Cooling assembly for a vacuum coater

CN224741138UActive Publication Date: 2026-09-11CHENGDU SISHENG TECH CO LTD
View PDF 1 Cites 0 Cited by

Patent Information

Application Number
CN202522198368.X
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-10-17
Publication Date
2026-09-11
Estimated Expiration
2035-10-17

AI Technical Summary

Technical Problem

[0003]公告号为CN219195102U的中国实用新型专利公开了一种真空镀膜机的冷却系统,其中包括“真空镀膜机本体、制冷机和若干制冷块,所述制冷块均匀的分布在所述真空镀膜机本体的外壁,所述制冷块均管道连接所述制冷机,所述制冷块与所述真空镀膜机本体的外壁相贴合,所述制冷块的内部中空,所述制冷块的上下方分别设有出水口及进水口”;但真空镀膜机腔体内设置被涂覆物件的工件盘及其周边区域的温度过高,而远离工件盘的区域温度低于工件盘位置,该装置都是整体进行水冷降温,不是根据各区域温度差异来选择水冷降温,能耗较大

Benefits of technology

[0007]The beneficial effects of this utility model are: with the combination of annular pipe, annular cavity, water channel, inlet valve and outlet valve, the cooling and heat-reducing parts can be adjusted according to actual needs to reduce energy consumption.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN224741138U_ABST
    Figure CN224741138U_ABST
Patent Text Reader

Abstract

The utility model relates to vacuum coating equipment technical field especially for the cooling assembly suitable for vacuum coating machine, including vacuum coating machine body, the top of vacuum coating machine body is equipped with annular distribution pipe, the annular distribution pipe is about vacuum coating machine body center and is distributed in vertical direction symmetry, the top one side of annular distribution pipe is equipped with liquid inlet pipe, one end of liquid inlet pipe is connected with circulating mechanism, the bottom of annular distribution pipe is connected with annular liquid transfer mechanism, a plurality of annular liquid transfer mechanisms are distributed in the upper middle and lower three parts of vacuum coating machine body, the annular liquid transfer mechanism is rotatably connected with cooling mechanism through the clamp, the bottom one side of annular distribution pipe is equipped with liquid outlet pipe, the other end of liquid outlet pipe is connected with circulating mechanism. The device can be used for the cooling operation of vacuum coating machine, and the serious heating parts of workpiece disc work area of vacuum coating machine can be cooled according to the need, thereby unnecessary energy consumption is reduced.
Need to check novelty before this filing date? Find Prior Art

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating equipment technology, and specifically to a cooling component suitable for a vacuum coating machine. Background Technology

[0002] A vacuum coating machine is a device that deposits a thin film on the surface of a material in a vacuum environment using physical or chemical methods. Its core principle is to use vacuum conditions to reduce interference from gas molecules, so that the coating material adheres to the substrate more purely and evenly.

[0003] Chinese utility model patent CN219195102U discloses a cooling system for a vacuum coating machine, including "a vacuum coating machine body, a refrigerator, and several cooling blocks, wherein the cooling blocks are evenly distributed on the outer wall of the vacuum coating machine body, each cooling block is connected to the refrigerator by a pipe, the cooling blocks are in contact with the outer wall of the vacuum coating machine body, the interior of the cooling blocks is hollow, and the upper and lower parts of the cooling blocks are respectively provided with water outlets and water inlets"; however, the temperature of the workpiece tray and its surrounding area where the object to be coated is placed in the vacuum coating machine cavity is too high, while the temperature of the area away from the workpiece tray is lower than that of the workpiece tray. This device uses water cooling for overall cooling, rather than selecting water cooling based on the temperature difference of each area, resulting in high energy consumption. Utility Model Content

[0004] The purpose of this invention is to provide a cooling component suitable for a vacuum coating machine to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a cooling component suitable for a vacuum coating machine, comprising a vacuum coating machine body, wherein an annular liquid distribution pipe is provided at the top of the vacuum coating machine body, the annular liquid distribution pipes are symmetrically distributed in the vertical direction about the center of the vacuum coating machine body, one of the annular liquid distribution pipes is provided with an inlet pipe on one side of its top, one end of the inlet pipe is connected to a circulation mechanism, the bottom of the annular liquid distribution pipe is connected to an annular liquid transfer mechanism, a plurality of annular liquid transfer mechanisms are distributed in the upper, middle and lower parts of the vacuum coating machine body, the annular liquid transfer mechanism is movably connected to a cooling mechanism by clamps, and another annular liquid distribution pipe is provided with an outlet pipe on one side of its bottom, the other end of the outlet pipe is connected to a circulation mechanism;

[0006] The annular liquid transfer mechanism includes an annular pipe with an annular cavity running through its interior. Several water passages run through the annular pipe from top to bottom, and each water passage has an inlet valve and an outlet valve at both its upper and lower ends.

[0007] The beneficial effects of this utility model are: with the combination of annular pipe, annular cavity, water channel, inlet valve and outlet valve, the cooling and heat-reducing parts can be adjusted according to actual needs to reduce energy consumption.

[0008] To achieve cooling operations on different parts of the vacuum coating machine:

[0009] The water passage is further configured such that the water passage is distributed in a ring about the center point of the annular pipe.

[0010] By adopting the above technical solution, cooling operations can be performed on different parts of the vacuum coating machine.

[0011] To enable cooling and heat dissipation operations:

[0012] The cooling mechanism is further configured as follows: the cooling mechanism is a structure of several arc-shaped metal sheets with high thermal conductivity, and the arc-shaped surface of the cooling mechanism is movably connected to the outer wall of the vacuum coating machine body.

[0013] By adopting the above technical solution, the vacuum coating machine can be cooled and dissipated.

[0014] To achieve overall structural stability:

[0015] The following configuration is further provided: the bottom of the annular liquid distribution pipe is provided with a number of water outlets that are consistent with the number of water channels, and the vertical center lines of the annular liquid distribution pipe, the annular pipe and the vacuum coating machine body are aligned.

[0016] By adopting the above technical solutions, the overall structural stability can be guaranteed.

[0017] The parts of the device not covered herein are the same as or can be implemented using existing technologies. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the main body of this utility model;

[0019] Figure 2 This is a partial cross-sectional schematic diagram of the annular liquid transfer mechanism of this utility model;

[0020] Figure 3 This is a schematic diagram showing the layout of the annular liquid transfer mechanism and cooling mechanism of this utility model;

[0021] Figure 4 This is a schematic diagram of the cooling mechanism of this utility model.

[0022] In the diagram: 1. Vacuum coating machine body; 2. Annular liquid distribution pipe; 3. Liquid inlet pipe; 4. Circulation mechanism; 5. Annular liquid transfer mechanism; 501. Annular pipe; 502. Annular cavity; 503. Water tank; 504. Water inlet valve; 505. Water outlet valve; 6. Cooling mechanism; 7. Liquid outlet pipe. Detailed Implementation

[0023] To enable those skilled in the art to better understand the technical solution of the present invention, the present invention will be described in detail below with reference to the accompanying drawings. The description in this part is only exemplary and explanatory, and should not be used to limit the scope of protection of the present invention in any way.

[0024] Please see Figures 1 to 4 A cooling component suitable for a vacuum coating machine includes a vacuum coating machine body 1. The top of the vacuum coating machine body 1 is provided with an annular liquid distribution pipe 2. The annular liquid distribution pipes 2 are symmetrically distributed in the vertical direction about the center of the vacuum coating machine body 1. One of the annular liquid distribution pipes 2 is provided with an inlet pipe 3 on one side of the top. One end of the inlet pipe 3 is connected to a circulation mechanism 4. The bottom of the annular liquid distribution pipe 2 is connected to an annular liquid transfer mechanism 5. Multiple annular liquid transfer mechanisms 5 are distributed in the upper, middle and lower parts of the vacuum coating machine body 1. The annular liquid transfer mechanism 5 is movably connected to a cooling mechanism 6 through a clamp. The bottom side of another annular liquid distribution pipe 2 is provided with an outlet pipe 7. The other end of the outlet pipe 7 is connected to the circulation mechanism 4.

[0025] The annular liquid transfer mechanism 5 includes an annular pipe 501, an annular cavity 502 is provided inside the annular pipe 501, and several water passages 503 are provided through the annular pipe 501 from top to bottom. Both the upper and lower ends of the water passages 503 are provided with inlet valves 504 and outlet valves 505.

[0026] In this embodiment, as Figure 2 and Figure 3 As shown, the water channel 503 is distributed in a ring around the center point of the annular pipe 501.

[0027] In this embodiment, as Figure 4 As shown, the cooling mechanism 6 is a structure of several arc-shaped metal sheets with high thermal conductivity, and the arc-shaped surface of the cooling mechanism 6 is movably connected to the outer wall of the vacuum coating machine body 1.

[0028] In this embodiment, as Figure 2 and Figure 3 As shown, the bottom of the annular liquid distribution pipe 2 has several outlets that are the same number as the number of water passages 503, and the vertical center lines of the annular liquid distribution pipe 2, the annular pipe 501 and the vacuum coating machine body 1 are aligned.

[0029] The cooling component for this vacuum coating machine operates as follows:

[0030] First, the annular liquid distribution pipe 2 and the annular pipe 501 are connected to the upper, middle and lower parts of the vacuum coating machine body 1, respectively, and are threaded to the outer wall of the vacuum coating machine body 1 through U-shaped pipe clamps. According to actual needs, the arc-shaped surface of the cooling mechanism 6 is connected to the outer wall of the vacuum coating machine body 1, and the upper and lower ports of the cooling mechanism 6 are connected to the water pipes of the upper water outlet valve 505 and the lower water inlet valve 504 through flanges, etc., so that the coolant can circulate through the inlet pipe 3, the outlet pipe 7 and the circulation mechanism 4 to ensure the cooling and heat dissipation effect while saving water. With the combination of the annular cavity 502 and the water channel 503, water can be supplied to multiple positions to facilitate changing positions for cooling and heat dissipation.

[0031] The contents not described in detail in this specification are existing technologies known to those skilled in the art.

[0032] It should be noted that, in this document, the terms “comprising,” “including,” or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0033] This article uses specific examples to illustrate the principles and implementation methods of this utility model. The above examples are only for the purpose of helping to understand the method and core ideas of this utility model. The above description is only a preferred embodiment of this utility model. It should be noted that due to the limitations of textual expression, there are objectively infinite specific structures. For those skilled in the art, several improvements, modifications, or changes can be made without departing from the principles of this utility model, and the above technical features can also be combined in an appropriate manner. These improvements, modifications, changes, or combinations, or the direct application of the concept and technical solution of the utility model to other occasions without modification, should all be considered within the protection scope of this utility model.

Claims

1. A cooling assembly for a vacuum coating machine, comprising the vacuum coating machine body (1), characterized in that: The top of the vacuum coating machine body (1) is provided with an annular liquid distribution pipe (2). The annular liquid distribution pipe (2) is symmetrically distributed in the vertical direction about the center of the vacuum coating machine body (1). One of the annular liquid distribution pipes (2) has an inlet pipe (3) on one side of its top. One end of the inlet pipe (3) is connected to a circulation mechanism (4). The bottom of the annular liquid distribution pipe (2) is connected to an annular liquid transfer mechanism (5). Multiple annular liquid transfer mechanisms (5) are distributed in the upper, middle and lower parts of the vacuum coating machine body (1). The annular liquid transfer mechanism (5) is movably connected to a cooling mechanism (6) through a clamp. The bottom side of another annular liquid distribution pipe (2) is provided with an outlet pipe (7). The other end of the outlet pipe (7) is connected to a circulation mechanism (4). The annular liquid transfer mechanism (5) includes an annular pipe (501), an annular cavity (502) is provided inside the annular pipe (501), and several water passages (503) are provided through the annular pipe (501) from top to bottom. Both the upper and lower ends of the water passages (503) are provided with inlet valves (504) and outlet valves (505).

2. The cooling assembly suitable for use in a vacuum coater of claim 1, wherein: The water channel (503) is distributed in a ring about the center point of the annular pipe (501).

3. The cooling assembly for a vacuum coating machine as described in claim 1, characterized in that: The cooling mechanism (6) is a structure of several arc-shaped metal sheets with high thermal conductivity, and the arc-shaped surface of the cooling mechanism (6) is in contact with the outer wall of the vacuum coating machine body (1).

4. The cooling assembly suitable for use in a vacuum coater of claim 1, wherein: The bottom of the annular liquid distribution pipe (2) is provided with a number of water outlets that are the same as the number of water channels (503), and the vertical center lines of the annular liquid distribution pipe (2), the annular pipe (501) and the vacuum coating machine body (1) are aligned.

Citation Information

Patent Citations

  • Cooling system of vacuum coating machine

    CN219195102U