A vacuum sintering apparatus

Abstract

The utility model relates to vacuum sintering technical field especially relates to a kind of vacuum sintering equipment, including the degassing module, sintering module and annealing module set gradually, valve is arranged between degassing module and sintering module and between sintering module and annealing module, heating device and the gas connection for vacuumizing are all arranged on degassing module, sintering module and annealing module, the inside of degassing module, sintering module and annealing module is all provided with the support guide rail for supporting object table, linear drive mechanism is arranged on degassing module, the distance between adjacent support guide rails is less than the length of object table.The utility model can be driven object table and quartz product from degassing module into sintering module and annealing module in order by linear drive mechanism, and entire transfer process is always in vacuum environment, can avoid introducing foreign impurities, to ensure the sintering quality of quartz product.

Description

Technical Field

[0001] This utility model relates to the field of vacuum sintering technology, and in particular to a vacuum sintering device. Background Technology

[0002] Quartz products, especially high-purity, high-performance quartz glass products, are indispensable key basic materials for modern high-tech industries. With their extreme purity, excellent optical properties, outstanding thermal stability, good chemical inertness, and high vacuum density, quartz products play a core role in many cutting-edge technology fields.

[0003] Vacuum sintering technology is a core process in modern quartz production, used primarily in industries such as semiconductors, optical communications, and high-purity quartz. In quartz product manufacturing, raw quartz typically undergoes multiple processing steps. However, each processing step requires separate equipment for heat treatment, leading to poor coordination between these devices. Therefore, a logistics system is usually needed to transfer the raw quartz materials between these devices. However, high-purity quartz is easily contaminated by external impurities when exposed to air during transfer, resulting in quality defects. Utility Model Content

[0004] In order to overcome the shortcomings mentioned in the background art, this application provides a vacuum sintering apparatus.

[0005] A vacuum sintering apparatus includes a degassing module, a sintering module, and an annealing module arranged sequentially. Valves are provided between the degassing module and the sintering module, and between the sintering module and the annealing module. Each of the degassing module, the sintering module, and the annealing module is equipped with a heating device and a vacuum inlet. Each of the degassing module, the sintering module, and the annealing module has a support rail for supporting a stage. The degassing module is equipped with a linear drive mechanism for sliding the stage from one support rail to another. The extension and retraction direction of the linear drive mechanism is parallel to the movement direction of the stage. The distance between adjacent support rails is less than the length of the stage.

[0006] In one embodiment, the degassing module, the sintering module, and the annealing module all include a heat insulation cover. The heat insulation cover includes a heating part and a heat insulation part. The heat insulation part is located at both ends adjacent to the heating part. The heating device is located inside the heating part. The gas inlet is located in the heat insulation part.

[0007] In one embodiment, the valve includes a valve plate for controlling the opening and closing between adjacent heat shields and a drive member for moving the valve plate.

[0008] As one embodiment, the heating device includes a plurality of heating tubes circumferentially distributed along the direction of movement of the platform.

[0009] In one embodiment, the linear drive mechanism includes a push rod and a drive unit. One end of the push rod is located inside the degassing module, and the other end of the push rod is located outside the degassing module and connected to the drive unit.

[0010] In one embodiment, both the degassing module and the annealing module include a furnace cover, which is detachably and sealed to the adjacent heat insulation cover. The push rod is sealed to the adjacent furnace cover. Both the furnace cover and the heat insulation cover are equipped with a support frame, which is slidably mounted on a slide rail.

[0011] In one embodiment, a first heat insulation body is installed at both ends of the valve plate, a second heat insulation body is installed at the end of the push rod near the platform, a third heat insulation body is provided inside the heating part, the heating tube is located inside the third heat insulation body, the support rail is installed inside the third heat insulation body, the heating device is provided with a clearance opening for avoiding the support rail, a fourth heat insulation body is provided inside the insulation part, and the air inlet faces the outer wall of the fourth heat insulation body.

[0012] As one embodiment, the degassing module, the sintering module, and the annealing module are all equipped with cooling devices.

[0013] In one embodiment, a sinking module is provided between the sintering module and the annealing module. The sinking module has the same structure as the sintering module. Valves are provided between the sintering module and the sinking module, as well as between the sinking module and the annealing module. The sinking module is provided with the heating device and the air inlet for vacuuming. The interior of the sinking module is provided with the support rail for supporting the stage.

[0014] As one embodiment, it also includes a reset mechanism for resetting the stage.

[0015] The beneficial effects of this application are: This invention sequentially sets up a degassing module, a sintering module, and an annealing module. Valves are installed between the degassing module and the sintering module, as well as between the sintering module and the annealing module. Supporting guide rails are installed inside each of the degassing module, the sintering module, and the annealing module, and a linear drive mechanism and a stage are also provided. When the valves are closed, the degassing module, the sintering module, and the annealing module are isolated from each other and process quartz products independently. When the valves are open, the degassing module, the sintering module, and the annealing module are connected in sequence, so that the linear drive mechanism can drive the stage and the quartz products from the degassing module into the sintering module and the annealing module in sequence. The entire transfer process is always carried out in a vacuum environment, which can avoid the introduction of external impurities and thus ensure the sintering quality of the quartz products.

[0016] Other technical solutions of this utility model can also achieve the following technical effects: By installing furnace covers on the heat insulation covers of the degassing module and the annealing module, and installing support frames at the bottom of the furnace covers and heat insulation covers, and sliding the support frames on the slide rails, operators can more easily and effortlessly slide the furnace cover after disconnecting it from the adjacent heat insulation cover. This provides operators with more operating space, making it easier to put in the next batch of quartz products or take out the processed quartz products. Furthermore, it makes it easier to align the furnace cover with the installation position on the heat insulation cover during reinstallation, thus improving the installation efficiency of the furnace cover.

[0017] By installing a third heat insulation body inside the heating section and placing the heating device inside the third heat insulation body, and installing a fourth heat insulation body inside the insulation section, with the air inlet facing the outer wall of the fourth heat insulation body, not only can the heat insulation cover be prevented from overheating and causing excessive heat loss, but the air inlet can also be protected to prevent the air inlet and the external equipment connected to it from being damaged due to overheating.

[0018] By installing a first heat insulation body on both ends of the valve plate and a second heat insulation body on the end of the push rod near the stage, the first heat insulation body can prevent heat transfer between the degassing module, sintering module and annealing module when they process quartz products separately, and the push rod can be protected to prevent deformation and damage. Attached Figure Description

[0019] Figure 1 This is a three-dimensional structural schematic diagram of the vacuum sintering equipment disclosed in the embodiments of this utility model; Figure 2 This is a schematic diagram showing the positional relationship of parts such as the furnace cover and push rod in an embodiment of this utility model; Figure 3 This is a schematic diagram showing the positional relationship of the third and fourth heat insulation components in an embodiment of this utility model. Figure 4 This is a schematic diagram showing the positional relationship between the air inlet and the insulation part in an embodiment of this utility model; Figure 5 This is a schematic diagram showing the positional relationship between the platform and the support rail in an embodiment of this utility model; Figure 6 This is a schematic diagram of the movement process of the platform in an embodiment of this utility model; Figure 7 This is a schematic diagram showing the positional relationship of the stage under different heat insulation covers in the embodiments of this utility model; Figure 8 This is a schematic diagram showing the positional relationship between the push rod and the reset mechanism in an embodiment of this utility model; Figure 9 This is a three-dimensional structural diagram of the push rod and reset mechanism in an embodiment of this utility model.

[0020] In the attached drawings, the following are the reference numerals: 1. Valve; 101. Valve plate; 102. First heat insulation body; 2. Heating device; 201. Heating tube; 3. Gas inlet; 4. Platform; 5. Support rail; 6. Linear drive mechanism; 601. Push rod; 602. Second heat insulation body; 7. Heat insulation cover; 701. Heating part; 702. Insulation part; 703. Third heat insulation body; 704. Fourth heat insulation body; 705. Furnace cover; 801. Support frame; 802. Slide rail; 9. Cooling device. Detailed Implementation

[0021] The present invention will now be described in detail with reference to the accompanying drawings and specific embodiments.

[0022] A vacuum sintering device, such as Figures 1-7As shown, the system includes a degassing module, a sintering module, and an annealing module, which are connected sequentially. Valves 1 are installed between the degassing module and the sintering module, and between the sintering module and the annealing module. Valves 1 control the connection between these modules. When valve 1 is open, the degassing module, sintering module, and annealing module are connected sequentially. Each module is equipped with a heating device 2 and a gas inlet 3. The heating device 2 heats the internal components of the equipment, placing the quartz product in a high-temperature environment. Each module can have at least one gas inlet 3. When each module has one gas inlet 3, it is used for vacuuming and pressurizing. When each module has multiple gas inlets 3, each module has at least one for vacuuming and at least one for pressurizing. The degassing module, sintering module, and annealing module all have internal supports for the platform 4. The guide rail 5, the stage 4, and the support guide rail 5 all use existing high-temperature resistant materials. The stage 4 and the support guide rail 5 are slidably connected by a T-slot or dovetail groove, and the T-slot or dovetail groove is connected along the moving direction of the stage 4, so that the stage 4 can slide from one support guide rail 5 and connect to the adjacent support guide rail 5. The distance between adjacent support guide rails 5 is less than the length of the stage 4 to prevent the stage 4 from falling out of the gap between adjacent support guide rails 5. The degassing module is equipped with a linear drive mechanism 6, which can drive the stage 4 to move linearly along the support guide rail 5. The extension and retraction direction of the linear drive mechanism 6 is parallel to the movement direction of the stage 4 to prevent the linear drive mechanism 6 from deviating from the stage 4. The linear drive mechanism 6 pushes the stage 4 so that the stage 4 can enter the sintering module and the annealing module in sequence from the degassing module. During the movement of the stage 4 and the quartz products on it, the stage 4 is always in a vacuum environment, which can avoid the introduction of external impurities during this period and ensure the sintering quality of the quartz products.

[0023] When quartz products need to be sintered, the operator removes the heat shield 7 of the degassing module, allowing the quartz products to be placed on the stage 4 inside the degassing module. Then, the heat shield 7 is reinstalled, and an external suction device is connected through the air inlet 3 to create a vacuum in the degassing module, sintering module, and annealing module. Then, all valves 1 are closed, and the interior of the degassing module and sintering module is heated by the heating device 2. The degassing module and sintering module can be heated simultaneously or sequentially, depending on the actual production situation. The internal temperature of the degassing module and sintering module reaches about 1050℃, and the quartz products are left to complete the degassing process in the degassing module. Heating the sintering module to 1050℃ not only keeps the temperature of the quartz products stable when they enter the sintering module, but also reduces the temperature difference between the temperature inside the sintering module and the sintering temperature of 1300℃-1550℃, which helps to improve the heating efficiency.

[0024] After degassing, valve 1 between the degassing module and the sintering module is opened. The linear drive mechanism 6 moves the platform 4 within the degassing module towards the sintering module, allowing the platform 4 to carry the quartz products through valve 1 and connect to the support rail 5 within the sintering module. The operator then resets the linear drive mechanism 6 and closes valve 1 between the degassing module and the sintering module. The heating device 2 continues to heat the sintering module, raising its internal temperature from the degassing temperature of 1050℃ to the sintering temperature of 1300℃-1550℃. Simultaneously, the operator can cool the degassing module to facilitate processing the next batch of quartz products. While waiting for the quartz products to sinter, the operator can heat the annealing module using the heating device 2, ensuring it reaches an annealing temperature of 800℃-1200℃ before the sintering process ends.

[0025] After the sintering process is completed, valve 1 between the degassing module and the sintering module, as well as valve 1 between the sintering module and the annealing module, is opened. The linear drive mechanism 6 is used to push the stage 4 into the annealing module, so that the stage 4 is positioned on the support rail 5 of the annealing module. The linear drive mechanism 6 is then reset and all valves 1 are closed to allow the quartz products to undergo annealing. At the same time, the sintering module is cooled down to the degassing temperature and then kept at that temperature to facilitate the processing of the next batch of quartz products.

[0026] After the annealing process, gas can be introduced into the gas inlet 3 to reduce the negative pressure in the degassing module, sintering module, and annealing module. Then, wait for the annealing module to cool down to room temperature before removing it and taking out the quartz products. Alternatively, the annealing module can be removed directly using high-temperature resistant equipment without waiting for it to cool down. After removing the quartz products, the operator opens all valves 1 and uses external equipment, such as a power telescopic rod, to push the platform 4 back to its original position on the support rail 5 of the degassing module. The power telescopic rod is then removed, and the annealing module is reinstalled. The above operation is repeated for the next batch of quartz products.

[0027] In one embodiment, a sinking module for eliminating internal stress in quartz products is provided between the sintering module and the annealing module. The structure of the sinking module is the same as that of the sintering module. Valves 1 are provided between the sintering module and the sinking module, as well as between the sinking module and the annealing module. The sinking module is provided with a heating device 2 and a vacuum inlet 3. The interior of the sinking module is provided with a support rail 5 for supporting the platform 4. The vent 3 of the sinking module is simultaneously evacuated from the vent 3 of other modules. While the quartz product is sintering in the sintering module, the heating device 2 heats the sinking module to a sinking temperature of 1600℃-1750℃. After the sintering module is complete, valve 1 between the sintering module and the sinking module, and valve 1 between the degassing module and the sintering module, are opened. The linear drive mechanism 6 pushes the stage 4 inside the sintering module onto the support rail 5 of the sinking module. Then, the linear drive mechanism 6 retracts and closes all valves 1. The sinking module sinks the quartz product, eliminating internal stress. During this period, the sintering module cools to the degassing temperature, and the annealing module heats to the annealing temperature. After the sinking module is complete, all valves 1 are opened, allowing the linear drive mechanism 6 to push the stage 4 inside the sinking module onto the support rail 5 of the annealing module.

[0028] In one embodiment, such as Figures 1-3 As shown, the degassing module, sintering module, and annealing module all include a heat insulation cover 7. The heat insulation cover 7 has a cylindrical structure and includes a heating part 701 and a heat insulation part 702. The heating device 2 is located inside the heating part 701 of each heat insulation cover 7. The air inlet 3 is set in the heat insulation part 702 of each heat insulation cover 7. The heat insulation cover 7 has two heat insulation parts 702, and the two heat insulation parts 702 are respectively located on both sides of the heating device 2 in the heat insulation cover 7. The area corresponding to the heating device 2 is the direct heating area, and the area corresponding to the heat insulation part 702 is the indirect heating area. Setting the air inlet 3 in the indirect heating area can play a certain protective role for the air inlet 3. The heating part 701 is located between the two heat insulation parts 702 in the same heat insulation cover 7. The heating part 701 and the heat insulation part 702 in the same heat insulation cover 7 are connected by a flange seal. A heat insulation cover 7 can be provided with two or more heating parts 701. In this case, the heating parts 701 in the same heat insulation cover 7 are connected by a flange.

[0029] In one embodiment, such as Figure 1 and 3 As shown, valve 1 includes valve plate 101 and drive component. Valve 1 can be a rotary valve or a slide valve. Valve plate 101 can close two adjacent heat insulation covers 7. The drive component can drive valve plate 101 to move so as to control the connection or closure of two adjacent heat insulation covers 7 through valve plate 101.

[0030] In one embodiment, such as Figure 2 and Figure 3As shown, the heating device 2 includes multiple heating tubes 201, which are equidistantly distributed circumferentially along the movement direction of the stage 4. All heating tubes 201 in the same heating device 2 are arranged in a ring, which can improve heating efficiency and temperature uniformity in the heating section 701.

[0031] In one embodiment, a copper electrode is connected to the heating tube 201. While the copper electrode does not directly improve the heating efficiency of the heating tube 201, it indirectly affects its heating performance. Specifically, the copper electrode has excellent conductivity, reducing electrode resistance and thus improving current conduction efficiency and reducing energy loss. The heating tube 201 itself has internal resistance, and it heats up through current. Improved current conduction efficiency further enhances the heating efficiency of the heating tube 201. Furthermore, a cooling pipe is arranged around the copper electrode, with circulating cooling water inside. The cooling pipe cools the electrode without affecting the heating of the heating tube 201, preventing the electrode from overheating and melting.

[0032] In one embodiment, such as Figure 3 As shown, the linear drive mechanism 6 includes a push rod 601 and a drive unit. One end of the push rod 601 is located inside the degassing module, and the other end of the push rod 601 is located outside the degassing module and connected to the drive unit. The drive unit is detachably and fixedly connected to the outside of the equipment, such as on the ground. The drive unit can be a pneumatic cylinder or a hydraulic cylinder, or a structure in which a hydraulic cylinder and a rotary motor cooperate. A hydraulic cylinder is provided on the rotating end face of the rotary motor. The telescopic end of the hydraulic cylinder is connected to the push rod 601, so that the rotary motor can drive the push rod 601 to rotate through the hydraulic cylinder. The hydraulic cylinder on the rotary motor can also drive the push rod 601 to move linearly. When the push rod 601 is not in use, the end of the push rod 601 located inside the degassing module is located on the side away from the sintering module, and the length of the push rod 601 allows it to extend into the annealing module.

[0033] In one embodiment, such as Figures 1-3As shown, both the degassing module and the annealing module include a furnace cover 705. The furnace cover 705 is detachable and sealed to an adjacent heat insulation cover 7. The two furnace covers 705 are arranged opposite each other and their axes coincide. The push rod 601 is connected to the adjacent furnace cover 705 by a magnetohydrodynamic seal. The push rod 601 can slide and rotate on the adjacent furnace cover 705. A support frame 801 is installed at the bottom of both the furnace cover 705 and the heat insulation cover 7. The support frame 801 is slidably mounted on the slide rail 802, which facilitates the removal of the furnace cover 705 and the heat insulation cover 7 by the operator. After the operator removes the furnace cover 705 from the heat insulation cover 7, the furnace cover 705 can slide along the slide rail 802 via the support frame 801, moving the furnace cover 705 away from the heat insulation cover 7, leaving operating space for the operator, facilitating maintenance, and making it easier to put in or take out quartz products. Furthermore, when the furnace cover 705 is subsequently installed back onto the heat insulation cover 7, the furnace cover 705 can be directly aligned with the installation position of the heat insulation cover 7, improving installation efficiency.

[0034] In one embodiment, such as Figure 3 and Figure 5 As shown, a first heat insulation body 102 is installed on both end faces of the valve plate 101, which can enhance the heat insulation performance of the valve plate 101 and prevent heat transfer when the degassing module, sintering module and annealing module process quartz products separately. A second heat insulation body 602 is installed on the end of the push rod 601 near the stage 4. Both the first heat insulation body 102 and the second heat insulation body 602 are coated with a high-temperature resistant coating. Since the end of the push rod 601 near the stage 4 needs to be in direct contact with the stage 4, the installation of the second heat insulation body 602 ensures that the second heat insulation body 602 is in direct contact with the stage 4, preventing the end of the push rod 601 from overheating and deforming or even being damaged. A cylindrical third heat insulation body 703 is provided inside the heating part 701. The axis of the third heat insulation body 703 coincides with the axis of the heating part 701. The heating tube 201 is located inside the third heat insulation body 703. The third heat insulation body 703 plays a heat insulation role, thereby preventing the heating part 701 from being damaged when the heating tube 201 heats up. The outer wall is overheated. The support rail 5 is installed inside the third heat insulation body 703. The heating device 2 is provided with a clearance opening to avoid the support rail 5. When heating is performed using the heating tube 201, the support rail 5 is located between two adjacent heating tubes 201. The clearance opening can prevent the heating device 2 from interfering with the position of the support rail 5. A cylindrical fourth heat insulation body 704 is provided inside the heat insulation part 702. The axis of the fourth heat insulation body 704 coincides with the axis of the third heat insulation body 703. Both the third heat insulation body 703 and the fourth heat insulation body 704 are coated with a high-temperature resistant coating. The fourth heat insulation body 704 can be installed on the inner wall of the heat insulation part 702 or on the third heat insulation body 703. The air inlet 3 faces the outer wall of the fourth heat insulation body 704. The length of the fourth heat insulation body 704 in its axial direction does not exceed the length in the axial direction of the heat insulation part 702, so that the air inlet 3 can make the entire interior of the heat insulation cover 7 a vacuum state by evacuating air.

[0035] In one embodiment, such as Figures 1-5 As shown, the degassing module, sintering module and annealing module are each equipped with a pair of cooling devices 9. The cooling device 9 can be a circulating cooling pipe with cooling water inside. The cooling device 9 can also be any other existing device that can cool the degassing module, sintering module and annealing module.

[0036] In one embodiment, such as Figure 1 , Figure 2 and Figure 4 As shown, it also includes a reset mechanism for resetting the stage 4. The reset mechanism and the linear drive mechanism 6 are positioned differently but have the same structure. The reset mechanism and the linear drive mechanism 6 are arranged opposite each other and are respectively installed on two opposite furnace covers 705 of the degassing module and the annealing module. After the annealing process of the quartz product is completed, the operator removes the furnace cover 705 where the reset mechanism is located, takes the quartz product out of the annealing module, then reinstalls the furnace cover 705, opens all valves 1, and causes the reset mechanism to push the stage 4 in the annealing module onto the support rail 5 of the degassing module. Then the reset mechanism is retracted and all valves 1 are closed.

[0037] In one embodiment, such as Figure 8 and Figure 9 As shown, the reset mechanism is installed at the end of the linear drive mechanism 6. The reset mechanism can be a power clamp or a rotating plate. The power clamp adopts an existing device. When the reset mechanism is a power clamp, the power clamp is installed at the end of the push rod 601 near the platform 4, and the power clamp does not affect the push rod 601 from pushing the platform 4. When it is necessary to reset the platform 4, the push rod 601 approaches the platform 4 and clamps the platform 4 through the power clamp. While the push rod 601 resets, the power clamp pulls back the platform 4, so that the platform 4 is reset to degassing. Module; When the reset mechanism is a rotating plate, the rotating plate is installed at one end of the push rod 601 near the stage 4, and the stage 4 also has an L-shaped plate that engages with the rotating plate on the side facing the push rod 601. Before the push rod 601 retracts, the drive unit can be used to drive the push rod 601 to rotate, so that the rotating plate on the push rod 601 engages with the L-shaped plate on the stage 4 and forms a structure similar to a "latch". Then the drive unit drives the stage 4 to reset through the push rod 601. After the stage 4 is reset, the push rod 601 rotates back to the initial position.

[0038] The above are merely preferred embodiments of the present utility model and are not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model shall be included within the protection scope of the present utility model.

Claims

1. A vacuum sintering apparatus, characterized in that, The assembly includes a degassing module, a sintering module, and an annealing module arranged sequentially. Valves (1) are provided between the degassing module and the sintering module, and between the sintering module and the annealing module. Heating devices (2) and vacuum inlets (3) are provided on the degassing module, the sintering module, and the annealing module. Support rails (5) for supporting the stage (4) are provided inside the degassing module, the sintering module, and the annealing module. A linear drive mechanism (6) is provided on the degassing module to allow the stage (4) to slide from one support rail (5) to another support rail (5). The extension and retraction direction of the linear drive mechanism (6) is parallel to the movement direction of the stage (4). The distance between adjacent support rails (5) is less than the length of the stage (4).

2. The vacuum sintering equipment according to claim 1, characterized in that, The degassing module, the sintering module and the annealing module all include a heat insulation cover (7). The heat insulation cover (7) includes a heating part (701) and a heat insulation part (702). The heat insulation part (702) is located at both ends adjacent to the heating part (701). The heating device (2) is located inside the heating part (701). The gas inlet (3) is located in the heat insulation part (702).

3. The vacuum sintering equipment according to claim 2, characterized in that, The valve (1) includes a valve plate (101) for controlling the opening and closing between adjacent heat shields (7) and a drive for moving the valve plate (101).

4. The vacuum sintering apparatus according to claim 3, wherein The heating device (2) includes a plurality of heating tubes (201) circumferentially distributed along the movement direction of the stage (4).

5. The vacuum sintering equipment according to claim 4, characterized in that, The linear drive mechanism (6) includes a push rod (601) and a drive unit. One end of the push rod (601) is located inside the degassing module, and the other end of the push rod (601) is located outside the degassing module and connected to the drive unit.

6. The vacuum sintering equipment according to claim 5, characterized in that, Both the degassing module and the annealing module include a furnace cover (705). The furnace cover (705) is detachable and sealed to the adjacent heat insulation cover (7). The push rod (601) is sealed to the adjacent furnace cover (705). Both the furnace cover (705) and the heat insulation cover (7) are equipped with a support frame (801). The support frame (801) is slidably mounted on the slide rail (802).

7. The vacuum sintering apparatus of claim 5, wherein Both ends of the valve plate (101) are equipped with a first heat insulation body (102). The push rod (601) is equipped with a second heat insulation body (602) at one end near the platform (4). A third heat insulation body (703) is provided inside the heating part (701). The heating tube (201) is located inside the third heat insulation body (703). The support rail (5) is installed inside the third heat insulation body (703). The heating device (2) is provided with a clearance opening for avoiding the support rail (5). A fourth heat insulation body (704) is provided inside the heat insulation part (702). The air inlet (3) faces the outer wall of the fourth heat insulation body (704).

8. The vacuum sintering equipment according to claim 1, characterized in that, Cooling devices (9) are provided on the degassing module, the sintering module and the annealing module.

9. The vacuum sintering apparatus of claim 1, wherein A sinking module is provided between the sintering module and the annealing module. The sinking module has the same structure as the sintering module. The valve (1) is provided between the sintering module and the sinking module, and between the sinking module and the annealing module. The sinking module is provided with the heating device (2) and the air inlet (3) for vacuuming. The sinking module is provided with the support rail (5) for supporting the platform (4).

10. A vacuum sintering apparatus according to claim 1 or 5, characterized in that, It also includes a reset mechanism for resetting the stage (4).

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