Wafer detection automatic feeding device

Abstract

The utility model discloses a wafer detection automatic feeding device, including stage, one end of stage is equipped with the lifting mechanism along Z axle setting, and the lifting mechanism is positioned with the hopper, and the stage is equipped with the material taking mechanism along X axle sliding setting, still including fixed base, and the fixed base is equipped with the sliding base along Y axle sliding installation, and the sliding base is equipped with the stage along X axle sliding installation, and the sliding of sliding base and stage is all by integrated power assembly drive. Realized mechanization continuous feeding, material taking and multi -position detection, greatly reduced the manual participation degree, effectively promoted the detection speed and work efficiency, while, can realize the detection of multiple positions without repeatedly moving wafer, avoided the problem of the secondary damage to wafer.

Description

Technical Field

[0001] This utility model belongs to the field of wafer inspection technology, and in particular relates to an automatic wafer inspection feeding device. Background Technology

[0002] After semiconductor fabrication processes, patterns are formed on the surface of wafers. The quality of these patterns needs to be inspected by sampling. The current sampling method is as follows: staff manually place each wafer on the stage of a microscope and then observe the pattern on the wafer through the microscope to judge the clarity and integrity of the pattern. At the same time, each wafer needs to be moved repeatedly on the stage by the staff during inspection in order to complete the inspection and observation of multiple different positions on the wafer surface.

[0003] This method has the following drawbacks:

[0004] 1. The wafer placement and testing processes require a great deal of manual intervention, which is slow and inefficient.

[0005] 2. Repeatedly moving the wafer on the wafer stage makes it difficult to find the correct position and may also cause secondary damage to the wafer. Utility Model Content

[0006] This invention provides an automatic wafer inspection feeding device to reduce manual intervention and improve inspection efficiency.

[0007] To solve the above-mentioned technical problems, the technical solution of this utility model is: an automatic wafer inspection and feeding device, including a platform, a lifting mechanism arranged along the Z-axis at one end of the platform, a material bin positioned on the lifting mechanism, and a material picking mechanism slidably arranged along the X-axis on the platform;

[0008] It also includes a fixed base, on which a slide block is slidably mounted along the Y-axis, and on which the platform is slidably mounted along the X-axis. The sliding of the slide block and the platform is driven by an integrated power assembly.

[0009] As an improvement, the integrated power assembly includes a connecting sleeve disposed on the slide, and a first drive shaft is rotatably mounted inside the connecting sleeve. The first drive shaft is driven by the fixed seat through gear meshing.

[0010] It also includes a second drive shaft that is rotatably mounted inside the first drive shaft, and the second drive shaft is also driven by the platform through gear meshing.

[0011] As a further improvement, the integrated power assembly is slidably mounted on the slide block, an elastic connector is provided between the slide block and the integrated power assembly, and a traction power separation mechanism is provided between the integrated power assembly and the platform.

[0012] The sliding direction of the integrated power component forms an angle with the sliding direction of the slide and the platform.

[0013] As a further improvement, a slide platform is slidably mounted on the slide block, and the slide platform is arranged at an angle relative to the sliding direction of the slide block and the platform; the integrated power assembly is fixed on the slide platform, and the sliding angle between the slide platform and the slide block and the platform is 45 degrees.

[0014] As a further improvement, the traction power separation mechanism includes a rope seat disposed on the slide and a nozzle disposed on the slide. The platform is provided with a hinge seat, on which a wire clamp and a handle are rotatably mounted. A wire tube is disposed on the handle and the wire tube is located upstream of the wire clamp.

[0015] It also includes a pull rope, one end of which is fixed to the rope seat, and the other end of which passes through the nozzle and the conduit in sequence and is then fixed to the wire clamp.

[0016] As an improvement, the lifting mechanism includes a bracket mounted on the platform, a power source driven pallet slidably mounted on the bracket along the Z-axis, the hopper being positioned on the pallet, the hopper having multiple material troughs and being open on one side facing the material picking mechanism.

[0017] As a further improvement, the pallet is provided with at least two positioning corner blocks that are adapted to the corners of the hopper, and the pallet is also provided with two positioning strips, with a positioning groove formed between the two positioning strips;

[0018] The bottom of the hopper is provided with a positioning protrusion that matches the positioning groove.

[0019] As a further improvement, the pallet is mounted on a carriage connected to the power source, and three adjustable mounting connectors arranged in a triangle are provided between the carriage and the pallet; the pallet is also provided with a hopper detection element, which is correspondingly set with the positioning groove.

[0020] As a further improvement, the material handling mechanism includes a material handling suction cup that is slidably mounted on the platform along the X-axis. The material handling suction cup has multiple suction nozzles at one end and a vacuum generator at the other end. The material handling suction cup located between the suction nozzles and the vacuum generator has a connecting air passage.

[0021] As a further improvement, the material-picking suction cup is driven by a belt drive mechanism, which is mounted on the platform and located on one side of the material-picking suction cup; a displacement detection element is provided on the platform on the other side of the material-picking suction cup.

[0022] A protective cover plate is provided on the platform corresponding to the displacement detection element and the belt drive mechanism; a protective box is provided around the bracket.

[0023] After adopting the above technical solution, the effect of this utility model is:

[0024] The loading device includes a platform with a lifting mechanism along the Z-axis at one end, a hopper positioned on the lifting mechanism, and a picking mechanism sliding along the X-axis on the platform. It also includes a fixed base with a slide mounted along the Y-axis, and the platform itself sliding along the X-axis on the slide. The sliding of the slide and platform is driven by an integrated power assembly. Based on this structure, during operation, the loading device first positions the hopper containing multiple wafers on the lifting mechanism. Then, the lifting mechanism moves the hopper vertically to a picking position. The picking mechanism then slides on the platform to the picking station and picks up a wafer. Afterward, the picking mechanism returns to its original position and performs inspection. When the inspection position needs adjustment, the integrated power assembly drives the slide and platform to move, thus meeting the requirements for inspection at multiple wafer positions. After inspection, the wafer is removed, and the next wafer is picked up and inspected according to the above process.

[0025] In summary, this feeding device enables mechanized continuous feeding, unloading, and multi-position detection, greatly reducing manual intervention and effectively improving detection speed and work efficiency. At the same time, it eliminates the need to repeatedly move the wafer to perform detection at multiple positions, avoiding secondary damage to the wafer.

[0026] Because the integrated power assembly includes a connecting sleeve mounted on the slide, a first drive shaft is rotatably mounted inside the connecting sleeve, and the first drive shaft is driven to connect with the fixed seat through gear meshing; it also includes a second drive shaft mounted and rotatably inside the first drive shaft, and the second drive shaft is also driven to connect with the stage through gear meshing, so in use, rotating the first drive shaft moves the slide, and rotating the second drive shaft moves the stage, thereby realizing the movement of the wafer on the stage in the X and Y directions. The gear meshing is reliable and the drive stability is high. Moreover, the integrated power assembly has a high degree of integration and a small space occupation.

[0027] Because the integrated power assembly is slidably mounted on the slide block, and an elastic connector is provided between the slide block and the integrated power assembly, and a traction power separation mechanism is provided between the integrated power assembly and the stage; the sliding direction of the integrated power assembly forms an angle with the sliding direction of the slide block and the stage, so when the stage needs to be moved quickly (the toothed meshing movement speed is relatively slow), the traction power separation mechanism drives the integrated power assembly to slide on the slide block, and at the same time, the sliding direction of the integrated power assembly forms an angle with the sliding direction of the slide block and the stage, realizing the simultaneous separation of the first drive shaft from the fixed seat and the second drive shaft from the stage; when not moving quickly, the traction of the elastic connector ensures the fixation of the integrated power assembly's position, thereby ensuring the reliability of the toothed meshing drive; at the same time, because the lifting mechanism of the positioning bin is set on the lifting mechanism, and the lifting mechanism is set on the stage, the lifting mechanism moves quickly and synchronously when the stage moves quickly, without affecting the relative position between the picking mechanism and the bin, ensuring the accuracy of the picking mechanism in picking up the wafer.

[0028] Because a slide platform is slidably mounted on the slide block, the slide platform is arranged at an angle relative to the sliding direction of the slide block and the platform; the integrated power component is fixed on the slide platform, so the integrated power component is fixedly installed through the transition of the slide platform, which not only does not affect the normal drive, but also lays the foundation for the sliding separation of the integrated power component; since the sliding angle between the slide platform and the slide block and the platform is 45 degrees, the optimal separation angle of the gear meshing is achieved, realizing easy and interference-free rapid disengagement.

[0029] The traction power separation mechanism includes a rope seat on the slide and a nozzle on the slide. A hinge seat is provided on the platform, and a wire clamp and a handle are rotatably mounted on the hinge seat. A wire tube is mounted on the handle, located upstream of the wire clamp. It also includes a pull rope, one end of which is fixed to the rope seat, and the other end passes through the nozzle and wire tube before being fixed to the wire clamp. Therefore, when separating the integrated power assembly, operating the handle and swinging the wire tube causes the pull rope to apply tension to the rope seat, thereby moving the slide and achieving gear-type separation. Conversely, the tension generated by the elastic connector drives the slide back to its original position. The structure is simple and easy to operate.

[0030] The lifting mechanism includes a support mounted on a platform, on which a power source drives a tray that slides along the Z-axis. A hopper is positioned on the tray, and the hopper has multiple slots and is open on one side facing the picking mechanism. This allows multiple wafers to be placed in the multiple slots. After the hopper is placed on the tray, the power source drives the tray, enabling the tray and the hopper on it to move vertically simultaneously. This allows the picking mechanism to pick up wafers one by one continuously, laying the foundation for improving testing efficiency.

[0031] Because the pallet has at least two positioning corner blocks that fit the corners of the hopper, and two positioning strips that form a positioning groove between the two positioning strips; the bottom of the hopper has a positioning protrusion that fits the positioning groove, the hopper can be installed on the pallet without a fixed connection through the cooperation of the positioning corner blocks, positioning groove and positioning protrusion, which is conducive to the quick loading and unloading of the hopper and improves the work continuity.

[0032] Since the pallet is mounted on a carriage connected to the power source, there are three adjustable mounting connectors arranged in a triangle between the carriage and the pallet; the pallet is also equipped with a hopper detection element, which is set in accordance with the positioning slot, so as to detect whether there is a hopper on the pallet, so as to determine whether the subsequent process should proceed; by adjusting the mounting connectors, not only is the carriage and the pallet connected, but both can also be adjusted.

[0033] The material handling mechanism includes a material handling chuck that slides along the X-axis on the platform. The material handling chuck has multiple nozzles at one end and a vacuum generator at the other. The material handling chuck, located between the nozzles and the vacuum generator, has a connecting air channel. When handling a single wafer in the hopper, the vacuum generator works and generates negative pressure and suction at the nozzles through the connecting air channel, thereby completing the wafer handling. Afterward, the material handling chuck slides along the X-axis to the inspection station for inspection. The structure is simple and the wafer handling reliability is high.

[0034] Since the material-picking suction cup is driven by a belt drive mechanism, which is set on the platform and located on one side of the material-picking suction cup, a displacement detection element is set on the platform on the other side of the material-picking suction cup. Through the detection of the displacement detection element and the drive of the belt drive mechanism, the material-picking suction cup can quickly reach the material-picking station and the detection station, while avoiding excessive displacement of the material-picking suction cup and interference with other mechanisms. Protective cover plates are set on the platform corresponding to the displacement detection element and the belt drive mechanism. A protective box is set on the periphery of the bracket, so as to provide safety protection during operation through the protective cover plates and the protective box. Attached Figure Description

[0035] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0036] Figure 1 This is a schematic diagram of the structure of this utility model;

[0037] Figure 2 yes Figure 1 A structural diagram from another angle (excluding the protective box);

[0038] Figure 3 yes Figure 2 Schematic diagram of the material extraction suction cup;

[0039] Figure 4 yes Figure 3 A structural diagram from another angle;

[0040] Figure 5 yes Figure 2 Schematic diagram of the structure of the middle tray;

[0041] Figure 6 yes Figure 5 A bottom view;

[0042] Figure 7 yes Figure 2 A schematic diagram of the structure after removing the lifting mechanism and the hopper;

[0043] Figure 8 yes Figure 7 A structural diagram from another angle;

[0044] Figure 9 yes Figure 8 Schematic diagram of the structure after deflection;

[0045] Wherein, 1-fixed seat; 101-first rack; 2-slide seat; 201-Y-axis slide rail assembly; 202-X-axis slide rail assembly; 203-slide rail assembly; 204-slide table; 205-hanging column; 3-platform; 301-second rack; 4-integrated power assembly; 401-connecting sleeve; 402-first drive shaft; 403-second drive shaft; 5-elastic connector; 6-traction power separation mechanism; 601-rope seat; 602-nozzle; 603-hinged seat; 604-line clamp; 605-handle; 606-conduit. 607-Pull rope; 7-Lifting mechanism; 700-Slide rail assembly; 701-Bracket; 702-Tray; 703-Protective box; 704-Positioning corner block; 705-Positioning strip; 706-Positioning groove; 707-Slide carriage; 708-Hopper detection element; 709-Adjusting installation connector; 8-Hopper; 801-Shore; 9-Material handling mechanism; 900-Slide rail assembly; 901-Material handling suction cup; 902-Suction nozzle; 903-Connecting air passage; 904-Belt drive mechanism; 905-Displacement detection element; 906-Protective cover plate. Detailed Implementation

[0046] The present invention will be further described in detail below through specific embodiments.

[0047] like Figure 1 and Figure 2As shown, an automatic wafer inspection feeding device includes a fixed base 1 mounted on a microscope frame. A slide 2 is slidably mounted on the fixed base 1 along the Y-axis. Specifically, a Y-axis slide rail assembly 201 is provided between the fixed base 1 and the slide 2. A stage 3 is slidably mounted on the slide 2 along the X-axis. Specifically, an X-axis slide rail assembly 202 is provided between the stage 3 and the slide 2. The sliding of the slide 2 and the stage 3 is driven by an integrated power assembly 4. The integrated power assembly 4 is located near one end of the stage 3. A lifting mechanism 7 is provided at the other end of the stage 3 along the Z-axis. A material bin 8 is positioned on the lifting mechanism 7. A material picking mechanism 9 is provided on the stage 3 along the X-axis.

[0048] like Figures 7 to 9 As shown, the integrated power assembly 4 includes a connecting sleeve 401 fixed on the slide 2, a first drive shaft 402 rotatably mounted inside the connecting sleeve 401, a first gear (not shown in the figure) on the first drive shaft 402, a first rack 101 that meshes with the first gear on the fixed base 1, and the first rack 101 is arranged parallel to the Y-axis; it also includes a second drive shaft 403 fitted and rotatably mounted inside the first drive shaft 402, a second gear (not shown in the figure) on the second drive shaft 403, a second rack 301 that meshes with the second gear on the platform 3, and the second rack 301 is arranged parallel to the X-axis.

[0049] Preferably, the integrated power assembly 4 is slidably mounted on the slide block 2, and an elastic connector 5 is provided between the slide block 2 and the integrated power assembly 4. A traction power separation mechanism 6 is provided between the integrated power assembly 4 and the platform 3. The sliding direction of the integrated power assembly 4 forms an angle with the sliding direction of the slide block 2 and the platform 3, and the preferred angle of the angle is 45 degrees.

[0050] A slide table 204 is slidably mounted on the slide block 2 via a slide rail assembly 203. The sliding direction of the slide table 204 is inclined relative to the sliding direction of the slide block 2 and the platform 3. That is to say, the slide rail assembly 203 is arranged at a 45-degree angle with both the Y-axis slide rail assembly 201 and the X-axis slide rail assembly 202. The integrated power assembly 4 (specifically the connecting sleeve 401) is fixed on the slide table 204.

[0051] The traction power separation mechanism 6 includes a rope seat 601 disposed on a slide table 204 and a nozzle 602 disposed on a slide table 2. A hinge seat 603 is provided on the platform 3. A wire clamp 604 and a handle 605 are rotatably mounted on the hinge seat 603. A wire tube 606 is provided on the handle 605. The wire tube 606 is located upstream of the wire clamp 604 and is arranged perpendicular to the handle 605. It also includes a pull rope 607. One end of the pull rope 607 is fixed to the rope seat 601, and the other end of the pull rope 607 passes through the nozzle 602 and the wire tube 606 in sequence and is then fixed to the wire clamp 604.

[0052] In this design, the nozzle 602 is oriented in the same direction as the slide 204, and the conduit 606 is offset from the nozzle 602. Specifically, the pull rope 607 passes through the nozzle 602, is bent, and then enters the conduit 606. Both the slide 204 and the slide block 2 are equipped with mounting posts 205. The elastic connector 5 is a tension spring, with both ends mounted on the mounting posts 205 (see [reference]). Figure 8 and Figure 9 It has a simple structure and is easy to install quickly in confined spaces.

[0053] like Figure 5 and Figure 6 As shown, the lifting mechanism 7 includes a bracket 701 disposed on the side of the platform 3. The bracket 701 protrudes from the end of the platform 3. A tray 702 driven by a power source (such as a power combination of a lead screw and a lead screw nut driven by a motor) is slidably mounted on the protruding area of ​​the bracket 701 along the Z-axis. A hopper 8 is positioned on the tray 702. The hopper 8 is provided with multiple material slots 801 and is open on one side facing the material picking mechanism 9. In this solution, the other end of the hopper 8 is also open to prevent the material picking mechanism (specifically, the material picking suction cup 901) from colliding with the hopper 8 due to excessive displacement during material picking. A protective box 703 covering the power source is provided around the bracket 701.

[0054] The pallet 702 is provided with at least two positioning corner blocks 704 that are adapted to the corners of the hopper 8. The pallet 702 is also provided with two positioning strips 705, and a positioning groove 706 is formed between the two positioning strips 705. The bottom of the hopper 8 is provided with a positioning protrusion (not shown in the figure) that is adapted to the positioning groove 706.

[0055] The tray 702 is mounted on a slide 707 connected to a power source. The slide 707 is vertically slidable along the Z-axis via a slide rail assembly 700. Three adjustable mounting connectors 709 (such as connecting bolts) arranged in a triangle are provided between the slide 707 and the tray 702. The tray 702 is also provided with a hopper detection element 708, which is located below the hopper 7 and is correspondingly arranged with the positioning groove 706.

[0056] like Figure 3 and Figure 4 As shown, the material handling mechanism 9 includes a slide rail assembly 900 arranged along the X-axis. A material handling suction cup 901 mounted on the top surface of the platform 3 slides on the slide rail assembly 900. The material handling suction cup 901 has multiple suction nozzles 902 at one end and a vacuum generator (not shown in the figure) at the other end. The material handling suction cup 901 located between the suction nozzles 902 and the vacuum generator has a connecting air passage 903. When in operation, the connecting air passage 903 is a closed air passage. In order to increase the suction effect, the suction nozzles 902 can be set to be arc-shaped to increase the suction area.

[0057] The material suction cup 901 is driven by a belt drive mechanism 904, which is mounted on the platform 3 and located on one side of the material suction cup 901. On the other side of the material suction cup 901, the platform 3 is provided with two displacement detection elements 905, which are distributed at the two movement limit positions of the material suction cup 901. A protective cover plate 906 is provided on the platform 3 at the position corresponding to the displacement detection element 905 and the belt drive mechanism 904.

[0058] The above-described embodiments are merely preferred embodiments of the present utility model and are not intended to limit the scope of the present utility model. Any modifications and alterations to the technical solution of the present utility model without departing from its design spirit shall fall within the protection scope defined by the claims of the present utility model.

Claims

1. An automatic wafer inspection and feeding device, characterized in that; Includes a platform, one end of which is provided with a lifting mechanism arranged along the Z-axis, a material bin is positioned on the lifting mechanism, and a material picking mechanism is provided on the platform along the X-axis; It also includes a fixed base, on which a slide block is slidably mounted along the Y-axis, and on which the platform is slidably mounted along the X-axis. The sliding of the slide block and the platform is driven by an integrated power assembly.

2. The automatic wafer inspection and feeding device as described in claim 1, characterized in that: The integrated power assembly includes a connecting sleeve disposed on the slide, and a first drive shaft is rotatably mounted inside the connecting sleeve. The first drive shaft is driven by the fixed seat through gear meshing. It also includes a second drive shaft that is rotatably mounted inside the first drive shaft, and the second drive shaft is also driven by the platform through gear meshing.

3. The automatic wafer inspection and feeding device as described in claim 2, characterized in that: The integrated power assembly is slidably mounted on the slide block, and an elastic connector is provided between the slide block and the integrated power assembly. A traction power separation mechanism is provided between the integrated power assembly and the platform. The sliding direction of the integrated power component forms an angle with the sliding direction of the slide and the platform.

4. The automatic wafer inspection and feeding device as described in claim 3, characterized in that: A slide platform is slidably mounted on the slide block, and the slide platform is arranged at an angle relative to the sliding direction of the slide block and the platform; the integrated power assembly is fixed on the slide platform, and the sliding angle between the slide platform and the slide block and the platform is 45 degrees.

5. The automatic wafer inspection and feeding device as described in claim 4, characterized in that: The traction power separation mechanism includes a rope seat disposed on the slide table and a nozzle disposed on the slide table. The platform is provided with a hinge seat, on which a wire clamp and a handle are rotatably mounted. A wire tube is disposed on the handle and the wire tube is located upstream of the wire clamp. It also includes a pull rope, one end of which is fixed to the rope seat, and the other end of which passes through the nozzle and the conduit in sequence and is then fixed to the wire clamp.

6. The automatic wafer inspection and feeding device as described in claim 1, characterized in that: The lifting mechanism includes a bracket mounted on the platform, a power source driven pallet slidably mounted on the bracket along the Z-axis, a hopper positioned on the pallet, the hopper having multiple material troughs and an open side facing the material picking mechanism.

7. The automatic wafer inspection and feeding device as described in claim 6, characterized in that: The pallet is provided with at least two positioning corner blocks that are adapted to the corners of the hopper, and the pallet is also provided with two positioning strips, with a positioning groove formed between the two positioning strips; The bottom of the hopper is provided with a positioning protrusion that matches the positioning groove.

8. The automatic wafer inspection and feeding device as described in claim 7, characterized in that: The pallet is mounted on a carriage connected to the power source, and three adjustable mounting connectors arranged in a triangle are provided between the carriage and the pallet; the pallet is also provided with a hopper detection element, which is correspondingly set with the positioning groove.

9. The automatic wafer inspection and feeding device as described in claim 6, characterized in that: The material handling mechanism includes a material handling suction cup that is slidably mounted on the platform along the X-axis. The material handling suction cup has multiple suction nozzles at one end and a vacuum generator at the other end. The material handling suction cup located between the suction nozzles and the vacuum generator has a connecting air passage.

10. The automatic wafer inspection and feeding device as described in claim 9, characterized in that: The material-grabbing suction cup is driven by a belt drive mechanism, which is mounted on the platform and located on one side of the material-grabbing suction cup; a displacement detection element is provided on the platform on the other side of the material-grabbing suction cup. A protective cover is provided on the platform corresponding to the displacement detection element and the belt drive mechanism; a protective box is provided around the bracket.

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