Trimethylsilane tail gas treatment apparatus

Abstract

The utility model provides a kind of tail gas treatment equipment for trimethylsilane, it is related to trimethylsilane production technical field, including processing bucket, rotating frame is rotatably installed in the processing bucket, the rotating frame bottom is fixedly connected with mounting disc by several support rods, several spray heads are hinged on the mounting disc, several The spray head is communicated with main water pipe by hose, one end of the main water pipe is connected with high-pressure delivery pump, the spray head one end is fixedly connected with outer sleeve, the outer sleeve is movably connected with collar, the collar is rotatably sleeved on lifting ring, the lifting ring is movably connected on support rod, lifting mechanism is provided on one of the support rod and lifting ring, the utility model drives spray head whole circumferential motion by the transmission of rotary drive motor, gear and gear ring, makes up the spray gap between fixed arrangement spray head, avoids the impurity accumulation problem caused by local cleaning incompletely.

Description

Technical Field

[0001] This utility model relates to the field of trimethylsilane production technology, and more specifically, to a tail gas treatment device for trimethylsilane. Background Technology

[0002] Trimethylsilane, as an important organosilicon intermediate, is widely used in semiconductor, pharmaceutical and chemical industries. Its production and use will generate exhaust gas containing silanes, volatile organic compounds and other components. Direct emission of this exhaust gas will cause environmental pollution, and impurities in the exhaust gas are easy to adhere to the inner wall of the treatment equipment, affecting the efficiency of subsequent treatment.

[0003] In the prior art, patent CN222855038U discloses a tail gas treatment device for trimethylsilane production, including a treatment tank. Multiple support legs are fixedly installed at the lower end of the treatment tank. A top cover is installed at the upper end of the treatment tank. An air inlet pipe is fixedly installed at the side end of the treatment tank. An exhaust pipe is fixedly installed on the top cover. A cleaning structure is movably installed inside the treatment tank to clean the inner wall of the treatment tank. The cleaning structure includes a first intermediate box, a first nozzle, and a scraper. An electric push rod is fixedly installed on the top cover, and a moving plate is connected to the electric push rod. The cleaning structure is mounted on the moving plate. A recovery structure is installed at the lower end of the treatment tank. The recovery structure includes a collection box, a heat storage body, and a cover plate, and recovers waste liquid and heat through the recovery structure.

[0004] However, in existing technologies, the nozzles are fixedly installed and their height can only be adjusted vertically. Due to the gap between adjacent nozzles during installation, spray gaps or uneven spraying may occur, resulting in poor cleaning effect. Utility Model Content

[0005] The main objective of this invention is to provide a tail gas treatment device for trimethylsilane, which can effectively solve the problems mentioned in the background art.

[0006] To achieve the above objectives, the technical solution adopted by this utility model is as follows:

[0007] A trimethylsilane tail gas treatment device includes a treatment tank. A water inlet pipe and an air outlet pipe are respectively installed on both sides of the upper part of the treatment tank, and a water outlet pipe and an air inlet pipe are respectively installed on both sides of the lower part. A rotating frame is rotatably mounted inside the treatment tank. A mounting plate is fixedly connected to the bottom of the rotating frame via several support rods. Several nozzles are hinged to the mounting plate. The nozzles are connected to a main water pipe via flexible hoses. One end of the main water pipe is connected to a high-pressure delivery pump. An outer sleeve is fixedly connected to one end of each nozzle. A collar is movably connected to the outer sleeve. The collar is rotatably fitted onto a lifting ring. The lifting ring is movably connected to a support rod. A lifting mechanism is provided on one of the support rods and the lifting ring.

[0008] Preferably, a rotating plate is fixedly connected to the upper end of the rotating frame, the rotating plate is rotatably installed in the middle of the upper end of the treatment tank, the main water pipe is fixedly installed in the middle of the mounting sleeve, the mounting sleeve is fixedly connected to the upper surface of the treatment tank, and the lower end of the main water pipe passes through the rotating plate and the rotating frame.

[0009] Preferably, a gear ring is fixedly sleeved on the upper external end of the rotating frame, and a first gear is meshed with one side of the gear ring. The first gear is fixedly connected to the output end of the rotary drive motor, and the rotary drive motor is fixedly installed on the upper surface of the processing barrel.

[0010] Preferably, an inner sleeve is slidably fitted inside the outer sleeve, a spring is fixedly connected between the inner wall of the outer sleeve and the inner sleeve, and the collar is fixedly connected to the end of the inner sleeve away from the outer sleeve.

[0011] Preferably, a number of limiting blocks are fixedly sleeved on the lifting ring, and the limiting blocks are slidably connected to the support rod.

[0012] Preferably, the lifting mechanism includes a lifting drive motor, which is fixedly mounted on a mounting base, and the mounting base is fixedly connected to one of the limit blocks.

[0013] Preferably, a second gear is rotatably mounted inside the mounting base. The second gear is fixedly connected to the output end of the lifting drive motor. A rack is meshed with one side of the second gear, and the rack is fixedly connected to one of the support rods.

[0014] Compared with the prior art, the present invention has the following beneficial effects:

[0015] (1) By rotating the drive motor, gears and gear rings, the nozzles are driven to move in a circular motion, which makes up for the spray gap between the fixed nozzles and avoids the problem of impurity accumulation caused by incomplete local cleaning.

[0016] (2) The buffer design of the inner sleeve and spring reduces the rigid collision and wear of components during the nozzle adjustment process. The guiding effect of the limit block ensures the stability of the lifting ring and nozzle posture, effectively extending the service life of the equipment, reducing the frequency and cost of maintenance, and ensuring the uniformity and stability of spraying during long-term operation. Attached Figure Description

[0017] Figure 1 This is a three-dimensional schematic diagram of the overall structure of this utility model;

[0018] Figure 2 This is a three-dimensional schematic diagram of a partial cross-sectional structure of the present invention;

[0019] Figure 3 This utility model Figure 2 Enlarged view of the structure at point A in the middle;

[0020] Figure 4 This is a three-dimensional cross-sectional structural diagram of the outer sleeve portion of this utility model;

[0021] Figure 5 This is a three-dimensional schematic diagram of a partial structure of this utility model;

[0022] Figure 6 This utility model Figure 5 Enlarged view of the structure at point B in the middle.

[0023] In the diagram: 1. Treatment tank; 11. Inlet pipe; 12. Outlet pipe; 13. Air inlet pipe; 14. Air outlet pipe; 2. Rotary drive motor; 21. First gear; 3. Main water pipe; 31. Mounting sleeve; 4. Rotating frame; 41. Rotating plate; 42. Gear ring; 43. Support rod; 5. Mounting plate; 6. Nozzle; 61. Hose; 7. Outer sleeve; 71. Spring; 72. Inner sleeve; 73. Collar; 8. Lifting ring; 81. Limit block; 9. Lifting mechanism; 91. Lifting drive motor; 92. Mounting base; 93. Second gear; 94. Rack. Detailed Implementation

[0024] The technical solutions of this utility model will be clearly and completely described below with reference to the embodiments of this utility model. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of this utility model.

[0025] like Figures 1-5As shown in the figure, this utility model embodiment proposes a tail gas treatment device for trimethylsilane, including a treatment tank 1. The upper two sides of the treatment tank 1 are respectively provided with a water inlet pipe 11 and an air outlet pipe 14, and the lower two sides are respectively provided with a water outlet pipe 12 and an air inlet pipe 13. A rotating frame 4 is rotatably installed inside the treatment tank 1. The bottom of the rotating frame 4 is fixedly connected to a mounting plate 5 through several support rods 43. Several nozzles 6 are hinged on the mounting plate 5. The nozzles 6 are connected to the main water pipe 3 through a hose 61. One end of the main water pipe 3 is connected to a high-pressure delivery pump. One end of the nozzle 6 is fixedly connected to an outer sleeve 7. A collar 73 is movably connected to the outer sleeve 7. The collar 73 is rotatably sleeved on a lifting ring 8. The lifting ring 8 is movably connected to the support rod 43. A lifting mechanism 9 is provided on one of the support rods 43 and the lifting ring 8.

[0026] Cooling water is introduced into the treatment tank 1 through the water inlet pipe 11, and trimethylsilane tail gas is introduced into the treatment tank 1 through the air inlet pipe 13 to come into contact with the water. The water absorbs the heat in the tail gas, and at the same time absorbs hydrogen chloride gas and dust in the tail gas. Sodium hydroxide solution is delivered from the main water pipe 3 to each hose 61 through the high-pressure delivery pump and sprayed evenly from each nozzle 6 to neutralize the hydrogen chloride in the water. The treated tail gas is output from the air outlet pipe 14.

[0027] like Figure 2 As shown, a rotating plate 41 is fixedly connected to the upper end of the rotating frame 4. The rotating plate 41 is rotatably installed in the middle of the upper end of the treatment tank 1. The main water pipe 3 is fixedly installed in the middle of the mounting sleeve 31. The mounting sleeve 31 is fixedly connected to the upper surface of the treatment tank 1. The lower end of the main water pipe 3 passes through the rotating plate 41 and the rotating frame 4. A gear ring 42 is fixedly sleeved on the outer side of the upper end of the rotating frame 4. A first gear 21 is meshed on one side of the gear ring 42. The first gear 21 is fixedly connected to the output end of the rotary drive motor 2. The rotary drive motor 2 is fixedly installed on the upper surface of the treatment tank 1.

[0028] Starting the rotary drive motor 2 can drive the first gear 21 to rotate. Through the meshing connection between the first gear 21 and the gear ring 42, the rotating frame 4 drives the mounting plate 5 and several nozzles 6 to rotate synchronously. While the nozzles 6 are spraying, the circular motion can cover the gap area between adjacent nozzles 6, forming a dynamic spray coverage surface. This effectively solves the problem of spray gaps caused by the spacing of the fixedly arranged nozzles 6, and realizes all-round spray cleaning of the inner wall of the treatment tank 1.

[0029] like Figure 3 , Figure 4 As shown, an inner sleeve 72 is slidably sleeved inside the outer sleeve 7. A spring 71 is fixedly connected between the inner wall of the outer sleeve 7 and the inner sleeve 72. A collar 73 is fixedly connected to the end of the inner sleeve 72 away from the outer sleeve 7. Several sets of limiting blocks 81 are fixedly sleeved on the lifting ring 8. The limiting blocks 81 are slidably connected to the support rod 43.

[0030] The lifting mechanism 9 drives the lifting ring 8 to move up and down, causing the nozzle 6 to rotate around the hinge axis. During the adjustment process, the inner sleeve 72 slides along the inner wall of the outer sleeve 7, and the spring 71 contracts or extends accordingly, ensuring the normal rotation of the nozzle 6. There are two limit blocks 81 in each group, which are slidably connected to both sides of the support rod 43, and play a guiding and limiting role in the movement of the lifting ring 8, improving the accuracy of the nozzle 6 angle adjustment and ensuring the consistency of the rotation of several nozzles 6.

[0031] like Figure 5 , Figure 6 As shown, the lifting mechanism 9 includes a lifting drive motor 91, which is fixedly mounted on a mounting base 92. The mounting base 92 is fixedly connected to one of the limit blocks 81. A second gear 93 is rotatably mounted inside the mounting base 92. The second gear 93 is fixedly connected to the output end of the lifting drive motor 91. A rack 94 is meshed on one side of the second gear 93. The rack 94 is fixedly connected to one of the support rods 43.

[0032] The lifting mechanism 9 can adjust the pitch angle of the nozzle 6. When adjusting, the lifting drive motor 91 is started to drive the second gear 93 to rotate. Since the rack 94 is fixedly installed on the support rod 43, the second gear 93 will drive the lifting ring 8 to move up and down along the rack 94, thereby changing the angle of the outer sleeve 7 and the inner sleeve 72, and thus changing the spray angle.

[0033] The working principle of a tail gas treatment device for trimethylsilane:

[0034] First, cooling water is introduced into the treatment tank 1 through the inlet pipe 11. Trimethylsilane tail gas is then introduced into the treatment tank 1 through the inlet pipe 13, where it comes into contact with the water. The water absorbs the heat from the tail gas, as well as hydrogen chloride gas and dust. A high-pressure pump then delivers sodium hydroxide solution from the main water pipe 3 to each hose 61, where it is evenly sprayed from each nozzle 6. This solution neutralizes the hydrogen chloride in the water. The treated tail gas is then output from the outlet pipe 14. The lifting mechanism 9 drives the lifting ring 8 to rise and fall along the support rod 43. The transmission of the collar 73, outer sleeve 7 and inner sleeve 72 drives the nozzle 6 to rotate around the hinge point of the mounting plate 5, so as to achieve precise adjustment of the pitch angle of the nozzle 6 to cover different height areas of the inner wall of the treatment tank 1. The rotation drive motor 2 drives the first gear 21 to rotate, and the meshing gear ring 42 makes the rotating frame 4, the mounting plate 5 and all nozzles 6 rotate synchronously around the central axis of the treatment tank 1, making up for the spray gap between adjacent nozzles 6, and finally achieving uniform neutralization of solution and comprehensive cleaning of the inner wall of the treatment tank 1, improving treatment efficiency and ensuring cleaning effect.

[0035] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating this utility model, and are not intended to limit the implementation of this utility model. For those skilled in the art, other variations or modifications can be made based on the above description. It is impossible to exhaustively list all the implementation methods here. Any obvious variations or modifications derived from the technical solutions of this utility model are still within the protection scope of this utility model.

Claims

1. A tail gas treatment device for trimethylsilane, comprising a treatment tank (1), characterized in that: The upper two sides of the treatment tank (1) are respectively provided with a water inlet pipe (11) and an air outlet pipe (14), and the lower two sides are respectively provided with a water outlet pipe (12) and an air inlet pipe (13). A rotating frame (4) is rotatably installed inside the treatment tank (1). The bottom of the rotating frame (4) is fixedly connected to an installation plate (5) by several support rods (43). Several nozzles (6) are hinged on the installation plate (5). Several nozzles (6) are connected to the main water pipe (3) through a hose (61). One end of the main water pipe (3) is connected to a high-pressure delivery pump. One end of the nozzle (6) is fixedly connected to an outer sleeve (7). A collar (73) is movably connected to the outer sleeve (7). The collar (73) is rotatably sleeved on a lifting ring (8). The lifting ring (8) is movably connected to a support rod (43). A lifting mechanism (9) is provided on one of the support rods (43) and the lifting ring (8).

2. The tail gas treatment device for trimethylsilane according to claim 1, characterized in that: The upper end of the rotating frame (4) is fixedly connected to a rotating plate (41), which is rotatably installed in the middle of the upper end of the treatment tank (1). The main water pipe (3) is fixedly installed in the middle of the mounting sleeve (31), which is fixedly connected to the upper surface of the treatment tank (1). The lower end of the main water pipe (3) passes through the rotating plate (41) and the rotating frame (4).

3. The tail gas treatment device for trimethylsilane according to claim 1, characterized in that: A gear ring (42) is fixedly sleeved on the upper end of the rotating frame (4). A first gear (21) is meshed on one side of the gear ring (42). The first gear (21) is fixedly connected to the output end of the rotary drive motor (2). The rotary drive motor (2) is fixedly installed on the upper surface of the processing barrel (1).

4. The tail gas treatment device for trimethylsilane according to claim 1, characterized in that: The inner sleeve (72) is slidably sleeved inside the outer sleeve (7), and a spring (71) is fixedly connected between the inner wall of the outer sleeve (7) and the inner sleeve (72). The collar (73) is fixedly connected to the end of the inner sleeve (72) away from the outer sleeve (7).

5. The tail gas treatment device for trimethylsilane according to claim 1, characterized in that: Several sets of limiting blocks (81) are fixedly sleeved on the lifting ring (8), and the limiting blocks (81) are slidably connected to the support rod (43).

6. The tail gas treatment device for trimethylsilane according to claim 5, characterized in that: The lifting mechanism (9) includes a lifting drive motor (91), which is fixedly mounted on a mounting base (92), and the mounting base (92) is fixedly connected to one of the limiting blocks (81).

7. The tail gas treatment device for trimethylsilane according to claim 6, characterized in that: A second gear (93) is rotatably mounted inside the mounting base (92). The second gear (93) is fixedly connected to the output end of the lifting drive motor (91). A rack (94) is meshed on one side of the second gear (93). The rack (94) is fixedly connected to one of the support rods (43).

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