A vertical sealing lifting device for vertical elongated tube inner wall coating equipment

Abstract

The utility model discloses a vertical sealing elevating gear for vertical slender tube inner wall coating equipment, it includes rigid structure support and at least one by the vertical telescopic cabin of sectional bellows sealed connection in proper order, is equipped with elevating gear, bellows molecular pump and vacuum valve respectively to each vertical telescopic cabin, bellows and rigid structure support vertical sliding connection, vacuum valve is located at the lower extreme of vertical telescopic cabin, and vertical telescopic cabin is connected with the furnace body of coating equipment through vacuum valve, and the inside communication of vertical telescopic cabin is extracted to bellows molecular pump's air outlet, and elevating gear is through respectively driving each section bellows telescopic, to realize the telescopic of vertical telescopic cabin whole. The utility model discloses through sectional telescopic can realize the telescopic of vertical telescopic cabin whole on very long distance, forms the space of high vacuum isolation and extraction in the inside, and ion bombardment electrode device, magnetron sputtering target and other components are installed in vertical telescopic cabin, can be used on slender tube coating equipment.

Description

Technical Field

[0001] This utility model belongs to the field of magnetron sputtering coating technology for the inner wall of slender tubes, specifically relating to a vertical sealing lifting device for coating equipment for the inner wall of vertical slender tubes. Background Technology

[0002] Magnetron sputtering coating technology has been widely used in various industries to prepare hard films and functional films, such as protective films for molds and dies, wear-resistant films and friction-reducing films for worn workpieces, decorative films for various products touched by human hands, as well as various optical films, optoelectronic films, magnetic films, etc. The shapes and sizes of the workpieces to be coated are varied, and the structural design of magnetron sputtering targets is becoming increasingly mature, generally applicable to the coating of various workpieces.

[0003] However, there is no corresponding coating equipment for the inner wall of slender tubes, and there are currently no precedents to follow. Slender tubes have very important value in many special application environments (special engineering, military) and have high quality requirements, so the coating technology for the inner wall of slender tubes is particularly important.

[0004] Slender tubes, characterized by their small cross-section but long length, present numerous technical challenges in designing coating equipment for their inner walls. One key challenge is how to insert extremely long components such as ion bombardment electrodes and magnetron sputtering targets into the tube. This necessitates a lifting device with a sufficiently long telescopic range. Furthermore, to ensure a high vacuum environment during coating, the space within the lifting device for installing the ion bombardment electrodes and magnetron sputtering targets must be isolated from the outside environment while maintaining communication with the furnace body of the coating equipment. Based on these requirements, this invention presents a vertical sealing lifting device for coating equipment on the inner walls of vertical slender tubes. Utility Model Content

[0005] The purpose of this invention is to provide a vertical sealing and lifting device for coating equipment on the inner wall of vertical slender tubes.

[0006] The objective of this utility model is achieved through the following technical solution:

[0007] A vertical sealing and lifting device for a vertical slender tube inner wall coating equipment is characterized by comprising a rigid structural support and at least one vertical telescopic chamber formed by sequentially sealing and connecting multiple corrugated pipe segments. The vertical telescopic chamber accommodates components that need to be inserted into the slender tube during the coating process. Each vertical telescopic chamber is equipped with a lifting mechanism, a corrugated pipe molecular pump, and a vacuum valve. The vertical telescopic chamber is mounted on the rigid structural support, with the corrugated pipes slidably connected vertically to the support. The vacuum valve is located at the lower end of the vertical telescopic chamber, which is connected to the furnace body of the coating equipment via the vacuum valve. The exhaust port of the corrugated pipe molecular pump is connected to the interior of the vertical telescopic chamber. The lifting mechanism extends and retracts each corrugated pipe segment individually to achieve the overall extension and retraction of the vertical telescopic chamber. The components that need to be inserted into the slender tube during the coating process include ion bombardment electrode devices, magnetron sputtering targets, etc.

[0008] A further technical solution of this utility model is as follows: flanges are provided at the upper and lower ends of the vertical telescopic cabin and between adjacent bellows, and telescopic components are provided between adjacent flanges in the lifting mechanism. The distance between adjacent flanges is changed by the telescopic components to realize the telescopic movement of the bellows between adjacent flanges.

[0009] A further technical solution of this utility model is as follows: an installation pipe seat is sealed and connected below the flange at the lower end of the vertical telescopic cabin, a bellows molecular pump is installed on the installation pipe seat, the air extraction port of the bellows molecular pump is connected to the inside of the installation pipe seat, and a vacuum valve is sealed and connected at the lower port of the installation pipe seat.

[0010] A further technical solution of this utility model is as follows: a vertical telescopic guide rail is provided on the rigid structure support, a horizontally extending slider connecting rod is connected to the side of the corrugated pipe, and a telescopic guide slider is provided at the end of the slider connecting rod away from the corrugated pipe. The telescopic guide slider is slidably connected to the telescopic guide rail.

[0011] A further technical solution of this utility model is as follows: telescopic guide rails are provided on both sides of the corrugated pipe on the rigid structure support, and slider connecting rods and telescopic guide sliders are provided on both sides of the corrugated pipe, with the telescopic guide sliders on both sides slidably connected to the telescopic guide rails on both sides.

[0012] A further technical solution of this utility model is: an oxygen-free copper gasket is provided between the bellows and the flange, and the oxygen-free copper gasket is used for sealing.

[0013] A further technical solution of this utility model is: a vertical support rod is provided below the flange at the lower end of the vertical telescopic chamber, and the support rod is used to support and connect to the furnace body of the coating equipment.

[0014] Compared with the prior art, the present invention has the following beneficial effects:

[0015] This invention features a vertical telescopic chamber composed of multiple corrugated pipe segments sequentially sealed and connected. Connected to the furnace body of the coating equipment via a vacuum valve, it achieves both isolation and communication between the vertical telescopic chamber and the furnace body. Inside the vertical telescopic chamber, an independent corrugated pipe molecular pump creates a high vacuum to meet the requirements of the coating environment. The telescopic chamber is extended and retracted by a lifting mechanism that drives each corrugated pipe segment individually, thus achieving overall extension and retraction. This segmented extension and retraction allows the entire vertical telescopic chamber to extend and retract over very long distances. As can be seen, this invention provides a sealed and retractable space inside the vertical telescopic chamber. Components such as ion bombardment electrodes and magnetron sputtering targets are installed inside the vertical telescopic chamber, allowing them to be inserted into slender tubes for coating operations on slender tube inner wall coating equipment. Attached Figure Description

[0016] Figure 1 This is a perspective view of the vertical sealing lifting device according to an embodiment of the present utility model;

[0017] Figure 2 This is a schematic diagram of the bottom structure of the vertical sealing lifting device according to an embodiment of the present invention;

[0018] Figure 3 yes Figure 1 Enlarged schematic diagram of section III-I;

[0019] Figure 4 This is a schematic diagram of the structure of a section of a corrugated pipe according to an embodiment of the present invention;

[0020] Figure 5 This is a schematic diagram of the lifting structure according to an embodiment of the present utility model;

[0021] Figure 6 This is a schematic diagram of the elongation process of the lifting structure according to an embodiment of the present invention;

[0022] Figure 7 This is a schematic diagram of the vertical sealing lifting device of this utility model installed on the furnace body;

[0023] Figure 8 This is a schematic diagram of the structure of the vacuum valve and bellows molecular pump of this utility model when installed on the furnace body;

[0024] Figure 9 This is a schematic diagram of the internal structure of the furnace to which the vertical sealing lifting device of this utility model is applicable.

[0025] Meaning of the labels in the attached diagram:

[0026] 1-Bellwall; 2-Flange; 3-Rigid structure support; 4-Telescopic hydraulic cylinder; 5-Bellwall molecular pump; 6-Mounting pipe seat; 7-Vacuum valve; 8-Support rod; 9-Notch; 10-Slider connecting rod; 11-Gas adsorption rod; 12-Ion bombardment electrode device; 13-Bottom layer film magnetron sputtering target; 14-Surface layer film magnetron sputtering target; 15-Telescopic guide rail; 16-Telescopic guide slider; 17-Oxygen-free copper pad; 18-Spacer ring; 19-Center hole; 20-Connecting block; 21-Connecting seat; 22-Furnace body; 23-Waiting for coating station; 24-Vacuuming station; 25-Ion bombardment cleaning station; 26-Bottom layer film magnetron sputtering coating station; 27-Surface layer film magnetron sputtering coating station; 28-Waiting for furnace exit station. Detailed Implementation

[0027] The present invention will be further described below with reference to embodiments.

[0028] In the description of this utility model, it should be understood that the directional descriptions, such as up, down, front, back, left, right, etc., indicate the directional or positional relationship based on the directional or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0029] In the description of this utility model, "several" means one or more, "multiple" means two or more, "greater than," "less than," and "exceeding" are understood to exclude the stated number, while "above," "below," and "within" are understood to include the stated number. If "first" or "second" is used in the description, it is only for the purpose of distinguishing technical features and should not be construed as indicating or implying relative importance, or implicitly indicating the number of indicated technical features, or implicitly indicating the order of the indicated technical features.

[0030] In the description of this utility model, unless otherwise explicitly defined, terms such as "setting," "installation," and "connection" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this utility model in conjunction with the specific content of the technical solution.

[0031] Example:

[0032] like Figures 1 to 3 The figure shown is a vertical sealing lifting device for a vertical slender tube inner wall coating equipment in this embodiment. It includes a rigid structure support 3 and four vertical telescopic chambers. Each vertical telescopic chamber is equipped with a lifting mechanism, a bellows molecular pump 5 and a vacuum valve 7.

[0033] The number of vertical telescopic chambers is determined based on the installation stations required for the coating process, such as... Figure 9As shown, the furnace body 22 of the coating equipment applicable to this embodiment will be equipped with a waiting coating station 23, a vacuuming station 24, an ion bombardment cleaning station 25, a bottom film magnetron sputtering coating station 26, a surface film magnetron sputtering coating station 27, and a waiting furnace exit station 28. Vertical elongated strips need to be installed above the vacuuming station 24, the ion bombardment cleaning station 25, the bottom film magnetron sputtering coating station 26, and the surface film magnetron sputtering coating station 27, respectively. The gas adsorption rod 11, ion bombardment electrode device 12, bottom film magnetron sputtering target 13, and surface film magnetron sputtering target 14 require vertical telescopic chambers to be installed above the vacuum station 24, ion bombardment cleaning station 25, bottom film magnetron sputtering coating station 26, and surface film magnetron sputtering coating station 27, respectively, to independently install the gas adsorption rod 11, ion bombardment electrode device 12, bottom film magnetron sputtering target 13, and surface film magnetron sputtering target 14.

[0034] In this embodiment, the vertical telescopic chamber is formed by five corrugated pipes 1 connected in a sealed manner. The number of corrugated pipes 1 is designed according to the required extension length. Flanges 2 are provided at the upper and lower ends of the vertical telescopic chamber and between adjacent corrugated pipes 1. The flange 2 at the lower end of the vertical telescopic chamber is sealed with a mounting pipe seat 6, and support rods 8 are provided at the four lower corners of the flange 2 at the lower end of the vertical telescopic chamber. The lower ends of the support rods 8 are fixedly connected to the upper part of the furnace body 22 to form a support. The upper ends of the gas adsorption rod 11, the ion bombardment electrode device 12, the bottom film magnetron sputtering target 13, and the surface film magnetron sputtering target 14 are respectively connected to the flange 2 at the upper end of the vertical telescopic chamber, forming a seal at the upper end of the vertical telescopic chamber. The upper ends of the gas adsorption rod 11, the ion bombardment electrode device 12, the bottom film magnetron sputtering target 13, and the surface film magnetron sputtering target 14 are exposed above the upper flange, thereby enabling connection with external cooling water, electricity, and gas.

[0035] like Figure 5As shown, the lifting mechanism includes vertical telescopic components respectively arranged between adjacent flanges 2. These telescopic components change the distance between adjacent flanges 2 to achieve the extension and retraction of the bellows 1 between adjacent flanges 2. This embodiment includes five bellows 1 sections, six flanges 2, and five telescopic components. Each telescopic component includes two diagonally arranged telescopic hydraulic cylinders 4. For ease of explanation, the flanges 2 and telescopic hydraulic cylinders 4 are numbered sequentially from bottom to top, namely, flanges 2.1-2.6 (first to sixth) and telescopic hydraulic cylinders 4.1-4.5 (first to fifth). Their specific connection structure is as follows: the cylinder body of the first telescopic hydraulic cylinder 4.1 is fixedly connected to the second flange 2.2 via a connecting block 20. The piston rod of the first telescopic hydraulic cylinder 4.1 faces downwards and is connected to the first flange 2.1 via a connecting seat 21. The cylinder body of the second telescopic hydraulic cylinder 4.2 is also fixedly connected to the second flange 2.2 via a connecting block 20. The piston rod of the second telescopic hydraulic cylinder 4.2 faces upward and is connected to the third flange 2.3 via an extended connecting seat 21. The cylinder body of the third telescopic hydraulic cylinder 4.3 is fixedly connected to the fourth flange 2.4 via a connecting block 20. The piston rod of the third telescopic hydraulic cylinder 4.3 faces downward and is connected to the connecting seat 21 on the third flange 2.3. The cylinder body of the fourth telescopic hydraulic cylinder 4.4 is fixedly connected to the fifth flange 2.5 via a connecting block 20. The piston rod of the fourth telescopic hydraulic cylinder 4.4 faces downward and is connected to the fourth flange 2.4. The cylinder body of the fifth telescopic hydraulic cylinder 4.5 is fixedly connected to the sixth flange 2.6 via a connecting block 20. The piston rod of the fifth telescopic hydraulic cylinder 4.5 faces downward and is connected to the fifth flange 2.5.

[0036] like Figure 6 The diagram shows the extension process of the lifting mechanism in this embodiment. First, the first telescopic hydraulic cylinder 4.1 extends, increasing the distance between the first flange 2.1 and the second flange 2.2. Then, the second telescopic hydraulic cylinder 4.2 extends, increasing the distance between the second flange 2.2 and the third flange 2.3, and so on, until the entire lifting mechanism is fully extended. Since the slender tubes requiring coating are very long, typically reaching ten meters, the lengths of the gas adsorption rod 11, the ion bombardment electrode device 12, the bottom film magnetron sputtering target 13, and the surface film magnetron sputtering target 14 are also very long. Therefore, the lifting mechanism and the vertical telescopic chamber must have sufficient telescopic capacity, and the structure of the aforementioned lifting mechanism and vertical telescopic chamber meets these requirements. Taking a slender pipe with a diameter of about 150mm and a length of about 10m as an example, the compressibility of the corrugated pipe 1 is usually 70%. Considering other necessary connecting accessories, the total length of the corrugated pipe 1 after being connected and extended is about 15 meters. The five corrugated pipe 1 designed in this embodiment, each of which is about 3 meters long after being extended, can achieve the requirement of 15 meters after being extended when connected in series.

[0037] The upper and lower ends of the bellows 1 are fixedly connected to the corresponding flanges 2. An oxygen-free copper gasket 17 is provided between the end face of the bellows 1 and the surface of the flange 2 to form a sealed connection. Of course, each flange 2 is provided with a central hole 19 to allow communication between the bellows 1. Furthermore, a notch 9 is provided on the flange 2 at the position where it interferes with the telescopic hydraulic cylinder.

[0038] The lifting mechanism is not limited to a hydraulic cylinder structure. In other embodiments, a pneumatic cylinder, a gear and rack structure, or other similar structures can be used to achieve the extension and retraction of each section of the bellows.

[0039] The lifting mechanism and the bellows 1 are both located inside the rigid structure support 3. Vertical telescopic guide rails 15 are provided on both sides of the bellows 1 inside the rigid structure support 3. Laterally extending slider rods 10 are provided on both sides of the bellows 1. Telescopic guide sliders 16 are provided at the outer ends of the slider rods 10. The telescopic guide sliders 16 are slidably connected to the telescopic guide rails 15, thereby ensuring that the bellows 1 can move up and down stably.

[0040] Figure 4 The structure of one section of the bellows 1 is shown, which is in a compressed state. The bellows 1 itself is an existing component purchased directly from the market, so its structure is only briefly described here: Figure 4 The corrugated pipe 1 shown is composed of seven telescopic pipe sections connected sequentially. Spacer rings 18 are provided between the pipe sections to connect them together. The guide mechanism between the spacer rings 18 is built into the corrugated pipe 1 and will not be described further here. In this embodiment, a slider connecting rod 10 and a telescopic guide slider 16 are provided on both sides of each spacer ring 18.

[0041] The bellows molecular pump 5 is mounted on the mounting base 6, and its extraction port is connected to the interior of the mounting base 6, thus enabling the pump to create a high vacuum inside the vertical telescopic chamber. A vacuum valve 7 is sealed to the lower end of the mounting base 6.

[0042] like Figure 7 and Figure 8 The diagram shows the structure of the vertical sealing lifting device of this embodiment installed on the furnace body 22 of the coating equipment. The lower end of the rigid structure bracket 3 is fixedly connected to the upper part of the furnace body 22, and the lower end of the vacuum valve 7 is sealed to the upper part of the furnace body 22. The upper part of the furnace body 22 is provided with a connecting hole corresponding to each vacuum valve 7. By opening the vacuum valve 7, the vertical telescopic chamber can be connected to the furnace body 22.

[0043] The above embodiments of this utility model are not intended to limit the scope of protection of this utility model. The implementation of this utility model is not limited thereto. All other modifications, substitutions or alterations made to the above structure of this utility model based on the above content of this utility model and in accordance with the common technical knowledge and conventional means in the field, without departing from the basic technical idea of ​​this utility model, shall fall within the scope of protection of this utility model.

Claims

1. A vertical sealing lifting device for a coating equipment for the inner wall of a vertical slender tube, characterized in that: The system includes a rigid structural support and at least one vertical telescopic chamber formed by sequentially sealing and connecting multiple corrugated pipe segments. Each vertical telescopic chamber houses components that need to be inserted into a slender tube during the coating process. Each vertical telescopic chamber is equipped with a lifting mechanism, a corrugated pipe molecular pump, and a vacuum valve. The vertical telescopic chamber is mounted on the rigid structural support, and the corrugated pipes are vertically slidably connected to the support. The vacuum valve is located at the lower end of each vertical telescopic chamber, which is connected to the furnace body of the coating equipment via the vacuum valve. The exhaust port of the corrugated pipe molecular pump communicates with the interior of the vertical telescopic chamber. The lifting mechanism extends and retracts each corrugated pipe segment individually to achieve the overall extension and retraction of the vertical telescopic chamber.

2. The vertical sealing lifting device for coating the inner wall of a vertical slender tube according to claim 1, characterized in that: Flanges are provided at the upper and lower ends of the vertical telescopic cabin and between the adjacent bellows. The lifting mechanism is provided with telescopic components between the adjacent flanges. The distance between the adjacent flanges is changed by the telescopic components to realize the telescopic expansion and contraction of the bellows between the adjacent flanges.

3. The vertical sealing lifting device for coating the inner wall of a vertical slender tube according to claim 2, characterized in that: A mounting base is sealed and connected below the flange at the lower end of the vertical telescopic chamber. The bellows molecular pump is mounted on the mounting base, and the pump port of the bellows molecular pump is connected to the interior of the mounting base. The vacuum valve is sealed and connected at the lower port of the mounting base.

4. The vertical sealing lifting device for coating equipment on the inner wall of vertical slender tubes according to claim 1, characterized in that: The rigid structure support is provided with a vertical telescopic guide rail, and a horizontally extending slider connecting rod is connected to the side of the corrugated pipe. The end of the slider connecting rod away from the corrugated pipe is provided with a telescopic guide slider, and the telescopic guide slider is slidably connected to the telescopic guide rail.

5. The vertical sealing lifting device for coating the inner wall of a vertical slender tube according to claim 4, characterized in that: The rigid structure support is provided with telescopic guide rails on both sides corresponding to the corrugated pipe, and the two sides of the corrugated pipe are provided with slider connecting rods and telescopic guide sliders, and the telescopic guide sliders on both sides are slidably connected to the telescopic guide rails on both sides.

6. The vertical sealing lifting device for coating equipment on the inner wall of a vertical slender tube according to claim 2, characterized in that: An oxygen-free copper gasket is provided between the bellows and the flange.

7. The vertical sealing lifting device for coating equipment on the inner wall of a vertical slender tube according to claim 2, characterized in that: A vertical support rod is provided below the flange at the lower end of the vertical telescopic chamber. The support rod is used to support and connect to the furnace body of the coating equipment.

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