A device for cleaning a drug solution on an arm

Abstract

The application discloses a device for cleaning chemical liquid on an ARM, and relates to the field of wafer manufacturing equipment cleaning, which comprises a device cavity and a device base, an ARM device is located in the device cavity, the device base is connected to the device cavity, a clean water pipe is installed on the device base, and a pipe opening of the clean water pipe faces the ARM device. The ARM device is cleaned on the surface through the clean water pipe after work, chemical liquid remaining on the surface of the ARM device is effectively removed, and negative effects caused by the residual chemical liquid in the subsequent wafer conveying process are reduced.

Description

Technical Field

[0001] This application relates to the technical field of cleaning wafer manufacturing equipment, and more specifically, to an apparatus for cleaning liquid on ARM wafers. Background Technology

[0002] In many fields, such as semiconductor manufacturing, precision electronic component production, and biopharmaceuticals, there are strict requirements for product surface cleaning. Among these requirements, various acid and alkali solutions are needed to remove metal ions from the surface of these products.

[0003] The ARM (Archive Module) is a transfer device used in the wafer fabrication process. After the ARM is cleaned, the following problems often occur: residual chemicals remain on the ARM, which can drip onto the wafer during subsequent operation, causing wafer contamination; some special chemicals condense into droplets on the ARM after cleaning. Once these droplets form, if not cleaned promptly, they are very likely to drip onto the wafer surface during subsequent wafer transfer. As the core carrier in semiconductor manufacturing, the surface quality of the wafer directly affects the performance and yield of the final product. Dripped chemicals forming a thick film on the wafer surface introduce impurities, causing surface defects, altering the surface's electrical properties, and severely impacting the final product's performance.

[0004] In conclusion, how to clean the residual liquid on the ARM is a problem that urgently needs to be solved by those skilled in the art. Utility Model Content

[0005] In view of this, the purpose of this application is to provide a device for cleaning the chemical solution on the ARM device, which can effectively clean the residual chemical solution on the surface of the ARM device with pure water in a timely manner, remove the chemical residue on the surface of the ARM device, and reduce the negative impact of these residual chemical solutions on the subsequent wafer transfer process.

[0006] To achieve the above objectives, this application provides the following technical solution:

[0007] A device for cleaning liquid on an ARM device includes a device cavity and a device base. The ARM device is located in the device cavity, and the device base is connected to the device cavity. A clean water pipe is installed on the device base, and the opening of the clean water pipe faces the ARM device.

[0008] Preferably, the water pipe is a flexible hose, and the device base has an installation channel for the water pipe to pass through. The outer wall of the water pipe is in contact with the inner wall of the installation channel. The installation channel includes a straight section and a curved section. The straight section is connected to one end of the curved section. The end of the straight section away from the curved section is located on the end face of the device base and faces the ARM device. The end of the curved section away from the straight section is located on the side wall of the device base.

[0009] Preferably, the device base is further provided with a detection channel, in which a detection sensor is embedded. The detection channel includes an installation part and a wiring part that are interconnected. The end of the installation part away from the wiring part and the end of the straight section away from the curved section are located on the same side of the device base.

[0010] Preferably, the device base has two fastening threaded holes, one end of which is connected to the mounting part or straight section, and the other end is located on the outer side wall of the device base. The device base is threadedly connected to a fastening bolt through the fastening threaded holes.

[0011] Preferably, the device base includes two sub-base bodies that are detachably connected to each other. The sub-base bodies are provided with assembly slots. When the two sub-base bodies are connected to each other, the slots of the two assembly slots are aligned and form an installation channel.

[0012] Preferably, one of the sub-base bodies has a mounting threaded hole, and the other sub-base body has a mounting operation hole. When the two sub-base bodies are connected to each other, the mounting threaded hole and the mounting operation hole are coaxially aligned and connected. A mounting bolt is threadedly connected to the device base through the mounting threaded hole, and the screw head of the mounting bolt is located in the mounting operation hole.

[0013] Preferably, the device base is a rotating body, the port of the straight section of the mounting channel is located on the end face of the device base, the device base and the device cavity are rotatably arranged relative to each other, and the axis of rotation is the geometric axis of the device base.

[0014] Preferably, a limiting member is connected to the device base, and a limiting waist hole is opened on the device cavity. The center of the arc trajectory of the limiting waist hole is located on the axis of the device base, and the limiting member is located inside the limiting waist hole.

[0015] Preferably, a coaxial limiting disc is formed on the device base, and the limiting element is a limiting screw. The limiting screw is threaded onto the limiting disc, and the screw heads of the limiting disc and the limiting screw respectively abut against the opposite sides of the device cavity.

[0016] Preferably, the water pipe is made of PFA.

[0017] The device provided in this application is for cleaning chemical solutions on an ARM device. The ARM device operates within a device cavity. After operation, chemical solutions remain on the device. A device base located within the device cavity guides a water pipe to spray water toward the ARM device, thereby removing the residual chemical solutions on the ARM device and reducing the negative impact of the residual chemical solutions on the wafer. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this application. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0019] Figure 1 A schematic diagram of the overall structure of the device for cleaning the drug solution on the ARM provided in this application;

[0020] Figure 2 A cross-sectional view of the device for cleaning the drug solution on the ARM provided in this application;

[0021] Figure 3 A structural perspective view of the device base for the apparatus for cleaning the drug solution on the ARM provided in this application;

[0022] Figure 4 A schematic diagram of the structure of one of the sub-base bodies of the device for cleaning the medicine on the ARM provided in this application;

[0023] Figure 5 A schematic diagram of another sub-base body of the device for cleaning the medicine liquid on the ARM provided in this application.

[0024] Figures 1-5 In the accompanying drawings, the reference numerals include:

[0025] 1. Device cavity; 11. Restricting waist hole; 2. Device base; 21. Sub-base body; 211. Assembly groove; 22. Installation channel; 221. Straight section; 222. Bending section; 23. Detection channel; 231. Mounting part; 232. Wiring part; 24. Mounting threaded hole; 25. Mounting operation hole; 26. Fastening threaded hole; 27. Limiting plate; 28. Limiting component; 3. Clean water pipe; 4. Detection sensor. Detailed Implementation

[0026] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0027] Unless otherwise defined, the technical or scientific terms used in this application shall have the ordinary meaning understood by one of ordinary skill in the art to which this application pertains. The terms "first," "second," and similar words used in this application do not indicate any order, quantity, or importance. Terms such as "connected" or "linked" are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. Terms such as "upper," "lower," "left," and "right" are used only to indicate relative positional relationships; when the absolute position of the described object changes, the relative positional relationship may also change accordingly. An embodiment of this application discloses a device for cleaning medicinal liquid on an ARM.

[0028] The core of this application is to provide a device for cleaning the medicinal liquid on an ARM.

[0029] Please refer to Figure 1 and 2 .

[0030] The device for cleaning the cleaning solution on an ARM wafer provided in this application includes a device cavity 1 and a device base 2. The device cavity 1 is a semi-enclosed space, and the ARM wafer (not shown in the figure) is located inside the device cavity 1 for tasks such as wafer transfer. The device base 2 is located on the inner wall of the device cavity 1, and a clean water pipe 3 is installed on the device base 2. One end of the clean water pipe 3 is connected to a pure water source located outside the device cavity 1, and the other end extends into the device cavity 1 and faces the ARM wafer under the guidance of the device base 2.

[0031] like Figure 2 As shown, the device base 2 is a rotating body, installed on the inner top wall of the device cavity 1, and the axis of the device base 2 is vertical. The water pipe 3 is a flexible hose, and in this embodiment, the material of the water pipe 3 is preferably PFA. The device base 2 has an installation channel 22 for the water pipe 3 to pass through. The installation channel 22 includes a straight section 221 and a curved section 222. The straight section 221 is connected to one end of the curved section 222. As the name suggests, the trajectory of the straight section 221 is a straight line, and the trajectory of the curved section 222 is an arc. The end of the straight section 221 away from the curved section 222 is located on the lower end face of the device base 2 and faces the ARM device. The end of the curved section 222 away from the straight section 221 is located on the side wall of the device base 2.

[0032] like Figure 2As shown, the water pipe 3 enters laterally through the curved section 222 and finally exits from the port of the straight section 221. At this time, the opening of the water pipe 3 is vertically downward and facing the ARM device. After the pure water source is turned on, the opening of the water pipe 3 sprays pure water towards the ARM device. There is friction between the outer wall of the water pipe 3 and the inner wall of the installation channel 22. During the process of the water pipe 3 spraying pure water, the friction between the water pipe 3 and the inner wall of the installation channel 22 can keep the water pipe 3 and the device base 2 relatively stationary. At the same time, the water pipe 3 can be manually pushed and pulled before starting the cleaning work to adjust the relative position of the water pipe 3 relative to the device base 2. During the adjustment process, the end of the water pipe 3 always remains stable, thereby adjusting the height position of the opening of the water pipe 3 relative to the end face of the device base 2. That is, the spray height of the water pipe 3 relative to the ARM device can be adaptively adjusted.

[0033] After the ARM device is used, the above-mentioned device for cleaning the chemical solution on the ARM device sprays pure water from the water pipe 3 downwards to remove the chemical agents on the surface of the ARM device, effectively solving the problem that the chemical agents remaining on the surface of the ARM device after operation cannot be effectively cleaned.

[0034] The apparatus for cleaning the medicine on the ARM provided in this application will be described in more detail below with reference to the accompanying drawings and specific embodiments.

[0035] In one specific implementation, reference is made to... Figure 1 and 2 .

[0036] Specifically, the device base 2 also has a detection channel 23, through which a detection sensor 4 is embedded. The detection channel 23 includes a mounting part 231 and a wiring part 232 that are interconnected. The diameter of the mounting part 231 is larger than the diameter of the wiring part 232. The end of the mounting part 231 away from the wiring part 232 and the end of the straight segment 221 away from the curved segment 222 are located on the same side of the device base 2. The length direction of the mounting part 231 is parallel to the length direction of the straight segment 221. The extension trajectory of the wiring part 232 is an arc, and the end of the wiring part 232 away from the mounting part 231 is located on the side wall of the device base 2. The detection sensor 4 is located inside the mounting part 231, and the wiring part 232 is used for the extension of the power line, signal line, and other wires of the detection sensor 4 out of the device base 2. The detection sensor 4 is a vision sensor, which is used to detect the specific position of the ARM device relative to the device base 2, the residual amount of medicine at the location directly opposite the water pipe 3, etc., and to provide feedback and adjustment to the pure water source connected to the water pipe 3, controlling parameters such as whether it is turned on or off, and the water flow rate, thereby improving work efficiency and cleaning effect.

[0037] Based on the above embodiments, such as Figure 3 As shown.

[0038] Specifically, one of the sub-base bodies 21 has two fastening threaded holes 26, the axes of which are horizontal. One end of one fastening threaded hole 26 is connected to the mounting part 231, and the other end is connected to the straight section 221. The end of the fastening threaded hole 26 away from the mounting part 231 or the straight section 221 is located on the outer wall of the device base 2. The device base 2 can be threaded with a fastening bolt (not shown in the figure) through the fastening threaded hole 26. The end of the fastening bolt abuts against the side wall of the detection sensor 4 or the outer wall of the water pipe 3, thereby increasing the friction between the detection sensor 4 or the water pipe 3 and the device base 2, thus improving its stability in the working state and the detection accuracy of the detection sensor 4.

[0039] Based on the above embodiments, such as Figure 3 , 4 As shown in Figure 5.

[0040] Specifically, the device base 2 includes two detachably connected sub-base bodies 21. Each sub-base body 21 has two assembly slots 211 on one side facing each other. When the two sub-base bodies 21 are connected, the openings of the assembly slots 211 are aligned and connected to form a detection channel 23 and an installation channel 22, respectively. The separate design of the device base 2 allows the clean water pipe 3 to be installed on the device base 2 without friction-through pipe insertion and the detection sensor 4 to be installed without wire threading.

[0041] like Figure 3 , 4 As shown in Figure 5, one sub-base 21 has multiple threaded mounting holes 24, and the other sub-base 21 has multiple operating mounting holes 25. When the two sub-bases 21 are joined together, the threaded mounting holes 24 and the operating mounting holes 25 are coaxially aligned and connected. The diameter of the operating mounting hole 25 is larger than the diameter of the threaded mounting hole 24. A mounting bolt (not shown in the figure) is threaded onto the device base 2 through the threaded mounting hole 24, and the bolt head is located inside the operating mounting hole 25. After the mounting bolt is tightened, the bolt head generates a retaining force against the sub-base 21 where the operating mounting hole 25 is located. Thus, the mounting bolt maintains a stable connection between the two sub-bases 21. In this embodiment, there are four operating mounting holes 25 and four threaded mounting holes 24.

[0042] Based on any of the above embodiments, such as Figure 1 and 2 As shown.

[0043] Specifically, the device base 2 and the device cavity 1 are rotatably arranged relative to each other, with the axis of rotation being the geometric axis of the device base 2 itself. A limiting disk 27 is coaxially and integrally formed on the device base 2, located at the end of the device base 2 away from the ARM device. The ports of the mounting channel 22 and the detection channel 23, at the ends away from the ARM device, are both located at the edge of the limiting disk 27. The top of the device cavity 1 is a horizontal plate, through which the device base 2 passes vertically. The limiting disk 27 is located on the side of the horizontal plate away from the ARM device. A limiting member 28 is connected to the device base 2, and three limiting waist holes 11 are opened on the device cavity 1. The center of the arc trajectory of each limiting waist hole 11 is located on the axis of the device base 2, and the three limiting waist holes 11 are arranged in a circumferential array around the device base 2. The device base 2 is connected to a limiting member 28. The number of limiting members 28 is the same as the number of limiting waist holes 11. Each limiting member 28 is located in a limiting waist hole 11. During the rotation of the device base 2, the length range of the limiting waist hole 11 is the range of motion of the limiting member 28. In this embodiment, the rotation angle range of the device base 2 is 30°.

[0044] like Figure 1 As shown, the limiting component 28 is a limiting screw, which is threaded onto the limiting plate 27 from bottom to top, meaning the axis of the limiting screw is parallel to the axis of the device base 2. When the limiting screw is tightened, the screw heads of the limiting plate 27 and the limiting screw respectively abut against the opposite sides of the horizontal plate of the device cavity 1. At this time, the frictional force between the screw heads of the limiting screw and the limiting plate 27 against the horizontal plate prevents the device base 2 from rotating easily, and the device base 2 and the device cavity 1 maintain a stable relative state. Before starting the pure water cleaning, adjust the circumferential angle of the device base 2 according to the specific situation of the ARM device. After adjustment, it can be used.

[0045] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other.

[0046] The above provides a detailed description of an apparatus for cleaning liquid on an ARM (arm unit). Specific examples have been used to illustrate the principles and implementation methods of this application. The descriptions of the embodiments above are merely for the purpose of helping to understand the method and core ideas of this application. It should be noted that those skilled in the art can make various improvements and modifications to this application without departing from its principles, and these improvements and modifications also fall within the protection scope of this application.

Claims

1. A device for cleaning a chemical liquid on an ARM, characterized by, The device includes a device cavity (1) and a device base (2). The ARM device is located inside the device cavity (1). The device base (2) is connected to the device cavity (1). A clean water pipe (3) is installed on the device base (2). The opening of the clean water pipe (3) faces the ARM device.

2. The device for cleaning the chemical liquid on the ARM according to claim 1, characterized in that, The water pipe (3) is a flexible hose. The device base (2) has an installation channel (22) through which the water pipe (3) passes. The outer wall of the water pipe (3) is in contact with the inner wall of the installation channel (22). The installation channel (22) includes a straight section (221) and a curved section (222). The straight section (221) is connected to one end of the curved section (222). The end of the straight section (221) away from the curved section (222) is located on the end face of the device base (2) and faces the ARM device. The end of the curved section (222) away from the straight section (221) is located on the side wall of the device base (2).

3. The device for cleaning the liquid medicine on the ARM according to claim 2, characterized in that, The device base (2) is also provided with a detection channel (23), and a detection sensor (4) is embedded in the detection channel (23). The detection channel (23) includes an installation part (231) and a wiring part (232) that are connected to each other. The end of the installation part (231) away from the wiring part (232) and the end of the straight section (221) away from the curved section (222) are located on the same side of the device base (2).

4. The device for cleaning the chemical liquid on the ARM according to claim 3, characterized in that, The device base (2) has two fastening threaded holes (26). One end of the fastening threaded hole (26) is connected to the mounting part (231) or the straight section (221), and the other end is located on the outer side wall of the device base (2). The device base (2) is threadedly connected to a fastening bolt through the fastening threaded hole (26).

5. The apparatus for cleaning the medicinal solution on an ARM according to any one of claims 2-4, characterized in that, The device base (2) includes two sub-base bodies (21) that are detachably connected to each other. The sub-base bodies (21) are provided with assembly slots (211). When the two sub-base bodies (21) are connected to each other, the slots of the two assembly slots (211) are aligned and form an installation channel (22).

6. The apparatus for cleaning the medicinal liquid on the ARM according to claim 5, characterized in that, One of the sub-base bodies (21) has a mounting threaded hole (24), and the other sub-base body (21) has a mounting operation hole (25). When the two sub-base bodies (21) are connected to each other, the mounting threaded hole (24) and the mounting operation hole (25) are coaxially aligned and connected. The device base (2) is threaded with a mounting bolt through the mounting threaded hole (24), and the head of the mounting bolt is located in the mounting operation hole (25).

7. The apparatus for cleaning the medicinal solution on an ARM according to any one of claims 2-4, characterized in that, The device base (2) is a rotating body, and the port of the straight segment (221) of the mounting channel (22) is located on the end face of the device base (2). The device base (2) and the device cavity (1) are rotatably arranged relative to each other, and the axis of rotation is the geometric axis of the device base (2).

8. The apparatus for cleaning the medicinal liquid on the ARM according to claim 7, characterized in that, A limiting member (28) is connected to the device base (2), and a limiting waist hole (11) is opened on the device cavity (1). The center of the arc trajectory of the limiting waist hole (11) is located on the axis of the device base (2), and the limiting member (28) is located inside the limiting waist hole (11).

9. The apparatus for cleaning a liquid chemical on an ARM according to claim 8, wherein, A coaxial limiting disk (27) is formed on the device base (2). The limiting member (28) is a limiting screw. The limiting screw is threaded onto the limiting disk (27). The screw heads of the limiting disk (27) and the limiting screw respectively abut against the opposite sides of the device cavity (1).

10. The apparatus for cleaning the medicinal solution on an ARM according to any one of claims 2-4, characterized in that, The water pipe (3) is made of PFA.

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