A purification apparatus for the preparation of etchants

Abstract

The utility model relates to the field of etchant, concretely relates to a kind of purification device of preparation etchant, comprising: the bottom is the shell assembly of hemispherical shape, separator, distributor and scraper assembly are sequentially arranged from top to bottom in the shell assembly, the top of the shell assembly is connected with the driving device of driving scraper assembly rotation, the outside of the shell assembly is connected with heating assembly, the inside of the shell assembly is symmetrically provided with arc flow guide groove, the scraper assembly includes driving shaft and the horizontal bar of interval connection on its surface, the separator, distributor are respectively set in driving shaft surface and not contact with it.The utility model is oriented by arc flow guide groove and is guided, and in driving device drives wedge-shaped scraper rotation, so that it drives liquid film to gather in arc flow guide groove, guides liquid film to flow along the preset arc trajectory quickly downwards, reduces the residence time of liquid film in device, avoids the decomposition of etchant effective component due to long time heating, reduces impurity generation.

Description

Technical Field

[0001] This utility model relates to the field of corrosives, and in particular to a purification apparatus for preparing corrosives. Background Technology

[0002] Ultra-high purity wet electronic chemicals belong to the high-end sub-category of inorganic chemical raw materials used in the electronics field. Their metal impurity content is usually strictly controlled below 10 ppb. These chemicals play a key role in the manufacturing process of electronic components, mainly used in core processes such as cleaning, etching, and deposition, which directly affect the performance and reliability of electronic products. As an important branch of ultra-high purity wet electronic chemicals, the core function of etchants is to achieve selective etching. Through precisely controlled chemical reactions, they directionally remove unwanted parts from the surface of electronic substrates (such as silicon wafers and metal films), thereby constructing specific circuit patterns or microstructures on the substrate. This process places extremely high demands on etching precision and material selectivity.

[0003] Regarding the aforementioned technologies, the inventors discovered that during the purification process of corrosive agents, the liquid film scraped off by the scraper in the purification device needs to flow naturally downwards along the inner wall of the device. Due to factors such as the viscosity of the material and the adhesion of the pipe wall, the flow speed of the liquid film is prone to slowing down, resulting in a longer total residence time of the material in the device. Corrosive agents often contain heat-sensitive components. If the liquid film residence time is too long, these components are very likely to decompose under continuous heating conditions, thereby affecting the purity of the product and the stability of the process. Utility Model Content

[0004] The main technical problem solved by this invention is to provide a purification device for preparing corrosives, which facilitates shortening the residence time of the liquid film in the purification device and reduces the risk of decomposition of heat-sensitive materials due to prolonged heating.

[0005] To solve the above-mentioned technical problems, the present invention adopts a technical solution as follows: a purification device for preparing a corrosive agent is provided, comprising: a shell assembly with a hemispherical bottom, wherein a separator, a distributor and a scraper assembly are arranged sequentially from top to bottom inside the shell assembly, a driving device for driving the scraper assembly to rotate is connected to the top of the shell assembly, a heating assembly is connected to the outside of the shell assembly, and arc-shaped guide grooves are symmetrically opened on the inside of the shell assembly; The scraper assembly includes a drive shaft and crossbars spaced apart on its surface. The separator and the spreader are respectively sleeved on the surface of the drive shaft and do not contact it. Side bars are respectively provided above and below the crossbars and mounted on the drive shaft. Mounting ports are respectively opened at both ends of the crossbars and one end of the side bars. Wedge-shaped scrapers are respectively connected between two adjacent mounting ports. The wedge-shaped scrapers are staggered and one side of the wedge-shaped scrapers is located close to the inner wall of the housing assembly.

[0006] By adopting the above technical solution, the hemispherical shell assembly at the bottom can achieve better material aggregation. During the purification process, liquid film and other materials can naturally converge towards the bottom center, facilitating subsequent collection and discharge operations. The distributor evenly disperses the material along the circumference of the shell to the top of the inner wall. After the corrosive agent is scraped by the scraper and heated by the heating component, its volatile components, such as low-boiling-point solvents and water, will evaporate to form "secondary steam". The separator can intercept trace amounts of corrosive agent droplets entrained in the steam, thereby avoiding "mist entrainment" and ensuring that the purity of the distillate and the purification effect of the liquid film do not interfere with each other. When the drive device rotates the scraper assembly, the liquid on the inner wall of the shell assembly is forcibly collected, guiding the liquid film to flow rapidly downward along the preset arc trajectory, reducing the residence time of the liquid film on the inner wall of the shell, effectively avoiding the decomposition of heat-sensitive materials caused by prolonged residence of the liquid film, and improving the purity and quality stability of the product.

[0007] During this process, one side of the wedge-shaped scraper is designed with an acute angle, which allows it to fit more closely to the inner wall compared to traditional flat scrapers. This reduces the thickness of the residual liquid film on the wall during scraping, preventing liquid film retention caused by incomplete scraping. Furthermore, the staggered distribution of adjacent wedge-shaped scrapers, combined with the rotation of the drive shaft, can achieve a thorough sweep of the inner wall of the housing without dead angles. This solves the problem of localized missed scraping caused by the parallel arrangement of traditional scrapers, ensuring that the liquid film in all areas can be pushed into the guide channel, further reducing the risk of retention.

[0008] In a preferred embodiment, the present invention can be further configured such that: the housing assembly includes a purification housing and a steam port connected to one side of its top; the bottom of the purification housing is connected to a concentrate outlet; and one side of the purification housing is connected to a feed port, which is located on one side of the distributor.

[0009] By adopting the above technical solution, the feed inlet transports the corrosive material containing impurities and other substances requiring purification into the purification shell. Under the action of the distributor, the incoming raw material is evenly distributed within the purification shell, ensuring a good distribution of the material within the device. This facilitates subsequent separation and purification operations. During the purification process, the steam inlet directs the purified secondary steam from the separator to the external condensation system, reducing interference with the lower material flow and ensuring the stability of the scraping and evaporation processes. During the purification process, after separation and evaporation, moisture and other volatile components in the material are removed. The remaining concentrated corrosive material gradually settles at the bottom of the purification shell and is discharged through the concentrated material outlet.

[0010] In a preferred embodiment, the present invention can be further configured as follows: the heating assembly includes a heating jacket, a medium inlet is connected to one top side of the heating jacket, a medium outlet is connected to one bottom side of the heating jacket, and a spiral guide plate is connected inside the heating jacket, the spiral guide plate dividing the inner cavity of the heating jacket into a spiral cavity.

[0011] By adopting the above technical solution, the heating jacket is tightly wrapped around the outside of the purification shell, forming an independent heating space. The heat generated by the external heat source is evenly conducted to the purification shell, thereby heating the corrosive material inside the shell. By controlling the temperature of the heating jacket, the temperature of the material inside the purification device can be precisely adjusted to meet the temperature requirements of different purification process stages. In addition, the medium inlet is used to introduce the heating medium, such as steam or heat transfer oil, into the heating jacket, while the medium outlet is used to discharge the medium whose temperature has decreased after heat transfer. Under the action of the spiral guide plate, the heating medium flows along the spiral cavity formed by the spiral guide plate, thereby increasing the flow path and residence time of the heating medium in the heating jacket, making the contact between the heating medium and the inner wall of the heating jacket more sufficient, thus enhancing the heat exchange effect.

[0012] In a preferred embodiment, the present invention can be further configured such that the top of the arc-shaped guide channel is flush with the top of the fabric distributor, and the bottom of the arc-shaped guide channel is located below the bottom of the lowest wedge-shaped scraper.

[0013] By adopting the above technical solution, the top of the arc-shaped guide channel is flush with the top of the distributor, so that the material is within the coverage area of ​​the guide channel from the moment it contacts the inner wall. The initial liquid film scraped by the scraper can directly enter the channel, avoiding the formation of an unguided stagnation area in the upper region. The bottom of the arc-shaped guide channel extends to below the bottom of the scraper, which can ensure that all the liquid film scraped by the scraper can enter the arc-shaped guide channel and flow directly along the channel wall to the concentrate outlet at the bottom of the shell.

[0014] In a preferred embodiment, the present invention can be further configured such that: the top end of the drive shaft is connected to the drive device, the bottom end is connected to a spiral stirring plate, the bottom of the spiral stirring plate is connected to a shaft support, the bottom of the shaft support is symmetrically equipped with support ribs, and the bottom ends of the support ribs are respectively connected to the inner wall of the housing assembly.

[0015] By adopting the above technical solution, the spiral stirring plate rotates with the drive shaft, and its spiral blades can exert a dual effect on the bottom liquid film, both by flipping it upward and pushing it towards the center. On the one hand, it breaks the sediment layer and puts the liquid film in a dynamic flow state. On the other hand, it guides the liquid film towards the concentrate outlet through the spiral guide, avoiding the formation of dead corners at the bottom, significantly reducing the risk of decomposition of heat-sensitive components. In addition, the support ribs form the bottom support points and, together with the shaft support, ensure the rotational stability of the scraper assembly when it rotates.

[0016] In a preferred embodiment, the present invention can be further configured such that the driving device is a servo motor and its output shaft is connected to the drive shaft.

[0017] By adopting the above technical solution, the servo motor drives the drive shaft to rotate, thereby driving the scraper assembly to rotate, so as to forcibly collect the liquid on the inner wall of the housing assembly.

[0018] In summary, the present invention includes at least one of the following beneficial technical effects of the purification apparatus for preparing corrosive agents: The flow is directed by an arc-shaped guide channel, and the wedge-shaped scraper is rotated by the drive device, causing the liquid film to gather in the arc-shaped guide channel. The liquid film is guided to flow rapidly downward along the preset arc trajectory, reducing the residence time of the liquid film in the device, avoiding the decomposition of the effective components of the corrosive agent due to prolonged heating, and reducing the generation of impurities. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort, wherein: Figure 1 This is a schematic diagram of the structure of this utility model; Figure 2 for Figure 1 Sectional view at point AA; Figure 3 This is a schematic diagram of the structure of this utility model; Figure 4 This is a schematic diagram of the arc-shaped guide channel of this utility model.

[0020] In the diagram: 10. Shell assembly; 2. Separator; 3. Fabric distributor; 40. Scraper assembly; 5. Drive unit; 60. Heating assembly; 7. Arc-shaped guide channel; 11. Purification shell; 12. Steam inlet; 13. Concentrate outlet; 14. Feed inlet; 41. Drive shaft; 42. Crossbar; 43. Side bar; 44. Mounting port; 45. Wedge-shaped scraper; 46. Spiral mixing plate; 47. Shaft support; 48. Support rib; 61. Heating jacket; 62. Medium inlet; 63. Medium outlet; 64. Spiral guide plate. Detailed Implementation

[0021] The preferred embodiments of the present invention will be described below with reference to the accompanying drawings. It should be understood that the preferred embodiments described herein are for illustration and explanation only and are not intended to limit the present invention.

[0022] It should be noted that these figures are simplified schematic diagrams, which only illustrate the basic structure of the present invention in a schematic manner, and therefore only show the components related to the present invention.

[0023] Reference Figure 1-4 This utility model discloses a purification device for preparing a corrosive agent, comprising: a shell assembly 10 with a hemispherical bottom; a separator 2, a feeder 3, and a scraper assembly 40 arranged sequentially from top to bottom inside the shell assembly 10; a drive device 5 for driving the scraper assembly 40 to rotate connected to the top of the shell assembly 10; a heating assembly 60 connected to the outside of the shell assembly 10; and arc-shaped guide grooves 7 symmetrically formed on the inner side of the shell assembly 10. The scraper assembly 40 includes a drive shaft 41 and crossbars 42 spaced apart on its surface. The separator 2 and the feeder 3 are respectively sleeved on the surface of the drive shaft 41 and do not contact it. Side rods 4 are respectively provided above and below the crossbars 42 and mounted on the drive shaft 41. 3. Mounting ports 44 are provided at both ends of the crossbar 42 and at one end of the side bar 43. Wedge-shaped scrapers 45 are connected between two adjacent mounting ports 44. The wedge-shaped scrapers 45 are staggered. One side of the wedge-shaped scraper 45 is located close to the inner wall of the housing assembly 10. The top of the arc-shaped guide channel 7 is flush with the top of the distributor 3. The bottom of the arc-shaped guide channel 7 is located below the bottom of the lowest wedge-shaped scraper 45. The top of the drive shaft 41 is connected to the drive device 5. The bottom is connected to a spiral stirring plate 46. The bottom of the spiral stirring plate 46 is connected to a shaft support 47. Support ribs 48 are symmetrically installed at the bottom of the shaft support 47. The bottom ends of the support ribs 48 are connected to the inner wall of the housing assembly 10.

[0024] When the corrosive agent to be purified, such as a hydrofluoric acid mixture, enters the device through the inlet, it is first evenly distributed along the circumference of the shell assembly 10 to the top of the inner wall by the distributor 3. This prevents the material from concentrating in a certain area of ​​the shell assembly 10 due to gravity. After the corrosive agent is scraped by the wedge scraper 45 and heated by the heating component 60, the volatile components, such as low-boiling-point solvents and water, will evaporate to form "secondary steam." The separator 2 can intercept trace amounts of corrosive agent droplets entrained in the steam, thus preventing mist entrainment. If droplets enter the subsequent condensation system with the steam, the distillate will be contaminated and cannot meet the requirements for recycling. Emission requirements; for corrosive agents requiring deep purification, droplet entrainment may lead to the loss of target components. The separator 2 removes droplets from the vapor, ensuring that the purity of the distillate and the liquid film purification effect do not interfere with each other. The drive device 5 rotates the scraper assembly 40, causing the scraper to scrape off a portion of the liquid film on the inner wall of the housing assembly 10. The arc-shaped guide channel 7 provides a dedicated flow channel for the liquid film scraped off by the wedge-shaped scraper 45. After the corrosive liquid film is pushed into the channel by the scraper, it quickly converges and flows downwards in the vertical direction under the guidance of gravity and the arc-shaped contour of the channel wall, avoiding "wall" formation caused by viscosity or adhesion. "Surface retention" significantly shortens the residence time of the liquid film within the housing assembly 10, reducing the risk of localized overheating and decomposition. Furthermore, the wedge-shaped structure of the wedge-shaped scraper 45 enhances scraping force, reducing liquid film residue on one side of the scraper 45. Compared to traditional flat scrapers, it can more closely adhere to the inner wall, including the arc-shaped guide groove 7, making it particularly suitable for scraping high-viscosity corrosives. This avoids liquid film retention caused by incomplete scraping. Moreover, due to the staggered distribution of adjacent wedge-shaped scrapers 45, combined with the rotation of the drive shaft 41, it can achieve a thorough sweep of the inner wall of the housing assembly 10 without dead angles, solving the problem of localized missed scraping caused by the parallel arrangement of traditional scrapers. The problem is to ensure that the liquid film in all areas can be pushed into the arc-shaped guide channel 7 to further reduce the risk of stagnation. On the other hand, the spiral stirring plate 46 rotates with the drive shaft 41, and its spiral blades can have a dual effect of flipping the bottom liquid film upward and pushing it towards the center. On the one hand, it breaks the sediment layer and puts the liquid film in a dynamic flow state. On the other hand, it guides the liquid film to converge towards the concentrate outlet 13 through the spiral guide, avoiding the formation of dead corners at the bottom, significantly reducing the risk of decomposition of heat-sensitive components. In addition, the support rib 48 forms the bottom support point and, together with the shaft support 47, ensures the rotational stability of the scraper assembly 40 when it rotates.

[0025] The housing assembly 10 includes a purification housing 11 and a steam port 12 connected to one side of its top. The bottom of the purification housing 11 is connected to a concentrate outlet 13, and one side of the purification housing 11 is connected to a feed port 14, which is located on one side of the distributor 3.

[0026] The purification shell 11 needs to be in direct contact with high-purity, highly corrosive corrosives, such as a mixture of hydrofluoric acid and nitric acid. Therefore, semiconductor-grade inert materials, such as PTFE, high-purity quartz, or stainless steel with a PFA coating on the inner wall, are usually used to prevent the material from being corroded and releasing metal ions to contaminate the material. This ensures that the content of metal impurities in the corrosive is kept below 10 ppb. At the same time, the bottom of the purification shell 11 is hemispherical, which can effectively guide the residual liquid to converge towards the center and finally discharge it quickly through the concentrate outlet 13, shortening the residence time of the residual liquid in the shell. The steam pipe 12 works in conjunction with the separator 2 to directionally export the secondary steam purified by the separator 2 to the external condensation system.

[0027] The heating assembly 60 includes a heating jacket 61, with a medium inlet 62 connected to the top of one side of the heating jacket 61 and a medium outlet 63 connected to the bottom of one side of the heating jacket 61. A spiral guide plate 64 is connected inside the heating jacket 61, which divides the inner cavity of the heating jacket 61 into a spiral cavity.

[0028] The heating jacket 61 is adapted to the surface of the shell assembly 10 and provides heat to the corrosive liquid film inside the shell assembly 10 through the heating medium. A temperature control system can also be installed on the heating jacket 61 to control the temperature of the heating jacket 61 and precisely adjust the temperature of the material inside the purification device to meet the temperature requirements of different purification process stages. In addition, the medium inlet 62 is used to introduce the heating medium, such as steam or heat transfer oil, into the heating jacket 61, while the medium outlet 63 is used to discharge the medium whose temperature has decreased after heat transfer. Under the action of the spiral guide plate 64, the heating medium flows along the spiral cavity formed by the spiral guide plate 64, thereby increasing the flow path and residence time of the heating medium in the heating jacket 61, making the contact between the heating medium and the inner wall of the heating jacket 61 more sufficient, thereby enhancing the heat exchange effect.

[0029] The drive unit 5 is a servo motor and its output shaft is connected to the drive shaft 41.

[0030] The implementation principle of this embodiment is as follows: During use, the corrosive material to be purified is added into the shell assembly 10 through the feed pipe 14, and under the action of the distributor 3, the material is evenly dispersed along the inner circumference of the shell assembly 10. At this time, the heating medium is controlled at a suitable temperature under the action of the external heating device to match the boiling point of different corrosives, and enters the heating jacket 61 through the medium inlet 62. At the same time, under the action of the spiral guide plate 64, the heating medium flows along the spiral cavity formed by the spiral guide plate 64, which enhances the heat exchange effect and heats and purifies the internal corrosive material. Meanwhile, the drive device 5 drives the scraper assembly 40 to rotate. The wedge-shaped scrapers 45 alternately scrape the inner wall, scraping the initial liquid film into a uniform thin liquid film. At the same time, they push the liquid film downward along the arc-shaped guide channel 7. The thin liquid film absorbs the heat from the heating jacket 61, and the volatile components in it quickly vaporize to form secondary steam. The secondary steam flows upward to the separator 2, where it intercepts and carries liquid droplets. It is then discharged from the steam pipe 12 to the condensation system to avoid contamination. The unevaporated concentrated residue, i.e. the purified corrosive agent, is pushed by the wedge-shaped scrapers 45 and flows along the arc-shaped guide channel 7 to the hemispherical bottom of the purification shell 11. In conjunction with the rotation of the spiral stirring plate 46, the bottom residual liquid sediment layer is broken, accelerating its convergence towards the concentrate outlet 13.

[0031] The above description is merely an embodiment of this utility model and does not limit the patent scope of this utility model. Any equivalent structural or procedural transformations made using the content of this utility model specification, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this utility model.

Claims

1. A purification apparatus for preparing a corrosive agent, comprising: The bottom is a hemispherical shell assembly (10). Inside the shell assembly (10), a separator (2), a fabric spreader (3) and a scraper assembly (40) are arranged sequentially from top to bottom. The top of the shell assembly (10) is connected to a drive device (5) for driving the scraper assembly (40) to rotate. The outer side of the shell assembly (10) is connected to a heating assembly (60). The shell assembly (10) is characterized by having arc-shaped guide grooves (7) symmetrically opened on the inner side of the shell assembly (10). The scraper assembly (40) includes a drive shaft (41) and crossbars (42) spaced apart on its surface. The separator (2) and the fabric spreader (3) are respectively sleeved on the surface of the drive shaft (41) and do not contact it. The crossbars (42) are respectively provided with side bars (43) mounted on the drive shaft (41) above and below. The two ends of the crossbars (42) and one end of the side bars (43) are respectively provided with mounting holes (44). The two adjacent mounting holes (44) are respectively connected with wedge scrapers (45). The wedge scrapers (45) are respectively staggered. One side of the wedge scraper (45) is located close to the inner wall of the housing assembly (10).

2. The purification apparatus for preparing a corrosive agent according to claim 1, characterized in that, The housing assembly (10) includes a purification housing (11) and a steam port (12) connected to one side of its top. The bottom of the purification housing (11) is connected to a concentrate outlet (13), and one side of the purification housing (11) is connected to a feed port (14), which is located on one side of the distributor (3).

3. The purification apparatus for preparing a corrosive agent according to claim 1, characterized in that, The heating assembly (60) includes a heating jacket (61), a medium inlet (62) is connected to the top of one side of the heating jacket (61), a medium outlet (63) is connected to the bottom of one side of the heating jacket (61), and a spiral guide plate (64) is connected inside the heating jacket (61), which divides the inner cavity of the heating jacket (61) into a spiral cavity.

4. The purification apparatus for preparing a corrosive agent according to claim 1, characterized in that, The top of the arc-shaped guide groove (7) is flush with the top of the fabric distributor (3), and the bottom of the arc-shaped guide groove (7) is located below the bottom of the lowest wedge scraper (45).

5. The purification apparatus for preparing a corrosive agent according to claim 1, characterized in that, The top end of the drive shaft (41) is connected to the drive device (5), and the bottom end is connected to a spiral stirring plate (46). The bottom of the spiral stirring plate (46) is connected to a shaft support (47). Support ribs (48) are symmetrically installed at the bottom of the shaft support (47). The bottom ends of the support ribs (48) are respectively connected to the inner wall of the shell assembly (10).

6. The purification apparatus for preparing a corrosive agent according to claim 1, characterized in that, The drive device (5) is a servo motor and its output shaft is connected to the drive shaft (41).

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