A clamping jig

Abstract

This utility model relates to the field of semiconductor manufacturing technology and discloses a clamping fixture, which includes multiple clamping components. Each clamping component includes a clamping part, a guiding part, and a sliding part. The guiding part is connected to one end of the clamping part. The clamping part has a through receiving hole, and the end of the receiving hole away from the guiding part is open. The wall of the receiving hole has a clamping groove suitable for inserting a substrate. The guiding part has a first end and a second end opposite to each other. The first end has a guiding groove, and the sliding part is connected to the second end. In two adjacent clamping components, the sliding part of one clamping component is slidably connected to the guiding groove of the other clamping component. The clamping fixture provided by this utility model, by setting a guiding groove at the first end of the clamping component and connecting a sliding part at the second end, can not only meet the operational needs in different scenarios, but also facilitate storage, portability, and deployment, and help improve production efficiency.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and in particular to a clamping fixture. Background Technology

[0002] In semiconductor manufacturing processes, the substrate, as the initial substrate and main carrier for semiconductor chip growth, is usually a large-size single-crystal wafer. Its surface undergoes precision grinding to achieve extremely high flatness and cleanliness, which is the basis for subsequent key processes such as thin film deposition, photolithography, and etching. During production, inspection, and transfer, in order to ensure that the substrate is not scratched, contaminated, or damaged, it is usually necessary to fix it in a special fixture for operation.

[0003] In existing technologies, the clamping and inspection of substrate wafers mostly adopt single or fixed arrangement of fixture structures. Operators need to load, position and inspect each wafer one by one, which results in low loading and unloading efficiency and frequent manual intervention. Especially in application scenarios that require continuous inspection of multiple substrate wafers, frequent loading and unloading operations reduce production efficiency. Utility Model Content

[0004] With the aim of at least solving one of the technical problems existing in the prior art, this utility model aims to provide a clamping fixture that helps to improve production efficiency.

[0005] To achieve the above objectives, this utility model provides a clamping fixture having mutually perpendicular first, second, and third directions. The clamping fixture includes multiple clamping components. The multiple clamping components are arranged along the first direction. Each clamping component includes a clamping portion, a guiding portion, and a sliding portion. The guiding portion is connected to one end of the clamping portion in the third direction. The clamping portion has a receiving hole extending through the first direction. The receiving hole is open at the end in the third direction away from the guiding portion. The wall of the receiving hole has a clamping groove suitable for inserting the substrate. The guiding portion has a first end and a second end opposite each other in the first direction. The first end has a guide groove extending along the second direction, and the sliding portion is connected to the second end. Along the first direction, in two adjacent clamping components, the sliding portion of one clamping component is slidably connected to the guide groove of the other clamping component.

[0006] In some embodiments, the wall of the receiving hole includes a first sidewall and a second sidewall, the first sidewall and the second sidewall being spaced apart and disposed opposite to each other along the second direction, and both the first sidewall and the second sidewall being provided with the clamping groove.

[0007] In some embodiments, the wall of the receiving hole further includes a first support wall and a second support wall, the first support wall being connected to one end of the first sidewall near the guide portion and adapted to support the substrate, and the second support wall being connected to one end of the second sidewall near the guide portion and adapted to support the substrate.

[0008] In some embodiments, the first support wall has a first support groove suitable for embedding the substrate, and the second support wall has a second support groove suitable for embedding the substrate.

[0009] In some embodiments, the guide groove has a first limiting wall and a second limiting wall, the first limiting wall and the second limiting wall being spaced apart and disposed opposite to each other in the second direction.

[0010] In some embodiments, the guide portion has a positioning groove communicating with the guide groove at one end in the third direction; the sliding portion includes a sliding block and a positioning block, one end of the sliding block is connected to the second end, and the positioning block is connected to the end of the sliding block away from the second end in the first direction, at least a portion of the sliding block is located in the guide groove, and at least a portion of the positioning block is located in the positioning groove.

[0011] In some embodiments, the guide portion includes a base plate, a first limiting plate, a second limiting plate, a side plate, and a positioning plate. The base plate is connected to the first limiting plate and the second limiting plate at opposite ends in the second direction, respectively. The side plate is connected to one end of the base plate in the first direction. The positioning plate is located on one side of the base plate in the third direction, and the positioning plate is connected to the first limiting plate and the second limiting plate at opposite ends in the second direction, respectively. The base plate, the first limiting plate, the positioning plate, the second limiting plate, and the positioning plate together form the guide groove. A first limiting wall is disposed on the first limiting plate, and a second limiting wall is disposed on the second limiting plate. One end of the sliding block is connected to the side plate. The base plate, the first limiting plate, the side plate, the second limiting plate, and the positioning plate together form the positioning groove. The positioning block and the side plate are spaced apart and opposite to each other along the first direction. The positioning block, the sliding block, and the side plate together form a limiting groove, and at least a portion of the positioning plate is located within the limiting groove.

[0012] In some embodiments, the clamping part is inserted into the positioning groove at one end facing the third direction, and both the base plate and the side plate are connected to the clamping part.

[0013] In some embodiments, the clamping part is provided with a weight-reducing groove.

[0014] In some embodiments, the clamping part is provided with a weight reduction hole extending through the first direction.

[0015] The advantages of the present invention compared with the prior art of clamping fixtures are as follows: (1) By setting the accommodating hole as an open end in the third direction; when it is necessary to assemble the substrate onto the clamping component, the substrate can be inserted into the accommodating hole through the open end of the accommodating hole and locked into the clamping groove to complete the loading and positioning of the substrate in the accommodating hole. After the substrate is inserted, it is supported by the hole wall set in the accommodating hole and limited by the clamping groove to ensure that the substrate remains stable during the transfer or inspection process; when it is necessary to remove the substrate from the clamping component, the substrate can be removed from the accommodating hole through the open end of the accommodating hole and detached from the clamping groove to complete the removal and detachment of the substrate from the clamping component; therefore, by setting the accommodating hole with an open end, the substrate can be directly loaded into or removed from the clamping groove from the open end without installation from the side of the clamping component or other restricted directions, which simplifies the operation process of loading and unloading the substrate and improves the operation efficiency, especially suitable for inspection or process scenarios with frequent loading and unloading.

[0016] (2) Since the two adjacent clamping parts are connected by sliding parts and guide grooves, one of the clamping parts can be slid along the second direction to achieve orderly unfolding and orderly folding between the two adjacent clamping parts; thus, the orderly unfolding and orderly folding between multiple clamping parts can be achieved, so that the clamping fixture can compactly fold multiple clamping parts together when not in use, occupying little space; when the clamping fixture is needed, it can unfold multiple clamping parts in an orderly manner to meet the operational needs of different scenarios, which is convenient for storage, carrying and deployment.

[0017] (3) In the unfolded or retracted state of the clamping fixture, multiple substrates can be pre-inserted from the open ends of the multiple clamping parts receiving holes and positioned in the clamping grooves on the hole walls to complete the one-time batch loading of multiple substrates. Since the two adjacent clamping parts are connected by sliding connection, during the detection process, it is possible to either unfold the corresponding clamping part to enter the detection optical path or probe area and detect multiple substrates in sequence, so as to avoid the repeated loading and unloading operation for each substrate to be detected, which helps to improve production efficiency; or it is possible to select multiple clamping parts to move in the second direction in sequence, and then move the clamping parts of the clamping fixture in sequence to enter the detection optical path or probe area to realize the continuous detection of multiple substrates, so as to avoid the repeated loading and unloading operation for each substrate to be detected, which helps to improve production efficiency. Attached Figure Description

[0018] Figure 1This is a schematic diagram of the structure of a clamping fixture when it is retracted, according to an embodiment of this utility model; Figure 2 This is a schematic diagram of the structure of a clamping fixture when unfolded according to an embodiment of the present invention; Figure 3 This is a schematic diagram of a clamping fixture with a substrate sheet provided in an embodiment of the present invention; Figure 4 This is a schematic diagram of the clamping component provided in an embodiment of the present invention from a first-view perspective; Figure 5 This is a schematic diagram of the clamping component provided in an embodiment of the present invention from a second perspective; Figure 6 This is a schematic diagram of the structure of the guide portion provided in an embodiment of the present utility model; Figure 7 This is a side view of the guide portion and sliding portion provided in an embodiment of the present utility model; Figure 8 This is a schematic diagram of the connection between the two clamping components provided in this embodiment of the utility model.

[0019] In the diagram, 100 represents the clamping fixture. 1. Clamping components; 11. Clamping part; 111. Receiving hole; 112. Weight reduction groove; 113. Weight reduction hole; 1111. First side wall; 1112. Second side wall; 1113. First support wall; 1114. Second support wall; 11111. Clamping groove; 11131. First support groove; 11141. Second support groove; 12. Guide section; 121. Base plate; 122. First limiting plate; 123. Second limiting plate; 124. Side plate; 125. Positioning plate; 1201. First end; 1202. Second end; 1203. Guide groove; 1204. Positioning groove; 1221. First limiting wall; 1231. Second limiting wall; 13. Sliding part; 131. Sliding block; 132. Positioning block; 1301. Limiting groove; 200. Substrate; X, first direction; Y, second direction; Z, third direction. Detailed Implementation

[0020] The specific embodiments of this utility model will be described in further detail below with reference to the accompanying drawings and examples. The following examples are used to illustrate this utility model, but are not intended to limit its scope.

[0021] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0022] The terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature.

[0023] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0024] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0025] Unless otherwise defined, all technical and scientific terms used in this application have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains; the terminology used in the description of this application is for the purpose of describing particular embodiments only and is not intended to limit the application; the terms "comprising" and "having" and any variations thereof in the description, claims and foregoing drawings of this application are intended to cover non-exclusive inclusion.

[0026] In this application, the reference to "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places in the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment that is mutually exclusive with other embodiments.

[0027] like Figures 1 to 8 As shown, a preferred embodiment of the present invention provides a clamping fixture 100 having a first direction X, a second direction Y, and a third direction Z that are perpendicular to each other. The clamping fixture 100 includes a plurality of clamping components 1.

[0028] Multiple clamping parts 1 are arranged along a first direction X. Each clamping part 1 includes a clamping portion 11, a guide portion 12, and a sliding portion 13. The guide portion 12 is connected to one end of the clamping portion 11 in a third direction Z. The clamping portion 11 has a receiving hole 111 extending along the first direction X. The receiving hole 111 is open at the end in the third direction Z away from the guide portion 12. The hole wall of the receiving hole 111 has a clamping groove 11111 suitable for inserting a substrate 200. The guide portion 12 has a first end 1201 and a second end 1202 opposite each other in the first direction X. The first end 1201 has a guide groove 1203 extending along the second direction Y. The sliding portion 13 is connected to the second end 1202. Along the first direction X, in two adjacent clamping parts 1, the sliding portion 13 of one clamping part 1 is slidably connected to the guide groove 1203 of the other clamping part 1.

[0029] Based on this technical solution, by making the Z-direction end of the receiving hole 111 open, when the substrate 200 needs to be assembled onto the clamping component 1, the substrate 200 can be inserted into the receiving hole 111 through the open end of the receiving hole 111 and locked into the clamping groove 11111, thereby completing the insertion and positioning of the substrate 200 in the receiving hole 111. After insertion, the substrate 200 is supported by the hole wall of the receiving hole 111 and limited by the clamping groove 11111, ensuring that the substrate 200 remains stable during transportation or testing. When removed from the clamping member 1, the substrate 200 can exit the receiving hole 111 through the open end of the receiving hole 111 and disengage from the clamping groove 11111, thereby completing the removal and take-off of the substrate 200 from the clamping member 1. Therefore, by providing a receiving hole 111 with an open end, the present invention allows the substrate 200 to be directly loaded into or removed from the clamping groove 11111 from the open end, without the need for installation from the side of the clamping member 1 or other restricted directions. This simplifies the operation process of loading and unloading the substrate 200, improves the operation efficiency, and is especially suitable for testing or process scenarios with frequent loading and unloading.

[0030] Since the two adjacent clamping parts 1 are slidably connected by the sliding part 13 and the guide groove 1203, the orderly unfolding and orderly folding of the two adjacent clamping parts 1 can be achieved by sliding one of the clamping parts 1 along the second direction Y. Thus, the orderly unfolding and orderly folding of multiple clamping parts 1 can be achieved. This allows the clamping fixture 100 to compactly fold up multiple clamping parts 1 when not in use, occupying little space. When the clamping fixture 100 is needed, it can be unfolded in an orderly manner to meet the operational needs of different scenarios. It is convenient for storage, carrying and deployment.

[0031] In the unfolded or retracted state of the clamping fixture 100, multiple substrate sheets 200 can be pre-inserted from the open ends of the receiving holes 111 of multiple clamping members 1 and positioned in the clamping grooves 11111 on the wall of the receiving holes 111, thus completing the one-time batch loading of multiple substrate sheets 200. Since the two adjacent clamping members 1 are connected by a sliding connection, during the inspection process, it is possible to either unfold the corresponding clamping member 1 to enter the detection optical path or probe area, thereby sequentially inspecting multiple substrate sheets 200, thus avoiding the repeated loading and unloading operation for each substrate sheet 200 inspected, which helps to improve production efficiency; or it is possible to sequentially move multiple clamping members 1 along the second direction Y, and then move them by translation to sequentially enter the detection optical path or probe area of ​​the clamping fixture 100, thereby achieving continuous inspection of multiple substrate sheets 200, thus avoiding the repeated loading and unloading operation for each substrate sheet 200 inspected, which helps to improve production efficiency.

[0032] In this embodiment, the number of clamping components 1 is six.

[0033] In some other embodiments, the number of clamping parts 1 can also be any number, such as two, three, four, five, seven, eight, nine, etc.

[0034] The sliding part 13 can be integrally formed on one end of the clamping part 1 in the third direction Z, or it can be fixedly connected to one end of the clamping part 1 in the third direction Z by welding, screw connection, pin connection, riveting or other methods.

[0035] The sliding part 13 can be integrally formed on the second end 1202 of the guide part 12, or it can be fixedly connected to the second end 1202 of the guide part 12 by means of welding, screw connection, pin connection, riveting, etc.

[0036] See 4 to Figure 5 The clamping part 11 is provided with a weight-reducing groove 112. The weight-reducing groove 112 can reasonably remove redundant material, reducing the amount of raw materials used and processing costs. While reducing the material, the overall weight of the clamping part 11 is reduced, making it easier and more flexible to unfold or retract multiple clamping parts 1 in conjunction.

[0037] The clamping part 11 is provided with a weight-reduction hole 113 extending through the first direction X. The weight-reduction hole 113 can effectively remove redundant material, reducing the amount of raw materials used and processing costs. While reducing material, the overall weight of the clamping part 11 is reduced, making it easier and more flexible to unfold or retract multiple clamping parts 1 in conjunction.

[0038] In this embodiment, the weight reduction hole 113 is provided through the bottom of the weight reduction groove 112.

[0039] The wall of the receiving hole 111 includes a first side wall 1111 and a second side wall 1112. The first side wall 1111 and the second side wall 1112 are spaced apart and arranged opposite each other along the second direction Y. Both the first side wall 1111 and the second side wall 1112 are provided with a clamping groove 11111.

[0040] By providing clamping grooves 11111 on both the first sidewall 1111 and the second sidewall 1112, after the substrate 200 is inserted into the receiving hole 111, the two sides of the substrate 200 along the second direction Y are simultaneously limited and supported by the two clamping grooves 11111, forming a symmetrical clamping structure. This prevents the substrate 200 from tilting, shifting or falling off due to unilateral force during transmission or detection, and significantly improves the stability and safety of clamping.

[0041] The two clamping slots 11111 apply a balanced constraint force to the substrate 200, making it easier to keep the center position of the substrate 200 consistent after clamping. Especially in the process of continuous inspection of multiple substrates, it can ensure that the positioning deviation of each substrate in spatial coordinates is minimized, which is beneficial to improving the accuracy and data consistency of subsequent inspections (such as optical alignment and surface defect scanning).

[0042] The wall of the receiving hole 111 also includes a first support wall 1113 and a second support wall 1114. The first support wall 1113 is connected to one end of the first side wall 1111 near the guide portion 12 and is adapted to support the substrate 200. The second support wall 1114 is connected to one end of the second side wall 1112 near the guide portion 12 and is adapted to support the substrate 200.

[0043] By setting the first support wall 1113 and the second support wall 1114, they can work in conjunction with the clamping grooves 11111 of the first chuck and the second side wall 1112 to form a multi-point limiting structure with double-sided clamping and bottom support. After the substrate 200 is inserted into the receiving hole 111, the two sides of the substrate 200 are positioned by the clamping grooves 11111, and the bottom is supported by the support wall, preventing the substrate 200 from sinking, tilting or shaking under the action of gravity or external force, which greatly improves the overall stability of the clamping.

[0044] The first support wall 1113 is provided with a first support groove 11131 suitable for embedding the substrate 200, and the second support wall 1114 is provided with a second support groove 11141 suitable for embedding the substrate 200.

[0045] By setting the first support groove 11131 and the second support groove 11141, the bottom edge of the substrate 200 can be partially embedded in the support groove during insertion. The support groove plays an embedded covering role for the edge of the substrate 200. The support groove can provide the substrate 200 with additional anti-pull-out and anti-shaking capabilities, preventing the substrate 200 from loosening or slipping out of the clamping slot 11111 due to external disturbances, thus improving operational safety.

[0046] In this embodiment, the substrate 200 is a circular substrate 200, the bottom wall of the first support groove 11131 is an arc-shaped structure adapted to the edge of the circular substrate 200, and the bottom wall of the second support groove 11141 is an arc-shaped structure adapted to the edge of the circular substrate 200.

[0047] See Figures 4 to 8 The guide groove 1203 has a first limiting wall 1221 and a second limiting wall 1231, which are spaced apart and arranged opposite to each other in the second direction Y.

[0048] The first limiting wall 1221 and the second limiting wall 1231 are arranged opposite to each other in the second direction Y to form symmetrical lateral limiting walls, which restrict the sliding part 13 when it slides along the guide groove 1203 and prevent the sliding part 13 from falling out of the guide groove 1203.

[0049] The guide portion 12 has a positioning groove 1204 at one end in the third direction Z that communicates with the guide groove 1203; the sliding portion 13 includes a sliding block 131 and a positioning block 132. One end of the sliding block 131 is connected to the second end 1202, and the positioning block 132 is connected to the end of the sliding block 131 away from the second end 1202 in the first direction X. At least a portion of the sliding block 131 is located in the guide groove 1203, and at least a portion of the positioning block 132 is located in the positioning groove 1204.

[0050] At least a portion of the sliding block 131 is located within the guide groove 1203, so that the sliding block 131 is constrained by the first limiting wall 1221 and the second limiting wall 1231, thereby achieving smooth sliding along the second direction Y. At the same time, the positioning block 132 is embedded in the positioning groove 1204 of the guide part 12, forming a spatial limit in the first direction X and the third direction Z, which can prevent the sliding part 13 from falling out of the guide groove 1203 during movement, thereby improving the connection stability and reliability between the guide part 12 and the sliding part 13.

[0051] See Figures 6 to 8The guide portion 12 includes a base plate 121, a first limiting plate 122, a second limiting plate 123, a side plate 124, and a positioning plate 125. The base plate 121 is connected to the first limiting plate 122 and the second limiting plate 123 at opposite ends in the second direction Y. The side plate 124 is connected to one end of the base plate 121 in the first direction X. The positioning plate 125 is located on one side of the base plate 121 in the third direction Z. The positioning plate 125 is connected to the first limiting plate 122 and the second limiting plate 123 at opposite ends in the second direction Y. The bottom plate 121, the first limiting plate 122, the side plate 124, the second limiting plate 123, and the positioning plate 125 together form a guide groove 1203. The bottom plate 121, the first limiting plate 122, the side plate 124, the second limiting plate 123, and the positioning plate 125 together form a positioning groove 1204. The positioning block 132 and the side plate 124 are spaced apart and opposite to each other along the first direction X. The positioning block 132, the sliding block 131, and the side plate 124 together form a limiting groove 1301. The positioning plate 125 is located in the limiting groove 1301.

[0052] The base plate 121, the first limiting plate 122, the positioning plate 125, the second limiting plate 123, and the positioning plate 125 together form a guide groove 1203, providing a stable channel for the sliding block 131 to slide along the second direction Y. The base plate 121, the first limiting plate 122, the side plate 124, the second limiting plate 123, and the positioning plate 125 further form a positioning groove 1204, which encloses the positioning block 132 in the assembly state, forming a limiting structure in which the positioning block 132 is embedded in the positioning groove 1204. The limiting groove 1301 formed by the positioning block 132, the sliding block 131, and the side plate 124 together, in the assembly state, The positioning plate 125 is partially enclosed to form a limiting structure in which "positioning plate 125 is embedded in limiting groove 1301". Through the limiting structure in which "positioning block 132 is embedded in positioning groove 1204" and "positioning plate 125 is embedded in limiting groove 1301", the guide part 12 not only provides a guiding function, but the positioning plate 125 of the guide part 12 itself also becomes a constrained object, thereby realizing bidirectional interlocking between two adjacent clamping parts 1. This nested fit enhances the connection rigidity between two adjacent clamping parts 1 and prevents loosening or separation between two adjacent clamping parts 1 due to vibration, impact or inertial force.

[0053] The side plate 124 at the end away from the positioning plate 125 in the first direction X forms the second end 1202, and the positioning plate 125 at the end away from the side plate 124 in the first direction X and the bottom plate 121 at the end away from the side plate 124 in the first direction X together form the first end 1201.

[0054] Optionally, the base plate 121, the first limiting plate 122, the second limiting plate 123, the side plate 124, and the positioning plate 125 can be integrally formed or separately spliced.

[0055] In this embodiment, the base plate 121, the first limiting plate 122, the second limiting plate 123, the side plate 124, and the positioning plate 125 are integrally formed.

[0056] The clamping part 11 is inserted into the positioning groove 1204 at one end in the third direction Z, and the bottom plate 121 and the side plate 124 are both connected to the clamping part 11.

[0057] As the core component supporting the substrate 200, the clamping part 11 is inserted into the positioning groove 1204 formed by the base plate 121, side plate 124, positioning plate 125, etc., and is connected to the base plate 121 and side plate 124 at multiple points to form a high-strength connection structure of "embedding + fixing". This improves the bonding strength between the clamping part 11 and the guide part 12, prevents loosening, warping or relative displacement during frequent insertion, sliding or equipment vibration, and ensures the structural stability of the clamping fixture 100 for long-term use.

[0058] The above description is only a preferred embodiment of the present utility model. It should be noted that for those skilled in the art, several improvements and substitutions can be made without departing from the technical principles of the present utility model, and these improvements and substitutions should also be considered within the protection scope of the present utility model.

Claims

1. A clamping jig (100) having a first direction (X), a second direction (Y), and a third direction (Z) perpendicular to each other, characterized by, include: Multiple clamping components (1) are arranged along the first direction (X). Each clamping component (1) includes a clamping part (11), a guide part (12), and a sliding part (13). The guide part (12) is connected to one end of the clamping part (11) in the third direction (Z). The clamping part (11) has a receiving hole (111) that extends through the first direction (X). The receiving hole (111) is open at the end of the third direction (Z) away from the guide part (12). The hole wall of the receiving hole (111) has a clamping groove (11111) suitable for inserting a substrate (200). The guide part (12) has a first end (1201) and a second end (1202) opposite each other in the first direction (X). The first end (1201) has a guide groove (1203) extending along the second direction (Y). The sliding part (13) is connected to the second end (1202). Along the first direction (X), in two adjacent clamping members (1), the sliding part (13) of one clamping member (1) is slidably connected to the guide groove (1203) of the other clamping member (1).

2. The clamping fixture (100) according to claim 1, characterized in that, The accommodating hole (111) includes a first side wall (1111) and a second side wall (1112). The first side wall (1111) and the second side wall (1112) are spaced apart and arranged opposite each other along the second direction (Y). Both the first side wall (1111) and the second side wall (1112) are provided with the clamping groove (11111).

3. The clamping fixture (100) according to claim 2, characterized in that, The accommodating hole (111) further includes a first support wall (1113) and a second support wall (1114). The first support wall (1113) is connected to one end of the first side wall (1111) near the guide portion (12) and is adapted to support the substrate (200). The second support wall (1114) is connected to one end of the second side wall (1112) near the guide portion (12) and is adapted to support the substrate (200).

4. The clamping fixture (100) according to claim 3, characterized in that, The first support wall (1113) is provided with a first support groove (11131) suitable for embedding the substrate (200), and the second support wall (1114) is provided with a second support groove (11141) suitable for embedding the substrate (200).

5. The clamping fixture (100) according to claim 1, characterized in that, The guide groove (1203) has a first limiting wall (1221) and a second limiting wall (1231), which are spaced apart and arranged opposite to each other in the second direction (Y).

6. The clamping fixture (100) according to claim 5, characterized in that, The guide part (12) has a positioning groove (1204) at one end of the third direction (Z) that communicates with the guide groove (1203). The sliding part (13) includes a sliding block (131) and a positioning block (132). One end of the sliding block (131) is connected to the second end (1202), and the positioning block (132) is connected to the end of the sliding block (131) away from the second end (1202) in the first direction (X). At least a portion of the sliding block (131) is located in the guide groove (1203), and at least a portion of the positioning block (132) is located in the positioning groove (1204).

7. The clamping fixture (100) according to claim 6, characterized in that, The guide portion (12) includes a base plate (121), a first limiting plate (122), a second limiting plate (123), a side plate (124), and a positioning plate (125). The base plate (121) is connected to the first limiting plate (122) and the second limiting plate (123) at opposite ends in the second direction (Y). The side plate (124) is connected to one end of the base plate (121) in the first direction (X). The positioning plate (125) is located on one side of the base plate (121) in the third direction (Z). The positioning plate (125) is connected to the first limiting plate (122) and the second limiting plate (123) at opposite ends in the second direction (Y). The base plate (121), the first limiting plate (122), the positioning plate (125), the second limiting plate (123), and the positioning plate (125) together form the guide groove (1203). The first limiting wall (1221) is disposed on the first limiting plate (122), the second limiting wall (1231) is disposed on the second limiting plate (123), and one end of the sliding block (131) is connected to the side plate (124). The base plate (121), the first limiting plate (122), the side plate (124), the second limiting plate (123), and the positioning plate (125) together form the positioning groove (1204). The positioning block (132) and the side plate (124) are spaced apart and opposite to each other along the first direction (X). The positioning block (132), the sliding block (131) and the side plate (124) together form a limiting groove (1301). At least a portion of the positioning plate (125) is located in the limiting groove (1301).

8. The clamping fixture (100) according to claim 7, characterized in that, The clamping part (11) is inserted into the positioning groove (1204) at one end in the third direction (Z), and the bottom plate (121) and the side plate (124) are both connected to the clamping part (11).

9. The clamping fixture (100) according to any one of claims 1-8, characterized in that, The clamping part (11) is provided with a weight-reducing groove (112).

10. The clamping fixture (100) according to any one of claims 1-8, characterized in that, The clamping part (11) is provided with a weight reduction hole (113) that extends through the first direction (X).

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