Ion source cathode structure and filament calibration tool

Abstract

The utility model discloses a kind of ion source cathode structure and filament calibration tool;It is related to ion implantation machine technical field;Ion source cathode structure, including cathode mounting plate and filament, the upper end of cathode mounting plate is equipped with mounting hole, filament clamp is set near mounting hole, the left and right ends of filament clamp are equipped with filament clamp adjusting screw, filament is fixed in mounting hole by filament clamp and filament clamp adjusting screw, the back of cathode mounting plate is equipped with cathode cap and cathode sheath corresponding mounting hole, cathode cap is sleeved in the outer periphery of filament, cathode sheath is sleeved on cathode cap;The outer periphery of cathode cap is formed with locating shoulder, the inner side wall of cathode sheath is formed with locating stop corresponding with locating shoulder.The ion source cathode structure and filament calibration tool provided by the utility model can effectively shorten the operation time of filament and cathode cap replacement, and can effectively ensure the relative position of filament and cathode cap installation, improve the maintenance efficiency of ion source.

Description

Technical Field

[0001] This utility model relates to the field of ion implantation machine technology, and more specifically, to an ion source cathode structure and filament calibration fixture. Background Technology

[0002] Ion implantation technology uses an ion implanter to dope semiconductors. The ion source is the key component for generating ions, converting the element to be implanted into an ion beam for subsequent acceleration and implantation. Among the types of ion sources, the hot filament ion source is the most widely used. It generates thermionic electrons by heating a filament such as a tungsten filament. These thermionic electrons bombard gas molecules under the influence of a magnetic field, ionizing them to form ions. However, the filament and cathode cap of a hot filament ion source have a limited lifespan and need to be replaced periodically.

[0003] Currently, the cathode structure of the hot filament ion source used in high-energy ion implanters on the market cannot accurately control the relative installation position of the cathode cap and cathode sheath when replacing or installing them, making it impossible to quickly and accurately position and install them.

[0004] Furthermore, when replacing the filament, the relative installation position of the filament cannot be accurately controlled, which can easily lead to the filament and cathode cap burning out due to excessively close proximity. Utility Model Content

[0005] In view of this, the purpose of this utility model is to provide a filament calibration fixture and an ion source cathode structure to solve the problems existing in the prior art.

[0006] To achieve the above objectives, the technical solution of this utility model is as follows: An ion source cathode structure includes a cathode mounting plate and a filament. The cathode mounting plate has a mounting hole at its upper end, and a filament clamp is positioned near the mounting hole. The filament clamp is mounted on the front side of the cathode mounting plate, and filament clamp adjusting screws are inserted at both ends of the filament clamp. The filament is fixed in the mounting hole by the filament clamp and the adjusting screws. A cathode cap and a cathode sheath are positioned on the back side of the cathode mounting plate corresponding to the mounting hole. The cathode cap is fitted around the filament, and the cathode sheath is fitted onto the cathode cap. A positioning shoulder is formed on the outer periphery of the cathode cap, and a positioning stop corresponding to the positioning shoulder is formed on the inner sidewall of the cathode sheath.

[0007] Furthermore, the positioning shoulder extends circumferentially along the outer periphery of the cathode cap, and the positioning stop extends circumferentially along the inner sidewall of the cathode sheath.

[0008] The purpose of this utility model is also to provide a filament calibration fixture for installing the aforementioned filament, including a fixture body, wherein a hollow cavity with an opening at one end is formed inside the fixture body for accommodating the filament, and a base plate for fitting the filament is provided at the other end of the hollow cavity; a positioning part is provided on the outer peripheral sidewall of the fixture body near the opening end, and a side observation port is provided on the outer peripheral sidewall of the other end of the fixture body.

[0009] Furthermore, the tooling body also has a mounting portion formed on the outer periphery of one end of the opening for connection to the mounting hole.

[0010] Furthermore, the positioning part has a ring-shaped structure.

[0011] Furthermore, the side observation ports are spaced 2 to 4 times in a circumferential manner.

[0012] Furthermore, a bottom observation port is provided on the base plate.

[0013] Furthermore, the bottom observation port is connected to the side observation port.

[0014] The beneficial effects of this utility model are as follows: The ion source cathode structure provided by this utility model allows for precise positioning of the axial position of the cathode cap and cathode sheath by the cooperation of the positioning shoulder and positioning stop when replacing and installing the cathode cap, ensuring the positional consistency of the cathode cap and cathode sheath. In addition, the installation of the filament by the filament calibration fixture can effectively shorten the operation time for replacing the ion source filament and cathode cap, while also effectively ensuring the relative position of the filament and cathode cap, thus improving the maintenance efficiency of the ion source. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other embodiments can be obtained based on these drawings.

[0016] Figure 1 This is an exploded structural diagram of the ion source cathode structure in this utility model.

[0017] Figure 2 This is a schematic diagram of the cathode cap in this utility model.

[0018] Figure 3 This is a schematic diagram of the cathode sheath in this utility model.

[0019] Figure 4 This is a cross-sectional schematic diagram of the ion source cathode structure in this utility model.

[0020] Figure 5 This is a schematic diagram of the filament calibration fixture in this utility model.

[0021] Figure 6 This is a schematic diagram showing the usage status of the filament calibration fixture in this utility model.

[0022] Explanation of reference numerals in the attached figures: 10. Ion source cathode structure; 11. Cathode mounting plate; 111. Mounting hole; 12. Filament; 13. Filament clamp; 14. Cathode cap; 141. Positioning shoulder; 15. Cathode sleeve; 151. Positioning stop; 16. Filament clamp adjusting screw; 20. Calibration fixture; 21. Fixture body; 22. Hollow cavity; 23. Base plate; 24. Positioning part; 25. Side observation port; 26. Mounting part; 27. Bottom observation port. Detailed Implementation

[0023] The structure provided by this utility model will be explained and described in detail below with reference to the accompanying drawings.

[0024] Example 1 refer to Figures 1 to 4 As shown, this embodiment specifically discloses an ion source cathode structure 10, including a cathode mounting plate 11 and a filament 12. The cathode mounting plate 11 has a mounting hole 111 at its upper end, and a filament clip 13 is provided near the mounting hole 111. The filament clip 13 is installed on the front side of the cathode mounting plate 11, and filament clip adjusting screws 16 are provided at both ends of the filament clip 13. The filament 12 is fixed in the mounting hole 111 by the filament clip 13 and the filament clip adjusting screws 16. A cathode cap 14 and a cathode sheath 15 are provided on the back side of the cathode mounting plate 11 corresponding to the mounting hole 111. The cathode cap 14 is sleeved on the outer periphery of the filament 12, and the cathode sheath 15 is sleeved on the cathode cap 14. A positioning shoulder 141 is formed on the outer periphery of the cathode cap 14, and a positioning stop 151 corresponding to the positioning shoulder 141 is formed on the inner side wall of the cathode sheath 15.

[0025] In this embodiment, the cathode mounting plate 11 serves as the supporting foundation. The filament 12 is fixed via the mounting hole 111, the filament clamp 13, and the filament clamp adjusting screw 16. Tightening the filament clamp adjusting screw 16 allows the filament clamp 13 to clamp the filament 12 from the front, ensuring the axial position of the filament within the mounting hole 111 is stable. The cathode cap 14 is fitted around the filament 12, and the cathode sheath 15 is then fitted onto the cathode cap 14, providing support and protection for the cathode cap 14. The outer periphery of the cathode cap 14 is fixed... The locating shoulder 141 and the locating stop 151 on the inner side of the cathode sleeve 15 form a shoulder and stop fit. The end face of the locating shoulder 141 fits against the stepped surface of the locating stop 151. Radial positioning is achieved through the size adaptation of the two, thereby constraining the axial position and radial coaxiality of the cathode cap 14 in the cathode sleeve 15. Ultimately, this ensures that the relative positions of the filament 12, cathode cap 14, and cathode sleeve 15 are accurately unified, thus achieving accurate installation of the cathode cap 14 and cathode sleeve 15.

[0026] In some embodiments, the positioning shoulder 141 extends circumferentially along the outer periphery of the cathode cap 14, and the positioning stop 151 extends circumferentially along the inner sidewall of the cathode sheath 15.

[0027] Specifically, the circumferentially extending positioning shoulder 141 and positioning stop 151 form an annular mating surface, which can form uniform constraint in the entire circumferential direction of cathode cap 14 and cathode sleeve 15, achieving 360° positioning without dead angles and ensuring maximum coaxiality. At the same time, the annular contact can evenly distribute the load to the entire circumference, avoiding stress concentration that may occur in local positioning (such as intermittent protrusions). If the local stress is too large, it may cause the positioning shoulder or positioning stop to crack. That is, the annular contact can evenly distribute the working load and improve the fatigue resistance of the structure. In addition, the circumferentially extending structure is easier to standardize machining and assembly. For example, the positioning shoulder 141 can be directly formed by turning on a lathe, and an annular step can be machined in one step along the outer circumference of cathode cap 14 without complex segmented machining or positioning tooling. The machining efficiency is high and the dimensional tolerance is easy to control.

[0028] Example 2 refer to Figure 5 and Figure 6 This embodiment provides a filament calibration fixture 20 for installing the filament 12 in Embodiment 1. It includes a fixture body 21, and a hollow cavity 22 with one end open is formed inside the fixture body 21 for accommodating the filament 12. A base plate 23 for fitting with the filament 12 is provided at the other end of the hollow cavity 22. A positioning part 24 is provided on the outer peripheral sidewall of the fixture body 21 near the opening end, and a side observation port 25 is provided on the outer peripheral sidewall of the other end of the fixture body 21.

[0029] In this embodiment, the hollow cavity 22 of the tooling body 21 provides an installation space for the filament 12. One end of the hollow cavity 22 is open for inserting the filament 12, and the bottom plate 23 at the other end serves as the axial positioning reference for the filament. After the filament 12 is inserted into the hollow cavity 22, its end is attached to the bottom plate 23, and the axial position of the filament 12 is constrained by physical contact to ensure that the filament extension length is consistent. The positioning part 24 near the outer periphery of the open end is used to attach or fix the tooling body 21 to the cathode mounting plate 11.

[0030] Optionally, in some embodiments, a positioning groove adapted to the positioning part 24 can be machined on the cathode mounting plate 11, and the spatial position of the calibration fixture 10 can be stabilized by screws or bolts after the positioning part 24 is fixed in the positioning groove.

[0031] In the illustrated embodiment, a mounting part 26 for connecting to the mounting hole 111 is provided on the outer periphery of the tooling body 21 at one end of the opening; the mounting part 26 is used to stabilize the overall spatial position of the calibration tooling 10, thereby avoiding filament positioning deviation caused by tooling displacement.

[0032] In addition, the side observation port 25 on the outer periphery of the other end of the tooling body 21 is connected to the hollow cavity 22. The operator can directly observe the fit between the filament 12 and the base plate 23 (such as whether it is in close contact or whether it is tilted) through the side observation port, and confirm in real time whether the positioning of the filament 12 meets the requirements, thus forming an immediate feedback of installation-verification.

[0033] Continue to refer to Figure 5 and Figure 6 As shown, the positioning part 24 has a ring structure. The ring structure of the positioning part 24 facilitates the positioning part 24 to fit with the cathode mounting plate. When it fits in contact, it can evenly distribute the radial force during assembly (such as the squeezing force when pushing in the tooling) to the entire ring contact surface, rather than concentrating it at certain points. This ensures that the positioning part 24 is subjected to uniform force and avoids structural deformation.

[0034] In this embodiment, there are 2 to 4 side observation ports 25 spaced circumferentially. A single side observation port 25 may miss defects due to the misalignment of the filament 12 tilt direction with the side observation port 25 (such as the filament 12 tilting to the side of the non-observation port). However, 2 to 4 side observation ports 25 spaced circumferentially can cover the entire circumference of the hollow cavity 22, ensuring that the fit between the filament 12 and the base plate 23 can be observed from any radial angle, thereby eliminating blind spots and improving the comprehensiveness of the inspection.

[0035] Continue to combine the diagram Figure 5 and Figure 6As shown, a bottom observation port 27 is provided on the base plate 23; the bottom observation port 27 is connected to the side observation port 25. The bottom observation port 27 is directly aligned with the contact area between the filament 12 and the base plate 23, allowing for a direct inspection of whether the two are fully fitted (e.g., whether there is a gap, whether the filament 12 is centered), thereby compensating for the shortcomings of the side observation port 25 in axial detail observation.

[0036] In this embodiment, the installation process of filament 12 is as follows: (1) First, calibrate the installation position of filament 12 using filament calibration fixture 20; (2) After unscrewing the filament calibration fixture 20, screw it in from the back of the cathode cap 14 until the positioning stop 151 and the positioning shoulder 141 are tightly fitted. (3) Screw the cathode cap into the mounting hole 111 of the cathode mounting plate 11. The cathode cap 14 is limited by the cathode sleeve 15. The final installation effect is as follows: Figure 6 As shown.

[0037] The filament calibration fixture 20, cathode cap 14, and cathode sheath 15 can effectively shorten the operation time for replacing the ion source filament 12 and cathode cap 14, while also effectively ensuring the relative position of the filament 12 and cathode cap 14 during installation, thus improving the maintenance efficiency of the ion source.

[0038] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0039] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0040] In the description of this specification, the references to terms such as "this embodiment," "an embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in a suitable manner in any at least one embodiment or example. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0041] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0042] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions and simple improvements made on the substantive content of the present utility model should be included within the protection scope of the present utility model.

Claims

1. An ion source cathode structure, characterized by, The device includes a cathode mounting plate (11) and a filament (12). The cathode mounting plate (11) has a mounting hole (111) at its upper end. A filament clip (13) is located near the mounting hole (111). The filament clip (13) is mounted on the front side of the cathode mounting plate (11). Filament clip adjusting screws (16) are inserted through the left and right ends of the filament clip (13). The filament (12) is fixed to the mounting hole (111) by the filament clip (13) and the filament clip adjusting screws (16). In 11), a cathode cap (14) and a cathode sleeve (15) are provided on the back side of the cathode mounting plate (11) corresponding to the mounting hole (111). The cathode cap (14) is sleeved on the outer periphery of the filament (12), and the cathode sleeve (15) is sleeved on the cathode cap (14). A positioning shoulder (141) is formed on the outer periphery of the cathode cap (14), and a positioning stop (151) corresponding to the positioning shoulder (141) is formed on the inner side wall of the cathode sleeve (15).

2. The ion source cathode structure according to claim 1, characterized in that, The positioning shoulder (141) extends circumferentially along the outer periphery of the cathode cap (14), and the positioning stop (151) extends circumferentially along the inner sidewall of the cathode sheath (15).

3. A filament calibration tool for installing the filament of claim 1, characterized by The fixture includes a tooling body (21), which has a hollow cavity (22) inside for accommodating the filament (12) and an opening at one end. The other end of the hollow cavity (22) is provided with a base plate (23) for fitting with the filament (12). The tooling body (21) has a positioning part (24) on the outer peripheral sidewall near the opening end, and a side observation port (25) is provided on the outer peripheral sidewall at the other end of the tooling body (21).

4. The filament alignment tool of claim 3, wherein, The tooling body (21) also has a mounting part (26) formed on the outer periphery of the opening end for connecting in the mounting hole (111).

5. The filament alignment tool of claim 3, wherein, The positioning part (24) has a ring-shaped structure.

6. The filament alignment tool of claim 3, wherein, The side observation port (25) is provided with 2 to 4 circumferentially spaced ports.

7. The filament alignment tool of claim 3, wherein, The bottom plate (23) has a bottom observation port (27).

8. The filament alignment tool of claim 7, wherein, The bottom observation port (27) is connected to the side observation port (25).

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