A polishing liquid recycling device and a polishing apparatus

Abstract

This invention provides a polishing slurry recycling device and polishing equipment. The polishing slurry recycling device includes a tank, a filter mechanism, an inlet pipe, and a rotation drive mechanism. A first receiving tank and a second receiving tank are formed within the tank. The filter mechanism is disposed within the first receiving tank. One end of the inlet pipe is located on the upper side of the tank and has an outlet. The inlet pipe is rotatable relative to the tank along its central axis. When the inlet pipe rotates to the first outlet position, the polishing slurry can be filtered and recycled through the first receiving tank and the filter mechanism therein. When the inlet pipe rotates to the second outlet position, waste polishing slurry can be discharged through the second receiving tank, thus achieving zoned recycling of the polishing slurry. Simultaneously, the rotation drive mechanism drives the inlet pipe to rotate and switch between the first and second outlet positions, thereby improving the automation level of the zoned recycling of the polishing slurry and increasing the recycling efficiency.

Description

Technical Field

[0001] This utility model relates to the field of polishing equipment technology, and in particular to a polishing liquid recycling device and polishing equipment. Background Technology

[0002] Chemical mechanical polishing (CMP) is a key process in semiconductor manufacturing, achieving nanoscale planarization through the mechanochemical interaction between the polishing slurry and the wafer surface. In semiconductor industry polishing equipment, to avoid waste of the polishing slurry, the issue of slurry recovery and recycling is inevitable. If the slurry cannot be recycled after each polishing cycle, it will significantly increase production costs for high-value semiconductor products. Therefore, the recycling of polishing slurry is a crucial aspect of the polishing process. Existing polishing equipment lacks effective methods for treating used polishing slurry, filtering, and recycling it, leading to increased costs. Utility Model Content

[0003] The purpose of this utility model is to provide a polishing slurry recycling device and polishing equipment, which aims to realize the recycling and reuse of polishing slurry in polishing equipment.

[0004] To solve the above-mentioned technical problems, the present invention provides a polishing slurry recycling device, comprising:

[0005] The tank body has a first liquid receiving tank and a second liquid receiving tank with their openings facing upwards, the first liquid receiving tank has a first drain outlet that communicates with the outside of the tank body through the tank wall, and the second liquid receiving tank has a second drain outlet that communicates with the outside of the tank body through the tank wall.

[0006] A filtration mechanism is disposed in the first liquid receiving tank and is configured to cover the first liquid outlet.

[0007] The inlet pipe has one end located on the upper side of the tank and has an outlet. The inlet pipe is rotatable relative to the tank along its central axis. When the inlet pipe is in the first outlet position, the outlet is vertically opposite to the opening of the first receiving tank. When the inlet pipe is in the second outlet position, the outlet is vertically opposite to the opening of the second receiving tank.

[0008] A rotation drive mechanism is provided, which is dynamically coupled to the inlet pipe to drive the inlet pipe to rotate.

[0009] Preferably, the upper end of the tank is covered with a cover, and the cover has a through hole; the liquid inlet pipe is inserted into the through hole, with one end of the liquid inlet pipe near the liquid outlet located inside the cover and the other end of the liquid inlet pipe away from the liquid outlet located outside the cover.

[0010] Preferably, the rotation drive mechanism is located outside the cover body, and the rotation drive mechanism is dynamically coupled to the end of the liquid inlet pipe away from the liquid outlet.

[0011] Preferably, the cover has a downward-facing protruding reinforcing bar arranged circumferentially along the groove, the reinforcing bar extending into the groove and abutting against the inner side of the groove sidewall.

[0012] Preferably, the perforation extends downward through the cover.

[0013] Preferably, the polishing slurry circulation and recovery device further includes a liquid distribution connector, the liquid distribution connector comprising:

[0014] The mounting part is sleeved on one end of the liquid inlet pipe;

[0015] The liquid outlet is provided extending radially from the mounting portion along the liquid inlet pipe, and the liquid outlet is provided at the end of the liquid outlet away from the liquid inlet pipe.

[0016] Preferably, a partition is provided in the tank, and the partition forms a first liquid receiving tank and a second liquid receiving tank at intervals in the tank; the upper end of the partition is provided with a notch for the end of the liquid outlet with the liquid outlet to pass through.

[0017] Preferably, the first drain outlet is disposed on the bottom wall of the first liquid receiving tank; the filtration mechanism includes:

[0018] The frame is box-shaped with the opening facing upwards, and mounting holes are provided on the bottom wall of the frame.

[0019] A filter plate is disposed at the mounting hole and is configured to cover the first drain port.

[0020] Preferably, the shape of the frame is adapted to the shape of the first liquid receiving tank.

[0021] Preferably, the frame has a lifting hole on its side wall.

[0022] Preferably, the rotation drive mechanism includes:

[0023] A power cylinder, wherein the drive end of the power cylinder is located on one side of the inlet pipe in the radial direction;

[0024] A driving component, the two ends of which are rotatably connected to the driving end of the power cylinder and the liquid inlet pipe, respectively.

[0025] Preferably, the inlet pipe is provided with a connecting flange, and the end of the drive component near the inlet pipe is rotatably connected to the connecting flange.

[0026] Preferably, the drive end of the power cylinder is arranged facing upwards, and the power cylinder is inclined from top to bottom towards the liquid inlet pipe.

[0027] To achieve the above objectives, this utility model also provides a polishing device, including the aforementioned polishing liquid recycling device.

[0028] Compared with the prior art, the present invention has the following beneficial effects:

[0029] The polishing slurry recycling device of this invention has a tank divided into a first receiving tank and a second receiving tank. When the inlet pipe rotates to the first outlet position, the polishing slurry can be filtered and recycled through the first receiving tank and the filter mechanism therein. When the inlet pipe rotates to the second outlet position, the waste polishing slurry can be discharged through the second receiving tank, thereby realizing the zoned recycling of polishing slurry. At the same time, the rotation drive mechanism drives the inlet pipe to rotate and switch between the first outlet position and the second outlet position, thereby improving the automation level of the zoned recycling of polishing slurry and improving the recycling efficiency of polishing slurry. Attached Figure Description

[0030] One or more embodiments are illustrated by way of example with reference numerals in the accompanying drawings. These illustrations do not constitute a limitation on the embodiments. Elements with the same reference numerals in the drawings are denoted as similar elements. Unless otherwise stated, the figures in the drawings are not to be limited by scale.

[0031] Figure 1 This is a schematic diagram of the polishing fluid recycling device provided in an embodiment of the present invention;

[0032] Figure 2 for Figure 1 A schematic diagram of the polishing fluid recycling device after the cover is removed;

[0033] Figure 3 for Figure 2 Schematic diagram of the structure at the middle tank;

[0034] Figure 4 for Figure 2 Schematic diagram of the structure at the liquid inlet pipe;

[0035] Figure 5 for Figure 1 A schematic diagram of the structure of the middle cover.

[0036] Explanation of reference numerals in the accompanying drawings of this utility model:

[0037] Polishing fluid circulation and recovery device 100, tank body 1, first liquid receiving tank 11, second liquid receiving tank 12, first drain port 13, first drain pipe 131, second drain port 14, second drain pipe 141, partition plate 15, notch 151, filter mechanism 2, frame 21, mounting hole 211, lifting hole 212, filter plate 22, inlet pipe 3, rotation drive mechanism 4, power cylinder 41, drive component 42, connecting flange 43, cover body 5, perforation 51, insert rib 52, liquid distribution connector 6, liquid outlet 61, mounting part 62, liquid outlet part 63.

[0038] The realization of the purpose, functional features and advantages of this utility model will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation

[0039] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0040] It should be noted that if the embodiments of this utility model involve directional indicators (such as up, down, left, right, front, back, etc.), the directional indicators are only used to explain the relative positional relationship and movement of the components in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indicators will also change accordingly.

[0041] Furthermore, if the embodiments of this utility model involve descriptions such as "first" or "second," these descriptions are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of indicated technical features. Therefore, features defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the technical solutions of the various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. If the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed by this utility model.

[0042] This invention provides a polishing slurry recycling device, which can be used in polishing equipment to achieve the recycling and reuse of polishing slurry. Figures 1 to 5 A preferred embodiment of the polishing slurry recycling device provided by this utility model is shown.

[0043] Please see Figures 1 to 5 In this embodiment, the polishing slurry circulation and recovery device 100 includes a tank 1, a filter mechanism 2, an inlet pipe 3, and a rotation drive mechanism 4. The tank 1 has a first liquid receiving tank 11 and a second liquid receiving tank 12 with their openings facing upwards. A first drain port 13 communicating with the outside of the tank 1 is provided through the wall of the first liquid receiving tank 11, and a second drain port 14 communicating with the outside of the tank 1 is provided through the wall of the second liquid receiving tank 12. The filter mechanism 2 is disposed within the first liquid receiving tank 11 and covers the first drain port 14. 3. Setup: One end of the inlet pipe 3 is located on the upper side of the tank body 1 and is provided with an outlet 61. The inlet pipe 3 is rotatable relative to the tank body 1 along the central axis of the inlet pipe 3. When the inlet pipe 3 is in the first outlet position, the outlet 61 is vertically opposite to the opening of the first receiving tank 11. When the inlet pipe 3 is in the second outlet position, the outlet 61 is vertically opposite to the opening of the second receiving tank 12. The rotation drive mechanism 4 is dynamically coupled to the inlet pipe 3 so as to drive the inlet pipe 3 to rotate.

[0044] Specifically, the opening of the tank 1 faces upwards. The specific shape and style of the tank 1 can be set according to the actual situation. For example, the tank 1 can be circular, triangular, or square. The following description will take a square tank 1 as an example. The tank 1 is provided with a partition structure to form a first liquid receiving tank 11 and a second liquid receiving tank 12 within the tank 1. The first liquid receiving tank 11 and the second liquid receiving tank 12 are not connected. The opening of the first liquid receiving tank 11 can be part of the opening of the tank 1; the opening of the first liquid receiving tank 11 can also be vertically opposite to the opening of the tank 1. Similarly, the opening of the second liquid receiving tank 12 can be part of the opening of the tank 1; the opening of the second liquid receiving tank 12 can also be vertically opposite to the opening of the tank 1. The arrangement direction of the first liquid receiving tank 11 and the second liquid receiving tank 12 can be set according to the actual situation. For example, the arrangement direction of the first liquid receiving tank 11 and the second liquid receiving tank 12 can be horizontal or the same direction. The following will take the arrangement direction of the first liquid receiving tank 11 and the second liquid receiving tank 12 as horizontal as an example, and define the arrangement direction of the first liquid receiving tank 11 and the second liquid receiving tank 12 as left and right. The side of the first liquid receiving tank 11 that is closer to the second liquid receiving tank 12 is the right side of the first liquid receiving tank 11, and the side of the second liquid receiving tank 12 that is closer to the first liquid receiving tank 11 is the left side of the second liquid receiving tank 12.

[0045] The first liquid receiving tank 11 has a first drain port 13 on its tank wall. After the polishing liquid flows into the first liquid receiving tank 11 from its opening, it can be discharged out of the tank body 1 through the first drain port 13. The first drain port 13 is usually equipped with a first drain pipe 131 for draining the liquid. The first drain port 13 can be located on the bottom wall, front side wall, rear side wall, or left side wall of the first liquid receiving tank 11. The following description will use an example where the first drain port 13 is located on the bottom wall of the first liquid receiving tank 11 and a first drain pipe 131 is provided at the first drain port 13.

[0046] The first liquid receiving tank 11 is equipped with a filter mechanism 2 that covers the first liquid outlet 13. In this way, the polishing liquid flowing into the first liquid receiving tank 11 will be filtered by the filter mechanism 2 before being discharged from the first liquid outlet 13 to the outside of the tank body 1.

[0047] Similarly, a second drain port 14 is provided on the wall of the second liquid receiving tank 12. After the polishing liquid flows into the second liquid receiving tank 12 from the opening of the second liquid receiving tank 12, it can be discharged out of the tank body 1 through the second drain port 14. A second drain pipe 141 is usually provided at the second drain port 14 for draining the liquid. The second drain port 14 can be located on the bottom wall, front side wall, rear side wall, or right side wall of the second liquid receiving tank 12. The following description will use an example where the second drain port 14 is located on the bottom wall of the second liquid receiving tank 12 and a second drain pipe 141 is provided at the second drain port 14.

[0048] The inlet pipe 3 is arranged horizontally, with one end located directly above the tank 1 and equipped with an outlet 61. The rotation drive mechanism 4 can drive the inlet pipe 3 to rotate relative to the tank 1 along the central axis of the inlet pipe 3, allowing the inlet pipe 3 to rotate back and forth between the first outlet position and the second outlet position. The arrangement direction of the inlet pipe 3 can be set according to the actual situation. For example, the arrangement direction of the inlet pipe 3 can be front-to-back. The following will take the arrangement direction of the inlet pipe 3 as front-to-back as an example. In this case, the inlet pipe 3 can rotate relative to the tank 1 along the front-to-back upward axis. The end of the inlet pipe 3 with the outlet 61 is defined as the front end of the inlet pipe 3, and the end of the inlet pipe 3 away from the outlet 61 is defined as the rear end of the inlet pipe 3.

[0049] When the inlet pipe 3 is rotated to the first outlet position, the outlet 61 is located directly above the first receiving tank 11, and the outlet 61 is horizontally offset from the second receiving tank 12. This allows the polishing liquid to flow into the inlet pipe 3 from the end furthest from the outlet 61, and after passing through the inlet pipe 3, flow into the first receiving tank 11 from the outlet 61. When the inlet pipe 3 is rotated to the second outlet position, the outlet 61 is located directly above the second receiving tank 12, and the outlet 61 is horizontally offset from the first receiving tank 11. This allows the polishing liquid to flow into the inlet pipe 3 from the end furthest from the outlet 61, and after passing through the inlet pipe 3, flow into the second receiving tank 12 from the outlet 61. The following description will use the polishing liquid flowing into the first receiving tank 11 as the polishing liquid with recycling value, and the polishing liquid flowing into the second receiving tank 12 as waste liquid, as an example. The first receiving tank 11 is a recycling tank, with its opening being the recycling outlet. The first drain pipe 131 is the polishing liquid recycling pipe, through which the polishing liquid can flow to a designated location. The second receiving tank 12 is a waste discharge tank, with its opening being the waste discharge outlet. The second drain pipe 141 is the sewage discharge pipe. Thus, the polishing liquid recycling device 100 is a polishing liquid recycling structure with a sewage discharge function. The rotating drive mechanism 4 drives the inlet pipe 3 to rotate and switch between the first and second outlet positions, improving the automation level of the polishing liquid zoned recycling and increasing the polishing liquid recycling efficiency.

[0050] The polishing slurry recycling device 100 of this invention has a tank 1 divided into a first receiving tank 11 and a second receiving tank 12. When the inlet pipe 3 rotates to the first outlet position, the polishing slurry can be filtered and recycled through the first receiving tank 11 and the filter mechanism 2 therein. When the inlet pipe 3 rotates to the second outlet position, the waste polishing slurry can be discharged through the second receiving tank 12, thereby realizing the partitioned recycling of polishing slurry. At the same time, the inlet pipe 3 is driven to rotate and switch between the first outlet position and the second outlet position by the rotation drive mechanism 4, thereby improving the automation level of the partitioned recycling of polishing slurry and improving the recycling efficiency of polishing slurry.

[0051] Optionally, please refer to Figures 1 to 5 In this embodiment, the upper end of the tank 1 is covered with a cover 5, and a through hole 51 is provided on the cover 5; the liquid inlet pipe 3 is inserted into the through hole 51, with one end of the liquid inlet pipe 3 near the liquid outlet 61 located inside the cover 5, and the other end of the liquid inlet pipe 3 away from the liquid outlet 61 located outside the cover 5.

[0052] Specifically, the cover 5 is a square open box structure that can cover the opening of the tank 1. When in use, the cover 5 is placed on top of the tank 1 to prevent the polishing liquid inside the tank 1 from splashing out. The cover 5 is provided with a perforation 51 that matches the shape of the liquid inlet pipe 3. Thus, when the cover 5 is placed on top of the tank 1, the front end of the liquid inlet pipe 3 extends into the cover 5 through the perforation 51, and the liquid inlet pipe 3 and the perforation 51 form a snap-fit ​​engagement.

[0053] Further, please refer to Figures 1 to 5 In this embodiment, the perforation 51 extends downward through the cover 5.

[0054] Specifically, the perforation 51 extends vertically, and the shape of the upper end of the perforation 51 matches the shape of the liquid inlet pipe 3, so that the upper end of the perforation 51 and the liquid inlet pipe 3 can form a snap-fit ​​engagement. The lower end of the perforation 51 penetrates the cover body 5 downwards, so as to form an insertion port on the lower end surface of the cover body 5 that communicates with the lower end of the perforation 51, so that the liquid inlet pipe 3 can be inserted into the perforation 51 from the insertion port. This makes the installation between the cover body 5 and the liquid inlet pipe 3 easier and more convenient.

[0055] The cover 5 can open and close the slot of the groove 1. The specific installation method of the cover 5 on the groove 1 can be set according to the actual situation. Optionally, please refer to Figures 1 to 5 In this embodiment, the cover 5 is provided with a downward protruding reinforcing bar 52 arranged along the circumference of the groove 1. The reinforcing bar 52 extends into the groove 1 and abuts against the inner side of the groove side wall of the groove 1.

[0056] Specifically, the insert ribs 52 are arranged along the circumference of the groove 1. The insert ribs 52 can be arranged in a ring extending along the circumference of the groove 1; or multiple insert ribs 52 can be spaced apart along the circumference of the groove 1. When the cover 5 is placed on the upper end of the groove 1, the lower end face of the cover 5 is in contact with the upper end face of the groove 1. The insert ribs 52 are inserted from the groove opening of the groove 1 into the upper end of the groove 1, thereby fixing the cover 5 to the upper end of the groove 1. This method of installing the cover 5 on the groove 1 makes the installation and removal of the cover 5 easier and more convenient.

[0057] The rear end of the liquid inlet pipe 3 is typically located outside the cover 5, and the rear end of the liquid inlet pipe 3 needs to be connected to the polishing area of ​​the polishing equipment (i.e., the outlet after the polishing liquid overflows). The rotation drive mechanism 4 is also typically located outside the cover 5. Optionally, please refer to [link to relevant documentation]. Figures 1 to 5 In this embodiment, the rotation drive mechanism 4 is located outside the cover 5, and the rotation drive mechanism 4 is dynamically coupled to the end of the liquid inlet pipe 3 away from the liquid outlet 61.

[0058] Specifically, the rear ends of the rotation drive mechanism 4 and the liquid inlet pipe 3 are both located outside the cover 5. The rotation drive mechanism 4 is connected to the rear end of the liquid inlet pipe 3 by power coupling. In this way, the rotation drive mechanism 4 is set on the rear side of the cover 5 and the tank 1, which can avoid interference between the rotation drive mechanism 4 and the tank 1 and the cover 5.

[0059] The specific configuration of the rotation drive mechanism 4 can be set according to the actual situation. For example, the rotation drive mechanism 4 can be a gear transmission mechanism, etc. Optionally, please refer to... Figures 1 to 5 In this embodiment, the rotation drive mechanism 4 includes a power cylinder 41 and a drive member 42. The drive end of the power cylinder 41 is located on one side of the liquid inlet pipe 3 in the radial direction. The two ends of the drive member 42 are rotatably connected to the drive end of the power cylinder 41 and the liquid inlet pipe 3, respectively.

[0060] Specifically, the power cylinder 41 can be a pneumatic cylinder or a hydraulic cylinder, for example, the power cylinder 41 can be a pen-shaped pneumatic cylinder. The following description will take the power cylinder 41 as a pneumatic cylinder as an example. By controlling the extension and retraction of the piston rod of the power cylinder 41, the power cylinder 41 can drive the liquid inlet pipe 3 to rotate back and forth between the first liquid outlet position and the second liquid outlet position, so that the liquid outlet 61 stops above the opening of the designated liquid receiving tank (the first liquid receiving tank 11 or the second liquid receiving tank 12), thereby realizing the diversion of polishing liquid.

[0061] The orientation of the power cylinder 41 can be set according to actual conditions. For example, the drive end of the power cylinder 41 can face upwards, downwards, leftwards, or rightwards. Optionally, please refer to... Figures 1 to 5 In this embodiment, the drive end of the power cylinder 41 is arranged facing upwards, and the power cylinder 41 is inclined from top to bottom towards the direction of the liquid inlet pipe 3.

[0062] Specifically, the power cylinder 41 is located on one side of the liquid inlet pipe 3, the drive end of the power cylinder 41 is set upward, and the power cylinder 41 is tilted from bottom to top in a direction away from the central axis of the liquid inlet pipe 3. This tilted setting of the power cylinder 41 can avoid the problem of jamming between the power cylinder 41 and the liquid inlet pipe 3.

[0063] Optionally, please refer to Figures 1 to 5 In this embodiment, a connecting flange 43 is provided on the inlet pipe 3, and the end of the driving component 42 near the inlet pipe 3 is rotatably connected to the connecting flange 43.

[0064] Specifically, a connecting flange 43 is provided at the rear end of the liquid inlet pipe 3. The rear end of the liquid inlet pipe 3 is rotatably connected to the drive component 42 through the connecting flange 43. Thus, by providing a connecting flange 43 on the liquid inlet pipe 3, it is convenient to rotatably connect the rear end of the liquid inlet pipe 3 to the drive component 42.

[0065] As described above, the tank 1 is equipped with a partition structure to form a first liquid receiving tank 11 and a second liquid receiving tank 12 within the tank 1. The specific arrangement of the partition structure can be set according to the actual situation. Optionally, please refer to [link to relevant documentation]. Figures 1 to 5 In this embodiment, a partition 15 is provided inside the tank 1, and the partition 15 forms a first liquid receiving tank 11 and a second liquid receiving tank 12 at intervals inside the tank 1.

[0066] Specifically, a partition (i.e., partition plate 15) is provided in the middle of the tank body 1. The surface of the partition plate 15 is perpendicular or nearly perpendicular to the left and right directions. A first liquid receiving tank 11 is formed on the left side of the partition plate 15, and a second liquid receiving tank 12 is formed on the right side of the partition plate 15. The partition plate 15 is used to separate the recovered polishing liquid from the waste liquid that needs to be discharged. By setting the partition structure as partition plate 15, the structure of the partition structure is relatively simple.

[0067] The inlet pipe 3 is provided with an outlet 61 at its front end. Optionally, please refer to [link / reference]. Figures 1 to 5 In this embodiment, the polishing slurry circulation and recovery device 100 further includes a liquid distribution connector 6, which includes an installation part 62 and a liquid outlet part 63. The installation part 62 is sleeved on one end of the liquid inlet pipe 3. The liquid outlet part 63 extends radially from the installation part 62 along the liquid inlet pipe 3, and a liquid outlet 61 is provided at the end of the liquid outlet part 63 away from the liquid inlet pipe 3.

[0068] Specifically, the liquid separator 6 can be a right-angle connector of a square or other shape. One end of the liquid separator 6 is located at the front end of the inlet pipe 3, and the other end of the liquid separator 6 is provided with an outlet 61. This method of setting the liquid separator 6 at the front end of the inlet pipe 3 to form the outlet 61 is relatively simple.

[0069] Further, please refer to Figures 1 to 5 In this embodiment, the upper end of the partition 15 is provided with a liquid supply section 63 with a notch 151 through which one end of the liquid outlet 61 passes.

[0070] Specifically, a notch 151 is provided at the upper end of the partition 15, which extends upwards and to the left and right of the partition 15. In this way, when the liquid inlet pipe 3 drives the liquid distributor 6 to rotate together, the end of the liquid distributor 6 with the liquid outlet 61 can pass back and forth through the partition 15 through the notch 151, thus avoiding interference from the partition 15 with the rotation of the liquid distributor 6.

[0071] The first liquid receiving tank 11 is equipped with a filter mechanism 2. The specific configuration of the filter mechanism 2 can be set according to the actual situation. Optionally, please refer to [the relevant documentation]. Figures 1 to 5In this embodiment, the filtration mechanism 2 includes a frame 21 and a filter plate 22. The frame 21 is box-shaped with the opening facing upwards, and the bottom wall of the frame 21 is provided with a mounting hole 211. The filter plate 22 is disposed at the mounting hole 211 and is arranged to cover the first drain port 13.

[0072] Specifically, the shape of the frame 21 is usually adapted to the shape of the first liquid receiving tank 11. The frame 21 can be arranged in a square box shape, and a filter plate 22 is provided on the bottom wall of the frame 21. The filter plate 22 is used to filter impurities in the polishing liquid. This arrangement of the filtration mechanism 2 makes the structure of the filtration mechanism 2 relatively simple and easy to assemble and disassemble.

[0073] Further, please refer to Figures 1 to 5 In this embodiment, a lifting hole 212 is provided on the side wall of the frame 21.

[0074] Specifically, at least one of the left box sidewall, right box sidewall, front box sidewall, and rear box sidewall of the frame 21 is provided with a lifting hole 212, which makes it easy to place the filter mechanism 2 into the first liquid receiving tank 11 and also makes it easy to remove the filter mechanism 2 from the first liquid receiving tank 11.

[0075] The main body of the polishing slurry recycling device 100 can be made of materials such as plastic to give it high corrosion resistance. A first drain pipe 131 and a second drain pipe 141 are welded to the first drain port 13 and the second drain port 14 of the tank body 1, respectively, to connect to a recycling tank or sewage discharge equipment, realizing the recycling and reuse of the polishing slurry. The polishing slurry recycling device 100 has a simple structure, and is convenient to install, disassemble, and debug; it has low equipment cost and high reliability; and its subsequent maintenance is relatively convenient.

[0076] During the grinding process, as the polishing liquid is continuously supplied to the surface area of ​​the fixed plate, a large amount of polishing liquid will overflow from the plate. At this time, after the liquid is collected and flows into the inlet pipe 3, the piston rod of the control power cylinder 41 is pushed out or retracted, so that the liquid distribution connector 6 rotates to the designated recovery tank or waste discharge tank, thereby realizing the recovery of polishing liquid and the discharge of waste liquid.

[0077] This utility model also provides a polishing device, which includes a polishing liquid circulation and recovery device. Since the polishing liquid circulation and recovery device adopts the technical solution of the above embodiment, it has the beneficial effects brought about by the technical solution of the above embodiment.

[0078] The above are merely preferred embodiments of this utility model and do not limit the patent scope of this utility model. Any equivalent structural transformations made based on the inventive concept of this utility model and the contents of this utility model specification and drawings, or direct / indirect applications in other related technical fields, are included within the patent protection scope of this utility model.

Claims

1. A polishing slurry recycling device, characterized in that, include: The tank body has a first liquid receiving tank and a second liquid receiving tank with their openings facing upwards, the first liquid receiving tank has a first drain outlet that communicates with the outside of the tank body through the tank wall, and the second liquid receiving tank has a second drain outlet that communicates with the outside of the tank body through the tank wall. A filtration mechanism is provided in the first liquid receiving tank and is configured to cover the first liquid outlet; The inlet pipe has one end located on the upper side of the tank and has an outlet. The inlet pipe is rotatable relative to the tank along its central axis. When the inlet pipe is in the first outlet position, the outlet is vertically opposite to the opening of the first receiving tank. When the inlet pipe is in the second outlet position, the outlet is vertically opposite to the opening of the second receiving tank. A rotation drive mechanism is provided, which is dynamically coupled to the inlet pipe to drive the inlet pipe to rotate.

2. The polishing slurry recycling device as described in claim 1, characterized in that, The upper end of the tank is covered with a cover, and a through hole is provided on the cover; the liquid inlet pipe is inserted into the through hole, with one end of the liquid inlet pipe near the liquid outlet located inside the cover and the other end of the liquid inlet pipe away from the liquid outlet located outside the cover.

3. The polishing slurry recycling device as described in claim 2, characterized in that, The rotation drive mechanism is located outside the cover body, and the rotation drive mechanism is dynamically coupled to the end of the inlet pipe away from the outlet; and / or The cover body has downwardly protruding reinforcing ribs arranged circumferentially along the groove body. These ribs extend into the groove body and abut against the inner side of the groove sidewall; and / or, The perforation extends downwards through the cover.

4. The polishing slurry recycling device as described in claim 1, characterized in that, The polishing fluid circulation and recovery device further includes a liquid distribution connector, which includes: The mounting part is sleeved on one end of the liquid inlet pipe; The liquid outlet is provided extending radially from the mounting portion along the liquid inlet pipe, and the liquid outlet is provided at the end of the liquid outlet away from the liquid inlet pipe.

5. The polishing slurry recycling device as described in claim 4, characterized in that, A partition is provided inside the tank, and the partition forms a first liquid receiving tank and a second liquid receiving tank at intervals inside the tank; the upper end of the partition is provided with a notch for the end of the liquid outlet with the liquid outlet to pass through.

6. The polishing slurry recycling device as described in claim 1, characterized in that, The first drain outlet is located on the bottom wall of the first receiving tank; the filtration mechanism includes: The frame is box-shaped with the opening facing upwards, and mounting holes are provided on the bottom wall of the frame. A filter plate is disposed at the mounting hole and is configured to cover the first drain port.

7. The polishing slurry recycling device as described in claim 6, characterized in that, The shape of the frame is adapted to the shape of the first liquid receiving tank; and / or, the side wall of the frame is provided with a lifting hole.

8. The polishing slurry recycling device as described in claim 1, characterized in that, The rotation drive mechanism includes: A power cylinder, wherein the drive end of the power cylinder is located on one side of the inlet pipe in the radial direction; A driving component, the two ends of which are rotatably connected to the driving end of the power cylinder and the liquid inlet pipe, respectively.

9. The polishing slurry recycling device as described in claim 8, characterized in that, The inlet pipe is provided with a connecting flange, and the end of the driving component near the inlet pipe is rotatably connected to the connecting flange; and / or The drive end of the power cylinder is positioned upwards, and the power cylinder is inclined from top to bottom towards the liquid inlet pipe.

10. A polishing device, characterized in that, Includes the polishing slurry recycling device as described in any one of claims 1-9.

Images