An apparatus for cleaning the inner surface of a polycrystalline silicon reduction furnace

Abstract

The utility model provides a kind of device for cleaning the inner surface of polycrystalline silicon reduction furnace, it is related to the technical field of cleaning equipment for polycrystalline silicon reduction furnace, it includes: shell, its outer top is equipped with the water storage pool of intercommunication first water pipe;Inner tube, it is located in the inside of shell, one end extends to the inside of water storage pool, the other end extends to the outside of shell and intercommunication second water pipe;Sleeve, it is fixedly connected with inner tube, and side wall surface is respectively equipped with water jet hole and through slot;Spray assembly, located in water jet hole;Cleaning assembly, it is equipped on the inner wall surface of through slot, for cleaning the inside of reduction furnace body;Connecting piece, for fixedly connecting sleeve and inner tube;Driving assembly, for driving inner tube rotation;Filtering assembly, for filtering wastewater in water storage pool and conveying to the inside of inner tube, the device can carry out all-round and deep cleaning to the inside of polycrystalline silicon reduction furnace body, also can secondary use after cleaning wastewater is recycled, avoid resource waste and environmental pollution.

Description

Technical Field

[0001] This utility model relates to the technical field of cleaning equipment for polysilicon reduction furnaces, specifically to a device for cleaning the inner surface of a polysilicon reduction furnace. Background Technology

[0002] The polysilicon reduction furnace is a core piece of equipment in the polysilicon production process. After long-term use, a large amount of silicon powder, impurities, and other residues accumulate on the inner surface of the furnace cylinder. These residues not only affect the heat transfer efficiency of the reduction furnace but may also contaminate the polysilicon products produced subsequently. Therefore, it is necessary to clean the inner surface of the polysilicon reduction furnace regularly. However, due to the complex internal shape and limited space of the reduction furnace, existing cleaning devices cannot achieve comprehensive and deep cleaning of the inner surface. Furthermore, during the cleaning process, a large amount of untreated cleaning wastewater is directly discharged, which not only wastes water resources but may also pollute the environment. Utility Model Content

[0003] This invention addresses the problem of the difficulty in thoroughly cleaning the interior of a polysilicon reduction furnace and the direct discharge of untreated wastewater after cleaning, which impacts the environment. It provides a device for cleaning the inner surface of a polysilicon reduction furnace, which can thoroughly clean the interior of the furnace and recycle the cleaning wastewater for reuse, thus avoiding resource waste and environmental pollution.

[0004] The technical solution adopted in this utility model is: An apparatus for cleaning the inner surface of a polysilicon reduction furnace is provided, comprising: The outer shell has a water storage tank on its top, and the water storage tank has an outlet inside; the outlet is connected to a first water supply pipe. The inner tube is located inside the outer shell, with one end passing through the top of the outer shell and the bottom of the water storage tank and extending into the interior of the water storage tank, and the other end passing through the bottom of the outer shell and extending into the exterior of the outer shell, and connected to the second water supply pipe. The sleeve is slidably connected to the inner tube, and water spray holes and through grooves are respectively opened on the side wall of the sleeve. The spray assembly is located inside the casing and sprays the interior of the reduction furnace body through spray holes; The cleaning component, located on the inner wall of the sleeve in the through groove, is used to clean the interior of the reduction furnace body; A connector, which is located on the outer wall of the sleeve, is used to fix the sleeve to the outer wall of the inner tube; The drive assembly, located inside the housing, is used to drive the inner tube to rotate about its own central axis. The filter assembly, which is connected to the first water supply pipe and the second water supply pipe respectively, is used to filter the wastewater in the water storage tank and transport it to the inside of the inner pipe.

[0005] Optionally, the spray assembly includes: The water distribution pipe is located inside the casing, with one end opening towards the inner pipe and the other end towards the inner top of the casing. The water guide pipe is located inside the casing. One end of the water guide pipe is open and connected to one end of the water distribution pipe, and the other end extends to the top of the inner casing. The nozzle is located inside the water spray hole and is located on the side wall of the water guide pipe; the nozzle is connected to the inside of the water guide pipe.

[0006] Optionally, the cleanup components include: A limiting frame is provided on the inner wall surface of the sleeve located in the through groove; The first support rod has one end hinged to the inner wall of the limiting frame; A connecting seat is located at the other end of the first support rod; The second support rod has one end hinged to the outer wall of the connecting seat; A brush plate is located at the other end of the second support rod, and the second support rod is hinged to the outer wall surface of the brush plate.

[0007] Optionally, the filtering component includes: A water storage tank, with one end open to allow the other end of the first water supply pipe to pass through; The filter cylinder is located inside the water storage tank, and one end of the filter cylinder is connected to the end of the first water supply pipe located inside the water storage tank. The drain pipe has one end connected to the other end of the filter cylinder, and the other end passes through the side wall of the water storage cylinder and extends to the outside of the water storage cylinder. The control valve is located at the opening at the other end of the sewage pipe; The water pump is connected to the sewage pipe and the second water supply pipe respectively.

[0008] Optionally, the driving component includes: The motor is located at the bottom inside the housing; The worm gear is located at the output end of the motor; The worm gear is located on the outer wall of the inner tube and meshes with the worm.

[0009] Optionally, the connector includes: A sleeve, which is located at the outer bottom of the sleeve; A threaded connector, located on the other side of the sleeve; A snap-fit ​​connector is fitted onto the outer wall of a threaded connector and is threadedly connected to the threaded connector. When the snap-fit ​​connector is threadedly connected to the threaded connector, the threaded connector is clamped on the outer wall surface of the sleeve.

[0010] Optionally, a slide bar is provided between the inner top and inner bottom of the limiting frame, and a slider is slidably connected to the outer wall of the slide bar; a spring is provided between the outer bottom of the slider and the inner bottom of the limiting frame, and the spring is sleeved on the outer wall of the slide bar; a push rod is provided on the outer wall of the slider and connected to the outer wall of the first support rod.

[0011] Optionally, there are multiple water spray holes, which are distributed circumferentially on the outer wall of the casing with the central axis of the casing as the axis of rotation, and are distributed on the outer wall of the casing along a direction parallel to the central axis of the casing.

[0012] Optionally, there are multiple through slots, which are distributed circumferentially on the outer wall surface of the sleeve with the central axis of the sleeve as the rotation axis.

[0013] The beneficial effects of this utility model are: 1. The reduction furnace body to be cleaned is placed inside the water storage tank. Then, cleaning water is poured into the water storage tank, and the drive component and filter component are operated at the same time. The drive component drives the inner tube to rotate, which in turn drives the sleeve to rotate. The filter component discharges the cleaning water from the water storage tank through the outlet of the water storage tank. The discharged cleaning water is transported to the inside of the filter component through the first water supply pipe for filtration. The filtered liquid is then passed into the inside of the inner tube, and then into the inside of the sleeve. Finally, it is sprayed out from the spray component on the side wall of the sleeve to rinse the inner surface of the reduction furnace body. 2. By opening a through groove on the outer wall of the sleeve and cleaning components inside the through groove, when the drive component is running, the drive component will drive the inner tube to rotate synchronously, and the cleaning components inside the through groove on the side wall of the sleeve can clean the inner surface of the reduction furnace body, and can also work with the cleaning water sprayed by the spray component to perform a more thorough cleaning. Attached Figure Description

[0014] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0015] Figure 1 This is a three-dimensional structural schematic diagram of a device for cleaning the inner surface of a polysilicon reduction furnace disclosed in this embodiment; Figure 2 for Figure 1 A partial internal structure diagram; Figure 3 This is a structural diagram of the connector, drive assembly, and part of the filter assembly; Figure 4 This is a structural diagram of the spray assembly and the cleaning assembly; Figure 5 This is a schematic diagram of the filter assembly.

[0016] Figure label: 1-Outer shell, 2-Water storage tank, 3-Support base, 4-Reduction furnace body, 5-Inner tube, 6-Shell, 7-Cleaning assembly, 8-First water supply pipe, 9-Filter assembly; 10-Water pump, 11-Second water supply pipe, 12-Connector, 13-Sealing ring, 14-Sleeve, 15-Sealing ring, 16-Threaded joint, 17-Snap-fit ​​block, 18-Motor, 19-Worm gear, 20-Worm wheel, 21-Through hole, 22-Water distribution pipe, 23-Water guide pipe, 24-Sprayer head, 25-Slide rod, 26-Spring, 27-Slider, 28-Push rod, 29-Outlet, 61-Spray hole, 62-Through groove, 71-Limit frame, 72-First support rod, 73-Connecting seat, 74-Second support rod, 75-Brush plate, 91-Water storage tank, 92-Filter cylinder, 93-Drainage pipe, 94-Control valve. Detailed Implementation

[0017] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0018] The following disclosure provides many different embodiments or examples for implementing various structures of this invention. To simplify the disclosure, specific examples of components and arrangements are described below. Of course, these are merely examples and are not intended to limit the scope of this invention.

[0019] The embodiments of the utility model will now be described in detail with reference to the accompanying drawings.

[0020] Example:

[0021] Reference Figures 1-5This embodiment provides an apparatus for cleaning the inner surface of a polysilicon reduction furnace, comprising a housing 1, a water storage tank 2 disposed on the top of the housing 1, the water storage tank 2 being generally annular, with the inner bottom of the water storage tank 2 sealed and the outer top open, and the inner diameter of the water storage tank 2 being larger than the outer diameter of the reduction furnace body 4. A support base 3 is disposed inside the water storage tank 2, and the reduction furnace body 4 is disposed on the top of the support base 3. An inner tube 5 is rotatably connected to the inner wall of the housing 1, and a sleeve 6 is fixedly connected to the outer side of the inner tube 5. Water spray holes 61 and through grooves 62 are respectively opened on the side wall of the sleeve 6.

[0022] The outer casing 1 serves as the external frame of the entire cleaning device, supporting and protecting the internal components and providing a relatively enclosed space for the cleaning operation. The water storage tank 2 stores the clean water required for cleaning the polysilicon reduction furnace, providing a water source for the cleaning operation. The inner tube 5 is rotatably connected to the inner wall of the outer casing 1 and is the main channel for transporting cleaning water. The rotation of the inner tube 5 drives the sleeve 6 and cleaning assembly 7 to perform the cleaning operation. The sleeve 6 is fixedly connected to the outside of the inner tube 5 and can rotate with the inner tube 5. The cleaning assembly 7 is installed on the side wall of the sleeve 6 for cleaning the inner surface of the reduction furnace body 4.

[0023] In this embodiment, three sets of cleaning components 7 are provided on the side wall of the sleeve 6. That is, there are three through slots 62 opened on the side wall of the sleeve 6, and the included angle between adjacent through slots 62 is 60°. In addition, there are multiple water spray holes 61, such as seven water spray holes 61. The cleaning components 7 include three sets of limiting frames 71 disposed inside the three through slots 62 on the side wall of the sleeve 6. The inner wall of the limiting frame 71 is rotatably connected to a first support rod 72. The other end of the first support rod 72 is provided with a connecting seat 73. The inner wall of the connecting seat 73 is rotatably connected to a second support rod 74. The other end of the second support rod 74 is rotatably connected to a brush plate 75.

[0024] The limiting frame 71 provides an installation position for the first support rod 72, and internally houses a slide rod 25 and a spring 26 to restrict and push the movement of related components. Specifically, the slide rod 25 and the spring 26 are fixed to the inner wall of the limiting frame 71, and the inner ring of the spring 26 is slidably connected to the outer side of the slide rod 25. The slide rod 25 is fixed to the inner wall of the limiting frame 71, providing a sliding track for the slider 27. The spring 26 is fixed to the inner wall of the limiting frame 71, and the inner wall is slidably connected to the outer side of the slide rod 25, pushing the slider 27 to move through its own elastic force. Specifically, the slider 27 is slidably connected to the outer side of the slide rod 25, and one side of the slider 27 is fixedly connected to one end of the spring 26. A push rod 28 is rotatably connected to one side of the slider 27, and the end of the push rod 28 away from the slider 27 is rotatably connected to the outer side of the first support rod 72. The slider 27 is slidably connected to the outside of the slide rod 25. One side is fixedly connected to one end of the spring 26, and the other side is rotatably connected to the push rod 28. Under the action of the spring 26, it slides along the slide rod 25, pushing the push rod 28 to move. One end of the push rod 28 is rotatably connected to the slider 27, and the other end is rotatably connected to the outside of the first support rod 72, transmitting the movement of the slider 27 to the first support rod 72, thereby adjusting the shape of the cleaning assembly 7 so that the brush plate 75 better fits the inner surface of the reduction furnace. One end of the first support rod 72 is rotatably connected to the inner wall of the limiting frame 71, and the other end is rotatably connected to the second support rod 74 through the connecting seat 73, serving to support and transmit power. The connecting seat 73 connects the first support rod 72 and the second support rod 74, allowing them to rotate relative to each other. One end of the second support rod 74 is rotatably connected to the connecting seat 73, and the other end is rotatably connected to the brush plate 75, further transmitting power and adjusting the position of the brush plate 75. The brush plate 75 is rotatably connected to the second support rod 74 and directly contacts the inner surface of the reduction furnace body 4. It brushes the inner surface of the reduction furnace body 4 by rotating and moving.

[0025] A water outlet 29 is provided at the bottom of the water storage tank 2, and a first water supply pipe 8 is connected to the water outlet 29. A filter assembly 9 is provided at the end of the first water supply pipe 8 away from the water storage tank 2. The filter assembly 9 includes a water storage cylinder 91 located at the end of the first water supply pipe 8 away from the water storage tank 2, and a filter cylinder 92 is provided inside the water storage cylinder 91. The end of the first water supply pipe 8 away from the water storage tank 2 is connected to one side of the filter cylinder 92. The filter assembly 9 also includes a drain pipe 93 connected to one side of the filter cylinder 92, and a control valve 94 is provided on the outside of the drain pipe 93.

[0026] The first water supply pipe 8 connects the water storage tank 2 and the filter assembly 9, and is used to transport water from the water storage tank 2 to the filter assembly 9 for filtration. The water storage tank 91 houses the filter cylinder 92, providing space for the filtration process. The filter cylinder 92 filters the water flowing in from the first water supply pipe 8, removing impurities and ensuring the cleanliness of the cleaning water. The drain pipe 93 is used to discharge impurities and wastewater filtered out by the filter cylinder 92. The control valve 94 controls the opening and closing of the drain pipe 93, and also controls the flow rate, facilitating the discharge of impurities and wastewater when needed.

[0027] In this embodiment, a water pump 10 is also connected to one side of the water storage tank 91, and the outlet end of the water pump 10 is connected to a second water supply pipe 11. A connector 12 is provided at the bottom end of the inner pipe 5, and the inner wall of the second connector 12 is rotatably connected to the end of the second water supply pipe 11 away from the water pump 10. A sealing ring 13 is provided at the end of the second water supply pipe 11 away from the water pump 10, and the outer ring of the sealing ring 13 fits into the inner wall of the connector 12.

[0028] The water pump 10 draws filtered water from the water storage tank 91 and delivers it to the inner pipe 5 through the second water supply pipe 11, providing water pressure for the cleaning operation. The second water supply pipe 11 connects the water pump 10 and the inner pipe 5, delivering the water drawn by the water pump 10 to the inner pipe 5. The connector 12 is located at the bottom end of the inner pipe 5 and is rotatably connected to the end of the second water supply pipe 11 away from the water pump 10, realizing the delivery of water from the second water supply pipe 11 to the inner pipe 5 while ensuring that the inner pipe 5 can rotate. The sealing ring 13 is located at the end of the second water supply pipe 11 away from the water pump 10 and fits against the inner wall of the connector 12 to prevent water leakage from the connection.

[0029] The connectors include a sleeve 14, a threaded connector 16, and a snap-fit ​​connector 17. Specifically, the bottom end of the sleeve 6 is provided with a sleeve 14, and a sealing ring 15 is provided on the inner wall surface of the sleeve 14, and the sealing ring 15 fits into the sleeve 6.

[0030] The sleeve 14 is located at the bottom end of the sleeve 6, providing an installation position for the sealing ring 15 and the threaded joint 16. The sealing ring 15 is located on the inner wall of the sleeve 14 and fits into the outer side of the sleeve 6 to prevent water from leaking from the connection between the sleeve 6 and the sleeve 14.

[0031] Specifically, a threaded connector 16 is provided at the bottom of the sleeve 14, and a snap-fit ​​block 17 is threadedly connected to the outer side of the threaded connector 16.

[0032] The threaded connector 16 is located at the bottom of the sleeve 14 and is threadedly connected to the snap-fit ​​block 17 to fix the position of the sleeve 6. The snap-fit ​​block 17 is threadedly connected to the threaded connector 16 to fix the sleeve 6 and prevent the sleeve 6 from shifting during the cleaning process. It should be noted that in this embodiment, during the threaded connection between the threaded connector 16 and the snap-fit ​​block 17, the side wall of the threaded connector 16 will be bent toward its own central axis, that is, the inner diameter of the threaded connector 16 is variable.

[0033] The drive assembly includes a motor 18, a worm 19, and a worm wheel 20. Specifically, the motor 18 is installed inside the housing 1, the worm 19 is fixed to the output end of the motor 18, and the worm wheel 20 is installed on the outer side of the inner tube 5, with the outer side of the worm wheel 20 meshing with the outer side of the worm 19.

[0034] The motor 18 serves as a power source, providing power for the rotation of the cleaning device. The worm 19 is fixed at the output end of the motor 18 and meshes with the worm wheel 20, transmitting the rotation of the motor 18 to the worm wheel 20. The worm wheel 20 is located on the outside of the inner tube 5 and meshes with the worm 19, converting the rotation of the worm 19 into the rotation of the inner tube 5.

[0035] In the above embodiment, both the inner tube 5 and the sleeve 6 have through holes 21 on their inner walls, and the two sets of through holes 21 are designed symmetrically from top to bottom. The inner wall of the sleeve 6 is connected to a water distribution pipe 22.

[0036] Both the inner tube 5 and the sleeve 6 have through holes 21 on their inner walls. The two sets of through holes 21 are symmetrically designed and aligned with each other, meaning that the central axes of the two through holes 21 coincide. When water flows from the inner tube 5 into the sleeve 6, it will flow in through the two corresponding interconnected through holes 21. The water distribution pipe 22 is connected to the inner wall of the sleeve 6, distributing the water in the sleeve 6 to each water guide pipe 23.

[0037] Specifically, the inner wall of the water distribution pipe 22 is connected to three sets of vertically arranged water guide pipes 23, and the inner wall of the water guide pipes 23 is connected to several sets of high-pressure nozzles 24.

[0038] The water guide pipe 23 is vertically installed on the inner wall of the water distribution pipe 22, guiding water to each high-pressure nozzle 24. The high-pressure nozzle 24 is connected to the inner wall of the water guide pipe 23, spraying water out in a high-pressure form to rinse the inner surface of the reduction furnace body 4.

[0039] When cleaning the polysilicon reduction furnace, first place the furnace body 4 on the support base 3 inside the water storage tank 2 to ensure its stability and prepare for subsequent cleaning operations. Next, fix the sleeve 6 to the outer wall of the inner tube 5 using the threaded connection between the threaded connector 16 and the snap-fit ​​block 17 to secure the sleeve 6. Simultaneously, ensure that the sealing ring 15 on the inner wall of the sleeve 14 fits tightly against the outer side of the sleeve 6 to prevent water leakage. Start the water pump 10, which draws water from the storage tank 91. The water is then transported to the inner tube 5 through the second water supply pipe 11. Since the second water supply pipe 11 is rotatably connected to the connector 12 at the bottom of the inner tube 5, and a sealing ring 13 is provided at the connection, normal water delivery is ensured without leakage. Water in storage tank 2 first flows through the first water supply pipe 8 into the water storage tank 91 of the filter assembly 9, and then enters the filter cylinder 92 for filtration to remove impurities and ensure the cleanliness of the cleaning water. The filtered water remains in the water storage tank 91 and is pumped by the water pump 10 for use. When it is necessary to remove the filtered impurities and sewage, the control valve 94 on the outside of the drain pipe 93 is opened, and the impurities and sewage can be discharged from the drain pipe 93. Then, the motor 18 is started, which drives the worm gear 19 to rotate. Since the worm gear 19 is meshed with the worm wheel 20 on the outside of the inner tube 5, the rotation of the worm gear 19 will drive the worm wheel 20 to rotate, thereby causing the inner tube 5 to rotate on the inner wall of the outer shell 1. The inner tube 5 will then drive the sleeve 6 to rotate. After the water flows from the inner tube 5 into the sleeve 6, it enters the water distribution pipe 22. The water distribution pipe 22 distributes the water into three sets of vertically arranged water guide pipes 23. The water is sprayed out in a high-pressure form through several sets of high-pressure nozzles 24 on the inner wall of the water guide pipe 23 to wash the inner surface of the reduction furnace body 4, washing away some of the impurities on the surface. At this time, the cleaning water will fall back into the water storage tank 2 by gravity, thereby achieving the purpose of water circulation and saving water resources. When the inner tube 5 rotates and drives the sleeve 6 to rotate, it will drive the cleaning component 7 located in the through groove 62 on the side wall of the sleeve 6 to rotate as well. The brush plate 75 in the cleaning component 7 contacts the inner surface of the reduction furnace body 4 and brushes the inner surface during the rotation. Since a slider 27 is slidably connected to the slide rod 25 on the inner wall of the limiting frame 71, one side of the slider 27 is fixedly connected to one end of the spring 26, and the slider 27 is rotatably connected to the outer side of the first support rod 72 through the push rod 28, under the elastic force of the spring 26, the slider 27 will slide along the slide rod 25, pushing the push rod 28 to move, thereby changing the shape of the first support rod 72, the second support rod 74 and the brush plate 75, so that the brush plate 75 can better fit the inner surface of the reduction furnace body 4, improving the cleaning effect. Finally, the motor 18 and the water pump 10 are turned off, the rotation of the inner tube 5 and the water supply are stopped, and the reduction furnace body 4 is removed from the support seat 3 to complete the cleaning operation.

[0040] Finally, it should be noted that the above are merely preferred embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention can have various modifications and variations. Without conflict, the embodiments and features described in the embodiments of this application can be arbitrarily combined with each other. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. An apparatus for cleaning the interior surface of a polycrystalline silicon reduction furnace, characterized by, include: The outer shell has a water storage tank on its top, and the water storage tank has an outlet inside; the outlet is connected to a first water supply pipe. An inner tube is located inside the outer shell, with one end passing through the top of the outer shell and the bottom of the water storage tank and extending into the interior of the water storage tank, and the other end passing through the bottom of the outer shell and extending into the exterior of the outer shell, and connected to a second water supply pipe. A sleeve is provided on the outer wall of the inner tube, and water spray holes and through grooves are respectively opened on the side wall of the sleeve; A spray assembly is located inside the sleeve and sprays the interior of the reduction furnace body through the spray holes; A cleaning component, which is located on the inner wall of the sleeve in the through groove, is used to clean the interior of the reduction furnace body; A connector is provided on the outer wall surface of the sleeve for fixing the sleeve to the outer wall surface of the inner tube; A drive assembly, located inside the housing, is used to drive the inner tube to rotate about its own central axis. The filter assembly is connected to the first water supply pipe and the second water supply pipe respectively, and is used to filter the wastewater in the water storage tank and transport it to the inside of the inner pipe.

2. The apparatus for cleaning the inner surface of a polycrystalline silicon reduction furnace according to claim 1, wherein The spray assembly includes: The water distribution pipe is located inside the sleeve, with one end of the water distribution pipe opening towards the inner pipe and the other end facing the inner top of the sleeve. A water guide pipe is located inside the sleeve, with one end of the water guide pipe open and connected to one end of the water distribution pipe, and the other end extending to the inner top of the sleeve. The nozzle is located inside the water spray hole and is disposed on the side wall of the water guide pipe; the nozzle is connected to the interior of the water guide pipe.

3. The apparatus for cleaning the interior surface of a polycrystalline silicon reduction furnace of claim 2, wherein, The cleaning component includes: A limiting frame is provided on the inner wall surface of the sleeve located in the through groove; The first support rod has one end hinged to the inner wall of the limiting frame; A connecting seat is located at the other end of the first support rod; The second support rod has one end hinged to the outer wall of the connecting seat; A brush plate is disposed at the other end of the second support rod, and the second support rod is hinged to the outer wall surface of the brush plate.

4. The apparatus for cleaning the interior surface of a polycrystalline silicon reduction furnace of claim 3, wherein The filtering component includes: A water storage tank, with one end open to allow the other end of the first water supply pipe to pass through; A filter cylinder is located inside the water storage tank, and one end of the filter cylinder is connected to the end of the first water supply pipe located inside the water storage tank. The drain pipe has one end connected to the other end of the filter cylinder, and the other end penetrates the side wall of the water storage cylinder and extends to the outside of the water storage cylinder. A control valve is located at the opening at the other end of the drain pipe; A water pump is connected to both the sewage pipe and the second water supply pipe.

5. The apparatus for cleaning the interior surface of a polycrystalline silicon reduction furnace of claim 4, wherein, The driving component includes: The motor is located at the inner bottom of the housing; A worm gear is located at the output end of the motor; A worm gear is disposed on the outer wall surface of the inner tube and meshes with the worm.

6. The apparatus for cleaning the interior surface of a polycrystalline silicon reduction furnace of claim 5, wherein, The connector includes: A sleeve is provided at the outer bottom of the sleeve; A threaded connector is located on the other side of the sleeve; A snap-fit ​​connector is fitted onto the outer wall of the threaded connector and is threadedly connected to the threaded connector. When the snap-fit ​​connector is threadedly connected to the threaded connector, the threaded connector is clamped to the outer wall surface of the sleeve.

7. The apparatus for cleaning the interior surface of a polycrystalline silicon reduction furnace of claim 3, wherein A sliding rod is provided between the inner top and inner bottom of the limiting frame, and a slider is slidably connected to the outer wall surface of the sliding rod; a spring is provided between the outer bottom of the slider and the inner bottom of the limiting frame, and the spring is sleeved on the outer wall surface of the sliding rod; a push rod is provided on the outer wall surface of the slider and connected to the outer wall surface of the first support rod.

8. The apparatus for cleaning the interior surfaces of a polycrystalline silicon reduction furnace of claim 1, wherein, The number of water spray holes is multiple, and the multiple water spray holes are circumferentially distributed on the outer wall surface of the sleeve with the central axis of the sleeve as the rotation axis, and the multiple water spray holes are distributed on the outer wall surface of the sleeve along a direction parallel to the central axis of the sleeve.

9. The apparatus for cleaning the interior surfaces of a polycrystalline silicon reduction furnace of claim 1, wherein, The number of through slots is multiple, and the multiple through slots are distributed circumferentially on the outer wall surface of the sleeve with the central axis of the sleeve as the rotation axis.

Images