A thermostat cooling device for a vacuum pump rotor

CN224742555UActive Publication Date: 2026-09-11CHENGDU RANKUUM MASCH LTD
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Patent Information

Application Number
CN202522302289.9
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-10-30
Publication Date
2026-09-11
Estimated Expiration
2035-10-30

AI Technical Summary

Technical Problem

[0003]然而现有的干式真空泵在实际运行过程中,对于设备转子的降温主要是通过风冷或水冷后的润滑油直接对转子进行降温,然而这种传统的技术路线存在明显的缺陷:润滑油温度受限于风冷时环境温度或水冷时冷却水温度,当环境温度或冷却水温度波动较大时,油温也会波动较大,不能精确控制油温,将会影响真空泵性能和使用寿命,降低了设备的整体性能和稳定性

Benefits of technology

[0011]本实用新型具有以下优点:本实用新型油箱内的润滑油在进入恒温混油阀之前会分成两路,一路直接经高温进油口流入恒温混油阀,另一路先流入换热器,再由进油管b流入低温进油口,恒温混油阀根据设定的出油温度自动调节高温进油口和低温进油口的进油比例,从而实现出油温度恒定,避免油温波动较大,提高了设备的整体性能和稳定性。

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses a constant temperature cooling device for vacuum pump rotor, including constant temperature mixed oil valve and heat exchanger, and constant temperature mixed oil valve has high temperature oil inlet, low temperature oil inlet and mixed oil outlet, and high temperature oil inlet is connected with oil inlet pipe a, and the other end of oil inlet pipe a communicates with three -way valve a, and three -way valve a still communicates with oil tank pipe, and low temperature oil inlet is connected with oil inlet pipe b, and the other end of oil inlet pipe b communicates with heat exchanger, and mixed oil outlet communicates with oil outlet mechanism, and the oil outlet end of oil outlet mechanism communicates with rotor. The lubricating oil in oil tank will be divided into two ways before entering constant temperature mixed oil valve, one way directly flows into constant temperature mixed oil valve through high temperature oil inlet, and the other way first flows into heat exchanger, and then flows into low temperature oil inlet through oil inlet pipe b, and constant temperature mixed oil valve automatically adjusts the oil inlet proportion of high temperature oil inlet and low temperature oil inlet according to the set oil outlet temperature, thereby realizing the constant oil outlet temperature, avoiding that oil temperature fluctuation is bigger, and improving the overall performance and stability of equipment.
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Description

Technical Field

[0001] This utility model relates to the field of vacuum pump technology, and in particular to a constant temperature cooling device for vacuum pump rotors. Background Technology

[0002] Vacuum technology is widely used in modern industrial production, from semiconductor manufacturing and electronic device production to chemical and pharmaceutical industries, all of which rely on high-quality vacuum equipment. Dry vacuum pumps, as an important vacuum-generating device, play a crucial role in many fields due to their unique working principle and performance advantages. They generate suction and exhaust through a pair of rotors rotating synchronously at high speed in opposite directions within the pump casing, achieving gas extraction and compression. They offer advantages such as high pumping efficiency, stable vacuum levels, and reliable operation, and are widely used in production processes with high vacuum requirements.

[0003] However, in actual operation, existing dry vacuum pumps mainly cool the rotor by directly cooling it with air-cooled or water-cooled lubricating oil. However, this traditional approach has obvious drawbacks: the lubricating oil temperature is limited by the ambient temperature when air-cooled or the cooling water temperature when water-cooled. When the ambient temperature or cooling water temperature fluctuates greatly, the oil temperature will also fluctuate greatly. The inability to accurately control the oil temperature will affect the performance and service life of the vacuum pump, reducing the overall performance and stability of the equipment. Utility Model Content

[0004] The purpose of this invention is to overcome the shortcomings of the prior art and provide a constant temperature cooling device for vacuum pump rotors.

[0005] The purpose of this utility model is achieved through the following technical solution: a constant temperature cooling device for a vacuum pump rotor, comprising a constant temperature mixing valve and a heat exchanger. The constant temperature mixing valve has a high temperature oil inlet, a low temperature oil inlet, and a mixed oil outlet. The high temperature oil inlet is connected to an oil inlet pipe a, and the other end of the oil inlet pipe a is connected to a three-way valve a. The three-way valve a is also connected to an oil tank pipe. The low temperature oil inlet is connected to an oil inlet pipe b, and the other end of the oil inlet pipe b is connected to the heat exchanger. The mixed oil outlet is connected to an oil outlet mechanism, and the oil outlet end of the oil outlet mechanism is connected to the rotor.

[0006] Preferably, the oil inlet of the oil tank pipe is connected to the oil tank, and a pipeline filter is installed on the oil tank pipe.

[0007] Preferably, the upper valve port of the three-way valve a is connected to the oil inlet pipe c, and the other end of the oil inlet pipe c is connected to the heat exchanger.

[0008] Preferably, the oil outlet mechanism includes an oil outlet pipe, one end of which is connected to a mixing oil outlet port, and the other end of which is connected to a three-way valve b. The other two valve ports of the three-way valve b are respectively connected to the oil outlet pipe b and the oil outlet pipe c. The oil outlets of both the oil outlet pipe b and the oil outlet pipe c are connected to the rotor.

[0009] Preferably, the thermostatic mixing valve has a valve core inside, which is located between the high-temperature oil inlet, the low-temperature oil inlet and the mixing oil outlet. A return spring is fitted on the valve core. An adjustment knob is provided on the top of the thermostatic mixing valve. The adjustment knob is connected to the return spring. A temperature sensing element is also fixedly installed on the valve core, and the other end of the temperature sensing element is located inside the mixing oil outlet.

[0010] Preferably, the temperature sensing element is a paraffin temperature sensing bulb.

[0011] This invention has the following advantages: Before entering the thermostatic mixing valve, the lubricating oil in the oil tank is divided into two paths. One path flows directly into the thermostatic mixing valve through the high-temperature oil inlet, and the other path first flows into the heat exchanger and then into the low-temperature oil inlet through the oil inlet pipe b. The thermostatic mixing valve automatically adjusts the oil inlet ratio of the high-temperature oil inlet and the low-temperature oil inlet according to the set oil outlet temperature, thereby achieving a constant oil outlet temperature, avoiding large oil temperature fluctuations, and improving the overall performance and stability of the equipment. Attached Figure Description

[0012] Figure 1 This is a schematic diagram of a constant temperature cooling device.

[0013] Figure 2 A cross-sectional structural schematic diagram of a thermostatic mixing valve;

[0014] In the diagram, 1-oil inlet pipe a, 2-thermal mixing valve, 3-oil inlet pipe b, 4-oil inlet pipe c, 5-pipeline filter, 6-oil tank pipe, 7-oil outlet pipe, 8-three-way valve a, 9-oil outlet pipe c, 10-heat exchanger, 11-three-way valve b, 12-oil outlet pipe b, 13-reset spring, 14-temperature sensing element. Detailed Implementation

[0015] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can typically be arranged and designed in various different configurations.

[0016] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0017] It should be noted that, where there is no conflict, the embodiments and features in the embodiments of this utility model can be combined with each other.

[0018] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0019] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this utility model is in use, or the orientation or positional relationship commonly understood by those skilled in the art. They are only used for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first," "second," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0020] In the description of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0021] In this embodiment, as Figure 1As shown, a constant-temperature cooling device for a vacuum pump rotor includes a constant-temperature mixing valve 2 and a heat exchanger 10. The constant-temperature mixing valve 2 has a high-temperature oil inlet, a low-temperature oil inlet, and a mixed oil outlet. The high-temperature oil inlet is connected to an oil inlet pipe a1, and the other end of the oil inlet pipe a1 is connected to a three-way valve a8. The three-way valve a8 is also connected to an oil tank pipe 6. Further, the oil inlet of the oil tank pipe 6 is connected to an oil tank, and a pipeline filter 5 is installed on the oil tank pipe 6. Further still, the upper valve port of the three-way valve a8 is connected to an oil inlet pipe c4, and the other end of the oil inlet pipe c4 is connected to the heat exchanger 10. The low-temperature oil inlet is connected to an oil inlet pipe b3, and the other end of the oil inlet pipe b3 is connected to the heat exchanger 10. The mixed oil outlet is connected to an oil outlet mechanism, and the oil outlet end of the oil outlet mechanism is connected to the rotor. Before entering the thermostatic mixing valve 2, the lubricating oil in the oil tank is divided into two paths. One path flows directly into the thermostatic mixing valve 2 through the high-temperature oil inlet, and the other path first flows into the heat exchanger 10, and then into the low-temperature oil inlet through the oil inlet pipe b3. Specifically, the lubricating oil in the oil tank flows through the oil tank pipe 6 and the pipeline filter 5 to the three-way valve a8. After reaching the three-way valve a8, the lubricating oil is divided into two paths. One path flows directly into the high-temperature oil inlet and into the thermostatic mixing valve 2 through the oil inlet pipe a1, and the other path flows sequentially through the oil inlet pipe c4, the heat exchanger 10, and the oil inlet pipe b3 into the low-temperature oil inlet and into the thermostatic mixing valve 2. The thermostatic mixing valve 2 automatically adjusts the oil inlet ratio of the high-temperature oil inlet and the low-temperature oil inlet according to the set oil outlet temperature, thereby achieving a constant oil outlet temperature, avoiding large oil temperature fluctuations, and improving the overall performance and stability of the equipment.

[0022] In this embodiment, the oil outlet mechanism includes an oil outlet pipe 7. One end of the oil outlet pipe 7 is connected to the mixing oil outlet port, and the other end of the oil outlet pipe 7 is connected to the three-way valve b11. The other two valve ports of the three-way valve b11 are connected to the oil outlet pipe b12 and the oil outlet pipe c9, respectively. The oil outlet ports of both the oil outlet pipe b12 and the oil outlet pipe c9 are connected to the rotor. Specifically, the lubricating oil mixed by the thermostatic mixing valve 2 is discharged through the mixing oil outlet port and then sequentially passes through the oil outlet pipe 7, the three-way valve b11, and the oil outlet pipe b12 or the oil outlet pipe c9 into the rotor, thereby cooling the rotor.

[0023] In this embodiment, as Figure 2As shown, the thermostatic mixing valve 2 contains a valve core located between the high-temperature inlet, the low-temperature inlet, and the mixing outlet. A return spring 13 is mounted on the valve core. An adjustment knob is located on the top of the thermostatic mixing valve 2, connected to the return spring 13. A temperature sensing element 14 is also fixedly mounted on the valve core, with its other end located inside the mixing outlet. Specifically, rotating the adjustment knob changes the spring preload; a higher preload results in a higher set temperature. Furthermore, the temperature sensing element 14 is a paraffin wax temperature sensor. Specifically, when the temperature of the mixed oil outlet is lower than the set value, the oil flow rate of the high-temperature oil inlet needs to be increased. Specifically, the paraffin temperature sensor shrinks due to low temperature (paraffin's characteristic is that it expands when heated and contracts when cooled), thus weakening the axial thrust on the valve core. At this time, the preload of the return spring 13 is greater than the thrust of the paraffin temperature sensor, which will push the valve core to move towards the high-temperature oil inlet. After the valve core is displaced, the flow area of ​​the high-temperature oil inlet increases, and the oil flow rate increases, while the flow area of ​​the low-temperature oil inlet decreases, and the oil flow rate decreases. This changes the oil volume of high-temperature oil and low-temperature oil (the proportion of high-temperature oil increases), thereby causing the temperature of the mixed oil outlet to rise until it approaches the set value. When the temperature at the mixed oil outlet exceeds the set value, the oil flow rate at the high-temperature inlet needs to be reduced. Specifically, the paraffin temperature sensor expands due to high temperature, increasing its volume and thus increasing the axial thrust on the valve core. At this point, the preload of the return spring 13 is less than the thrust of the paraffin temperature sensor, causing the valve core to move towards the low-temperature inlet. After the valve core shifts, the flow area of ​​the low-temperature inlet increases, leading to an increase in the oil flow rate, while the flow area of ​​the high-temperature inlet decreases, resulting in a decrease in the oil flow rate. This alters the ratio of high-temperature to low-temperature oil (increasing the proportion of low-temperature oil), thereby lowering the temperature at the mixed oil outlet until it approaches the set value. When the temperature at the mixed oil outlet equals the set value, the expansion force of the paraffin and the elastic force of the return spring 13 are perfectly balanced. The valve core remains in a fixed position, the flow areas of the high-temperature and low-temperature inlets stabilize, and the oil flow ratio remains unchanged, thus achieving a constant oil outlet temperature. In this embodiment, the assembly relationship between the valve core, the return spring 13, the adjustment knob and the paraffin temperature sensor is the existing assembly method, and no improvement has been made here, so it will not be described in detail.

[0024] Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A thermostatic cooling device for a vacuum pump rotor, characterized by: It includes a constant temperature mixing valve (2) and a heat exchanger (10). The constant temperature mixing valve (2) has a high temperature oil inlet, a low temperature oil inlet and a mixing oil outlet. The high temperature oil inlet is connected to the oil inlet pipe a (1). The other end of the oil inlet pipe a (1) is connected to the three-way valve a (8). The three-way valve a (8) is also connected to the oil tank pipe (6). The low temperature oil inlet is connected to the oil inlet pipe b (3). The other end of the oil inlet pipe b (3) is connected to the heat exchanger (10). The mixing oil outlet is connected to the oil outlet mechanism. The oil outlet end of the oil outlet mechanism is connected to the rotor.

2. The thermostatic cooling device for a vacuum pump rotor according to claim 1, characterized in that: The oil inlet of the oil tank pipe (6) is connected to the oil tank, and a pipeline filter (5) is provided on the oil tank pipe (6).

3. The thermostatic cooling device for a vacuum pump rotor according to claim 2, characterized in that: The upper valve port of the three-way valve a (8) is connected to the oil inlet pipe c (4), and the other end of the oil inlet pipe c (4) is connected to the heat exchanger (10).

4. The constant temperature cooling device for a vacuum pump rotor according to claim 3, characterized in that: The oil outlet mechanism includes an oil outlet pipe (7), one end of which is connected to the mixing oil outlet, and the other end of which is connected to a three-way valve b (11). The other two valve ports of the three-way valve b (11) are connected to the oil outlet pipe b (12) and the oil outlet pipe c (9) respectively. The oil outlets of the oil outlet pipe b (12) and the oil outlet pipe c (9) are both connected to the rotor.

5. The thermostatic cooling device for a vacuum pump rotor according to claim 4, characterized in that: The thermostatic mixing valve (2) is equipped with a valve core located between the high temperature inlet, the low temperature inlet and the mixing outlet. A return spring (13) is fitted on the valve core. An adjustment knob is provided on the top of the thermostatic mixing valve (2). The adjustment knob is connected to the return spring (13). A temperature sensing element (14) is also fixedly installed on the valve core. The other end of the temperature sensing element (14) is located inside the mixing outlet.

6. The thermostatic cooling device for a vacuum pump rotor according to claim 5, characterized in that: The temperature sensing element (14) is a paraffin temperature sensing bag.