A wafer box

Abstract

This invention provides a wafer cassette, including a cassette body, a suction cup, a driving unit, and a detection mechanism. The cassette body has multiple slots arranged vertically at intervals, each slot housing the suction cup and the detection mechanism. The suction cup is connected to the driving unit and can rotate under the drive of the driving unit, with its rotation axis extending vertically. The driving unit is mounted on the cassette body. The detection mechanism is located on the outer periphery of the suction cup. The wafer cassette is used to store wafers. When storing the wafer, the wafer is adsorbed onto the suction cup and can rotate with the suction cup. The detection mechanism can identify the wafer's identification number and notch slot during rotation, thereby enabling wafer verification.

Description

Technical Field

[0001] This utility model belongs to the technical field of wafer manufacturing equipment, and specifically relates to a wafer box. Background Technology

[0002] During wafer manufacturing, wafers completed at each process stage are placed in slots within a wafer cassette. Each wafer in each slot requires verification to ensure its integrity. This verification includes checking that the wafer identification number matches the corresponding standard identification number and inspecting the notch slots on the wafer's edge for proper functioning. If a wafer has a problem, such as an inconsistent identification number or a faulty notch slot, subsequent production may be disrupted. Currently, most wafer cassettes only store wafers and cannot automatically identify wafer identification numbers or notch slots, thus hindering automated wafer verification. Utility Model Content

[0003] The purpose of this invention is to provide a wafer cassette that addresses the aforementioned problems.

[0004] To achieve the above objectives, this utility model provides a wafer cassette, including a cassette body, a suction cup, a driving unit, and a detection mechanism; the cassette body has a plurality of slots arranged at intervals along the vertical direction, and each slot is provided with the suction cup and the detection mechanism; the suction cup is connected to the driving unit and can rotate under the drive of the driving unit, and the rotation axis of the suction cup extends along the vertical direction; the driving unit is disposed on the cassette body; the detection mechanism is disposed on the outer periphery of the suction cup.

[0005] Optionally, the detection mechanism includes a first detection element and a second detection element, the first detection element and the second detection element being different and arranged separately.

[0006] Optionally, the drive unit is also communicatively connected to the detection mechanism.

[0007] Optionally, the wafer cassette further includes a wireless communication module, which is disposed on the cassette body; the testing mechanism communicates with external mechanisms through the wireless communication module.

[0008] Optionally, the wafer cassette further includes a display mechanism disposed on the cassette body and located outside the slot.

[0009] Optionally, the display mechanism includes multiple indicator lights, each of which corresponds to one of the multiple card slots, and the indicator lights communicate with the external mechanism through the wireless communication module.

[0010] Optionally, the display mechanism may further include a display screen.

[0011] Optionally, the suction cup is a negative pressure suction cup.

[0012] Optionally, the suction cup includes a suction cup base and a suction cup body. The suction cup base is connected to the driving unit. The suction cup base is provided with a first gas flow channel. The suction cup body is disposed at the upper end of the suction cup base. The suction cup body is provided with a plurality of air holes, which communicate with the first gas flow channel.

[0013] Optionally, the housing is provided with a second gas flow channel, which is connected to the first gas flow channel.

[0014] Compared with the prior art, the wafer cassette of this invention has the following advantages:

[0015] The aforementioned wafer cassette includes a cassette body, a suction cup, a driving unit, and a detection mechanism. The cassette body has multiple slots arranged vertically at intervals, each slot housing the suction cup and the detection mechanism. The suction cup is connected to the driving unit and can rotate under the drive of the driving unit, with its rotation axis extending vertically. The driving unit is mounted on the cassette body. The detection mechanism is located on the outer periphery of the suction cup. The wafer cassette is used to store wafers. When storing the wafer, the wafer is supported on the suction cup and can rotate with the suction cup. The detection mechanism can identify the wafer's identification number and notch slot during rotation, thereby enabling wafer verification.

[0016] Furthermore, after confirming that the wafer is normal, the drive unit continues to drive the suction cup to rotate, so as to adjust the storage position of the wafer to a preset position, so that all the wafers stored in the wafer cassette are in the same position. Attached Figure Description

[0017] The accompanying drawings are provided to better understand this utility model and do not constitute an undue limitation thereof. Wherein:

[0018] Figure 1 This is a schematic diagram of the structure of a wafer cassette according to an embodiment of the present invention;

[0019] Figure 2 This is a partial structural schematic diagram of a wafer cassette provided according to an embodiment of the present invention;

[0020] Figure 3 This is a partial cross-sectional view of a wafer cassette provided according to an embodiment of the present invention.

[0021] [The following are explanations of the reference numerals in the attached drawings]: 10-Wafer box, 110-Box body, 111-Outer shell, 112-Separator, 1101-Slot, 1102-Second gas flow channel, 120-Suction cup, 121-Suction cup base, 1211-First gas flow channel, 122-Suction cup body, 1221-Air hole, 130-Detection mechanism, 131-First detection element, 132-Second detection element, 140-Display mechanism, 141-Indicator light, 142-Display screen, 20-Wafer, 21-Identification number, 22-Notch slot. Detailed Implementation

[0022] The following specific examples illustrate the implementation of this utility model. Those skilled in the art can easily understand other advantages and effects of this utility model from the content disclosed in this specification. This utility model can also be implemented or applied through other different specific embodiments, and various details in this specification can be modified or changed based on different viewpoints and applications without departing from the spirit of this utility model. It should be noted that the illustrations provided in this embodiment are only schematic representations of the basic concept of this utility model. Therefore, the drawings only show components related to this utility model and are not drawn according to the actual number, shape, and size of the components in implementation. In actual implementation, the type, quantity, and proportion of each component can be arbitrarily changed, and the component layout may also be more complex.

[0023] Furthermore, while each embodiment described below possesses one or more technical features, this does not imply that users of this utility model must simultaneously implement all technical features in any embodiment, or can only separately implement some or all technical features in different embodiments. In other words, provided it is feasible, those skilled in the art can selectively implement some or all technical features in any embodiment, or selectively implement a combination of some or all technical features in multiple embodiments, based on the disclosure of this utility model and depending on design specifications or implementation requirements, thereby increasing the flexibility in implementing this utility model.

[0024] As used herein, the singular forms “a,” “an,” and “the” include plural objects, and the plural form “multiple” includes two or more objects, unless otherwise expressly indicated. As used herein, the term “or” is generally used to include the meaning of “and / or,” unless otherwise expressly indicated, and the terms “installed,” “connected,” and “linked” should be interpreted broadly, for example, as a fixed connection, a detachable connection, or an integral connection. Connections can be mechanical or electrical. Connections can be direct or indirect through an intermediate medium, and can be internal communication between two elements or an interaction between two elements. Relational terms such as “first,” “second,” etc., are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations, nor do they indicate or imply relative importance or implicitly specify the number of indicated technical features. It should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "axial," "radial," and "circumferential," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description. They do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. For those skilled in the art, the specific meaning of the above terms in this utility model can be understood according to the specific circumstances.

[0025] To make the objectives, advantages, and features of this utility model clearer, the following detailed description is provided in conjunction with the accompanying drawings. It should be noted that the drawings are all in a very simplified form and use non-precise proportions, and are only used to conveniently and clearly illustrate the objectives of the embodiments of this utility model. The same or similar reference numerals in the drawings represent the same or similar parts.

[0026] Figure 1 This is a schematic diagram of the structure of the wafer cassette 10 provided in some embodiments of this utility model. Figure 2 This is a partial structural schematic diagram of the wafer cassette 10. Figure 3 This is a partial cross-sectional view of the wafer cassette 10. (See attached image.) Figures 1 to 3As shown, the wafer cassette 10 includes a housing 110, a suction cup 120, a driving unit (not shown), and a detection mechanism 130. The housing 110 has a plurality of slots 1101 arranged at intervals along a vertical direction. Each slot 1101 houses the suction cup 120 and the detection mechanism 130. The suction cup 120 is connected to the driving unit and configured to rotate under the drive of the driving unit, with its rotation axis extending vertically. The driving unit is located on the housing 110. The detection mechanism 130 is located on the outer periphery of the suction cup 120.

[0027] like Figure 2 and Figure 3 As shown, the wafer cassette 10 is used to store the wafer 20. When the wafer 20 is stored in the wafer cassette 10, the wafer 20 is adsorbed onto the suction cup 120. The detection mechanism 130 is configured to identify the identification number 21 on the wafer 20, and the grooves on the edge of the wafer 20, including notch grooves 22, and other types of grooves, such as unwanted defect grooves.

[0028] The operation of storing the wafer 20 using the wafer cassette 10 is as follows:

[0029] First, the wafer 20 is fed into the slot 1101, and the suction cup 120 is used to pick up the wafer 20.

[0030] Then, the drive unit drives the suction cup 120 to rotate, thereby rotating the wafer 20. When the wafer 20 rotates until the identification number 21 on it reaches the position of the detection mechanism 130, the detection mechanism 130 identifies the identification number 21. And when the wafer 20 rotates until the slot on it reaches the position of the detection mechanism 130, the detection mechanism 130 identifies the slot.

[0031] After the detection mechanism 130 identifies the identification number 21 and the slot, those skilled in the art can verify the identification number 21 and the slot on the wafer 20 using any suitable method. That is, the wafer cassette 10 has the function of identifying the identification number 21 and the slot on the wafer 20.

[0032] Checking the identification number 21 of the wafer 20 means comparing the identified identification number 21 with the predetermined standard identification number of the corresponding slot 1101 to determine whether the two are consistent. If they are consistent, it indicates that the wafer 20 is stored in the correct position; otherwise, it indicates that the wafer 20 is in the wrong position.

[0033] Generally, only notch slots 22 are provided on the edge of the wafer 20, and no other types of slots are provided. The number and position of the notch slots 22 are fixed. Checking the slots on the wafer 20 refers to checking whether the slots on the edge of the wafer 20 are notch slots 22, and whether the shape and size of the notch slots 22 are acceptable. If the slot is a notch slot 22, and the shape and size of the notch slot 22 are acceptable, then the slot is normal. If there are cases where the slot is not a notch slot 22, or the shape of the notch slot 22 is unacceptable, or the size of the notch slot 22 is unacceptable, then the slot is abnormal. A specific checking process for the slots is to first determine whether the number and position of the identified slots are consistent with the set number and position of the notch slots 22. If so, then the identified slots are determined to be notch slots 22, and then the shape and size of the notch slots 22 are checked for compliance.

[0034] It is easy to understand that after the suction cup 120 adsorbs the wafer 20, the driving unit drives the suction cup 120 to rotate 360°, so that the wafer 20 rotates 360°, to ensure that the detection mechanism 130 can identify the identification number 21 and identify all the grooves on the entire edge of the wafer 20.

[0035] In some examples, the drive unit stops driving the suction cup 120 to rotate when the suction cup 120 rotates 360°.

[0036] In other examples, it is desirable for wafers stored in the same wafer cassette to have the same orientation so that they are in a roughly uniform state when proceeding to the next step. In these examples, after the chuck 120 rotates 360° and confirms that the wafer 20 is in the correct orientation, the drive unit continues to drive the chuck 120 to rotate until the wafer 20 is in a preset orientation, thereby ensuring that all wafers 21 stored in the wafer cassette 10 are in the same orientation. That is, the wafer cassette 10 also has the function of adjusting the orientation of the wafer 20. Here, "the wafer 20 is in the correct orientation" means that the wafer 20 is stored in the correct position and that the slots on the wafer 20 are normal.

[0037] When the wafer cassette 10 has the function of adjusting the placement orientation of the wafer 20, the driving unit drives the suction cup 120, which holds the wafer 20, to rotate by an angle of 360° + α. The specific value of α can be determined based on the position of the notch groove 22 on the wafer 20 and the preset placement orientation. The position of the notch groove 22 on the wafer 20 can be obtained based on the recognition result of the detection mechanism 30. Thus, the driving unit is also communicatively connected to the detection mechanism 130 to obtain the position of the notch groove 22 on the wafer 20, and thereby obtain the specific value of α.

[0038] It should be understood that the drive unit includes a drive unit controller and a drive unit body that are connected in communication. The drive unit body is connected to the suction cup 120. The drive unit controller controls the drive unit body to provide driving force to the suction cup 120. Here, the communication connection between the drive unit and the detection mechanism 130 refers to the communication connection between the drive unit controller and the detection mechanism 130.

[0039] The wafer cassette 10 will be described in further detail below.

[0040] Please return to the reference. Figure 1 The box body 110 includes an outer shell 111 and partitions 112. The outer shell 111 has an inner cavity (not shown in the figure). The partitions 112 are disposed in the inner cavity and divide the inner cavity into a plurality of slots 1101 arranged in a vertical direction. Generally, there are multiple partitions 112, which are spaced apart in the inner cavity in a vertical direction.

[0041] The suction cup 120 can be a negative pressure suction cup. Thus, refer to... Figure 3 The suction cup 120 may include a suction cup base 121 and a suction cup body 122. The suction cup base 121 is rotatably mounted on the housing 110 and connected to the driving unit, and can rotate under the drive of the driving unit. The suction cup base 121 is provided with a first gas flow channel 1211. The suction cup body 122 is disposed at the upper end of the suction cup base 121, and the suction cup body 122 is provided with a plurality of air holes 1221, all of which are connected to the first gas flow channel 1211. During operation, the first gas flow channel 1211 is connected to an external suction device. When the suction device is working, a negative pressure is formed at the air holes 1221 so that the suction cup 120 can adsorb the wafer 20.

[0042] Optionally, the housing 110 is provided with a second gas flow channel 1102, which is connected to all the first gas flow channels 1211, so that all the suction cups 120 can share one suction device.

[0043] Certainly, in other examples, the suction chuck 120 may also be an electrostatic chuck.

[0044] The driving part can be arranged in the inner cavity, or can be partially arranged outside the inner cavity. Optionally, the driving part comprises a plurality of sub-driving parts, the plurality of sub-driving parts correspond to the plurality of clamping grooves 1101 one by one, and each sub-driving part is connected with the suction chuck 121 in the corresponding clamping groove 1101. Each of the sub-driving parts comprises the driving part controller and the driving part body. In the embodiment of the present utility model, the driving part includes but is not limited to a motor.

[0045] The detection mechanism 130 comprises a first detection element 131 and a second detection element 132, and the functions of the first detection element 131 and the second detection element 132 are different. Wherein, the first detection element 131 is configured to identify the identification number 21 of the wafer 20, and the second detection element 132 is configured to identify the notch at the edge of the wafer 20. The first detection element 131 and the second detection element 132 of the same detection mechanism 130 are dispersedly arranged in the same clamping groove 1101 and do not interfere with each other.

[0046] The meaning of the above description "when the wafer 20 rotates until the identification number 21 thereon reaches the position where the detection mechanism 130 is located, the detection mechanism 130 identifies the identification number 21" is that when the wafer 20 rotates until the identification number 21 thereon reaches the position where the first detection element 131 is located, the first detection element 131 identifies the identification number 21. It can be understood that when the wafer 20 is adsorbed on the suction chuck 120, the surface of the wafer 20 provided with the identification number 21 is arranged facing the first detection element 131. For example, when the first detection element 131 is arranged on the bottom wall of the clamping groove 1101, the surface of the wafer 20 adsorbed on the suction chuck 120 provided with the identification number 21 is arranged downward.

[0047] Similarly, the meaning of the above description "when the wafer 20 rotates until the notch thereon reaches the position where the detection mechanism 130 is located, the detection mechanism 130 identifies the notch" is that when the wafer 20 rotates until the notch reaches the position where the second detection element 132 is located, the second detection element 132 identifies the notch. In addition, when the specific value of α is determined according to the position of the notch 22 on the wafer 20 and the preset placement orientation, that the driving part is in communication connection with the detection mechanism 130 means that the driving part is in communication connection with the second detection element 132.

[0048] Furthermore, this embodiment of the invention does not particularly limit the construction of the first detection element 131 and the second detection element 132, as long as the first detection element 131 can identify the identification number 21 and the second detection element 132 can identify the notch slot 22. In practice, any suitable device in the prior art capable of identifying the identification number 21 can be used as the first detection element 131, and any suitable device in the prior art capable of identifying the notch slot 22 can be used as the second detection element 132.

[0049] In an optional embodiment, the wafer cassette 10 further includes a wireless communication module (not shown in the figure), which is disposed on the cassette body 110. The detection mechanism 130 interacts with external devices, such as the control system of a wafer fab, through the wireless communication module to verify the identification number 21 and the slot.

[0050] Preferably, the wafer cassette 10 further includes a display mechanism 140, which is disposed on the cassette body 110 and located outside the slot 1101. In a non-limiting example, the display mechanism 140 includes a plurality of indicator lights 141, each of which corresponds one-to-one with a plurality of card slots 1101 and communicates with an external mechanism via the wireless communication module. Each indicator light 141 is configured to display the status of the wafer 20 in the corresponding card slot 1101. For example, each indicator light 141 can display a different color, with different colors representing different states of the wafer 20 in the corresponding card slot 1101. For example, it may display green when the identification number 21 of the wafer 20 in the corresponding card slot 1101 matches the corresponding standard identification number, red when the identification number 21 of the wafer 20 in the corresponding card slot 1101 does not match the corresponding standard identification number, and yellow when the notch slot 22 of the wafer 20 in the corresponding card slot 1101 is abnormal, etc., as specifically set according to needs. In another non-limiting example, the display mechanism 140 includes a display screen 142, which can be used, for example, to display preset orientation information of the wafer 20 within the wafer cassette 10. Of course, the display mechanism 140 may simultaneously include the indicator light 141 and the display screen 142.

[0051] While the present invention has been disclosed above, it is not limited thereto. Those skilled in the art can make various modifications and variations to the present invention without departing from its spirit and scope. Therefore, if such modifications and variations fall within the scope of the claims of the present invention and their equivalents, the present invention also intends to include such modifications and variations.

Claims

1. A wafer cassette, characterized by, The device includes a housing, a suction cup, a driving unit, and a detection mechanism. The housing has multiple slots arranged at intervals along a vertical direction, each slot housing both the suction cup and the detection mechanism. The suction cup is connected to the driving unit and can rotate under its own power; the axis of rotation of the suction cup extends vertically. The driving unit is mounted on the housing. The detection mechanism is located on the outer periphery of the suction cup.

2. The wafer cassette of claim 1, wherein, The detection mechanism includes a first detection element and a second detection element, the first detection element and the second detection element are different, and the first detection element and the second detection element are arranged separately.

3. The wafer cassette of claim 1, wherein, The drive unit is also communicatively connected to the detection mechanism.

4. The wafer cassette of claim 1, wherein, The wafer cassette also includes a wireless communication module, which is mounted on the cassette body; the testing mechanism communicates with external mechanisms through the wireless communication module.

5. The wafer cassette of claim 4, wherein, The wafer cassette also includes a display mechanism, which is disposed on the cassette body and located outside the slot.

6. The wafer cassette of claim 5, wherein, The display mechanism includes multiple indicator lights, each of which corresponds to one of the multiple card slots. The indicator lights communicate with the external mechanism through the wireless communication module.

7. The wafer cassette of claim 5, wherein, The display mechanism also includes a display screen.

8. The wafer cassette of claim 1, wherein, The suction cup is a negative pressure suction cup.

9. The wafer cassette of claim 8, wherein, The suction cup includes a suction cup base and a suction cup body. The suction cup base is connected to the driving unit. The suction cup base is provided with a first gas flow channel. The suction cup body is disposed at the upper end of the suction cup base. The suction cup body is provided with a plurality of air holes, which are connected to the first gas flow channel.

10. The wafer cassette of claim 9, wherein, The box body is provided with a second gas flow channel, which is connected to the first gas flow channel.

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