A tablet carrier and tablet appearance detection device

Abstract

The utility model relates to chip detection equipment technical field provides a kind of sheet material carrier and sheet material appearance detection device, wherein, a kind of sheet material carrier, including carrier, the first recess for placing sheet material is equipped on carrier, the first avoiding slot for avoiding the chip set on sheet material is equipped in the first recess, the bearing space of the outer edge frame of accommodating sheet material is formed between the first avoiding slot and the first recess;Pressing piece is respectively installed on carrier and located the both ends of sheet material, and pressing groove is equipped in the place close to sheet material of pressing piece, and the pressing space of limiting sheet material warping is formed between pressing groove and the first recess.The utility model can realize the effective limiting and fixed of sheet material, avoid the problem of sheet material both ends warping.

Description

Technical Field

[0001] This utility model relates to the field of chip testing equipment technology, and in particular to a chip carrier and a chip appearance testing device. Background Technology

[0002] A chip generally refers to an integrated circuit, which is a way to miniaturize circuits (mainly including semiconductor devices, but also passive components, etc.). Using certain processes, the transistors, resistors, capacitors, inductors, and other components required for a circuit, along with interconnecting wiring, are fabricated on one or several small pieces of semiconductor wafers or dielectric substrates, and then packaged in a casing to become a miniature structure with the required circuit functions.

[0003] In the later stages of chip manufacturing, chips are mostly arranged on wafers. When performing wafer appearance inspection, operators usually need to pre-place the wafers on a support fixture. Then, the fixture places the wafers under the appearance inspection device for appearance inspection. Since most current wafer support fixtures have a relatively simple structure, they usually only have a groove in the middle that matches the shape of the wafer. When the wafer is placed in the groove, the groove can only limit the sides of the wafer and cannot press the wafer down. As a result, the wafer sometimes warps at both ends due to deformation during inspection, which affects the normal inspection of the chip. Utility Model Content

[0004] In order to overcome the defects of the prior art mentioned above, this utility model provides a sheet carrier and a sheet appearance inspection device, which can effectively limit and fix the sheet, and avoid the problem of warping at both ends of the sheet.

[0005] To solve the above-mentioned technical problems, the technical solution of this utility model is as follows: A sheet carrier includes a carrier, the carrier having a first groove for placing a sheet, the first groove having a first clearance groove for circumventing a chip disposed on the sheet, and a bearing space for accommodating an outer edge frame of the sheet being formed between the first clearance groove and the first groove. Pressing components are respectively installed on the carrier at both ends of the material sheet. The pressing components are provided with pressing grooves near the material sheet. The pressing grooves and the first groove form a pressing space to limit the warping of the material sheet.

[0006] As an improved technical solution, the pressing component includes a pressing body, which is mounted on the carrier. The pressing body is provided with a pressing portion extending toward the material sheet, and the pressing groove is located at the end of the pressing portion away from the pressing body. The pressure body is also provided with through holes for installation and fixing.

[0007] As an improved technical solution, the carrier is provided with mounting grooves at both ends of the material sheet, the pressing body is installed in the mounting groove, and the mounting groove is provided with threaded holes for connection, the threaded holes being correspondingly provided with the through holes; The carrier is provided with a second groove near the mounting groove. The second groove is connected to the first groove and is flush with the bottom. The pressing part is located in the second groove.

[0008] As an improved technical solution, the thickness of the pressing part is equal to the depth of the second groove.

[0009] As an improved technical solution, clearance grooves are provided at the corners of the first groove and the first clearance groove.

[0010] As an improved technical solution, the carrier is also provided with a second clearance groove for picking up and placing the material piece, and the second clearance groove is arranged perpendicularly to the first clearance groove.

[0011] A sheet appearance inspection device includes the sheet carrier and an appearance inspection table. The appearance inspection table is provided with a carrier placement slot, and the sheet carrier is placed in the carrier placement slot. Guide rails and a first drive cylinder are respectively installed on both sides of the carrier placement slot. A support frame is provided between the guide rails and the first drive cylinder. An appearance inspection device driven by a second drive cylinder is provided on the support frame. The detection probe of the appearance inspection device faces the material carrier.

[0012] After adopting the above technical solution, the beneficial effects of this utility model are: By setting up a carrier, the carrier is provided with a first groove for placing the sheet material, and a first clearance groove is provided in the first groove for avoiding the chip set on the sheet material. The first clearance groove and the first groove form a bearing space for accommodating the outer edge frame of the sheet material. The first groove can limit the four sides of the sheet material, and the first clearance groove can avoid the chip on the sheet material, so that the outer edge frame of the sheet material can be placed flat in the bearing space, and the sheet material and the chip on the sheet material are in a horizontal state, which is convenient for appearance inspection. A pressing component is installed on the carrier at both ends of the material sheet. The pressing component has a pressing groove near the material sheet. The pressing groove and the first groove form a pressing space to limit the warping of the material sheet. By setting the pressing component and the pressing groove, the end of the material sheet can be limited to avoid the problem of warping at the end of the material sheet, which would affect the normal testing.

[0013] In summary, this utility model provides a sheet carrier and a sheet appearance inspection device, which can effectively limit and fix the sheet, avoiding the problem of warping at both ends of the sheet. Attached Figure Description

[0014] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. In all the drawings, similar elements or parts are generally identified by similar reference numerals. In the drawings, the elements or parts are not necessarily drawn to scale.

[0015] Figure 1 This is a schematic diagram of the material carrier in this utility model; Figure 2 This is an exploded structural diagram of the material carrier in this utility model; Figure 3 This is a schematic diagram of the structure of the medium-pressure component of this utility model; Figure 4 This is a schematic diagram of the structure of the material sheet appearance inspection device of this utility model; Reference numerals: 1. Carrier; 2. First groove; 3. First clearance groove; 4. Pressing element; 401. Pressing body; 402. Pressing part; 403. Through hole; 5. Pressing groove; 6. Mounting groove; 7. Threaded hole; 8. Second groove; 9. Clearance groove; 10. Second clearance groove; 11. Appearance inspection table; 12. Carrier placement groove; 13. Guide rail; 14. First drive electric cylinder; 15. Support frame; 16. Appearance inspection device; 17. Second drive electric cylinder; 18. Material sheet; 100. Material sheet carrier. Detailed Implementation

[0016] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0017] It should be noted that all directional indicators (such as up, down, left, right, front, back, etc.) in this utility model embodiment are only used to explain the relative positional relationship and movement of each component in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indicator will also change accordingly.

[0018] Meanwhile, the meaning of "and / or" or "and / or" appearing throughout the text is that it includes three options. Taking "A and / or B" as an example, it includes option A, option B, or an option that satisfies both A and B.

[0019] Furthermore, in this utility model, descriptions involving "first," "second," etc., are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined with "first" or "second" may explicitly or implicitly include at least one of that feature. Additionally, the technical solutions of the various embodiments can be combined with each other, but only on the basis of being achievable by those skilled in the art. When the combination of technical solutions is contradictory or impossible to implement, such a combination of technical solutions should be considered non-existent and not within the scope of protection claimed by this utility model.

[0020] like Figures 1-3 As shown, a sheet carrier 100 includes a carrier 1. The carrier 1 is provided with a first groove 2 for placing a sheet 18. The first groove 2 is provided with a first clearance groove 3 for avoiding chips disposed on the sheet 18. The first clearance groove 3 and the first groove 2 form a bearing space for accommodating the outer edge frame of the sheet 18. The first groove 2 can limit the four sides of the sheet 18, and the first clearance groove 3 can avoid the chips on the sheet 18, so that the outer edge frame of the sheet 18 can be placed flat in the bearing space, and the sheet 18 and the chips on the sheet 18 are in a horizontal state, which is convenient for appearance inspection. Pressing components 4 are installed on the carrier 1 at both ends of the material sheet 18. Pressing components 4 are provided with pressing grooves 5 near the material sheet 18. The pressing grooves 5 and the first groove 2 form a pressing space to limit the warping of the material sheet 18. By setting the pressing components 4 and pressing grooves 5, the ends of the material sheet 18 can be limited to avoid the problem of warping at the ends of the material sheet 18, which would affect normal testing.

[0021] Combination Figures 1-3 As shown, the pressing component 4 includes a pressing body 401, which is mounted on the carrier 1. The pressing body 401 is provided with a pressing part 402 extending in the direction of the sheet 18. The pressing groove 5 is provided at the end of the pressing part 402 away from the pressing body 401. The end of the sheet 18 can be limited by the pressing part 402 and the pressing groove 5. The pressure body 401 is also provided with a through hole 403 for installation and fixing. The through hole 403 is used for bolts to pass through, so that the pressure body 401 can be installed on the carrier 1.

[0022] Combination Figure 2 As shown, the carrier 1 has mounting grooves 6 at both ends of the material sheet 18. The mounting grooves 6 are adapted to the pressing body 401. The pressing body 401 is installed in the mounting grooves 6. The mounting grooves 6 have threaded holes 7 for connection. The threaded holes 7 are corresponding to the through holes 403. The pressing body 401 is fixed in the mounting grooves 6 of the carrier 1 by bolts. A second groove 8 is provided on the carrier 1 near the mounting groove 6. The second groove 8 is connected to the first groove 2 and is flush with the bottom. The pressing part 402 is located in the second groove 8.

[0023] Combination Figures 2-3 As shown, the thickness of the pressing part 402 is equal to the groove depth of the second groove 8, so that the upper surface of the pressing part 402 is flush with the upper surface of the carrier 1, making the appearance more aesthetically pleasing.

[0024] Combination Figures 1-2 As shown, both the corner of the first groove 2 and the corner of the first clearance groove 3 are provided with clearance grooves 9. By setting clearance grooves 9, the corner positions of the sheet 18 and the chips near the corners can be cleared.

[0025] Combination Figures 1-2 As shown, the carrier 1 is also provided with a second clearance groove 10 for picking up and putting down the material piece 18. The second clearance groove 10 is arranged perpendicularly to the first clearance groove 3. The second clearance groove 10 facilitates the picking up and putting down of the material piece 18.

[0026] Combination Figures 1-2 As shown in Figure 4, a sheet appearance inspection device includes a sheet carrier 100 and an appearance inspection table 11. The appearance inspection table 11 is provided with a carrier placement groove 12, which is adapted to the shape of the sheet carrier 100. The sheet carrier 100 is placed in the carrier placement groove 12. Guide rails 13 and first drive cylinders 14 are respectively installed on both sides of the carrier placement slot 12. A support frame 15 is provided between the guide rails 13 and the first drive cylinders 14. The support frame 15 can be driven to move axially along the guide rails 13 by the first drive cylinders 14. An appearance inspection device 16 driven by a second drive cylinder 17 is provided on the support frame 15. The detection probe of the appearance inspection device 16 faces the material carrier 100. The appearance inspection device 16 can be driven to move along the support frame 15 by the second drive cylinders 17, and the appearance inspection device 16 can move in the horizontal plane in conjunction with the first drive cylinders 14. In addition, sometimes, to facilitate the loading and unloading of the sheet carrier 100, the appearance inspection device 16 is also equipped with a drive assembly that moves in the vertical direction. The drive assembly usually consists of components such as a drive motor, lead screw, lead screw nut, slider, and guide rail 13. The drive assembly is common in daily life and is common knowledge to those skilled in the art, so it will not be described in detail here.

[0027] For ease of understanding, the working process of this embodiment is described below: like Figures 1-4As shown, firstly, the pressing body 401 is installed in the mounting groove 6 of the carrier 1 by bolts, and the pressing part 402 is attached to the second groove 8. Then, the sheet 18 is placed in the first groove 2, and both ends of the sheet 18 are respectively abutted against the pressing groove 5. The pressing groove 5 limits the two ends of the sheet 18 to avoid the problem of warping at the ends of the sheet 18. Then, the wafer carrier 100 with wafer 18 placed is placed in the carrier placement slot 12 of the appearance inspection table 11, and the appearance inspection device 16 is started. The appearance inspection device 16 is driven to move in the horizontal plane by the first drive electric cylinder 14 and the second drive electric cylinder 17, thereby realizing the appearance inspection of the chip on the wafer 18. After the appearance inspection of sheet 18 is completed, sheet 18 can be manually removed from sheet carrier 100 through the clearance position of the second clearance slot 10.

[0028] In summary, this utility model provides a sheet carrier and a sheet appearance inspection device, which can effectively limit and fix the sheet, avoiding the problem of warping at both ends of the sheet.

[0029] It should be understood that these embodiments are for illustrative purposes only and are not intended to limit the scope of protection of this utility model. Furthermore, it should be understood that after reading the technical description of this utility model, those skilled in the art can make various alterations, modifications, and / or variations to this utility model, and all such equivalent forms also fall within the scope of protection defined by the appended claims.

Claims

1. A tablet carrier characterized by: The carrier includes a first groove for placing a sheet, and a first clearance groove for avoiding the chip disposed on the sheet. The first clearance groove and the first groove form a bearing space for accommodating the outer edge frame of the sheet. Pressing components are respectively installed on the carrier at both ends of the material sheet. The pressing components are provided with pressing grooves near the material sheet. The pressing grooves and the first groove form a pressing space to limit the warping of the material sheet.

2. A web carrier as claimed in claim 1, characterized in that: The pressing component includes a pressing body, which is mounted on the carrier. The pressing body has a pressing portion extending toward the material sheet, and the pressing groove is located at the end of the pressing portion away from the pressing body. The pressure body is also provided with through holes for installation and fixing.

3. A web carrier as claimed in claim 2, characterized in that: The carrier is provided with mounting grooves at both ends of the material sheet, the pressing body is installed in the mounting groove, and the mounting groove is provided with threaded holes for connection, the threaded holes being corresponding to the through holes; The carrier is provided with a second groove near the mounting groove. The second groove is connected to the first groove and is flush with the bottom. The pressing part is located in the second groove.

4. A web carrier as claimed in claim 3, characterized in that: The thickness of the pressing part is equal to the depth of the second groove.

5. A web carrier as in claim 1, wherein: Both the corner of the first groove and the corner of the first clearance groove are provided with clearance grooves.

6. A web carrier as in claim 1, wherein: The carrier is also provided with a second clearance groove for picking up and placing the material piece, and the second clearance groove is arranged perpendicularly to the first clearance groove.

7. A web appearance detection apparatus characterized by comprising: The material carrier according to any one of claims 1-6 further includes an appearance inspection table, wherein the appearance inspection table is provided with a carrier placement slot, and the material carrier is placed in the carrier placement slot; Guide rails and a first drive cylinder are respectively installed on both sides of the carrier placement slot. A support frame is provided between the guide rails and the first drive cylinder. An appearance inspection device driven by a second drive cylinder is provided on the support frame. The detection probe of the appearance inspection device faces the material carrier.

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