Sealing device, piping system and single crystal furnace

Abstract

This disclosure provides a sealing device, a piping system, and a single crystal furnace. The sealing device includes: a cover pivotally connected to the piping for rotation between a closed position (closing the cleaning port) and an open position (opening the cleaning port); a mounting assembly fixed to the piping; and a drive unit mounted on the mounting assembly and detachably connected to the cover for driving the cover to rotate from the closed position to the open position. This sealing device automatically drives the pivotable cover from the closed position to the open position via the drive unit, improving the automation, convenience, and efficiency of the cleaning port opening and closing operation.

Description

Technical Field

[0001] This disclosure relates to the field of semiconductor materials, and in particular to encapsulation devices, piping systems and single crystal furnaces. Background Technology

[0002] Precision manufacturing equipment such as semiconductor-grade silicon single crystal furnaces typically contain complex piping systems, including those for vacuum extraction, gas delivery, and waste disposal. After a period of operation, these piping systems may accumulate residues, contaminants, or crystallize, necessitating regular cleaning and maintenance to ensure proper equipment operation and product quality.

[0003] Existing piping systems typically have cleaning ports installed at specific locations to facilitate inspection, cleaning, or maintenance of the pipe interior. When a cleaning port needs to be opened, operators must manually remove the sealing device; after cleaning or maintenance is completed, the sealing device must be manually reinstalled and tightened to restore the pipe's seal.

[0004] However, these manual operations are not only inefficient, but may also cause inconvenience or safety hazards to operators. Therefore, it is necessary to improve the sealing method of the cleaning port to solve the above problems. Utility Model Content

[0005] This disclosure provides a sealing device, a piping system, and a single crystal furnace. The sealing device automatically drives a pivotable cover from a closed position to an open position via a drive unit, improving the automation, convenience, and efficiency of the cleaning port opening and closing operation.

[0006] To achieve the above objectives, in a first aspect, some embodiments of this disclosure provide a sealing device. This sealing device can be used to seal the cleaning port of a single crystal furnace's piping, and may include: The cover is pivotally connected to the pipeline to rotate between a closed position that closes the cleaning port and an open position that opens the cleaning port. Mounting components that are fixed to the pipeline; A drive unit, which is mounted on the mounting assembly and detachably connected to the cover, is used to drive the cover to rotate from the closed position to the open position.

[0007] Secondly, some embodiments of this disclosure provide a piping system for a single crystal furnace, and include: Piping; A cleaning port is installed on the pipeline, and the cleaning port has a sealing surface that is inclined relative to the central axis of the pipeline; According to the sealing device of the first aspect, the cover of the sealing device is pivotally connected to the pipeline to pivot between a closed position that closes the cleaning port and an open position that opens the cleaning port.

[0008] Thirdly, some embodiments of this disclosure provide a single crystal furnace. The single crystal furnace includes a piping system according to the second aspect.

[0009] This disclosure provides a sealing device, a piping system, and a single crystal furnace. The sealing device employs a drive unit to automatically actuate a pivotable cover, enabling switching between closed and open cleaning ports. This design significantly improves the automation and convenience of cleaning port operation, overcoming the inefficiency, inconvenience, and potential safety hazards of traditional manual sealing methods. Through automated actuation, the device not only saves manpower and time, especially in inaccessible or hazardous areas, but also effectively ensures operator safety and may improve the overall efficiency and reliability of maintenance processes. Attached Figure Description

[0010] Figure 1 A schematic perspective view of the enclosure device and piping system provided for embodiments of this disclosure.

[0011] Figure 2 Another schematic perspective view of the enclosure device and piping system provided for embodiments of this disclosure.

[0012] Figure 3 A side view of the enclosure and piping system provided for embodiments of this disclosure.

[0013] Figure 4 A schematic front view of a portion of a single crystal furnace provided for an embodiment of this disclosure. Detailed Implementation

[0014] The technical solutions in the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings.

[0015] In their practice of maintaining piping systems for equipment such as single crystal furnaces, the inventors observed that when cleaning or repairing the inside of the piping is required, operators often need to spend considerable time and effort removing the sealing components used to close the cleaning ports. Especially in environments with complex structures or limited space, disassembling and reinstalling these sealing components (such as blind flanges or flange covers), which are usually fixed by bolts or other fasteners, is not only cumbersome and reduces maintenance efficiency, but repeated disassembly and reassembly may also affect the reliability of the seal, and even bring inconvenience or potential risks to the operators.

[0016] To address this operational inconvenience, the inventors initially envisioned simplifying the removal process of the sealing component. However, they discovered that even if the handling issue were resolved, the process of separating and resealing the sealing component from the pipeline cleaning port remained an efficiency bottleneck. Furthermore, the stability of the seal still depended on the standardization and consistency of manual operation. This was particularly problematic in precision piping systems requiring high vacuum or high cleanliness, where the uncertainty in sealing caused by manual tightening was a significant issue.

[0017] After further observation and analysis, the inventors realized that the root of the problem lay in the fact that traditional sealing methods required the sealing component to be completely disassembled as a separate part and sealed through multiple fastening points (such as bolts). This separate, manual-tightening-dependent mode was the main reason for the cumbersome, time-consuming, and unreliable sealing operation. The inventors then considered whether it was possible to design a closed structure that could be opened without completely removing it from the pipeline and could achieve a reliable seal automatically or semi-automatically when closed, thus completely eliminating the reliance on manual tightening.

[0018] Based on the above considerations, the inventors proposed a sealing device, a piping system, and a single-crystal furnace. The sealing device employs a drive unit to automatically operate a pivotable lid, thereby enabling switching between closed and open cleaning ports. This automated drive method not only improves the overall efficiency and reliability of the maintenance process but also effectively ensures the safety of operators in inaccessible or hazardous areas.

[0019] In some embodiments of this disclosure, see Figure 1 The sealing device 200 may include a cover 220, a mounting assembly 240, and a drive unit 260. These three components work together to achieve selective sealing and automatic opening of the cleaning port of the pipeline.

[0020] Specifically, the cover 220 is a component that directly acts on the cleaning port 24 of the conduit 22 to achieve a sealing function. For example, the cover 220 can generally be a plate-like or disc-like structure that completely covers the outline of the cleaning port, such as... Figure 1 As shown. The material of cover 220 needs to be selected according to the specific application environment. For example, in the high temperature or vacuum environment of a single crystal furnace, a metal material with sufficient strength and corrosion resistance is often selected.

[0021] Unlike conventional sealing devices, the cap 220 is not completely removed; instead, it is pivotally connected to the conduit 22 or a nearby fixed structure. This pivotal connection means that the cap 220 and the conduit have a connection that allows them to rotate or swing about a specific axis or fulcrum, rather than to translate or separate. This pivotal connection can be achieved in various ways, such as through a hinge structure, like... Figure 1As shown. In embodiments not shown, a shaft and bearing can be used, as long as rotation around the shaft is possible.

[0022] This pivotal connection allows the cover 220 to rotate between two key functional states: one state is the closed position, where the cleaning port 24 is closed, such as... Figure 2 As shown, at this point the cover completely covers and normally seals the cleaning port; another state is the open position where the cleaning port 24 is left open, as shown... Figure 1 As shown, the cover is then removed to expose the cleaning port for maintenance. Because the cover remains connected to the pipeline after being opened, the problems of disassembly, storage, and easy loss of traditional sealing components are completely avoided, greatly simplifying the operation process.

[0023] The mounting component 240 enables automated operation of the cover 220 and provides it with stable support. This mounting component 240 acts as a bridge, reliably securing the drive unit 260 (mentioned later) to the pipe 22. This securing means that the position of the mounting component 240 relative to the pipe 22 is stable and unchanging, capable of withstanding the forces and reaction torques generated by the drive unit during operation, ensuring precise positioning of the drive unit. The securing method can be varied, such as clamping it to the cylindrical pipe using a clamping structure, or fixing the bracket to the pipe using welding or bolts.

[0024] In some embodiments of this disclosure, see Figure 1 The mounting assembly 240 may include a connector 242 that connects directly to the piping and a support 244 for carrying the drive unit. This robust connection is fundamental to the stable operation of the entire enclosure, ensuring that the drive unit 260 is precisely and consistently positioned relative to the cleaning port 24 and the cover 220, which is a prerequisite for effective actuation.

[0025] The drive unit 260 is the core power component that enables the cover 220 to open automatically. The drive unit 260 is designed to generate and output power to drive the movement of the cover 220. The drive unit 260 is mounted on the mounting assembly 240, meaning the mounting assembly provides it with a precise and secure mounting base.

[0026] The specific form of the drive unit 260 can be varied, such as including a pneumatic actuator, an electric actuator, or a hydraulic actuator, as long as it can provide sufficient driving force.

[0027] The connection between the drive unit 260 and the cover 220 is designed to be separable. This means that the connection between the power output end of the drive unit 260, such as the piston rod of the cylinder or its extended support, and the point of action on the cover 220 is not permanent or continuous, allowing them to disengage or be released from constraint in a specific state, such as when the cover is in the closed position, while still effectively transmitting force when drive is required.

[0028] This detachable design has several advantages. First, it ensures that when the cover 220 is in the closed position, the drive unit 260 can be fully retracted or separated from the cover without affecting the cover's sealing state (e.g., if gravity sealing is used, there will be no interfering force), thus guaranteeing the stability of the closed state. Secondly, according to the inventors' design considerations, this non-fixed connection also facilitates manual opening of the cover in emergency situations such as drive unit 260 failure, reducing the risk of equipment damage. Thirdly, when thorough cleaning of the pipeline requires the cover to be fully opened, the detachable design makes operation more convenient and avoids the risk of the cover being accidentally closed by the drive unit 260 during cleaning. In this embodiment, the main function of the drive unit 260 is to apply thrust during opening. For example, the drive unit 260 may only need to push the cover initially away from the cleaning port to achieve a so-called "ventilation," releasing gas or pressure from the pipeline. Further full opening at a larger angle can be manually performed by the operator according to cleaning needs. This ensures safety when personnel are close to the operation and may also simplify the structural complexity and stroke requirements of the drive unit itself. The core function of the drive unit is to provide power to rotate the lid from the closed position to the open position. This indicates that the goal of the drive unit is to overcome the resistance to the lid's movement (such as gravity and friction) and enable it to complete at least the initial stage of the transition from a closed to an open state around the pivot axis.

[0029] In summary, the sealing device 200 in the above embodiments organically combines a pivotally connected cover 220, a mounting assembly 240 fixed to the conduit 22, and a drive unit 260 mounted on the assembly and detachably connected to the cover, thus constructing a solution for sealing the cleaning port. These components work synergistically: the mounting assembly 240 provides a stable platform for the drive unit 260 relative to the conduit 22; after precise installation, the drive unit 260, through its detachable connection with the cover 220, can effectively apply power to the pivotable cover 220 when needed; the power generated by the drive unit 260 causes the cover 220 to rotate about its pivot, completing the action from closing to opening, thus automating the opening operation of the cover 220.

[0030] Compared to traditional manual disassembly and installation methods, this automation significantly improves operational convenience, especially in complex or hazardous environments. Operators can open the device simply by sending control signals, significantly enhancing safety. Furthermore, automated operation is typically faster than manual operation, reducing equipment downtime for maintenance and improving overall work efficiency. In addition, the pivotal connection design of the cover avoids the management inconvenience and loss risks associated with complete component separation. Therefore, the sealing device 200 effectively solves the inherent problems of low efficiency, inconvenience, and safety risks associated with manual operation of cleaning port sealing devices in existing technologies.

[0031] See Figure 3 In some embodiments of this disclosure, the drive unit 260 may include an actuator 262 and a support 264. The actuator 262 is a power-generating source component, which may be pneumatic, electric, or hydraulic. The support 264 may be connected to the output of the actuator 262, for example, to the piston rod of a cylinder if the actuator 262 is a cylinder. The support 264 is also configured to be detachably connected to the cover 220.

[0032] Actuator 262 can be designed to drive support 264 in linear motion. When the cleaning port 24 needs to be opened, actuator 262 drives support 264 to move along a linear path, and support 264 then contacts and pushes cover 220, causing it to rotate about the pivot connection to the open position. This linear motion drive method has a relatively simple structure and is easy to achieve precise control.

[0033] See Figure 1 To simplify the structure and improve the reliability of the seal, the cover 220 may include a body 222 and a sealing portion 224 disposed on the body 222. The body 222 constitutes the main part of the cover 220 and is used to cover the cleaning port 24. The sealing portion 224 is the part of the body 222 that directly contacts the edge of the cleaning port to form a sealing interface. The sealing portion 224 may be a precision-machined surface of the body itself, or it may be an elastic sealing ring, such as an O-ring, mounted on the body. Figure 1 As shown.

[0034] In some embodiments of this disclosure, the cover 220 may be designed to reliably seal the cleaning port 24 via the sealing portion 224 by its own weight alone when in the closed position.

[0035] See Figure 3In some embodiments of this disclosure, the cover 220 is configured such that, when in the closed position, the angle α between it and the central axis of the conduit 22 is approximately acute, for example, approximately 45°. When the conduit 22 is arranged with its central axis approximately horizontal, when the cover 220 is in the closed position, the torque generated by its center of gravity causes it to press stably against the sealing surface of the cleaning port. The gravitational component, perpendicular to the sealing surface, generates sufficient pressure to achieve an effective seal. When the sealing device 200 is applied to the piping system of a single crystal furnace, since the furnace is typically under negative pressure during use, once the furnace is started, the negative pressure inside further draws the cover 220 to press against the cleaning port, further improving the sealing characteristics. This design eliminates the need for an additional locking mechanism, making the sealing device simple in structure, reliable in sealing, and energy-efficient in the closed state.

[0036] In some embodiments of this disclosure, the cover 220 may be designed to reliably seal the cleaning port 24 via the sealing portion 224 solely by its own weight when in the closed position. To achieve this simple and reliable weight-based seal, the structures of the cover 220 and the cleaning port 24 require a special fit. (Refer to...) Figure 1 and Figure 3 In some embodiments, the cleaning port 24 on the conduit 22 itself is provided with an inclined sealing surface 24a. This sealing surface 24a is inclined relative to the central axis of the conduit 22, and the angle α between it and the central axis of the conduit 22 is approximately acute, for example, approximately 45°. In this case, the body 222 of the cover 220 has a sealing portion 224 that mates with the inclined sealing surface 24a. When the conduit 22 is positioned such that its central axis is approximately horizontal, when the cover 220 is in the closed position (e.g.) Figure 2 , Figure 3 As shown), its sealing part 224 rests on the inclined sealing surface 24a of the cleaning port 24. Since the sealing surface is inclined, the weight of the cover 220 itself will generate a component force perpendicular to the sealing surface, pressing the sealing part 224 tightly onto the sealing surface 24a, thereby achieving effective sealing of the cleaning port by gravity alone.

[0037] Alternatively, in other embodiments, even if the cleaning port 24 on the pipe 22 is itself perpendicular to the central axis of the pipe, i.e., its sealing surface is horizontal or not inclined, an inclined sealing surface can be achieved by adding a transition component. For example, an transition flange (not shown in the figure) can be provided. This transition flange is fixedly installed on the existing cleaning port 24 and has a through hole communicating with the cleaning port 24. The end face of this transition flange facing the cover 220 is designed to be inclined, thereby forming a new, inclined sealing surface. In this case, the sealing part 224 of the cover 220 mates with the inclined end face of this transition flange, and can also achieve a seal by the weight of the cover 220 itself. This method of using a transition flange makes the self-weight sealing solution applicable to more existing piping systems with non-inclined cleaning ports, improving the applicability of the sealing device.

[0038] Whether the cleaning port itself has an inclined sealing surface or an inclined sealing surface is formed through an adapter flange, this design, which utilizes gravity combined with the pressure difference of the application environment, such as the negative pressure in the vacuum piping system of a single crystal furnace, further adsorbs and presses the cover 220 onto the cleaning port 24, eliminates the need for a complex external locking mechanism. This makes the sealing device 200 simpler in the closed state, provides a stable and reliable sealing effect, and requires no additional energy consumption to maintain the closed state.

[0039] Considering that cleaning port 24 may require handling substances flowing out of the pipeline, such as cleaning fluid or process residues, when it is opened, the structure of cover 220 can be further optimized to improve safety and cleanliness. See also Figures 1 to 3 In some embodiments, the cover 220 may also have a protective portion 226 disposed around the circumferential edge of the body 222. This protective portion 226 may be an integrally formed flange or skirt structure that extends relative to the body 222 to at least partially surround the seal 224. At the moment the cover 220 is opened, or while the cover 220 is still near the cleaning port 24 and not fully opened, the protective portion 226 effectively contains and guides material flowing from the cleaning port 24, preventing it from splashing or spreading in all directions, thus helping to maintain the cleanliness of the environment around the equipment and the safety of operators. Simultaneously, the protective portion 226 can also increase the structural rigidity of the cover 220 to a certain extent.

[0040] In addition to its airflow guiding function, the protective section 226 also serves as an interface for force transmission between the drive unit 260 and the cover 220. (Refer to...) Figure 3In some embodiments, the support member 264 of the drive unit 260 is detachably connected to the protective portion 226. The support member 264 is configured to apply a pushing force to the protective portion 226. For example, when the actuator 262 is activated, driving the support member 264 to extend toward the cover 220, the end of the support member 264 contacts and pushes the edge portion or a specific contact area of ​​the protective portion 226, thereby opening the cover 220. When the support member 264 retracts, the two naturally separate. Setting the point of action on the protective portion 226 located at the circumferential edge of the body 222 generally provides a better lever arm, which is beneficial for efficiently driving the cover 220 to rotate about the pivot point, and also meets the need for detachable connection for easy manual operation and cleaning.

[0041] The pivotal connection between cover 220 and pipe 22 can be a hinge structure. See [link / reference] Figures 1 to 3 In some embodiments of this disclosure, the cover 220 is connected to the pipe 22 via a hinge 280. The hinge 280 may include one or more hinge seats 280A fixed to the outer wall of the pipe 22 or the cleaning port flange, and one or more hinge seats 280B fixed to the cover 220, for example, its body 222 or protective portion 226, connected by a pivot pin 280C to form a rotating pair that allows the cover 220 to rotate freely about a fixed axis. This hinge connection structure is mature, has strong load-bearing capacity, flexible rotation, and high reliability. The installation position and axial direction of the hinge 280 need to be precisely designed to ensure that the cover 220 can accurately align with the cleaning port 24 and achieve an effective seal (especially with a weight-based seal) in the closed position, and achieve an open angle suitable for maintenance operations in the open position.

[0042] The structure of mounting component 240 will now be explained in detail. (Combined with...) Figure 1 and Figure 3 In some embodiments of this disclosure, the mounting assembly 240 includes a connector 242 for surrounding and securing to the pipe 22, and a support 244 fixed to the connector 242. The connector 242 can be a pipe clamp, for example, composed of two or more arc-shaped components, which can be securely fastened to the outer surface of the pipe 22 by fasteners such as bolts. For pipes of a specific diameter, such as DN100 pipes, the dimensions of the connector 242 need to be precisely matched. The support 244 can be used to support and secure the drive unit 260, which can be fixed to the connector 242. The specific structural form of the support 244 depends on the type of drive unit 260. For example, if the drive unit is a cylinder, the support 244 can be designed to securely mount the cylinder body thereon by surrounding it or by other means such as bolting. This mounting assembly, consisting of the connector 242 and the support 244, provides a stable and reliable mounting base, is easy to install, and generally does not require permanent modifications to the pipe itself, such as welding.

[0043] The core power element in the drive unit 260, namely the actuator 262, can be selected from different types according to actual needs. In some embodiments of this disclosure, as explained above, the actuator 262 can be a cylinder. A cylinder uses compressed air as a power source, driving the piston rod to extend and retract by controlling the opening and closing of the air passage, generating linear motion output. Cylinders have advantages such as fast response speed, large output torque, relatively simple structure, low cost, and easy integration and control, making them particularly suitable for applications like the drive cover 220 that may require overcoming initial sealing force or significant gravity. Of course, the actuator 262 can also be other types, such as an electric actuator, which achieves linear motion by driving a lead screw with a motor, providing high control precision; or a hydraulic cylinder, which provides even greater output force.

[0044] To ensure that the cover 220 remains stably open after being opened, preventing it from accidentally falling back down and thus ensuring the convenience and safety of maintenance operations, the closing device 200 may also be equipped with a limiting structure. (Refer to...) Figure 3 In some embodiments of this disclosure, the closing device 200 further includes a limiting portion 290. The limiting portion 290 functions to hold the cover 220 in its open position. Figure 3 As shown, the limiting part 290 can be a simple mechanical baffle mounted on the pipe 22, which abuts against the cover 220 when it is rotated to its maximum opening angle. Alternatively, the limiting function can be achieved through the end of the stroke of the drive unit 260 itself, such as when the cylinder piston rod is fully extended or the electric push rod reaches its maximum stroke. In applications requiring stronger locking, the limiting part 290 can also be designed as a lockable mechanism, such as a spring pin or pawl, which automatically engages and locks when the cover reaches the open position, and is unlocked by a specific operation when closing is required. The presence of the limiting part 290 ensures that the cleaning port can be reliably kept open when needed.

[0045] The following description uses the application of the sealing device 200 in the piping system 20 of the single crystal furnace 1 as an example to illustrate its usage. During normal operation of the single crystal furnace, the cleaning port 24 of the piping 22, such as the vacuum piping, is in the closed position by the cover 220 (e.g., Figure 2 and Figure 3(As shown) the cover 220 is sealed, and the drive unit 260 is normally in a non-operating state at this time. When cleaning and maintenance of the inside of the pipeline 22 is required, the operator can issue an opening command through the control system. The control system then activates the actuator 262 in the drive unit 260, for example, by supplying air to the cylinder. The actuator 262 drives the support member 264 to move, and the support member 264 contacts the cover 220, for example, contacts the protective part 226 of the cover 220 and applies a thrust. The cover 220 overcomes the resistance and begins to rotate about the hinge 280, moving from the closed position to the open position. The initial rotation breaks the seal between the cover 220 and the cleaning port 24, achieving venting, which means safe automatic depressurization for vacuum pipelines. The drive unit 260 can drive the cover 220 to the fully open position, and the cover 220 can be stopped and held in this position by the limiting part 290. Alternatively, the drive unit 260 may only push the cover 220 open to an initial angle before stopping or retracting, allowing the operator to manually push the cover 220 fully to the open position and secure it with the limiting part 290. Figure 1 As shown, this method facilitates handling abnormal situations or thorough cleaning. Maintenance can be performed once the cleaning port 24 is fully open. After maintenance, a closing command is issued, or the limit switch can be manually released. If a self-weight sealing design is used, once the drive unit 260 retracts and separates from the cover 220, or is manually released, the cover 220 will automatically rotate around the hinge 280 and fall back to the closed position under gravity, resealing the cleaning port 24. The entire process achieves automated or semi-automated opening and closing, significantly improving efficiency and safety.

[0046] See Figures 1 to 4 This disclosure also relates to a piping system 20 for use, for example, in a single crystal furnace. The piping system includes a pipe 22 with a cleaning port 24 and is equipped with the aforementioned sealing device 200. A cap 220 of the sealing device 200 is pivotally connected to the pipe 22, pivoting between a closed position that closes the cleaning port 24 and an open position that opens the cleaning port 24. In some embodiments of this disclosure, as described above and referred to... Figure 1 The cleaning port 24 of the piping system 20 is provided with a sealing surface 24a that is inclined relative to the central axis of the piping 22. Accordingly, the cover 220 (specifically its body 222) of the sealing device 200 has a sealing portion 224 that can mate with the inclined sealing surface 24a. This structure allows the sealing portion 224 of the cover 220 to rest on the inclined sealing surface 24a when the cover 220 is in the closed position, and to reliably seal the cleaning port 24 by its own weight alone.

[0047] Further, see Figure 4 The document also illustrates a single-crystal furnace 1 provided in an embodiment of this disclosure. For clarity, only a portion of the single-crystal furnace 1 is shown. Figure 4As shown, the single crystal furnace 1 includes the aforementioned piping system 20. The piping system 20, including the sealing device 200, can be located at the lower part of the single crystal furnace 1. Integrating this piping system 20, which has an automatic opening and closing function for cleaning ports, into the single crystal furnace 1 can significantly improve the automation, efficiency, and safety of single crystal furnace maintenance operations. For example, when cleaning of the vacuum piping is required, the drive unit can be remotely activated through the control system to automatically open the cleaning port cover, or at least initially ventilate it, achieving safe automatic pressure relief without requiring close-range manual operation by operators. This reduces potential risks and shortens maintenance time, which is of positive significance for ensuring the stable operation of the single crystal furnace and improving production efficiency.

[0048] In summary, the embodiments of this disclosure provide a sealing device 200, a piping system 20, and a single crystal furnace 1. By employing a structure including a cover 220, a mounting assembly 240, and a drive unit 260, particularly by utilizing the drive unit 260 to automatically rotate the cover 220 from a closed position to an open position, and further designing features such as inclined sealing surfaces, gravity sealing, and detachable connections, the opening and closing operation of the piping cleaning port is automated. This solution not only improves the convenience, efficiency, and safety of operation but also provides an automatic pressure relief function, solving many problems associated with manual sealing devices in related technologies. The sealing device structure can be adapted and optimized in various ways according to specific application requirements, making it suitable for applications requiring regular piping maintenance in fields such as semiconductor manufacturing, vacuum processing, and chemical engineering.

[0049] The above description is merely a specific embodiment of this disclosure, but the scope of protection of this disclosure is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this disclosure should be included within the scope of protection of this disclosure. Therefore, the scope of protection of this disclosure should be determined by the scope of the claims.

Claims

1. A sealing device for sealing the cleaning port of a pipe in a single crystal furnace, characterized in that, The sealing device includes: A cover, which is pivotally connected to the conduit to rotate between a closed position that closes the cleaning port and an open position that opens the cleaning port; Mounting components that are fixed to the pipeline; A drive unit, which is mounted on the mounting assembly and detachably connected to the cover, is used to drive the cover to rotate from the closed position to the open position.

2. The sealing device according to claim 1, characterized in that, The drive unit includes an actuator and a support member detachably connected to the cover, wherein the actuator is configured to drive the support member to perform linear motion to rotate the cover from the closed position to the open position.

3. The sealing device according to claim 2, characterized in that, The cover includes a body having a sealing portion, and the cover is configured to seal the cleaning port via the sealing portion by its own weight in the closed position.

4. The sealing device according to claim 3, characterized in that, The cover also has a protective portion disposed around the circumferential edge of the body, the protective portion being used to guide the material flowing out from the cleaning port.

5. The sealing device according to claim 4, characterized in that, The support member is detachably connected to the protective part and is configured to apply a pushing force to the protective part.

6. The sealing device according to any one of claims 1 to 5, characterized in that, The cover is connected to the pipeline via a hinge.

7. The sealing device according to any one of claims 1 to 5, characterized in that, The mounting assembly includes a connector fixed around the pipeline and a support fixed to the connector, the drive unit being supported by the support.

8. A piping system for a single crystal furnace, characterized in that, The piping system includes: Piping; A cleaning port is provided on the pipeline, the cleaning port having a sealing surface inclined relative to the central axis of the pipeline; According to claim 1, the closure device has a cover pivotally connected to the conduit to pivot between a closed position that closes the cleaning port and an open position that opens the cleaning port.

9. The plumbing system of claim 8, wherein, The cleaning port is provided with a sealing surface that is inclined relative to the central axis of the pipeline. The cover includes a body with a sealing portion, and the sealing portion of the cover is configured in the closed position to engage with the sealing surface of the cleaning port and seal the cleaning port by its own gravity.

10. A single crystal furnace characterized by comprising: The single crystal furnace includes the piping system according to claim 8 or 9.

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