Polysilicon reduction furnace base apparatus

Abstract

This utility model discloses a polycrystalline silicon reduction furnace chassis device, which includes a reduction furnace chassis, a high-temperature medium main pipe, a low-temperature medium main pipe, and a return water main pipe. The outlet ends of the high-temperature medium main pipe and the low-temperature medium main pipe are respectively connected to the inlet of a mixing pipe, and the outlet of the mixing pipe is connected to the water inlet connector of the reduction furnace chassis. A high-temperature control valve, a high-temperature regulating valve, and a high-temperature check valve are sequentially arranged along the water flow direction on the high-temperature medium main pipe, and a low-temperature control valve, a low-temperature regulating valve, and a low-temperature check valve are sequentially arranged along the water flow direction on the low-temperature medium main pipe. The return water connector of the reduction furnace chassis is connected to the inlet end of the return water main pipe, and a first temperature sensor and a return water control valve are installed on the return water main pipe. Advantages: The reduction furnace chassis of this utility model has uniform temperature in all areas, thereby optimizing and solving the problems of blackening of the reduction furnace chassis, silicon polymer condensation, impurity accumulation, silicon deposition in the tail gas pores, and furnace shutdown / rod tipping.

Description

Technical Field

[0001] This utility model relates to the field of polycrystalline silicon reduction furnace technology, and in particular to a polycrystalline silicon reduction furnace chassis device. Background Technology

[0002] In existing electronic-grade polysilicon reduction production processes, the cooling medium for the reduction furnace chassis is mostly high-temperature furnace water (140-150℃) from the high-temperature water system of the polysilicon reduction workshop. This single cooling medium leads to a gradual increase in both the chassis water return temperature and the overall furnace chassis temperature as the reduction reaction progresses, easily causing the chassis to blacken. Furthermore, the temperature variations cause silicon polymers to condense on the chassis, indirectly affecting the quality of the electronic-grade polysilicon. The lack of a regulating system for the cooling water in the reduction furnace chassis results in differences in return water temperature between different furnaces during the same operating phase, potentially leading to variations in the quality of the electronic-grade polysilicon product. Additionally, temperature differences in different areas can cause variations in the deposition rate of electronic-grade polysilicon, potentially causing the reduction furnace to collapse during shutdown, significantly impacting both the equipment and product quality. Utility Model Content

[0003] The purpose of this invention is to provide a polycrystalline silicon reduction furnace chassis device to solve the problems existing in the prior art.

[0004] This utility model is implemented by the following technical solution: a polycrystalline silicon reduction furnace chassis device, which includes a reduction furnace chassis, and further includes a high-temperature medium main pipe, a low-temperature medium main pipe and a return water main pipe. The outlet ends of the high-temperature medium main pipe and the low-temperature medium main pipe are respectively connected to the inlet of a mixing pipe, and the outlet of the mixing pipe is connected to the water inlet connector of the reduction furnace chassis. A high-temperature control valve, a high-temperature regulating valve and a high-temperature check valve are sequentially arranged on the high-temperature medium main pipe along the water flow direction, and a low-temperature control valve, a low-temperature regulating valve and a low-temperature check valve are sequentially arranged on the low-temperature medium main pipe along the water flow direction. The return water connector of the reduction furnace chassis is connected to the inlet end of the return water main pipe, and a first temperature sensor and a return water control valve are provided on the return water main pipe. Furthermore, the reduction furnace chassis includes a chassis body, a cooling chamber disposed within the chassis body, a feed hole and several pairs of electrode holes penetrating the top and bottom of the chassis body, and a water inlet connector and a water return connector disposed at both ends of the chassis body and communicating with the interior of the cooling chamber; a tail gas pipe is disposed inside the cooling chamber, the inlet end of the tail gas pipe communicating with the top of the chassis body, and the outlet end of the tail gas pipe communicating with the side wall of the chassis body.

[0005] Furthermore, the inlet end of the exhaust pipe is located at the center of the chassis body, and two rings of electrode holes are arranged on the chassis body around the inlet end of the exhaust pipe. Between the two rings of electrode holes, a ring of feed holes is arranged on the chassis body centered on the inlet end of the exhaust pipe; and the distance between any feed hole and each adjacent electrode hole is the same. Furthermore, a number of pairs of first baffles arranged in a figure-eight shape, gradually changing from outward expansion to inward contraction, are arranged in the middle of the cooling cavity between the water inlet connector and the water return connector; the spacing between the pairs of first baffles between the water inlet connector and the water return connector changes with a trend of first increasing and then decreasing, and the pairs of first baffles are centrally symmetrically distributed.

[0006] Furthermore, several pairs of second baffles are arranged on the inner wall of the cooling chamber. These pairs of second baffles are arranged from the water inlet connector to the water return connector, and are arranged in a figure-eight shape, gradually changing from outward expansion to inward contraction.

[0007] Furthermore, the outlet end of the water inlet connector extends from bottom to top into the interior of the cooling chamber, and a flow divider plate is fixed inside the cooling chamber opposite to the outlet end of the water inlet connector.

[0008] Advantages of this invention: The reduction furnace chassis of this invention exhibits uniform temperature across all areas, thereby optimizing and resolving issues such as blackening of the reduction furnace chassis, condensation of silicon polymers, accumulation of impurities, silicon deposition in the tail gas vents, and furnace shutdown / rod tipping. Specifically, the water inlet connector of the reduction furnace chassis is simultaneously connected to the high-temperature medium main pipe and the low-temperature medium main pipe via a mixing pipe. By adjusting the ratio of the high-temperature and low-temperature media, the temperature of the cooling water entering the water inlet connector can be adjusted, achieving flexible temperature regulation. Furthermore, the rational arrangement of the electrode holes, feed holes, and tail gas pipes in the reduction furnace chassis improves the uniformity of the material layer and the stability of the tail gas temperature. Simultaneously, the rational arrangement of the first and second baffles within the cooling chamber further enhances the temperature uniformity across all areas of the reduction furnace chassis. Attached Figure Description

[0009] Figure 1 This is a schematic diagram of the overall structure of this embodiment.

[0010] Figure 2 This is a schematic diagram of the structure of the reduction furnace chassis.

[0011] In the picture: 1. Reduction furnace chassis, 11. Water inlet connector, 12. Water return connector, 13. Chassis body, 14. Cooling chamber, 15. Feed hole, 16. Electrode hole, 17. Tail gas pipe, 18. First baffle plate, 19. Second baffle plate, 110. Diverter plate, 111. Second temperature sensor, 2. High temperature medium main pipe, 21. High temperature control valve, 22. High temperature regulating valve, 23. High temperature check valve, 3. Low temperature medium main pipe, 31. Low temperature control valve, 32. Low temperature regulating valve, 33. Low temperature check valve, 4. Water return main pipe, 41. First temperature sensor, 42. Water return control valve, 5. Mixing pipe. Detailed Implementation

[0012] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0013] like Figure 1 and Figure 2 The diagram shows a polycrystalline silicon reduction furnace chassis device, comprising a reduction furnace chassis 1, a chassis body 13, a cooling chamber 14 disposed within the chassis body 13, a feed hole 15 penetrating the top and bottom of the chassis body 13 and several electrode holes 16, and water inlet connectors 11 and return connectors 12 disposed at both ends of the chassis body 13 and communicating with the interior of the cooling chamber 14. An exhaust gas pipe 17 is disposed inside the cooling chamber 14, with its inlet end communicating with the top of the chassis body 13 and its outlet end communicating with the side wall of the chassis body 13. A second temperature sensor 111 is disposed at the outlet end of the exhaust gas pipe 17. The exhaust gas pipe 17 is located inside the cooling chamber 14, and the exhaust gas temperature can be measured by the second temperature sensor 111, providing a basis for determining the temperature inside the cooling chamber.

[0014] The inlet end of the exhaust pipe 17 is located at the center of the chassis body 13. Two rings of electrode holes 16 are arranged around the inlet end of the exhaust pipe 17 on the chassis body 13. Between the two rings of electrode holes 16, a ring of feed holes 15 is arranged on the chassis body 13 with the inlet end of the exhaust pipe 17 as the center. The distance between any feed hole 15 and each adjacent electrode hole 16 is the same, which helps to improve the uniformity of the material layer, avoid excessive local material layer, and help to improve the uniformity of temperature distribution. The outlet end of the water inlet connector 11 extends from bottom to top into the interior of the cooling chamber 14, and a diversion plate 110 is fixed inside the cooling chamber 14 opposite to the outlet end of the water inlet connector 11. The cooling water delivered by the water inlet connector 11 is blocked and diverted by the diversion plate 110, which can prevent the local temperature of the chassis body 13 directly opposite the water inlet connector 11 from being too low, and at the same time can realize the initial diversion of cooling water.

[0015] A plurality of pairs of first baffles 18, arranged in a V-shape, gradually narrowing from the inlet connector 11 to the outlet connector 12, are arranged in the middle of the cooling cavity 14. The spacing between the pairs of first baffles 18 from the inlet connector 11 to the outlet connector 12 first increases and then decreases, and the pairs of first baffles 18 are centrally symmetrically distributed. The first baffles 18 can divert the cooling water. In this embodiment, the first baffles 18 are all located outside the inner electrode hole ring layer, allowing more cooling water to contact and cool the outer electrode hole ring layer, further enhancing the uniformity of cooling. A plurality of pairs of second baffles 19 are arranged on the inner wall of the cooling cavity 14, extending from the inlet connector 11 to the outlet connector 12, and arranged in a V-shape, gradually narrowing from the inlet connector 11 to the outlet connector 12. The second baffles 19 can guide the cooling water reaching the inside of the cooling cavity 14 to the outer electrode hole ring layer, further enhancing the cooling effect.

[0016] It also includes a high-temperature medium main pipe 2, a low-temperature medium main pipe 3, and a return water main pipe 4. The outlet ends of the high-temperature medium main pipe 2 and the low-temperature medium main pipe 3 are respectively connected to the inlet of the mixing pipe 5, and the outlet of the mixing pipe 5 is connected to the water inlet connector 11 of the reduction furnace chassis 1. A high-temperature control valve 21, a high-temperature regulating valve 22, and a high-temperature check valve 23 are sequentially arranged on the high-temperature medium main pipe 2 along the water flow direction. A low-temperature control valve 31, a low-temperature regulating valve 32, and a low-temperature check valve 33 are sequentially arranged on the low-temperature medium main pipe 3 along the water flow direction. The return water connector 12 of the reduction furnace chassis 1 is connected to the inlet end of the return water main pipe 4. A first temperature sensor 41 and a return water control valve 42 are installed on the return water main pipe 4. The high-temperature medium from the high-temperature medium main pipe 2 and the low-temperature medium main pipe 3 can be mixed in the mixing pipe 5. By adjusting the opening of the high-temperature regulating valve 22 and the low-temperature regulating valve 32, the temperature of the cooling water that finally enters the cooling chamber 14 can be adjusted. The user can adjust the opening of the high-temperature regulating valve 22, the low-temperature regulating valve 32 and the return water control valve 42 according to the temperature of the first temperature sensor 41 and the second temperature sensor 111, so as to flexibly adjust the cooling water inlet temperature and flow rate according to the return water temperature and the exhaust gas temperature. In the description of this utility model, it should be noted that the terms "center", "upper", "lower", "front", "rear", "top", "bottom", "left", "right", "vertical", "horizontal", "inner", and "outer" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

Claims

1. A polysilicon reduction furnace base apparatus comprising a reduction furnace base, characterized by, It also includes a high-temperature medium main pipe, a low-temperature medium main pipe, and a return water main pipe. The outlet ends of the high-temperature medium main pipe and the low-temperature medium main pipe are respectively connected to the inlet of the mixing pipe, and the outlet of the mixing pipe is connected to the water inlet connector of the reduction furnace chassis. A high-temperature control valve, a high-temperature regulating valve, and a high-temperature check valve are sequentially arranged on the high-temperature medium main pipe along the water flow direction. A low-temperature control valve, a low-temperature regulating valve, and a low-temperature check valve are sequentially arranged on the low-temperature medium main pipe along the water flow direction. The return water connector of the reduction furnace chassis is connected to the inlet end of the return water main pipe. A first temperature sensor and a return water control valve are installed on the return water main pipe. A second temperature sensor is installed at the outlet end of the tail gas pipe of the reduction furnace chassis.

2. A polysilicon reduction furnace pan apparatus as defined in claim 1, wherein, The reduction furnace chassis includes a chassis body, a cooling chamber disposed within the chassis body, a feed hole and several pairs of electrode holes penetrating the top and bottom of the chassis body, and a water inlet connector and a water return connector disposed at both ends of the chassis body and communicating with the interior of the cooling chamber; a tail gas pipe is disposed inside the cooling chamber, the inlet end of the tail gas pipe communicating with the top of the chassis body, and the outlet end of the tail gas pipe communicating with the side wall of the chassis body.

3. A polysilicon reduction furnace pan apparatus as defined in claim 2, wherein, The inlet end of the exhaust pipe is located at the center of the chassis body. Two rings of electrode holes are arranged around the inlet end of the exhaust pipe on the chassis body. Between the two rings of electrode holes, a ring of feed holes is arranged on the chassis body centered on the inlet end of the exhaust pipe. The distance between any feed hole and each adjacent electrode hole is the same.

4. A polysilicon reduction furnace pan apparatus as defined in claim 2, wherein, A plurality of pairs of first baffles arranged in a figure-eight shape, gradually changing from outward expansion to inward contraction, are arranged in the middle of the cooling cavity between the water inlet connector and the water return connector; the spacing between the plurality of pairs of first baffles between the water inlet connector and the water return connector changes with a trend of first increasing and then decreasing, and the plurality of pairs of first baffles are centrally symmetrically distributed.

5. A polysilicon reduction furnace pan apparatus as defined in claim 2, wherein, Several pairs of second baffles are arranged on the inner wall of the cooling chamber. The several pairs of second baffles are arranged from the water inlet connector to the water return connector, and are arranged in a figure-eight shape, gradually changing from outward expansion to inward contraction.

6. A polysilicon reduction furnace pan apparatus as defined in claim 2, wherein, The outlet end of the water inlet connector extends from bottom to top into the interior of the cooling chamber, and a flow divider plate is fixed inside the cooling chamber opposite to the outlet end of the water inlet connector.

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