Continuous rotary device for cleaning a sub-chamber of a single crystal furnace

Abstract

The utility model discloses a kind of continuous rotary devices for single crystal furnace auxiliary chamber cleaning, including cleaning head main body, cleaning ring and tensioner, cleaning head main body is located in the lower direction of cleaning ring and is sequentially sleeved with connecting plate, rotating sleeve and mounting sleeve, one side of mounting sleeve is provided with motor mounting seat, rotating motor is installed at the bottom of motor mounting seat, rotating motor motor shaft is installed with driving pinion through motor mounting seat, driven gear is provided on the lower part side wall of rotating sleeve, guide slide block is equipped on the upper surface of connecting plate, sliding seat is arranged on the inner wall of cleaning ring, and the sliding seat is connected with tensioner and slides on guide slide block;The utility model is provided with mounting sleeve, rotating sleeve and connecting plate on cleaning head main body below cleaning ring, connecting plate is movably connected with cleaning ring, motor is arranged on mounting sleeve, motor drives rotating sleeve and connecting plate to rotate, so that the continuous rotation of cleaning ring is realized, and the utility model has the advantages of simple structure, convenient operation, low cost, high cleaning efficiency of single crystal furnace auxiliary chamber.

Description

Technical Field

[0001] This utility model belongs to the technical field of auxiliary parts for single crystal furnace production, and specifically relates to a continuous rotary device for cleaning the auxiliary chamber of a single crystal furnace. Background Technology

[0002] A single crystal furnace is a device that melts polycrystalline materials such as polycrystalline silicon in an inert gas environment (mainly nitrogen and helium) using a graphite heater and grows dislocation-free single crystals using the Czochralski method. The single crystal furnace mainly includes a furnace body, electrical control cabinet, heater, power supply cabinet, main vacuum pump, auxiliary chamber vacuum pump, vacuum pipeline, hydraulic system, argon system, and cooling water system.

[0003] In the single crystal pulling process, the cleanliness of the furnace inner wall of the single crystal furnace auxiliary chamber cleaning device is one of the key factors affecting crystal formation. The main chamber of the single crystal furnace auxiliary chamber cleaning device is mainly used for the heating reaction of silicon material. The crystal formed in the main chamber is pulled upwards by a lifting device placed in the auxiliary chamber. During the pulling process, argon gas passes through the auxiliary chamber and flows into the main chamber. The argon gas carries the volatiles from the reaction and moves downwards along the auxiliary chamber. Residues of these volatiles accumulate on the inner wall of the furnace. If these residues are not cleaned in time, they will fall into the silicon material in the main chamber during the crystal pulling process, contaminating the purity of the molten silicon and seriously affecting the quality of crystal formation. Therefore, maintaining the cleanliness of the single crystal furnace auxiliary chamber is of great significance for improving the quality of the finished crystal.

[0004] The main chamber of a single-crystal furnace has a relatively large opening diameter, making it easy to clean. The auxiliary chamber, however, is a cylindrical structure, long and narrow, with an inner diameter of approximately 400mm (300-450mm) and a furnace depth of approximately 5500mm (4500-7500mm), and is positioned 1500mm-4500mm above ground level. Currently, the most common method for cleaning the auxiliary chamber involves fixing a ring to a stainless steel or aluminum alloy tube, wrapping the ring with sponge and lint-free paper. The cleaning rod typically consists of two to three sections connected by threads. When cleaning the auxiliary chamber, the operator manually pushes the cleaning rod into the chamber and then manually reciprocates the rod to clean it. While this method is simple, it is difficult to guarantee cleanliness, and the uncontrollable nature of manual operation of the cleaning rod can easily lead to incomplete cleaning.

[0005] Chinese patent application number 2021223142568 discloses a single crystal furnace cleaning device, comprising: a cleaning mechanism for cleaning a sub-chamber; and a rotating mechanism rotatably connecting the cleaning mechanism to the column of the single crystal furnace. The rotating mechanism includes a rotating shaft, a transmission assembly, and a first driving component. The rotating shaft is connected to both the cleaning mechanism and the column, and the first driving component drives the cleaning mechanism to rotate around the rotating shaft via the transmission assembly. This invention addresses the shortcomings of existing sub-chamber cleaning devices, such as large size, complex structure, and cumbersome alignment process. The single crystal furnace cleaning device provided by this utility model uses a rotating mechanism to mount the cleaning mechanism on the column of the single crystal furnace, saving space and increasing the initial height of the rotating mechanism. The rotating mechanism enables the cleaning mechanism to rotate around the rotating shaft, thereby aligning the cleaning mechanism with the sub-chamber of the single crystal furnace, improving alignment efficiency and facilitating automatic alignment of the cleaning mechanism with the sub-chamber. However, in situations requiring continuous rotation during operation, cable interference and narrow space within the sub-chamber make practical solutions difficult. A common solution is to use slip ring technology, but slip rings are costly and have low reliability.

[0006] Therefore, how to achieve continuous rotation of the sub-chamber of the single crystal furnace for automatic cleaning has become a technical problem that urgently needs to be solved by those skilled in the art. Summary of the Invention

[0007] This utility model provides a continuous rotary device for cleaning the auxiliary chamber of a single crystal furnace. The device consists of a mounting base, a rotating sleeve, and a connecting plate located below the cleaning ring on the main body of the cleaning head. The connecting plate is movably connected to the cleaning ring. A motor is mounted on the mounting base, driving the rotating sleeve and the connecting plate to rotate, thereby achieving continuous rotation of the cleaning ring. The device is simple in structure, easy to operate, low in cost, and highly efficient in cleaning the auxiliary chamber of the single crystal furnace.

[0008] To solve the above-mentioned technical problems, this utility model provides a continuous rotary device for cleaning the auxiliary chamber of a single crystal furnace, comprising a cleaning head body, a cleaning ring disposed on the top of the cleaning head body, and a tensioning device for driving the cleaning ring to unfold. The cleaning ring is formed by at least two arc-shaped plates. The cleaning head body is located below the cleaning ring and is sequentially fitted with a connecting plate, a rotating sleeve, and a mounting base. The mounting base is fixedly installed on the cleaning head body. The connecting plate and the rotating sleeve are fixedly connected. A motor mounting seat is provided on one side of the mounting base. A rotary motor is installed at the bottom of the motor mounting seat. The motor shaft of the rotary motor passes through the motor mounting seat and is fitted with a driving pinion. A driven large gear that meshes with the driving pinion is provided on the lower side wall of the rotating sleeve. A guide slider is provided on the upper surface of the connecting plate. A slide block that slides on the guide slider and is connected to the tensioning device is provided on the inner wall of the cleaning ring.

[0009] Furthermore, the cleaning head body has a pair of ball bearing mounting grooves on the side wall of the rotating sleeve, and the ball bearing mounting grooves are evenly distributed with balls that abut against the inner wall of the rotating sleeve.

[0010] Furthermore, the tensioning device includes a tensioning motor, a lift connected to the tensioning motor, a lifting rod extending vertically through the lift, and a conical tensioning seat connected to the bottom of the lifting rod, with the sliding seat movably connected to the conical tensioning seat.

[0011] Furthermore, a spring mechanism for resetting is provided between the connecting plate and the slide.

[0012] Furthermore, the slide block is provided with an abutting protrusion on the side near the conical tensioning seat for abutting against the conical outer wall of the conical tensioning seat, and an arc-shaped mounting plate adapted to the arc plate is provided on the other side, and bolts are connected between the arc-shaped mounting plate and the arc plate.

[0013] Furthermore, a lower mounting plate for mounting a lifting mechanism is provided on the side wall near the top of the cleaning head body, and an upper mounting plate for fixing the lifting mechanism is provided on the top of the cleaning head body. The lifting mechanisms are configured as a pair and symmetrically arranged around the cleaning head body, and the tensioning motor is fixed on the side wall of the lifting mechanism.

[0014] Furthermore, the lifting mechanism is configured as a worm gear screw jack, the input shaft of which is connected to the motor shaft of the tensioning motor, and the lifting rod is configured as a screw.

[0015] Furthermore, a connecting rod is provided at the top of the lifting rod, and a guide rod is provided on the lower mounting plate near the lifting machine, with the other end of the connecting rod sliding on the guide rod.

[0016] The beneficial effects of this utility model are as follows: This utility model discloses a continuous rotary device for cleaning the auxiliary chamber of a single crystal furnace. The main body of the cleaning head is provided with a mounting base, a rotating sleeve, and a connecting plate located below the cleaning ring. The connecting plate is movably connected to the cleaning ring. A motor is provided on the mounting base, and the motor drives the rotating sleeve and the connecting plate to rotate, thereby realizing the continuous rotation of the cleaning ring. The device has a simple structure, is easy to operate, has low cost, and has high cleaning efficiency for the auxiliary chamber of the single crystal furnace. Attached Figure Description

[0017] Figure 1 is a schematic diagram of the continuous rotary device for cleaning the auxiliary chamber of a single crystal furnace according to this utility model; Figure 2 is a front view of the continuous rotary device for cleaning the auxiliary chamber of a single crystal furnace according to this utility model; Figure 3 is a cross-sectional view of the continuous rotary device for cleaning the auxiliary chamber of a single crystal furnace according to this utility model; Figure 4 is a side sectional view of the continuous rotary device for cleaning the auxiliary chamber of a single crystal furnace according to this utility model; Figure 5 is a top view of the continuous rotary device for cleaning the auxiliary chamber of a single crystal furnace according to this invention.

[0018] Reference numerals: 1-Cleaning head body; 2-Cleaning ring; 3-Mounting sleeve; 4-Rotary motor; 5-Rotating sleeve; 6-Driving pinion; 7-Driven gear; 8-Connecting plate; 9-Motor mounting base; 10-Ball bearing; 11-Guide slider; 12-Slide seat; 13-Upper mounting plate; 14-Lifting mechanism; 15-Input shaft; 16-Lifting rod; 17-Conical tensioning seat; 18-Abutting protrusion; 19-Tensioning motor; 20-Connecting rod; 21-Guide rod. Detailed Implementation

[0019] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0020] like Figure 1-5 This is a schematic diagram of the structure of a continuous rotary device for cleaning the auxiliary chamber of a single crystal furnace according to the present invention. The continuous rotary device for cleaning the auxiliary chamber of a single crystal furnace according to the present invention includes a cleaning head body 1, a cleaning ring 2 disposed on the top of the cleaning head body 1, and a tensioning device for driving the cleaning ring 2 to unfold. The cleaning ring 2 is surrounded by at least two arc-shaped plates. The cleaning head body 1 is located below the cleaning ring 2 and is fitted with a connecting plate 8, a rotating sleeve 5, and a mounting base 3 in sequence. The mounting base 3 is fixedly installed on the cleaning head body 1. The connecting plate 8 and the rotating sleeve 5 are fixedly connected. A motor mounting base 9 is provided on one side of the mounting base 3. A rotary motor 4 is installed at the bottom of the motor mounting base 9. The motor shaft of the rotary motor 4 passes through the motor mounting base 9 and is fitted with a driving pinion 6. A driven large gear 7 that meshes with the driving pinion 6 is provided on the lower side wall of the rotating sleeve 5. A guide slider 11 is provided on the upper surface of the connecting plate 8. A slide block 12 that slides on the guide slider 11 and is connected to the tensioning device is provided on the inner wall of the cleaning ring 2.

[0021] In this embodiment, the continuous rotation device is installed on the cleaning head body 1 below the cleaning ring 2, and the tensioning device is installed inside the cleaning ring 2. The motor drives the driving pinion 6 to work, which drives the driven gear 7, the rotating sleeve 5, the connecting plate 8, the guide block 11, the slide block 12 and the cleaning ring 2 to rotate, thereby achieving continuous rotation.

[0022] In this embodiment, a mounting base 3, a rotating sleeve 5, and a connecting plate 8 are provided on the main body 1 of the cleaning head below the cleaning ring 2. The connecting plate 8 is movably connected to the cleaning ring 2. A motor is provided on the mounting base 3, and the motor drives the rotating sleeve and the connecting plate to rotate, thereby realizing the continuous rotation of the cleaning ring. The structure is simple, the operation is convenient, the cost is low, and the cleaning efficiency of the single crystal furnace auxiliary chamber is high.

[0023] In this embodiment, a tensioning device is used to drive the slide block 12 to slide on the guide block 11, thereby enabling the cleaning ring 2 to expand and retract.

[0024] In a preferred embodiment, the cleaning head body 1 has a pair of ball bearing mounting grooves on the side wall of the rotating sleeve 5. Ball bearings 10 are evenly distributed in the ball bearing mounting grooves and abut against the inner wall of the rotating sleeve. This structure reduces the friction of the rotating sleeve 5 and improves the working efficiency of the rotating motor 4.

[0025] In a preferred embodiment, the tensioning device includes a tensioning motor 19, a lift 14 connected to the tensioning motor 19, a lifting rod 16 extending vertically through the lift, and a conical tensioning seat 17 connected to the bottom of the lifting rod 16. A slide 12 is movably connected to the conical tensioning seat 17. In this embodiment, the structure utilizes the operation of the lift to drive the lifting rod and the conical tensioning seat 17 to move up and down, thereby squeezing the slide 12 to slide outward or inward along the guide slider 11, thus realizing the unfolding and retraction of the cleaning ring 2.

[0026] In a preferred embodiment, a spring mechanism for resetting is provided between the connecting plate 8 and the slide 12. In this embodiment, this structure facilitates the resetting and retraction of the cleaning ring 2 under the action of the spring when the lifting rod 16 and the conical tensioning seat 17 move upward.

[0027] In a preferred embodiment, the slide 12 is provided with an abutting protrusion 18 on the side near the conical tensioning seat 17 for abutting against the conical outer wall of the conical tensioning seat, and an arc-shaped mounting plate adapted to the arc plate is provided on the other side. Bolts are connected between the arc-shaped mounting plate and the arc plate. In this embodiment, this structure facilitates the conical outer wall to drive the abutting protrusion 18 and the slide 12 to slide outward or outward along the guide slider 11.

[0028] In a preferred embodiment, a lower mounting plate for mounting the lifting mechanism 14 is provided on the side wall near the top of the cleaning head body 1, and an upper mounting plate 13 for fixing the lifting mechanism is provided on the top of the cleaning head body. The lifting mechanisms 14 are arranged in pairs and symmetrically around the cleaning head body 1, and the tensioning motor 19 is fixed to the side wall of the lifting mechanism. This structure in this embodiment facilitates the sliding of the extrusion slide 12 outward or inward along the guide slide 11, thereby enabling the cleaning ring 2 to expand and retract.

[0029] In a preferred embodiment, the lifting machine 14 is configured as a worm gear screw jack, the input shaft 15 of which is connected to the motor shaft of the tensioning motor, and the lifting rod is configured as a screw.

[0030] In a preferred embodiment, a connecting rod 20 is provided at the top of the lifting rod, and a guide rod 21 is provided on the lower mounting plate near the lifting machine 14, with the other end of the connecting rod sliding on the guide rod 21.

[0031] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A continuous rotary device for cleaning the sub-chamber of a single crystal furnace, comprising a cleaning head body, a cleaning ring arranged on the top of the cleaning head body and a tensioning device for driving the cleaning ring to expand, wherein the cleaning ring is surrounded by no less than two arc-shaped plates, characterized in that: The cleaning head body is located below the cleaning ring and is sequentially fitted with a connecting plate, a rotating sleeve, and a mounting base. The mounting base is fixedly installed on the cleaning head body, and the connecting plate and the rotating sleeve are fixedly connected. A motor mounting base is provided on one side of the mounting base, and a rotary motor is installed at the bottom of the motor mounting base. The motor shaft of the rotary motor passes through the motor mounting base and is fitted with a driving pinion. A driven large gear that meshes with the driving pinion is provided on the lower side wall of the rotating sleeve. A guide slider is provided on the upper surface of the connecting plate, and a slide block that slides on the guide slider and is connected to the tensioning device is provided on the inner wall of the cleaning ring.

2. A continuous rotary device for cleaning a subchamber of a single crystal furnace according to claim 1, characterized in that: The cleaning head body has a pair of ball bearing mounting grooves on the side wall of the rotating sleeve, and the ball bearing mounting grooves are evenly distributed with balls that abut against the inner wall of the rotating sleeve.

3. A continuous rotary device for cleaning the auxiliary chamber of a single crystal furnace according to claim 1 or 2, characterized in that: The tensioning device includes a tensioning motor, a lift connected to the tensioning motor, a lifting rod extending vertically through the lift, and a conical tensioning seat connected to the bottom of the lifting rod. The sliding seat is movably connected to the conical tensioning seat.

4. A continuous rotary device for cleaning a subchamber of a single crystal furnace according to claim 3, characterized in that: A spring mechanism for resetting is provided between the connecting plate and the slide.

5. A continuous rotary device for cleaning a subchamber of a single crystal furnace according to claim 4, characterized in that: The slide block is provided with an abutting protrusion on the side near the conical tensioning seat for abutting against the conical outer wall of the conical tensioning seat, and an arc-shaped mounting plate adapted to the arc plate is provided on the other side. The arc-shaped mounting plate and the arc plate are connected by bolts.

6. A continuous rotary device for cleaning the subchamber of a single crystal furnace according to claim 3, characterized in that: The cleaning head body has a lower mounting plate for mounting the lifting mechanism on its side wall near the top, and an upper mounting plate for fixing the lifting mechanism is provided on the top of the cleaning head body. The lifting mechanisms are arranged in pairs and symmetrically around the cleaning head body, and the tensioning motor is fixed to the side wall of the lifting mechanism.

7. A continuous rotary device for cleaning a subchamber of a single crystal furnace according to claim 6, characterized in that: The lifting mechanism is configured as a worm gear screw jack, the input shaft of which is connected to the motor shaft of the tensioning motor, and the lifting rod is configured as a screw.

8. A continuous rotary device for cleaning a subchamber of a single crystal furnace according to claim 7, characterized in that: A connecting rod is provided at the top of the lifting rod, and a guide rod is provided on the lower mounting plate near the lifting machine. The other end of the connecting rod slides on the guide rod.

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