A high-temperature quartz boat positioning and clamping device

Abstract

The utility model relates to high temperature quartz boat field especially relates to a high temperature quartz boat positioning and clamping device. Including bottom plate, the upper surface of bottom plate installs the locating plate, the upper surface of locating plate installs quartz boat body, the inside of quartz boat body installs several boat poles, the arc surface of one boat pole is fixedly connected with auxiliary board, the upper surface of auxiliary board is provided with connecting piece, the side fixedly connected with two round rods of connecting piece near quartz boat body. The high temperature quartz boat positioning and clamping device provided by the utility model has the boat pole of quartz boat as the locating face, uses PEEK regular board and comb tooth to regularize silicon wafer, and the position reference of regular board is quartz boat pole, and along with the synchronous change of the position of pole, can guarantee that the relative position of boat pole and regular board remains consistent, to avoid the hard contact with quartz boat and silicon wafer in the regular process, realizes soft contact through spring mechanism, reduces the advantage of quartz boat and silicon wafer damage.

Description

Technical Field

[0001] This utility model relates to the field of high-temperature quartz boats, and in particular to a positioning and clamping device for high-temperature quartz boats. Background Technology

[0002] Photovoltaic power generation is a technology that directly converts light energy into electrical energy by utilizing the photovoltaic effect at the semiconductor interface. It mainly consists of three parts: solar panels (modules), controllers, and inverters, with the main components being electronic devices.

[0003] Existing technologies, such as the utility model patent with publication number CN221192431U, disclose a high-temperature resistant quartz boat. This patent uses a semi-cylindrical quartz boat body with a semi-cylindrical accommodating chamber inside. Semi-circular end plates integrally formed with the quartz boat body are provided at both ends. The accommodating chamber of the quartz boat contains several partitions arranged parallel to each other along the length of the boat body. Connecting blocks corresponding to each partition are provided on the inner wall of the groove of the quartz boat. Each connecting block is hinged to one end of the corresponding partition, allowing the partition to rotate out of the accommodating space along the hinge point. The quartz boat body and internal components are all high-temperature resistant and made of high-purity materials. The quartz boat can carry both silicon wafers and silicon rods. The number of semi-ring partitions can be adjusted according to the load requirements, and the diffusion is uniform. The loading is unstable, easy to use, and suitable for large-scale general application.

[0004] The inventors discovered during use that the existing technology uses the three end faces of the quartz boat as a reference for positioning, which requires high processing of the quartz boat. The flatness, parallelism, and perpendicularity must be within 0.05. In actual production, the processing deviation of the quartz boat is relatively large, which makes it impossible for the silicon wafer to be effectively inserted into the quartz boat, causing serious problems such as equipment jamming and leakage. Utility Model Content

[0005] The purpose of this invention is to solve the problem in the prior art where silicon wafers cannot be effectively inserted into the quartz boat, resulting in equipment jamming and serious leakage.

[0006] To solve the above technical problems, this utility model provides a high-temperature quartz boat positioning and clamping device, comprising: a base plate, a positioning plate mounted on the upper surface of the base plate, a quartz boat body mounted on the upper surface of the positioning plate, a plurality of boat rods mounted inside the quartz boat body, an auxiliary plate fixedly connected to the arc surface of one of the boat rods, a connector provided on the upper surface of the auxiliary plate, two round rods fixedly connected to the side of the connector near the quartz boat body, a connecting member fixedly connected to the end of the round rod away from the connector, a square plate fixedly connected to the side of the connecting member near the connecting member, and the inner surface of the square plate... The wall sliding connection has two positioning rods. Each positioning rod and the side of the connector that are close to each other are fixedly connected to a fixing plate. Each side plate is fixedly connected to the upper end of the side of the two fixing plates that are close to each other. Each side plate is fixedly connected to a number of comb teeth. Each fixing plate is fixedly connected to a regularizing plate. An mounting plate is installed on the side of the quartz boat body away from the connector. An end face connecting plate is installed on the end of the quartz boat body away from the auxiliary plate. The mounting plate is installed on the end face connecting plate. Several silicon wafers are arranged between the two boat rods and the two side plates.

[0007] The effect achieved by the above components is as follows: when it is necessary to clamp the silicon wafer, the fixed plate near the square plate is pulled to move, the fixed plate drives the spring to retract, the positioning rod slides on the inner wall of the square plate, the fixed plate drives the side plate and comb teeth to move, pulls the silicon wafer to move, and then moves the silicon wafer to the top of the quartz boat. Then the disc is aligned with the gap between the two comb teeth, and then the fixed plate spring is released to stretch. The spring's rebound force drives the two side plates and two straightening plates to move closer to each other. Then the side plates drive the comb teeth to move, and then the side plates and straightening plates clamp and limit each other. Then the straightening plates and side plates are pulled to loosen, and then the silicon wafer enters the boat rod.

[0008] Preferably, protective pads, which are rubber pads, are fixedly connected to the sides of the two regularized plates that are close to each other.

[0009] The effect achieved by the above components is that the protective pad can protect the silicon wafer and prevent wear and tear on the silicon wafer when the straightening plate clamps it.

[0010] Preferably, the positioning rod has a circular cross-section and is made of stainless steel.

[0011] The effect achieved by the above components is that the positioning rod can limit the spring, prevent the spring from deforming during use, and improve the service life of the spring.

[0012] Preferably, the mounting plate has a rectangular cross-section and is a ceramic plate.

[0013] The effect achieved by the above components is that ceramic materials have excellent wear resistance, which can effectively reduce equipment wear and extend tool life.

[0014] Preferably, a plurality of the comb teeth are staggered with the slots on the boat rod, and a plurality of the comb teeth are evenly distributed on the side plate.

[0015] Preferably, the cross-section of the round rod is circular, and the round rod is a stainless steel rod.

[0016] The effects achieved by the above components are as follows: the stainless steel material can increase the service life of the round rod, prevent the round rod from breaking due to excessive corrosion during use, and prevent the connecting parts from falling off after the round rod breaks.

[0017] Compared with related technologies, the high-temperature quartz boat positioning and clamping device provided by this utility model has the following beneficial effects: This utility model provides a high-temperature quartz boat positioning and clamping device. Existing technologies use the three end faces of the quartz boat as a reference for positioning, which requires high precision in the quartz boat's machining, with flatness, parallelism, and perpendicularity requirements within 0.05. In actual production, significant machining deviations in the quartz boat lead to ineffective insertion of silicon wafers, causing equipment jamming and severe leakage. This device uses the boat's rod as a positioning surface, employing a PEEK straightening plate and comb teeth to straighten the silicon wafers. The straightening plate's position reference is the quartz boat rod, and its position changes synchronously with the rod, ensuring consistent relative positions between the boat rod and the straightening plate. To avoid hard contact between the straightening plate and the quartz boat and silicon wafer during straightening, a spring mechanism achieves soft contact, reducing damage to both the quartz boat and silicon wafer. Attached Figure Description

[0018] Figure 1 A schematic diagram of the structure of a high-temperature quartz boat positioning and clamping device provided by this utility model; Figure 2 for Figure 1 The diagram shows the side structure. Figure 3 for Figure 2 The enlarged view at point A is shown below; Figure 4 for Figure 2 The diagram shows a partial structural schematic.

[0019] Labels in the diagram: 1. Base plate; 2. Positioning plate; 3. Boat rod; 4. Quartz boat body; 5. Silicon wafer; 6. Auxiliary plate; 7. Side plate; 8. Mounting plate; 9. Connector; 10. Positioning rod; 11. End face connecting plate; 12. Round rod; 13. Comb teeth; 14. Connector; 15. Square plate; 16. Fixing plate; 18. Protective pad; 19. Regularizing plate; 20. Spring. Detailed Implementation

[0020] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0021] The specific implementation of this utility model will be described in detail below with reference to specific embodiments.

[0022] Please see Figures 1 to 4This utility model provides a high-temperature quartz boat positioning and clamping device, comprising: a base plate 1, a positioning plate 2 mounted on the upper surface of the base plate 1, a quartz boat body 4 mounted on the upper surface of the positioning plate 2, a plurality of boat rods 3 mounted inside the quartz boat body 4, an auxiliary plate 6 fixedly connected to the arc surface of one of the boat rods 3, a connector 9 provided on the upper surface of the auxiliary plate 6, two round rods 12 fixedly connected to the side of the connector 9 near the quartz boat body 4, a connecting member 14 fixedly connected to the end of the round rods 12 away from the connector 9, a square plate 15 fixedly connected to the side of the connecting member 14 near the connector 9, and the inner wall of the square plate 15 sliding. Two positioning rods 10 are connected. A fixing plate 16 is fixedly connected to the side of the positioning rods 10 and the connecting piece 9 that are close to each other. A side plate 7 is fixedly connected to the upper end of the side of the two fixing plates 16 that are close to each other. Several comb teeth 13 are fixedly connected to the side of the two side plates 7 that are close to each other. A regularizing plate 19 is fixedly connected to the side of the two fixing plates 16 that are close to each other. An mounting plate 8 is installed on the side of the quartz boat body 4 away from the connecting piece 9. An end face connecting plate 11 is installed on the end of the quartz boat body 4 away from the auxiliary plate 6. The mounting plate 8 is installed on the end face connecting plate 11. Several silicon wafers 5 are arranged between the two boat rods 3 and the two side plates 7. When it is necessary to clamp the silicon wafer 5, the fixing plate 16 near the square plate 15 is pulled to move. The fixing plate 16 drives the spring 20 to retract, and the positioning rod 10 slides on the inner wall of the square plate 15. The fixing plate 16 drives the side plate 7 and the comb teeth 13 to move, pulling the silicon wafer 5 to move. Then the silicon wafer 5 is moved above the quartz boat. The disc is then aligned with the gap between the two comb teeth 13. The fixing plate 16 is then released and the spring 20 is stretched. The rebound force of the spring 20 drives the two side plates 7 and the two straightening plates 19 to move closer to each other. Then the side plate 7 drives the comb teeth 13 to move. Then the side plate 7 and the straightening plate 19 clamp and limit each other. Then the straightening plate 19 and the side plate 7 are pulled to loosen them. Then the silicon wafer 5 enters the boat rod 3. The two straightening plates 19 are fixedly connected to the side that is close to each other. The protective pads 18 are rubber pads. The protective pad 18 protects the silicon wafer 5, preventing wear on the aligning plate 19 when clamping the silicon wafer 5. The positioning rod 10 has a circular cross-section and is made of stainless steel. The positioning rod 10 limits the spring 20, preventing deformation during use and improving its service life. The mounting plate 8 has a rectangular cross-section and is made of ceramic. Ceramic material has excellent wear resistance, effectively reducing equipment wear and extending tool life. Several comb teeth 13 are staggered with the slots on the boat rod 3, and the comb teeth 13 are evenly distributed on the side plate 7. The round rod 12 has a circular cross-section and is made of stainless steel. The stainless steel material increases the service life of the round rod 12, preventing excessive corrosion that could lead to breakage. If the round rod 12 breaks, the connecting piece 14 will fall off. The working principle of the high-temperature quartz boat positioning and clamping device provided by this utility model is as follows: When it is necessary to clamp the silicon wafer 5, the fixed plate 16 near the square plate 15 is pulled to move. The fixed plate 16 drives the spring 20 to retract, and the positioning rod 10 slides on the inner wall of the square plate 15. The fixed plate 16 drives the side plate 7 and the comb teeth 13 to move, pulling the silicon wafer 5 to move. Then, the silicon wafer 5 is moved above the quartz boat. Then, the circular piece is aligned with the gap between the two comb teeth 13. Then, the fixed plate 16 is released and the spring 20 is stretched. The rebound force of the spring 20 drives the two side plates 7 and the two leveling plates 19 to move closer to each other. Then, the side plate 7 drives the comb teeth 13 to move. Then, the side plate 7 and the leveling plate 19 clamp and limit the movement. Then, the leveling plate 10 is pulled to move the comb teeth 13. The main plate 19 and side plate 7 are loosened, and then the silicon wafer 5 enters the boat rod 3. The irregular plate 17 can limit the square plate 15 to prevent the irregular plate 17 from falling off the positioning rod 10 during use. The protective pad 18 can protect the silicon wafer 5 to prevent wear when the regular plate 19 clamps the silicon wafer 5. The positioning rod 10 can limit the spring 20 to prevent the spring 20 from deforming during use and improve the service life of the spring 20. The ceramic material has excellent wear resistance and can effectively reduce the wear of the equipment and extend the tool life. The stainless steel material can increase the service life of the round rod 12 and prevent the round rod 12 from being broken due to excessive corrosion during use. After the round rod 12 breaks, the connecting part 14 will fall off.

[0023] The circuits and controls involved in this utility model are all existing technologies, and will not be described in detail here.

[0024] The above description is merely an embodiment of this utility model and does not limit the patent scope of this utility model. Any equivalent structural or procedural transformations made based on the content of this utility model specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this utility model.

Claims

1. A high-temperature quartz boat positioning and clamping device, characterized in that, include: A base plate (1) is provided with a positioning plate (2) on its upper surface. A quartz boat body (4) is provided on the upper surface of the positioning plate (2). Several boat rods (3) are installed inside the quartz boat body (4). An auxiliary plate (6) is fixedly connected to the arc surface of one of the boat rods (3). A connector (9) is provided on the upper surface of the auxiliary plate (6). Two round rods (12) are fixedly connected to the side of the connector (9) near the quartz boat body (4). A connecting piece (14) is fixedly connected to the end of the round rod (12) away from the connector (9). A square plate (15) is fixedly connected to the side of the connecting piece (14) near the connector (9). Two positioning rods (10) are slidably connected to the inner wall of the square plate (15). A fixing plate (16) is fixedly connected to the side of the positioning rod (10) and the connector (9) that are close to each other. A side plate (7) is fixedly connected to the upper end of the side of the two fixing plates (16) that are close to each other. A number of comb teeth (13) are fixedly connected to the side of the two side plates (7) that are close to each other. A regular plate (19) is fixedly connected to the side of the two fixing plates (16) that are close to each other. An mounting plate (8) is installed on the side of the quartz boat body (4) away from the connector (9). An end face connecting plate (11) is installed on the end of the quartz boat body (4) away from the auxiliary plate (6). The mounting plate (8) is installed on the end face connecting plate (11). A number of silicon wafers (5) are provided between the two boat rods (3) and the two side plates (7).

2. The high-temperature quartz boat positioning and clamping device according to claim 1, characterized in that, The two regular plates (19) are fixedly connected to a protective pad (18) on the side that is close to each other. The protective pad (18) is a rubber pad.

3. The high-temperature quartz boat positioning and clamping device according to claim 1, characterized in that, The positioning rod (10) has a circular cross-section and is made of stainless steel.

4. The high-temperature quartz boat positioning and clamping device according to claim 1, characterized in that, The mounting plate (8) has a rectangular cross-section and is a ceramic plate.

5. The high-temperature quartz boat positioning and clamping device according to claim 1, characterized in that, Several comb teeth (13) are staggered with the slots on the boat rod (3), and several comb teeth (13) are evenly distributed on the side plate (7).

6. The high-temperature quartz boat positioning and clamping device according to claim 1, characterized in that, The cross-section of the round rod (12) is circular, and the round rod (12) is a stainless steel rod.

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