A cover plate for a crucible of a vacuum coating machine

Abstract

This invention provides a cover plate for a crucible in a vacuum coating machine, comprising at least one cover plate assembly. The cover plate assembly includes a cooling guard plate, a rotating arm, a drive mechanism, a rotating shaft, and a support. The drive mechanism is connected to the rotating shaft, and symmetrical rotating arms are fixed at both ends of the shaft. The rotating arms are hinged to the cooling guard plate, and pulleys are provided on the sides of the cooling guard plate, cooperating with a support plate. The cooling guard plate is a hollow cavity with built-in cooling channels, and is equipped with inlet and outlet connectors. The cover plate assemblies are symmetrically arranged, and the cooling guard plates can be moved in opposite directions to achieve a double-door opening and closing. The rotating arm is equipped with a limit block, and the support is equipped with a limit slot and a position sensor. This cover plate can quickly open and close the sealed crucible, effectively preventing impurities from falling in, while also providing cooling protection. It has a compact structure and is easy to maintain.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating technology, specifically to a cover plate for a crucible in a vacuum coating machine. Background Technology

[0002] Vacuum coating technology is an important means of improving product appearance and performance. With its advantages of enhancing conductivity, oxidation resistance, and anti-aging properties, it significantly extends product lifespan and improves product quality, and has been widely used in various industries. In the vacuum coating process, vacuum roll-to-roll coating equipment is a key large-scale mechanical device for producing metallized thin films on object surfaces. Vacuum evaporation coating machines often use electric heating, employing a resistance-heated crucible to evaporate the coating material, thus completing the coating operation.

[0003] In the coating process, the quality of the finished product has strict requirements on the amount of splashing during the evaporation process, and impurities inside the chamber are a significant factor causing evaporation splashing. Therefore, when the vacuum coating machine is shut down or the chamber door is opened, the crucible needs to be sealed with a cover plate to prevent dust and other impurities from falling into the crucible. However, existing vacuum coating machines mostly use an arc-shaped rotating mechanism for their opening and closing water-cooled plates. This structure not only occupies space at the bottom of the evaporation source but also takes up a large amount of space at the top of the equipment, resulting in a crowded internal layout and causing many inconveniences for subsequent maintenance and repair work, making it difficult to meet the actual needs of high-efficiency production. Utility Model Content

[0004] To address the aforementioned technical deficiencies, the purpose of this utility model is to provide a cover plate for a vacuum coating machine crucible that allows for quick opening and sealing of the crucible, preventing impurities from falling in.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: A cover plate for a vacuum coating machine crucible includes at least one cover plate assembly; the cover plate assembly includes: A cooling guard plate is installed on the upper part of the crucible in the vacuum coating machine and is used to open and close the crucible. A rotating arm, with its first end hinged to a cooling guard plate, is used to drive the cooling guard plate to move in a first direction. The drive mechanism is connected to the second end of the rotating arm and is used to drive the rotating arm to rotate in the second direction. The rotating arm is driven to rotate in the second direction by the drive mechanism, so that the rotating arm drives the cooling guard plate to move in the first direction, thereby opening and closing the crucible.

[0006] Preferably, the cover plate assembly further includes a rotating shaft and a bracket; the drive mechanism is fixed on the bracket; the rotating shaft is rotatably mounted on the bracket; two rotating arms are configured and symmetrically fixed at both ends of the rotating shaft; the drive mechanism is connected to the rotating shaft in a transmission connection; the drive mechanism drives the rotating shaft to rotate, causing the rotating arms to rotate in a second direction.

[0007] Preferably, the drive mechanism includes a motor and a reduction mechanism; the motor is connected to the reduction mechanism in a transmission connection; the reduction mechanism is connected to the rotating shaft in a transmission connection via a coupling or a gear set.

[0008] Preferably, a limit block is fixedly provided on the rotating arm; a limit slot matching the limit block is provided on the bracket, and one end of the limit block is movably placed in the limit slot to limit the swing amplitude of the rotating arm.

[0009] Preferably, a position sensor is provided on the support; the position sensor is used to detect the swing position of the rotating arm.

[0010] Preferably, the cover plate assembly further includes a support plate; the support plate is disposed on the side of the cooling guard plate; a pulley is installed on the cooling guard plate away from the connection with the rotating arm; the pulley is rolled on the support plate.

[0011] Preferably, two cover plate assemblies are configured; the two cover plate assemblies are symmetrically arranged on both sides of the support plate; the cooling guards in the two cover plate assemblies move in opposite directions.

[0012] Preferably, the cooling guard plate is a rectangular hollow cavity structure; a cooling passage is provided inside the cooling guard plate; an inlet connector and an outlet connector connected to the cooling passage are provided on the side of the cooling guard plate; the cooling medium enters the cooling passage from the inlet connector and flows out from the outlet connector.

[0013] Compared with the prior art, the beneficial effects of this utility model are as follows: The symmetrical parallel double-door opening design significantly optimizes space utilization and effectively solves the problem of large space occupation associated with traditional mechanisms. The cooling guards allow for quick opening and closing, facilitating operation and reducing maintenance and cleaning difficulties. The hollow cavity structure of the cooling guards, combined with internal cooling channels, effectively provides cooling protection, preventing high temperatures from affecting components and extending the overall service life of the device. The coordination of limit blocks, limit slots, and position sensors ensures precise positioning during operation and improves operational stability. The symmetrical layout of the cooling guards provides excellent sealing when closed, reliably preventing impurities from entering the crucible and ensuring the quality of the coated products. The overall device operates smoothly and is highly adaptable, providing strong support for the efficient implementation of vacuum coating operations. Attached Figure Description

[0014] Figure 1 This is a three-dimensional structural diagram of the present invention; Figure 2 This is a schematic diagram of the structure of this utility model; Figure 3 This is a schematic diagram of the cooling guard plate in the open state of this utility model.

[0015] in: 1. Cooling plate; 2. Rotating shaft; 3. Rotating arm; 4. Motor; 5. Bracket; 6. Reduction mechanism; 7. Support plate; 8. Limit block; 9. Slide groove; 10. Pulley; 11. Inlet connector; 12. Outlet connector; 13. Position sensor; 14. Limit slot. Detailed Implementation

[0016] The present invention will be further described below with reference to the accompanying drawings.

[0017] like Figures 1 to 3 As shown, a cover plate for a vacuum coating machine crucible includes at least one cover plate assembly; the cover plate assembly includes: Cooling plate 1 is installed on the upper part of the crucible of the vacuum coating machine and is used to open and close the crucible; The rotating arm 3 is hinged at its first end to the cooling guard plate 1 and is used to drive the cooling guard plate 1 to move in the first direction. The drive mechanism, connected to the second end of the rotating arm 3, drives the rotating arm 3 to rotate in the second direction. The drive mechanism drives the rotating arm 3 to rotate in the second direction, causing the rotating arm 3 to move the cooling plate 1 in the first direction, thereby opening and closing the crucible. Through the transmission link of "drive mechanism - rotating arm 3 - cooling plate 1," rotational motion is converted into linear motion, achieving rapid opening and closing of the crucible. The structure is highly efficient in transmission and precise in action. The first and second directions are as follows: Figure 2 direction shown.

[0018] In this embodiment, the cover plate assembly further includes a rotating shaft 2 and a bracket 5; a drive mechanism is fixed on the bracket 5; the rotating shaft 2 is rotatably mounted on the bracket 5; two rotating arms 3 are configured and symmetrically fixed at both ends of the rotating shaft 2; the drive mechanism is connected to the rotating shaft 2 in a transmission manner; the drive mechanism drives the rotating shaft 2 to rotate, causing the rotating arms 3 to rotate in a second direction. The symmetrical layout of the two rotating arms 3 and their linkage with the rotating shaft 2 ensures that the cooling guard plate 1 is subjected to balanced force and moves smoothly without deviation, while also improving the overall structural stability of the mechanism and avoiding component wear caused by unilateral force.

[0019] In this embodiment, the drive mechanism includes a motor 4 and a reduction mechanism 6; the motor 4 is connected to the reduction mechanism 6 via a transmission; the reduction mechanism 6 is connected to the rotating shaft 2 via a coupling or gear set. The motor 4 provides the power source, the reduction mechanism 6 can reduce the speed and increase the torque, avoiding the impact caused by the excessive speed of the cooling plate 1, and the coupling or gear set ensures efficient power transmission and reduces transmission loss.

[0020] In this embodiment, a limiting block 8 is fixedly installed on the rotating arm 3; a limiting groove 14 matching the limiting block 8 is provided on the bracket 5, and one end of the limiting block 8 is movably placed in the limiting groove 14 to limit the swing amplitude of the rotating arm 3. Through the mechanical cooperation between the limiting block 8 and the limiting groove 14, the maximum swing angle of the rotating arm 3 is rigidly limited, preventing structural collision or sealing failure caused by excessive movement of the cooling guard plate 1, and ensuring the safety of the mechanism operation.

[0021] In this embodiment, a position sensor 13 is provided on the bracket 5; the position sensor 13 is used to detect the swing position of the rotating arm 3. The position sensor 13 provides real-time feedback of the position signal of the rotating arm 3. When the cooling guard plate 1 reaches the preset open or closed position, it can trigger the drive mechanism to stop, thereby achieving automated and precise positioning and improving the ease of operation and control accuracy.

[0022] In this embodiment, the cover plate assembly further includes a support plate 7; the support plate 7 is disposed on the side of the cooling guard plate 1; a pulley 10 is installed on the cooling guard plate 1 away from the connection point with the rotating arm 3; the support plate 7 is provided with a groove 9 adapted to the pulley 10, and the pulley 10 is rolled on the groove 9 of the support plate 7. The pulley 10 and the support plate 7 form a rolling support structure, which converts the sliding friction of the cooling guard plate 1 into rolling friction, reduces motion resistance, reduces component wear, and at the same time ensures that the movement trajectory of the cooling guard plate 1 is straight, improving the smoothness of opening and closing.

[0023] In this embodiment, two cover plate assemblies are configured; the two cover plate assemblies are symmetrically arranged on both sides of the support plate 7; the cooling guard plates 1 in the two cover plate assemblies move in opposite directions. The symmetrical and opposite movement of the two components realizes the "double-door" mode. Compared with a single cover plate, the moving distance is reduced by half, which greatly saves the space at the top and bottom of the equipment, and the fit is tight when closed, resulting in better dustproof and sealing effects.

[0024] In this embodiment, the cooling guard plate 1 is a rectangular hollow cavity structure; a cooling passage is provided inside the cooling guard plate 1; an inlet connector 11 and an outlet connector 12 communicating with the cooling passage are provided on the side of the cooling guard plate 1; the cooling medium enters the cooling passage from the inlet connector 11 and flows out from the outlet connector 12. The hollow cavity and the cooling passage constitute a circulating cooling system. The continuous flow of the cooling medium can quickly remove the heat absorbed by the guard plate, avoid deformation of the guard plate under high temperature conditions, extend its service life, and at the same time prevent the high temperature of the guard plate from affecting the performance of the plating material inside the crucible.

[0025] When the coating equipment needs maintenance or shutdown and the hatch needs to be opened, the drive mechanism starts and drives the rotating shaft 2 to rotate. The rotating shaft 2 drives the symmetrically fixed rotating arms 3 to rotate synchronously around the rotating shaft 2. The end of the rotating arm 3 away from the rotating shaft 2 drives the cooling guard plate 1, so that the cooling guard plate 1 slides smoothly along the slide groove 9 on the support plate 7 via the pulley 10. The two symmetrically arranged cooling guard plates 1 move towards each other in opposite directions and fit together precisely to achieve closed protection of the crucible. At the same time, the cooling medium enters the internal cooling passage from the inlet joint 11 of the cooling guard plate 1, flows through the passage and flows out from the outlet joint 12, continuously carrying away the heat absorbed by the cooling guard plate 1, and achieving cooling protection of the cooling guard plate 1. When the equipment needs to be run, the drive mechanism drives the rotating shaft 2 to rotate in the opposite direction, and the rotating arm 3 drives the cooling guard plate 1 to slide in the opposite direction along the slide groove 9. The two cooling guard plates 1 separate from each other and move to both sides, opening the space above the crucible and ensuring that the coating operation can proceed normally. During the swing of the rotating arm 3, the limiting block 8 and the limiting slot 14 work together to limit the swing amplitude of the rotating arm 3. When the position sensor 13 detects that the rotating arm 3 has reached the preset position, it triggers the drive mechanism to stop, ensuring that the opening and closing position of the cooling guard plate 1 is accurate and controllable.

Claims

1. A cover plate for a crucible in a vacuum coating machine, characterized in that, Includes at least one cover plate assembly; the cover plate assembly includes: Cooling guard plate (1) is set on the upper part of the crucible of the vacuum coating machine and is used to open and close the crucible; The rotating arm (3) is hinged at its first end to the cooling guard plate (1) for driving the cooling guard plate (1) to move in the first direction; The drive mechanism is connected to the second end of the rotating arm (3) for driving the rotating arm (3) to rotate in the second direction; the rotating arm (3) is driven to rotate in the second direction by the drive mechanism, so that the rotating arm (3) drives the cooling guard plate (1) to move in the first direction, thereby opening and closing the crucible.

2. The cover plate for a vacuum coating machine crucible as described in claim 1, characterized in that, The cover plate assembly also includes a rotating shaft (2) and a bracket (5); the drive mechanism is fixed on the bracket (5); the rotating shaft (2) is rotatably mounted on the bracket (5); two rotating arms (3) are configured and symmetrically fixed at both ends of the rotating shaft (2); the drive mechanism is connected to the rotating shaft (2) in a transmission manner; the drive mechanism drives the rotating shaft (2) to rotate, so that the rotating arms (3) rotate in the second direction.

3. The cover plate for a vacuum coating machine crucible as described in claim 2, characterized in that, The drive mechanism includes a motor (4) and a reduction mechanism (6); the motor (4) is connected to the reduction mechanism (6) in a transmission connection; the reduction mechanism (6) is connected to the rotating shaft (2) in a transmission connection through a coupling or a gear set.

4. The cover plate for a vacuum coating machine crucible as described in claim 2, characterized in that, A limiting block (8) is fixedly installed on the rotating arm (3); a limiting slot (14) matching the limiting block (8) is provided on the bracket (5), and one end of the limiting block (8) is movably placed in the limiting slot (14) to limit the swing amplitude of the rotating arm (3).

5. A cover plate for a vacuum coating machine crucible as described in claim 2, characterized in that, A position sensor (13) is provided on the bracket (5); the position sensor (13) is used to detect the swing position of the rotating arm (3).

6. The cover plate for a vacuum coating machine crucible as described in claim 1, characterized in that, The cover plate assembly also includes a support plate (7); the support plate (7) is disposed on the side of the cooling guard plate (1); a pulley (10) is installed on the cooling guard plate (1) away from the connection with the rotating arm (3); the pulley (10) is rolled on the support plate (7).

7. A cover plate for a vacuum coating machine crucible as described in claim 6, characterized in that, Two cover plate assemblies are configured; the two cover plate assemblies are symmetrically arranged on both sides of the support plate (7); the cooling guards (1) in the two cover plate assemblies move in opposite directions.

8. A cover plate for a vacuum coating machine crucible as described in any one of claims 1 to 7, characterized in that, The cooling guard plate (1) is a rectangular hollow cavity structure; a cooling passage is provided inside the cooling guard plate (1); an inlet connector (11) and an outlet connector (12) connected to the cooling passage are provided on the side of the cooling guard plate (1); the cooling medium enters the cooling passage from the inlet connector (11) and flows out from the outlet connector (12).

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