Perkin elmer bloch prism for laser beam combining
Patent Information
- Application Number
- CN202522311659.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-10-31
- Publication Date
- 2026-09-11
- Estimated Expiration
- 2035-10-31
AI Technical Summary
但是，棱镜合束的方法也存在以下技术难点：为了实现合束效率的最大化，需要对等边或等腰棱镜对的排列角度及间距进行精确控制，这直接导致该方法的调节操作难度大幅增加
该用于激光合束的佩林布洛卡棱镜，包括棱镜本体，棱镜本体用于接收至少两束不同波长的入射激光；其中，至少两束不同波长的入射激光以预设的入射角从棱镜本体的入射面分别入射至棱镜本体的内部，在棱镜本体的内部发生折射后，在棱镜本体的与出射面相对的后表面发生全反射，并从棱镜本体的出射面合束出射形成激光束。该用于激光合束的佩林布洛卡棱镜，通过棱镜本体的“入射折射-后表面全反射-出射合束”实现至少两束不同波长的入射激光的合束，使用时只需调节单个棱镜的摆放角度，无需进行复杂的棱镜组的控制调节，具有结构简单、操作方便的优点，并且由于能够实现全反射，因此还具有低损耗入射、高光效全反射、合束效率高的优点。
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Figure CN224745228U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of optical technology, and more specifically, to a Perinbrocca prism for laser beam combining. Background Technology
[0002] Laser beam combining technology is the simplest and most effective method to increase the output power of semiconductor lasers. In recent years, various mainstream implementation methods have emerged for laser beam combining, including equilateral prism pairs, fiber couplers, mirror groups, interferometers, and diffraction gratings. Among these, prism beam combining integrates laser beams of different wavelengths into a single high-power laser beam through the action of refracting prisms. In practical applications, precise calculations and simulations are needed to determine the apex angle, incident angle, and spatial relationship of the prism group, thereby designing a suitable beam combining scheme. This method has significant advantages such as low cost, compact beam combining system size, high beam combining efficiency, and no need for additional coating processes. Therefore, its application in multi-band laser beam combining is increasing. However, prism beam combining also presents the following technical challenges: to maximize beam combining efficiency, precise control of the arrangement angle and spacing of equilateral or isosceles prism pairs is required, which directly increases the difficulty of adjustment operations. Utility Model Content
[0003] The purpose of this application is to provide a Perinbroka prism for laser beam combining that does not require complex control and adjustment of the prism assembly, and has the advantages of simple structure and convenient operation.
[0004] The embodiments of this application are implemented as follows: A first aspect of this application provides a Perimbero Broca prism for laser beam combining, comprising a prism body for receiving at least two incident laser beams of different wavelengths; wherein the at least two incident laser beams of different wavelengths are respectively incident from the incident surface of the prism body at a preset incident angle into the interior of the prism body, refracted inside the prism body, undergo total internal reflection on the rear surface of the prism body opposite to the exit surface, and are combined and emitted from the exit surface of the prism body to form a laser beam. This Perimbero Broca prism for laser beam combining does not require complex control and adjustment of the prism assembly, and has the advantages of simple structure and convenient operation.
[0005] As one possible implementation, the wedge angle of the prism body is 78°26′.
[0006] As one possible implementation, the prism body is made of ultraviolet fused silica, BK7 glass, or calcium fluoride.
[0007] As one possible implementation, the at least two incident laser beams of different wavelengths include a first laser and a second laser, wherein the first laser is incident on the incident surface of the prism body at Brewster angle.
[0008] As one possible implementation, when the prism body is made of ultraviolet fused silica, the wavelength range of the first laser is 185~760nm and the wavelength range of the second laser is 185~2100nm; or, the wavelength range of the first laser is 760~1100nm and the wavelength range of the second laser is 185~1100nm.
[0009] As one possible implementation, when the prism body is made of BK7 glass, the wavelength range of the first laser is 350~2000nm, and the wavelength range of the second laser is 350~2000nm.
[0010] As one possible implementation, when the prism body is made of calcium fluoride, the wavelength range of the first laser is 180~280nm and the wavelength range of the second laser is 185~2500nm; or, the wavelength range of the first laser is 280~330nm and the wavelength range of the second laser is 280~330nm.
[0011] As one possible implementation, the emission direction of the laser beam formed by combining the beams is perpendicular to the incident direction of the first laser.
[0012] As one possible implementation, a nonlinear optical crystal is also included; the laser beam formed by beam combining is guided to the nonlinear optical crystal for frequency combining.
[0013] As one possible implementation, the nonlinear optical crystal is an LBO crystal, a BBO crystal, a CLBO crystal, or a KTP crystal.
[0014] The beneficial effects of the embodiments of this application include: This Peri-Broch prism for laser beam combining includes a prism body for receiving at least two incident laser beams of different wavelengths. The at least two incident laser beams of different wavelengths are incident from the incident surface of the prism body at a preset incident angle into the interior of the prism body. After refraction within the prism body, total internal reflection occurs on the rear surface of the prism body opposite the exit surface, and the beams are combined and emitted from the exit surface of the prism body to form a laser beam. This Peri-Broch prism for laser beam combining achieves the beam combining of at least two incident laser beams of different wavelengths through the "incident refraction - rear surface total internal reflection - exit beam combining" process of the prism body. In use, only the placement angle of a single prism needs to be adjusted, eliminating the need for complex control and adjustment of the prism assembly. It has the advantages of simple structure and convenient operation. Furthermore, due to the ability to achieve total internal reflection, it also has the advantages of low-loss incident light, high-efficiency total internal reflection, and high beam combining efficiency. Attached Figure Description
[0015] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.
[0016] Figure 1 A schematic diagram of the optical path of a prism assembly provided for existing technology; Figure 2 This is one of the optical path diagrams of the Perimbero dell'arte prism provided in the embodiments of this application; Figure 3 This is the second schematic diagram of the structure of the Perinbroca prism provided in the embodiments of this application; Figure 4 The third schematic diagram of the structure of the Perinbroca prism provided in the embodiments of this application.
[0017] Icons: 10-Perrin-Broca prism; 11-Incident surface; 12-Rear surface; 13-Outgoing surface; 21-First laser; θ1-Brewster angle; 22-Second laser; θ2-Incident angle; 23-Laser beam; θ3-Outgoing angle; 30-Nonlinear optical crystal; 31-Combined laser. Detailed Implementation
[0018] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. The described embodiments are only some embodiments of this application, not all embodiments. Similar reference numerals and letters in the following drawings indicate similar items. Once an item is defined in one drawing, it does not need to be further defined in other drawings.
[0019] The terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product is in use. They are used only for the convenience of describing this application and should not be construed as limiting this application. The terms "first," "second," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.
[0020] Unless otherwise expressly specified and limited, the terms "set up," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; and they can refer to connections within two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.
[0021] like Figure 1 As shown, the prism beam combining method integrates laser beams of different wavelengths into a single high-power laser beam through the action of refracting prisms. In practical applications, precise calculations and simulations are required to determine the apex angle, incident angle, and spatial relationship of the prism group, thereby designing a suitable beam combining scheme. To maximize beam combining efficiency, precise control of the arrangement angle and spacing of equilateral or isosceles prism pairs is necessary, which directly increases the difficulty of adjusting the prism beam combining method.
[0022] To solve the above problems, please refer to the following: Figures 2 to 4 This application provides a Peri-Broch prism 10 for laser beam combining, comprising a prism body for receiving at least two incident laser beams of different wavelengths. The at least two incident laser beams of different wavelengths are incident from the incident surface 11 of the prism body at a preset incident angle into the interior of the prism body. After refraction within the prism body, total internal reflection occurs at the rear surface 12 of the prism body opposite to the exit surface 13, and the beams are combined and emitted from the exit surface 13 to form a laser beam 23. This Peri-Broch prism 10 for laser beam combining eliminates the need for complex control and adjustment of the prism assembly, offering advantages such as simple structure and convenient operation.
[0023] It should be noted that, as Figures 2 to 4As shown, the Perinbroca prism 10 for laser beam combining includes a prism body for receiving at least two incident laser beams of different wavelengths. The prism body has at least three optical surfaces: an incident surface 11, an exit surface 13, and a rear surface 12 opposite to the exit surface 13. At least two incident laser beams of different wavelengths are incident from the incident surface 11 of the prism body at a preset incident angle into the interior of the prism body. After refraction inside the prism body, total internal reflection occurs at the rear surface 12 of the prism body, and the beams are combined and emitted from the exit surface 13 of the prism body to form a laser beam 23.
[0024] The Perinbroka prism 10 for laser beam combining achieves the beam combining of at least two incident lasers of different wavelengths through the "refraction at the incident surface 11 - total reflection at the rear surface 12 - beam combining at the exit surface 13" of the prism body. In use, only the placement angle of a single prism needs to be adjusted, without the need for complex control and adjustment of the prism group. It has the advantages of simple structure and convenient operation. Furthermore, since it can achieve total reflection, it also has the advantages of low-loss incident light, high-efficiency total reflection, and high beam combining efficiency.
[0025] As one possible implementation method, such as Figures 2 to 4 As shown, the wedge angle of the prism body is 78°26′.
[0026] It should be noted that the wedge angle of the prism body refers to the angle between the two optical surfaces (refracting surfaces) of the prism body, which directly determines the propagation path of the incident laser inside the prism body. In this application, the wedge angle of the prism body is designed to be 78°26′, which allows at least two incident laser beams of different wavelengths to be incident from the incident surface 11 of the prism body at a preset incident angle into the interior of the prism body. After refraction inside the prism body, total internal reflection occurs at the rear surface 12 of the prism body, thereby achieving low-loss incident laser, high-efficiency total internal reflection, and finally precise emission.
[0027] As one possible implementation, the prism body is made of ultraviolet fused silica, BK7 glass, or calcium fluoride.
[0028] It should be noted that ultraviolet fused silica refers to fused silica glass with a SiO2 purity greater than or equal to 99.995%. Ultraviolet fused silica exhibits excellent transmittance in the ultraviolet (185nm~400nm), visible (400nm~760nm), and near-infrared (760nm~2500nm) wavelength ranges. For beam combining scenarios requiring ultraviolet lasers (such as 355nm ultraviolet light for photolithography, 266nm ultraviolet light for material surface modification, and 1064nm infrared light for heating), using ultraviolet fused silica ensures low-loss propagation of lasers of various wavelengths within the prism body, avoiding the optical power attenuation caused by ultraviolet absorption in traditional glass, thereby improving the overall optical efficiency of the laser beam 23 formed by beam combining.
[0029] The dispersion coefficient of ultraviolet fused silica is approximately 67, which is higher than that of ordinary optical glass (such as K9 glass, which has a dispersion coefficient of approximately 64). Furthermore, its refractive index changes gradually over a wide wavelength range. For example, in the 355nm ultraviolet and 1064nm near-infrared bands, the refractive indices are 1.470 and 1.450, respectively, with a difference of only 0.02. The Perinbroca prism 10 provided in this application achieves laser beam combining of multiple wavelengths through a "refractive-total internal reflection" path. Low dispersion reduces optical path offset caused by differences in refractive index between different wavelengths of laser light. Taking the combining of two laser beams (355nm + 1064nm) as an example, the ultraviolet fused silica prism exhibits high beam overlap and small optical axis deviation, meeting the requirements for high-precision beam combining (such as laser lithography and precision spectral analysis).
[0030] In addition, those skilled in the art can also use BK7 glass as the material for the prism body according to actual needs. BK7 glass has good light transmittance in the visible light band (400nm~700nm), and the raw material cost is only 1 / 5 to 1 / 10 of that of ultraviolet fused silica, making it suitable for mass production of medium and low precision optical systems (such as camera lenses and telescope beam splitters). Alternatively, those skilled in the art can also use calcium fluoride as the material for the prism body according to actual needs. Calcium fluoride can simultaneously cover an ultra-wide band from vacuum ultraviolet (120nm) to mid-infrared (10μm) with minimal dispersion, making it suitable for wide-band systems with high color difference correction requirements (such as infrared spectrometers and multispectral imaging).
[0031] As one possible implementation method, such as Figures 2 to 4 As shown, at least two incident laser beams of different wavelengths include a first laser 21 and a second laser 22. The first laser 21 is incident on the incident surface 11 of the prism body at a Brewster angle θ1.
[0032] As one possible implementation, when the prism body is made of ultraviolet fused silica, the wavelength range of the first laser 21 is 185~760nm and the wavelength range of the second laser 22 is 185~2100nm; or, the wavelength range of the first laser 21 is 760~1100nm and the wavelength range of the second laser 22 is 185~1100nm.
[0033] As one possible implementation, when the prism body is made of BK7 glass, the wavelength range of the first laser 21 is 350~2000nm, and the wavelength range of the second laser 22 is 350~2000nm.
[0034] As one possible implementation, when the prism body is made of calcium fluoride, the wavelength range of the first laser 21 is 180~280nm and the wavelength range of the second laser 22 is 185~2500nm; or, the wavelength range of the first laser 21 is 280~330nm and the wavelength range of the second laser 22 is 280~330nm.
[0035] Those skilled in the art should be able to make reasonable selections and designs for the wavelengths of the first laser 21 and the second laser 22 based on actual needs and the material of the prism body; no specific limitations are imposed here.
[0036] like Figures 2 to 4 As shown, the following will take the process of combining a first laser 21 with a wavelength of 532 nm and a second laser 22 with a wavelength of 1064 nm incident from air into a prism body made of ultraviolet fused silica as an example to explain in detail the optical principle and calculation process of combining two incident laser beams using the Perinbrocca prism 10 provided in this application. Those skilled in the art will know that the refractive index of the first laser 21 with a wavelength of 532 nm in the prism body is 1.460678, and the refractive index of the second laser 22 with a wavelength of 1064 nm in the prism body is 1.449604.
[0037] Those skilled in the art should know that the formula for calculating Brewster's angle θ1 is θ B =arctan(n2 / n1), where n1 and n2 are the refractive indices of medium 1 and medium 2, respectively, when light propagates from medium 1 into medium 2. When the first laser 21 and the second laser 22 are incident on the interior of the prism body from the incident surface 11 of the prism body at their respective preset incident angles, as... Figure 2As shown, according to the Brewster angle θ1 calculation formula above, the Brewster angle θ1 of the first laser 21 with a wavelength of 532nm is 55.604°. Since the outgoing beam forms a 90° angle with the incident beam when the beam enters the interior of the Perinbrocca prism 10 with a Brewster angle θ1, those skilled in the art will know that the exit angle θ3 of the laser beam 23 formed by combining the first laser 21 with a wavelength of 532nm and the second laser 22 with a wavelength of 1064nm is 55.604°. According to Snell's formula n 入 ×sinθ 入 =n 折 ×sinθ 折 From this, the incident angle θ2 of the second laser with a wavelength of 1064nm can be calculated to be 50.519°. When the first laser 21 with a wavelength of 532nm is incident at Brewster angle θ1 and the second laser 22 with a wavelength of 1064nm is incident at the second laser angle θ2, the two incident laser beams are refracted at the incident surface 11 of the prism body and irradiate the rear surface 12 of the prism body. Those skilled in the art should know that the formula for calculating the critical angle of total internal reflection is θ. c =arcsin(n2 / n1), where n1 and n2 are the refractive indices of medium 1 and medium 2, respectively, when light travels from medium 1 into medium 2. According to the formula for calculating the critical angle of total internal reflection, the critical angles for total internal reflection of the first laser 21 and the second laser 22 on the rear surface 12 of the prism body are 43.205° and 43.618°, respectively. Since the angle at which the first laser 21 is incident on the rear surface 12 of the prism body is 44.037°, which is greater than 43.205°, and the angle at which the second laser 22 is incident on the rear surface 12 of the prism body is 46.263°, which is greater than 43.618°, the first laser 21 and the second laser 22 can undergo total internal reflection on the rear surface 12 of the prism body and be reflected to the front surface of the prism body opposite to the rear surface 12 (i.e., the exit surface 13). Finally, they are emitted in the form of a combined beam. The exit angle θ3 of the combined laser beam 23 is 55.604°, and it forms a 90° angle with the Brewster angle θ1 of the first laser 21. In other words, the exit direction of the combined laser beam 23 is perpendicular to the incident direction of the first laser 21.
[0038] like Figure 3 and Figure 4 As shown, in one possible implementation, the Perinbrocca prism 10 for laser beam combining also includes a nonlinear optical crystal 30; the laser beam 23 formed by beam combining is guided to the nonlinear optical crystal 30 for frequency combining.
[0039] It should be noted that the Perinbroka prism 10 used for laser beam combining also includes a nonlinear optical crystal 30. By integrating the nonlinear optical crystal 30 on the basis of the prism body, an integrated optical system of "multi-wavelength laser beam combining - frequency combining and outputting new wavelength laser" is constructed. This system can retain the advantages of simplified structure and convenient operation of using a single prism for beam combining, and can also expand the wavelength range of the final frequency-combined laser 31 through the optical effect of the nonlinear optical crystal 30 (such as generating ultraviolet, deep ultraviolet or mid-infrared lasers).
[0040] Specifically, at least two incident laser beams of different wavelengths, after passing through the "refraction at the incident surface 11 - total internal reflection at the rear surface 12 - beam combining at the exit surface 13" process of the prism body, can output a laser beam 23 with high spot overlap and small optical axis deviation. On this basis, the exit surface 13 of the prism body is precisely aligned with the incident surface of the nonlinear optical crystal 30 to ensure that the laser beam 23 formed by beam combining is incident into the interior of the nonlinear optical crystal 30 at a preset angle. Based on the "optical sum-frequency effect" of the nonlinear optical crystal 30 (the second harmonic in nonlinear optics generates an extension effect, satisfying energy conservation), the multi-wavelength laser beam 23 output by the prism body is converted into a new wavelength combined laser 31 (such as 532nm + 1064nm combined to generate 355nm ultraviolet light, or 1064nm + 1319nm combined to generate 589nm yellow light). The nonlinear optical crystal 30 can be optically polished and / or coated with an anti-reflection film in advance. Those skilled in the art should be able to make reasonable selections and designs for the length of the nonlinear optical crystal 30 according to the requirements of the combination efficiency, without making specific restrictions here.
[0041] like Figure 3 and Figure 4 As shown, in one possible implementation, when a first laser 21 with a wavelength of 532 nm is incident on a prism body made of ultraviolet fused silica at a Brewster angle θ1 of 55.604° and a second laser 22 with a wavelength of 1064 nm at an incident angle θ2 of 50.519°, the nonlinear optical crystal 30 can be selected as an LBO crystal to generate a combined laser 31 with a wavelength of 355 nm.
[0042] Alternatively, as one possible implementation, when a first laser 21 with a wavelength of 266 nm is incident on a prism body made of ultraviolet fused silica at a Brewster angle θ1 of 56.304° and a second laser 22 with a wavelength of 1064 nm at an incident angle θ2 of 50.947°, the nonlinear optical crystal 30 can be selected as a BBO crystal to generate a combined laser 31 with a wavelength of 213 nm.
[0043] Alternatively, as one possible implementation, when a first laser 21 with a wavelength of 355 nm is incident on the prism surface at a Brewster angle θ1 of 55.883° and a second laser 22 with a wavelength of 1064 nm is incident on the prism body made of ultraviolet fused silica at an incident angle θ2 of 53.022°, the nonlinear optical crystal 30 can be selected as a CLBO crystal to generate a combined laser 31 with a wavelength of 266 nm.
[0044] Alternatively, as an implementation method, when a first laser 21 with a wavelength of 1064 nm is incident on the prism surface at a Brewster angle θ1 of 56.433° and a second laser 22 with a wavelength of 1319 nm is incident on the prism body made of BK7 glass at an incident angle θ2 of 56.092°, the nonlinear optical crystal 30 can be selected as a KTP crystal to generate a combined laser 31 with a wavelength of 589 nm.
[0045] The above description is merely an optional embodiment of this application and is not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.
[0046] It should also be noted that the various specific technical features described in the above embodiments can be combined in any suitable manner without contradiction. In order to avoid unnecessary repetition, this application will not describe the various possible combinations separately.
Claims
1. A Perinbrocca prism for laser beam combining, characterized in that, The prism body is used to receive at least two incident laser beams of different wavelengths. The at least two incident laser beams of different wavelengths are respectively incident from the incident surface of the prism body into the interior of the prism body at a preset incident angle. After refraction inside the prism body, total internal reflection occurs on the rear surface of the prism body opposite to the exit surface, and the beams are combined and emitted from the exit surface of the prism body to form a laser beam.
2. The Perinbrocca prism for laser beam combining according to claim 1, characterized in that, The wedge angle of the prism body is 78°26′.
3. The Pellin-Broca prism for laser beam combining according to claim 1 or 2, characterized in that, The prism body is made of ultraviolet fused silica, BK7 glass, or calcium fluoride.
4. The Pellin-Broca prism for laser beam combining of claim 3, wherein, The at least two incident laser beams of different wavelengths include a first laser and a second laser, wherein the first laser is incident on the incident surface of the prism body at Brewster angle.
5. The Perinbrocca prism for laser beam combining according to claim 4, characterized in that, When the prism body is made of ultraviolet fused silica, the wavelength range of the first laser is 185~760nm and the wavelength range of the second laser is 185~2100nm; or, the wavelength range of the first laser is 760~1100nm and the wavelength range of the second laser is 185~1100nm.
6. The Pellin-Broca prism for laser beam combining of claim 4, wherein, When the prism body is made of BK7 glass, the wavelength range of the first laser is 350~2000nm, and the wavelength range of the second laser is 350~2000nm.
7. The Pellin-Broca prism for laser beam combining of claim 4, wherein, When the prism body is made of calcium fluoride, the wavelength range of the first laser is 180~280nm and the wavelength range of the second laser is 185~2500nm; or, the wavelength range of the first laser is 280~330nm and the wavelength range of the second laser is 280~330nm.
8. The Perinbrocca prism for laser beam combining according to claim 4, characterized in that, The exit direction of the laser beam formed by the combined beam is perpendicular to the incident direction of the first laser.
9. The Perinbrocca prism for laser beam combining according to claim 1, characterized in that, It also includes a nonlinear optical crystal; the laser beam formed by beam combining is guided to the nonlinear optical crystal for frequency combining.
10. The Pellin-Broca prism for laser beam combining of claim 9, wherein, The nonlinear optical crystal is an LBO crystal, a BBO crystal, a CLBO crystal, or a KTP crystal.