first direction X, allowing the carrier plate 200 to be continuously transported along the second direction Y.

[0056] Please refer to the following: Figure 6 and Figure 7 In some embodiments, each transmission component 20 may include a timing pulley 21, a transmission shaft 22, and a magnetohydrodynamic base 23. The timing pulley 21 may be located outside the cavity 10 and rotatably connected to the cavity 10. The axial direction of the rotation center axis of the timing pulley 21 is parallel to the first direction X. A timing belt may be fitted onto the timing pulley 21, and the timing belt may also be fitted onto a drive wheel connected to a drive member. The drive member can drive the timing pulley 21 to rotate by rotating the drive wheel, thereby driving the timing pulley 21 to rotate through the belt drive principle; alternatively, the timing pulley 21 may be connected to a drive member, and the drive member can drive the timing pulley 21 to rotate.

[0057] The transmission shaft 22 can be located within the chamber 11, and the axial direction of the transmission shaft 22 is parallel to the first direction X. The transmission shaft 22 can be coaxially arranged with the synchronous pulley 21. The magnetic fluid seat 23 can be connected between the transmission shaft 22 and the synchronous pulley 21, and the magnetic fluid seat 23 can penetrate the chamber 10. The magnetic fluid seat 23 can achieve coaxial fixation of the transmission shaft 22 and the synchronous pulley 21, and can achieve sealing of the outside of the chamber 10 and the inside of the chamber 11.

[0058] Multiple positioning grooves 221 can be formed on the peripheral wall of the transmission shaft 22, the portion of which is away from the synchronous pulley 21. These positioning grooves 221 can be spaced apart along the first direction X. Multiple flexible rings 222 can be fitted onto the transmission shaft 22, each corresponding one-to-one with a positioning groove 221. Each flexible ring 222 can be partially housed within its corresponding positioning groove 221, and can be fitted onto the inner wall of the positioning groove 221 to fit onto the transmission shaft 22. The outer periphery of each flexible ring 222 can protrude from the peripheral wall of the transmission shaft 22.

[0059] The plate 201 may include a main body 2011 and overlapping portions 2012. The main body 2011 may extend along a first direction X, and a guide strip 2021 may be fixedly installed at the center E of the bottom of the main body 2011 in the first direction X. There are two overlapping portions 2012, both of which are fixedly installed at the bottom of the main body 2011 and are located on opposite sides of the main body 2011 in the first direction X, so that the main body 2011 and each overlapping portion 2012 can cooperate to form an L-shaped structure. Two transmission shafts 22 may correspond one-to-one with the two overlapping portions 2012. A flexible ring 222 on each transmission shaft 22 may abut against the bottom of the corresponding overlapping portion 2012 to realize the support of the transmission shaft 22 on the plate 201.

[0060] It is understood that the synchronous wheel 21 can be driven by the driving component to rotate, causing the transmission shaft 22 to rotate synchronously. When the transmission shaft 22 rotates, the plate 201, which abuts against the multiple flexible rings 222, can move along the second direction Y, thereby realizing the transmission of the transmission component 20 to the carrier plate 200.

[0061] When the flexible ring 222 comes into contact with the plate 201, it can undergo elastic deformation, and after separating from the plate 201, the flexible ring 222 can return to its original shape through the elastic force generated by its own deformation. The flexible ring 222 can buffer the collision between the plate 201 and the transmission shaft 22, reduce the impact between the carrier plate 200 and the transmission assembly 20, thereby reducing the impact of the impact on the transmission direction of the carrier plate 200, and reducing the probability of damage to the carrier plate 200 and the transmission assembly 20. This can improve the reliability of the cavity structure 100.

[0062] In the embodiments of this application, the material of the flexible ring 222 is not specifically limited. For example, the material of the flexible ring 222 can be, but is not limited to, rubber or silicone.

[0063] It is understandable that the principle by which the magnetohydrodynamic seat 23 enables the two components to be coaxially fixed and seals the cavity 10 is a common principle in the relevant field, and will not be elaborated here.

[0064] In some cases, the synchronizing wheels 21 in multiple transmission components 20 can be driven by the same drive unit to achieve synchronous rotation. In other cases, at least some transmission components 20 can be connected to different drive units than other transmission components 20, and the synchronizing wheels 21 in the transmission components 20 connected to different drive units can rotate and stop separately. The embodiments of this application do not limit this.

[0065] With the cavity structure 100 and carrier plate 200 provided in the embodiments of this application, after a sheet material is placed on the carrier plate 200, the synchronous wheel 21 in the plurality of transmission components 20 supporting the carrier plate 200 can rotate under the drive of the driving member, causing the corresponding transmission shaft 22 to rotate; the rotating transmission shaft 22 can transmit the carrier plate 200 along the second direction Y. During the transmission of the carrier plate 200, the support component 30 can abut against the guide structure 202 at the bottom of the plate 201 to support the middle part of the carrier plate 200. When the guide structure 202 includes a guide bar 2021, the guide wheel 33 located on the side of the guide bar 2021 can adjust the direction of the carrier plate 200 by abutting against the guide bar 2021 when the transmission direction of the carrier plate 200 deviates, so that the carrier plate 200 is maintained to be transmitted along the second direction Y.

[0066] Thus, when the transmission component 20 transmits the carrier plate 200, the support component 30 supports the middle of the carrier plate 200, reducing the probability of denting, deformation, or breakage of the middle of the carrier plate 200 due to gravity or the weight of the sheet material it supports, thereby increasing the service life of the carrier plate 200 and the cavity structure 100. Simultaneously, the contact between the guide wheel 33 and the guide strip 2021 reduces the probability of the carrier plate 200 deviating from the second direction Y during transmission, improving the reliability of the transmission of the carrier plate 200 and the sheet material it supports.

[0067] It will be apparent to those skilled in the art that this application is not limited to the details of the exemplary embodiments described above, and that this application can be implemented in other specific forms without departing from the spirit or essential characteristics of this application. Therefore, the embodiments described above should be considered exemplary and non-limiting in all respects, and the scope of this application is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within this application.

Claims

1. A cavity structure for accommodating a carrier plate, wherein the carrier plate is movable within the cavity structure along a transmission direction, characterized in that, The cavity structure includes: The cavity is provided with a chamber for accommodating the carrier plate. The cavity includes a bottom wall, a first side wall, a second side wall, and a top wall, which together form the chamber. At least two transmission components are provided, each of which is rotatably connected to the first sidewall and the second sidewall, and a portion of each transmission component is located within the cavity. The portion of each transmission component located within the cavity is used to receive the carrier plate, and the transmission component is used to rotate to transmit the carrier plate. A support assembly is disposed within the cavity and connected to the bottom wall. The support assembly is located at the middle of the bottom wall along a first direction, which is perpendicular to the transmission direction. The support assembly can cooperate with the guide structure of the carrier plate, and the guide structure can move relative to the support assembly along the transmission direction, so that the support assembly provides support for the carrier plate during the movement of the carrier plate along the transmission direction.

2. The cavity structure as described in claim 1, characterized in that, The support assembly includes a base and a support wheel. The base is connected to the bottom wall, and the support wheel is rotatably connected to the base. The guide structure includes a guide bar located at the bottom of the carrier plate and extending along the transmission direction. The outer peripheral surface of the support wheel can abut against the guide bar, and the guide bar can move relative to the support wheel along the transmission direction. Alternatively, the support assembly includes a base and a support wheel, the base is connected to the bottom wall, the support wheel is rotatably connected to the base, the guide structure includes a guide groove located at the bottom of the carrier plate and extending along the transmission direction, and the outer peripheral surface of the support wheel can abut against the inner wall of the guide groove. Alternatively, the support assembly includes a base and a guide member, the base being connected to the bottom wall and the guide member being connected to the base, the guide structure including a pulley located at the bottom of the carrier plate, the outer peripheral surface of the pulley being able to abut against the guide member, and the pulley being able to move relative to the guide member along the transmission direction.

3. The cavity structure as described in claim 2, characterized in that, The base includes: The support is connected to the cavity; A connector is provided on the bracket, and a storage groove is provided on the connector. The support wheel is partially stored in the storage groove, and the top of the support wheel protrudes from the top of the connector through the storage groove.

4. The cavity structure as described in claim 3, characterized in that, The connector is provided with a mounting shaft, which passes through the connector and the support wheel along the first direction and through the storage groove. The support wheel is rotatably connected to the mounting shaft. The connector has a mounting groove on one side in the first direction, and one end of the mounting shaft is located in the mounting groove.

5. The cavity structure as described in claim 2, characterized in that, The carrier plate includes a plate body, the guiding structure includes a guide strip disposed at the bottom of the plate body and extending along the transmission direction, and the support assembly further includes: At least two guide wheels are rotatably connected to the base. The two guide wheels are arranged along the first direction and a gap is provided between the two guide wheels for the guide bar to pass through. The rotation center axis of the guide wheel is perpendicular to the rotation center axis of the support wheel. The outer peripheral surface of the guide wheel is used to abut against the side of the guide bar in the first direction to limit the offset of the carrier plate in the first direction.

6. The cavity structure as described in claim 5, characterized in that, The base includes: The support is connected to the cavity; A connector is provided on the bracket. The guide wheel is rotatably connected to the top of the connector. The connector is provided with a storage groove. The support wheel is partially stored in the storage groove, and the top of the support wheel protrudes from the top of the connector through the storage groove.

7. The cavity structure as described in claim 1, characterized in that, The transmission component includes: A timing pulley is located outside the cavity and is used to connect to a drive unit or a timing belt, which is used to operate to drive the timing pulley to rotate. A transmission shaft is connected to the synchronous pulley and located inside the cavity. The transmission shaft is connected to the carrier plate and is used to rotate synchronously with the synchronous pulley. A magnetic fluid seat is disposed on the side of the cavity in the first direction and is connected to the synchronous wheel and the transmission shaft. The magnetic fluid seat is used to realize the transmission between the synchronous wheel and the transmission shaft.

8. The cavity structure as described in claim 7, characterized in that, A flexible ring is fitted on the transmission shaft, and the flexible ring is used to abut against the bottom of the carrier plate; A positioning groove is provided on the peripheral wall of the transmission shaft. The positioning groove is used to accommodate part of the flexible ring, and the flexible ring protrudes from the peripheral wall of the transmission shaft.

9. A carrier plate, applied to a cavity structure, capable of moving within the cavity structure along a transmission direction, characterized in that, The cavity structure includes a cavity and a support assembly. The cavity is provided with a chamber. The support assembly is disposed in the chamber and connected to the bottom wall of the cavity. The support assembly is located in the middle of the bottom wall along a first direction, which is perpendicular to the transmission direction. The carrier plate includes: plate body; A guide structure is disposed at the bottom of the plate body, extends along the transmission direction, and is located at the middle of the bottom of the plate body in the first direction. The guide structure can cooperate with the support component and can move relative to the support component along the transmission direction, so that the support component provides support for the plate body during the movement of the plate body along the transmission direction.

10. The carrier plate as claimed in claim 9, characterized in that, The support assembly includes a base and a support wheel. The base is connected to the bottom wall, and the support wheel is rotatably connected to the base. The guide structure includes a guide bar, which is disposed at the bottom of the plate and extends along the transmission direction. The outer peripheral surface of the support wheel can abut against the guide bar, and the guide bar can move relative to the support wheel along the transmission direction. Alternatively, the support assembly includes a base and a support wheel, the base is connected to the bottom wall, the support wheel is rotatably connected to the base, the guide structure includes a guide groove, the guide groove is disposed at the bottom of the plate and extends along the transmission direction, and the outer peripheral surface of the support wheel can abut against the inner wall of the guide groove; Alternatively, the support assembly includes a base and a guide member, the base being connected to the bottom wall and the guide member being connected to the base, the guide structure including a pulley, the pulley being disposed at the bottom of the plate, the outer peripheral surface of the pulley being able to abut against the guide member, and the pulley being able to move relative to the guide member along the transmission direction.

11. The carrier plate as claimed in claim 9, characterized in that, The cavity includes a bottom wall, a first side wall, a second side wall, and a top wall. The bottom wall, the first side wall, the second side wall, and the top wall together form the cavity. The cavity structure also includes at least two transmission components. The two transmission components are rotatably connected to the first side wall and the second side wall, respectively, and the transmission components are partially located inside the cavity. The plate body includes: The main body extends along the first direction; An overlapping portion is connected to the main body portion, and the bottom of the overlapping portion can be received by the portion of the transmission assembly located in the cavity, so that the carrier plate can be transmitted when the transmission assembly rotates, wherein the main body portion and the overlapping portion form an L-shaped structure.

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