A high compatibility automatic identification system for vacuum gauge
Patent Information
- Application Number
- CN202522031680.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-09-20
- Publication Date
- 2026-09-11
- Estimated Expiration
- 2035-09-20
AI Technical Summary
[0003]针对上述的问题，本实用新型提出了一种真空计高兼容自动识别系统，通解决现有技术中传感器更换需手动重编程、控制灵活性差、系统智能化程度低的问题，提升真空设备的自动化水平、可扩展性与运维便捷性
本实用新型提供的系统可适配不同工艺要求和多种类型的真空计，应用范围广泛。并且无需等电气工程师到达现场，装上新真空计，通电设备即可使用，不用审核调试，减少对生产的影响。采用本实用新型后，当现场真空计发生故障操作人员只需安装新真空计，设备通电后即可自动识别并投入正常使用，无需额外的程序审核与调试步骤，极大缩短了设备维护窗口，显著减少了对生产计划的影响和停机损失。
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Figure CN224744477U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of vacuum equipment control technology, and in particular to a highly compatible automatic identification system for vacuum gauges. Background Technology
[0002] In semiconductor manufacturing, optical coating, and materials research, a vacuum environment is a critical process condition. Traditional vacuum control systems typically use fixed-model vacuum gauges with fixed PLC control logic. Changing to a different brand or type of vacuum gauge often requires technicians to rewrite the PLC program, adjust the AD range and control parameters, resulting in long debugging cycles, high error rates, and high maintenance costs. Therefore, there is an urgent need for a technology that can automatically identify the type and interface protocol of the connected vacuum gauge and perform adaptive parameter configuration to improve the integration efficiency and intelligence level of vacuum systems. Utility Model Content
[0003] To address the aforementioned problems, this utility model proposes a highly compatible automatic identification system for vacuum gauges. This system solves the problems of manual reprogramming required for sensor replacement, poor control flexibility, and low system intelligence in existing technologies, thereby improving the automation level, scalability, and ease of operation and maintenance of vacuum equipment.
[0004] This utility model provides a highly compatible automatic identification system for vacuum gauges, comprising: a vacuum chamber, a vacuum gauge, an AD module, and a PLC controller; wherein, The vacuum gauge is connected to the vacuum chamber and is used to detect the vacuum level inside the vacuum chamber and output an analog signal. The AD module is connected to the vacuum gauge and is used to convert the analog signal into a digital signal; The PLC controller is connected to the AD module and is used to identify the digital signals and perform corresponding operations.
[0005] Furthermore, the vacuum gauge may be of any of a variety of types.
[0006] Furthermore, the AD module is an NX-AD3604 module.
[0007] Furthermore, the PLC controller is an NX102-9000.
[0008] Furthermore, it also includes an MES management system, a host computer, and a touchscreen; among which, The MES management system is networked with the PLC controller via an industrial communication protocol to receive and manage production process data. The host computer communicates bidirectionally with the PLC controller for remote monitoring of the system's operating status; The touchscreen is integrated into the host computer or set up independently, and is used to display vacuum parameters, operation command input, and alarm prompts.
[0009] The beneficial effects of this utility model are as follows: The system provided by this invention is adaptable to different process requirements and various types of vacuum gauges, with a wide range of applications. Furthermore, it eliminates the need for electrical engineers to arrive on-site; simply installing a new vacuum gauge and powering on the equipment is sufficient for immediate use, without requiring review or debugging, thus minimizing production disruption. With this invention, when a vacuum gauge malfunctions on-site, operators only need to install a new one, and the equipment will automatically recognize and operate normally after powering on, without additional procedural review or debugging steps. This significantly shortens the equipment maintenance window and substantially reduces the impact on production plans and downtime losses.
[0010] This invention can simulate different scenarios such as vacuum ovens, vacuum storage boxes, vacuum tunnel furnaces, vacuum mixers, and vacuum transfer vehicles, and all meet the design and production requirements. Attached Figure Description
[0011] Figure 1 A schematic diagram of the framework of a high-compatibility automatic identification system for vacuum gauges provided in this embodiment of the present invention; Figure 2 A flowchart illustrating the workflow of the high-compatibility automatic identification system for vacuum gauges provided in this embodiment of the present invention. Detailed Implementation
[0012] To make the objectives, technical solutions, and advantages of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.
[0013] like Figure 1 As shown in the figure, this utility model embodiment provides a highly compatible automatic identification system for vacuum gauges, including: a vacuum chamber, a vacuum gauge, an AD module, a PLC controller, and an actuator. The vacuum gauge, connected to the vacuum chamber, is used to detect the vacuum level within the chamber and output an analog signal; the AD module, connected to the vacuum gauge, is used to convert the analog signal into a digital signal; and the PLC controller, connected to the AD module, is used to identify the digital signal and perform corresponding operations to control the actuator.
[0014] The vacuum chamber provides a sealed environment for vacuum processes, and can be any of the following: vacuum oven, vacuum storage box, vacuum tunnel furnace, vacuum mixer or vacuum transfer vehicle. One or more standard interfaces are reserved on the wall for connecting a vacuum gauge.
[0015] The vacuum gauge can be any of several types to detect the absolute or relative pressure of the vacuum chamber in real time and output corresponding analog electrical signals. The high compatibility of this system is primarily due to its ability to adapt to various types and brands of vacuum gauges. For example, it can use vacuum gauges such as the Infocom PCG550 and Infocom PSG500. It should be noted that the system is not limited to these models; through the pre-built vacuum gauge information library within the PLC, it can also output standard analog signals (0-10V, 0-5V, 4-20mA, etc.).
[0016] The AD module used is the NX-AD3604 module. The Omron NX-AD3604 module is a 4-point analog input module that receives analog voltage or current signals from a vacuum gauge and converts them with high precision into digital signals that can be processed by a PLC. The NX-AD3604 module supports -10 ~ +10V DC voltage input, and the range can be switched through hardware settings and PLC program. Its differential input mode effectively suppresses common-mode noise, making it particularly suitable for long-distance transmission in industrial environments, ensuring the stability and accuracy of signal acquisition.
[0017] The PLC controller used is the NX102-9000. The Omron NX102-9000, as a high-performance programmable automation controller (PAC), is the core of the entire system. It is responsible for signal processing, vacuum gauge identification, logic judgment, control algorithm execution, and communication with the host computer. The PLC controller used in this embodiment has a built-in EtherNet / IP port, allowing for easy integration into the factory network.
[0018] The actuators include solenoid valves and vacuum baffle valves, used to receive control commands from the PLC and execute specific physical actions to regulate the pressure in the vacuum chamber. Solenoid valves are used for on / off control of the gas path. For example, they control the opening and closing of the roughing valve and the forestage valve, which can be directly driven by the PLC's digital output points. Vacuum baffle valves are used for precise adjustment of flow conductance or isolation of the vacuum chamber; for example, they are used to control the opening degree of the high-vacuum valve to precisely control the pumping speed.
[0019] Based on the above embodiments, preferably, the system further includes: an MES management system, a host computer, and a touch screen; wherein, the MES management system is networked with the PLC controller via an industrial communication protocol to receive and manage production process data; the host computer communicates bidirectionally with the PLC controller to remotely monitor the system's operating status; the touch screen is integrated into the host computer or set up independently to display vacuum parameters, operation command inputs, and alarm prompts.
[0020] like Figure 2 As shown, the highly compatible working process of the vacuum gauge provided by this utility model is as follows: The vacuum gauge is installed inside the vacuum chamber and sends the collected voltage data to the PLC chip via the AD module; Specifically, the vacuum gauge senses the pressure in the vacuum chamber and generates a voltage value of 0~10.23V (the voltage range varies between different manufacturers, with 0.61~10.23 and 1.2~8.68V being the most common on the market). This voltage value is converted into a digital signal by the AD module and then transmitted to the PLC controller. The PLC controller identifies the corresponding vacuum gauge decoupling and calls the corresponding control program.
[0021] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and not to limit it. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this utility model.
Claims
1. A vacuum gauge high compatibility automatic identification system, characterized in that, include: Vacuum chamber, vacuum gauge, AD module, and PLC controller; among which, The vacuum gauge is connected to the vacuum chamber and is used to detect the vacuum level inside the vacuum chamber and output an analog signal. The AD module is connected to the vacuum gauge and is used to convert the analog signal into a digital signal; The PLC controller is connected to the AD module and is used to identify the digital signals and perform corresponding operations.
2. The high compatibility automatic identification system for vacuum gauges according to claim 1, characterized in that, The vacuum gauge can be any of a variety of types.
3. The high-compatibility automatic identification system for vacuum gauges according to claim 1, characterized in that, The AD module used is the NX-AD3604 module.
4. The high-compatibility automatic identification system for vacuum gauges according to claim 1, characterized in that, The PLC controller used is NX102-9000.
5. The high-compatibility automatic identification system for vacuum gauges according to claim 1, characterized in that, It also includes the MES management system, the host computer, and the touch screen; among which, The MES management system is networked with the PLC controller via an industrial communication protocol to receive and manage production process data. The host computer communicates bidirectionally with the PLC controller for remote monitoring of the system's operating status; The touchscreen is integrated into the host computer or set up independently, and is used to display vacuum parameters, operation command input, and alarm prompts.