Chlorosilane production pressure stabilizing device and tail gas treatment system

Abstract

The utility model provides a kind of chlorosilane production pressure stabilizing device and tail gas treatment system, it is related to chlorosilane production technical field.The chlorosilane production pressure stabilizing device includes: with HCL analysis-absorption unit intercommunication's chlorosilane storage tank with pressure, for the chlorosilane lean liquid after hydrogen chloride is removed is stored;And chlorosilane storage tank with pressure and rectification unit intercommunication;And with the conveying pipeline intercommunication of recovery hydrogen gas of reduction tail gas recovery product hydrogen gas storage tank, for receiving recovery hydrogen gas;And tail gas recovery product hydrogen gas storage tank and chlorosilane storage tank with pressure and the pipeline of reduction procedure are all intercommunication;Wherein, first pressure difference regulating valve is arranged on the intercommunication pipeline between chlorosilane storage tank with pressure and tail gas recovery product hydrogen gas storage tank.The utility model can carry out reliable pressure regulation to the chlorosilane buffer tank of HCL absorption-analysis unit continuously without using additional hydrogen gas.

Description

Technical Field

[0001] This utility model relates to the field of chlorosilane production technology, specifically to a chlorosilane production pressure stabilizing device and tail gas treatment system. Background Technology

[0002] In existing technologies, the improved Siemens process tail gas recovery process receives the reduction tail gas generated in the reduction process and separates the chlorosilanes (dichlorosilane, trichlorosilane, silicon tetrachloride), hydrogen, and hydrogen chloride from the reduction tail gas through processes such as condensation, compression, absorption, desorption, and adsorption. The recovered chlorosilanes are sent to a distillation process for further separation and purification, the recovered hydrogen is sent to the reduction process to participate in the reduction reaction again, and the recovered hydrogen chloride is sent to a cold hydrogenation process to participate in the hydrogenation reaction of silicon tetrachloride. During this process, multi-stage condensers, compressors, absorption towers, desorption towers, adsorption towers, and collection tanks are used to achieve the separation and recovery of the reduction tail gas. Specifically, the HCl separation stage uses an HCl absorption tower and an HCl desorption tower to form an HCl absorption-desorption unit. The HCl absorption tower uses liquid-phase chlorosilane as the absorbent to dissolve and absorb hydrogen chloride; the HCl desorption tower is used to desorb HCl.

[0003] In existing technologies, chlorosilane buffer tanks are generally used as pressure stabilizing devices for two distillation columns. A constant operating pressure needs to be maintained to prevent cavitation in the first chlorosilane delivery pump and to ensure continuous and stable operation of the distillation column during the rectification process. This requires high-frequency supply of 1.0 MPa electrolytically produced high-purity hydrogen to the chlorosilane buffer tank via a regulating valve to maintain stable pressure. However, several problems arise during this process: 1. Prolonged supply of 1.0 MPa electrolytically produced high-purity hydrogen leads to significant waste of this hydrogen; 2. It increases the energy consumption of the high-purity hydrogen compressor; 3. When the pressure in the chlorosilane buffer tank is too high, a VG1 pressure relief pipeline to the subsequent rinsing device is installed, resulting in waste of 1.0 MPa high-purity hydrogen during the pressure relief process; 4. If the 1.0 MPa high-purity hydrogen compressor trips, it will affect the hydrogen supply to the chlorosilane buffer tank, causing insufficient hydrogen supply, resulting in pressure loss, cavitation in the chlorosilane delivery pump, and severely impacting the delivery of chlorosilane to the distillation process and the stable operation of the distillation column. Utility Model Content

[0004] This invention addresses the problem that existing methods of maintaining stable pressure by supplying 1.0 MPa electrolytically generated high-purity hydrogen to the chlorosilane buffer tank of the HCl absorption-desorption unit result in significant hydrogen waste and insufficient pressure stabilization to handle risks. It provides a chlorosilane production pressure stabilizing device and tail gas treatment system that can continuously and reliably regulate the pressure of the chlorosilane buffer tank of the HCl absorption-desorption unit without using additional hydrogen.

[0005] The technical solution adopted in this utility model is:

[0006] A voltage stabilizing device for chlorosilane production, comprising:

[0007] A pressurized chlorosilane storage tank is connected to an HCl desorption-absorption unit and is used to store lean chlorosilane solution after hydrogen chloride removal; the pressurized chlorosilane storage tank is also connected to a distillation unit.

[0008] The exhaust gas recovery product hydrogen storage tank is connected to the pipeline for conveying hydrogen recovered from the reduced exhaust gas and is used to receive the recovered hydrogen; and the exhaust gas recovery product hydrogen storage tank is connected to the pressurized chlorosilane storage tank and the pipeline of the reduction process.

[0009] A first differential pressure regulating valve is installed on the connecting pipeline between the pressurized chlorosilane storage tank and the tail gas recovery product hydrogen storage tank. When the pressure of the pressurized chlorosilane storage tank is lower than the set lower pressure limit, the first differential pressure regulating valve controls the tail gas recovery product hydrogen storage tank to pressurize the pressurized chlorosilane storage tank. When the pressure of the pressurized chlorosilane storage tank is higher than the set lower pressure limit, the first differential pressure regulating valve controls the tail gas recovery product hydrogen storage tank to stop pressurizing the pressurized chlorosilane storage tank.

[0010] Furthermore, the hydrogen storage tank for the exhaust gas recovery product is a 0.9MPa pressurized storage tank.

[0011] Furthermore, the pressurized chlorosilane storage tank is provided with a first discharge port, and a second differential pressure regulating valve is provided on the first discharge port.

[0012] Furthermore, a first chlorosilane delivery pump and a first chlorosilane cooler are installed on the connecting pipeline between the pressurized chlorosilane storage tank and the distillation unit.

[0013] A chlorosilane production tail gas treatment system, comprising:

[0014] The hydrogen chloride absorption tower has at least a first inlet for inputting mixed tail gas from the reduction furnace, a first top outlet for outputting hydrogen, and a first bottom outlet for outputting chlorosilane-rich liquid.

[0015] The hydrogen chloride stripping column has at least a fourth input port connected to the bottom output port of the first column, a second top output port for outputting hydrogen chloride gas, and a second bottom output port for outputting chlorosilane lean solution.

[0016] The second tower bottom outlet is connected to the chlorosilane production pressure stabilizing device described above.

[0017] Furthermore, a reboiler is also provided at the bottom of the hydrogen chloride stripping tower.

[0018] Furthermore, the hydrogen chloride absorption tower is provided with a third inlet, which is connected to the bottom outlet of the second tower; and a chlorosilane cryostat is provided on the connecting pipeline between the third inlet and the bottom outlet of the second tower.

[0019] Furthermore, it also includes:

[0020] The first lean-rich liquid heat exchanger has at least a first tube-side passage and a first shell-side passage.

[0021] The first exchanger tube-side passage is connected to the connecting pipeline between the first tower bottom output port and the fourth input port; the first exchanger shell-side passage is connected to the connecting pipeline between the second tower bottom output port and the third input port.

[0022] Furthermore, it also includes:

[0023] The second lean-rich liquid heat exchanger has at least a second tube-side passage and a second shell-side passage.

[0024] The second exchanger tube-side passage is connected to the connecting pipeline between the output port of the first exchanger tube-side passage and the fourth input port; the second exchanger shell-side passage is connected to the connecting pipeline between the output port of the second tower bottom and the input port of the first exchanger shell-side passage.

[0025] Furthermore, a second chlorosilane delivery pump and a second chlorosilane cooler are installed on the connecting pipeline between the output port of the second exchanger shell-side passage and the input port of the first exchanger shell-side passage.

[0026] The beneficial effects of this utility model are:

[0027] 1. The pressure stabilizing device of this utility model recovers hydrogen from the reduction tail gas by setting up a hydrogen storage tank for the product of tail gas recovery; and sets up a pressurized chlorosilane storage tank to regulate the pressure of the HCl absorption-desorption unit; then connects the hydrogen storage tank for the product of tail gas recovery and the pressurized chlorosilane storage tank, and sets up a first differential pressure regulating valve to regulate the pressure of both. At the same time, it realizes that the pressure stabilization of the HCl absorption-desorption unit does not consume additional hydrogen, and makes full use of the hydrogen recovered from the reduction tail gas in the tail gas recovery process. This solves the problem that the existing technology of supplying 1.0MPa electrolytically produced high-purity hydrogen to the chlorosilane buffer tank of the HCl absorption-desorption unit to maintain stable pressure will cause a large amount of hydrogen waste and the pressure stabilization effect is insufficient to cope with risks.

[0028] 2. The exhaust gas treatment system of this utility model recovers hydrogen from the reduction exhaust gas by setting up a hydrogen storage tank for the exhaust gas recovery product; and sets up a pressurized chlorosilane storage tank to regulate the pressure of the hydrogen chloride absorption tower and the hydrogen chloride desorption tower; then connects the exhaust gas recovery product hydrogen storage tank and the pressurized chlorosilane storage tank, and sets up a first differential pressure regulating valve to regulate the pressure of both, thereby achieving pressure stabilization of the hydrogen chloride absorption tower and the hydrogen chloride desorption tower without consuming additional hydrogen, and making full use of the hydrogen recovered from the reduction exhaust gas in the exhaust gas recovery process. This solves the problem in the prior art that the method of supplying 1.0MPa electrolysis to produce high-purity hydrogen to the chlorosilane buffer tank of the HCl absorption-desorption unit to maintain stable pressure results in a large amount of hydrogen waste and insufficient pressure stabilization to cope with risks. Attached Figure Description

[0029] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0030] Figure 1 This is a schematic diagram of the voltage stabilizing device according to Embodiment 1 of this utility model;

[0031] Figure 2 This is a schematic diagram of the exhaust gas treatment system of Embodiment 2 of this utility model.

[0032] Reference numerals: 110-pressurized chlorosilane storage tank, 111-first connecting port, 112-second connecting port, 113-third connecting port, 114-first discharge port, 115-second differential pressure regulating valve, 120-tail gas recovery product hydrogen storage tank, 124-fourth connecting port, 125-fifth connecting port, 126-sixth connecting port, 130-first differential pressure regulating valve, 140-first chlorosilane transfer pump, 150-first chlorosilane cooler;

[0033] 200 - Hydrogen chloride absorption tower, 201 - First inlet, 202 - Second inlet, 203 - Third inlet, 210 - First top outlet, 220 - First bottom outlet;

[0034] 300 - Hydrogen chloride stripping column, 304 - Fourth inlet, 310 - Second top outlet, 320 - Second bottom outlet, 330 - Stripping column reboiler;

[0035] 400 - First lean-rich liquid heat exchanger;

[0036] 500 - Second lean-rich liquid heat exchanger;

[0037] 600-chlorosilane cryocooler;

[0038] 710 - Second chlorosilane transfer pump, 720 - Second chlorosilane cooler. Detailed Implementation

[0039] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0040] The following disclosure provides many different embodiments or examples for implementing various structures of this invention. To simplify the disclosure, specific examples of components and arrangements are described below. Of course, these are merely examples and are not intended to limit the scope of this invention.

[0041] The embodiments of the utility model will now be described in detail with reference to the accompanying drawings.

[0042] Example 1

[0043] In the existing tail gas recovery process, the high demand for stabilizing hydrogen in the chlorosilane buffer tank of the HCl desorption-absorption unit leads to significant hydrogen consumption at the 1.0 MPa electrolytic hydrogen production rate, resulting in a heavy load on the high-purity hydrogen compressor and increasing equipment operational risks. Furthermore, insufficient supply of hydrogen from the 1.0 MPa electrolytic hydrogen production rate or a shutdown of the high-purity hydrogen compressor can cause depressurization of the chlorosilane buffer tank, resulting in the shutdown of the chlorosilane transfer pump and affecting the delivery of chlorosilane condensate to the distillation section. This could lead to liquid shortages and tower shutdowns in the distillation process and disrupt the cyclic operation of the two towers in the HCl desorption-absorption unit, creating safety risks.

[0044] To address the aforementioned problems in the prior art, this embodiment provides a pressure stabilizing device for chlorosilane production. This device is used to maintain a stable pressure in the chlorosilane buffer tank and to stabilize the pressure of the two-tower circulation in the HCl absorption-desorption unit. This chlorosilane production pressure stabilizing device can provide continuous and reliable pressure regulation of the HCl absorption-desorption unit without using additional hydrogen. Please refer to... Figure 1 The chlorosilane production pressure stabilization device mainly includes: a pressurized chlorosilane storage tank 110 and a tail gas recovery product hydrogen storage tank 120, etc.

[0045] The pressurized chlorosilane storage tank 110 is used to receive and store a portion of the chlorosilane lean solution after hydrogen chloride removal from the desorption tower of the HCl absorption-desorption unit, thereby balancing the pressure of the absorption tower and the desorption tower of the HCl absorption-desorption unit. Figure 1 As shown, the pressurized chlorosilane storage tank 110 is equipped with a first connection port 111, a second connection port 112, and a third connection port 113. The first connection port 111 is connected to the pipeline of the HCl absorption-desorption unit and is used to input the lean chlorosilane solution after hydrogen chloride removal. The second connection port 112 is connected to the tail gas recovery product hydrogen storage tank 120 and is used to input recovered hydrogen for pressure regulation. The third connection port 113 is connected to the distillation unit and is used to output chlorosilane for distillation treatment, thereby enabling its use as a raw material for refined trichlorosilane, etc.

[0046] The tail gas recovery product hydrogen storage tank 120 is used to receive the recovered hydrogen after treatment by the tail gas adsorption system. The recovered hydrogen has stable purity and does not contain HCl impurities. The tail gas recovery product hydrogen storage tank 120 is equipped with a fourth connection port 124, a fifth connection port 125, and a sixth connection port 126. Among them, the fourth connection port 124 is connected to the pipeline for conveying the recovered hydrogen from the reduced tail gas, and is used to input the recovered hydrogen from the reduced tail gas into the tail gas recovery product hydrogen storage tank 120 for storage; the fifth connection port 125 is connected to the pressurized chlorosilane storage tank 110, and is used to output the recovered hydrogen; the sixth connection port 126 is connected to the pipeline of the reduction process, and is used to provide hydrogen as a raw material for the reduction process.

[0047] Furthermore, a first differential pressure regulating valve 130 is installed on the connecting pipeline between the second connection port 112 of the pressurized chlorosilane storage tank 110 and the fifth connection port 125 of the tail gas recovery product hydrogen storage tank 120. The first differential pressure regulating valve 130 has front and rear manual valve groups and is equipped with a pressure interlock and automatic control circuit to the tank exhaust gas VG1 pipeline to maintain the pressure stability of the chlorosilane buffer tank. It is adapted to quickly and safely release pressure and reduce the delivery of chlorosilane to the subsequent distillation process in the event of pressure overpressure or underpressure.

[0048] One specific working method of this embodiment is as follows:

[0049] First, the two towers of the HCl absorption-desorption unit are turned on to begin the material circulation and separation operation. Simultaneously, the tail gas recovery product hydrogen storage tank 120 receives recovered hydrogen from the tail gas adsorption system. When the pressure in the pressurized chlorosilane storage tank 110 is lower than the set lower pressure limit, the first differential pressure regulating valve 130 controls the hydrogen delivery rate through an automatic control loop to pressurize the pressurized chlorosilane storage tank 110. When the pressure in the pressurized chlorosilane storage tank 110 is higher than the set lower pressure limit, the first differential pressure regulating valve 130 stops the hydrogen delivery rate, stops pressurizing the pressurized chlorosilane storage tank 110 through the automatic control loop, and controls the depressurization of the tail gas recovery product hydrogen storage tank 120.

[0050] The applicant discovered in the research that the tail gas recovery process uses the reduction tail gas to recover hydrogen for reuse. The recovered product hydrogen collection tank is used to collect product hydrogen and supply pure hydrogen to the reduction process. However, in actual operation, due to the large volume of reduction tail gas, venting is often performed to prevent system pressure buildup. This operation results in a certain waste of recovered hydrogen resources and safety risks. Therefore, in this embodiment, the recovered hydrogen resources are reused to assist the chlorosilane buffer tank of the HCl absorption-desorption unit in stabilizing the pressure. Therefore, in this embodiment, the chlorosilane production pressure stabilization device recovers hydrogen from the reduction tail gas by setting up a tail gas recovery product hydrogen storage tank 120; and sets up a pressurized chlorosilane storage tank 110 to regulate the pressure of the HCl absorption-desorption unit; then connects the tail gas recovery product hydrogen storage tank 120 and the pressurized chlorosilane storage tank 110, and uses a first differential pressure regulating valve 130 to regulate the pressure of both. This achieves pressure stabilization of the HCl absorption-desorption unit without consuming additional hydrogen, and full utilization of the hydrogen recovered from the reduction tail gas in the tail gas recovery process. This solves the problem in the prior art that the method of supplying 1.0MPa electrolysis to produce high-purity hydrogen to the chlorosilane buffer tank of the HCl absorption-desorption unit to maintain stable pressure results in a large waste of hydrogen and insufficient pressure stabilization effect to cope with risks.

[0051] Furthermore, in this embodiment, the hydrogen storage tank 120 for the exhaust gas recovery product is a 0.9MPa pressurized storage tank, which does not involve moving equipment such as compressors, and the pressure is stable and compatible with the operating pressure of the high-pressure chlorosilane storage tank 110.

[0052] Furthermore, in this embodiment, the pressurized chlorosilane storage tank 110 is provided with a first discharge port 114, and a second differential pressure regulating valve 115 is provided on the first discharge port 114. The first discharge port 114 is used for emergency pressure relief or to discharge excess hydrogen in the pressurized chlorosilane storage tank 110 when it is not in use, to prevent hydrogen leakage and energy waste. In addition, a first chlorosilane transfer pump 140 and a first chlorosilane cooler 150 are provided on the connecting pipeline between the third connecting port 113 and the distillation unit. The first chlorosilane transfer pump 140 and the first chlorosilane cooler 150 cooperate with each other to transport chlorosilane to the distillation unit and keep the chlorosilane in a liquefied state during the transportation process.

[0053] Example 2

[0054] Based on the above embodiments, a chlorosilane production tail gas treatment system is further proposed, and a second embodiment is provided below.

[0055] Please see Figure 2The chlorosilane production tail gas treatment system in the second embodiment is used to treat the tail gas of the modified Siemens process and recover hydrogen chloride. The chlorosilane production tail gas treatment system mainly includes a hydrogen chloride absorption tower 200, a hydrogen chloride desorption tower 300, and the chlorosilane production pressure stabilizing device in the above embodiment.

[0056] like Figure 2 As shown, the hydrogen chloride absorption tower 200 uses liquid-phase chlorosilane as the absorbent, allowing most of the hydrogen chloride to dissolve in the chlorosilane condensate under low temperature and high pressure conditions to form a rich solution. The hydrogen chloride absorption tower 200 is equipped with a first inlet 201 in the middle of the tower, a first top outlet 210 at the top of the tower, and a first bottom outlet 220 at the bottom of the tower. The first inlet 201 is connected to the tail gas output pipe of the reduction furnace and is used to input a mixed tail gas containing hydrogen, hydrogen chloride gas, and chlorosilane. The first top outlet 210 is used to discharge the hydrogen separated from the mixed tail gas. Simultaneously, the first bottom outlet 220 is connected to the hydrogen chloride stripping tower 300 and is used to output the rich solution (chlorosilane liquid containing HCl) that has absorbed the hydrogen chloride gas and chlorosilane from the mixed tail gas.

[0057] The hydrogen chloride stripping tower 300 is used to achieve HCl stripping under low pressure and high temperature conditions. During this process, HCl can be separated from the top of the hydrogen chloride stripping tower 300. The hydrogen chloride stripping tower 300 is provided with a fourth inlet 304 in the middle of the tower, a second top outlet 310 at the top of the tower, and a second bottom outlet 320 at the bottom of the tower. The fourth inlet 304 is connected to the first bottom outlet 220 of the hydrogen chloride absorption tower 200 and is used to input the rich liquid. The second top outlet 310 is used to discharge the hydrogen chloride gas separated from the rich liquid. At the same time, the second bottom outlet 320 is connected to the chlorosilane production pressure stabilizing device in the above embodiment and is used to output the lean liquid (chlorosilane liquid without HCl component) after hydrogen chloride is separated from the rich liquid.

[0058] In this embodiment, the chlorosilane production tail gas treatment system recovers hydrogen from the reduction tail gas by setting up a tail gas recovery product hydrogen storage tank 120; and sets up a pressurized chlorosilane storage tank 110 to regulate the pressure of the hydrogen chloride absorption tower 200 and the hydrogen chloride desorption tower 300; then connects the tail gas recovery product hydrogen storage tank 120 and the pressurized chlorosilane storage tank 110, and uses a first differential pressure regulating valve 130 to regulate the pressure of both, thereby achieving pressure stabilization of the hydrogen chloride absorption tower 200 and the hydrogen chloride desorption tower 300 without consuming additional hydrogen, and making full use of the hydrogen recovered from the reduction tail gas in the tail gas recovery process. This solves the problem in the prior art that the method of supplying 1.0MPa electrolysis to produce high-purity hydrogen to the chlorosilane buffer tank of the HCl absorption-desorption unit to maintain stable pressure results in a large waste of hydrogen and insufficient pressure stabilization to cope with risks.

[0059] Furthermore, the hydrogen chloride absorption tower 200 of this embodiment is also provided with a second inlet 202 in the middle of the tower. The second inlet 202 is used to input chlorosilane condensate for the absorption of hydrogen chloride and chlorosilane in the mixed tail gas.

[0060] Furthermore, the hydrogen chloride stripping column 300 of this embodiment is also provided with a stripping column reboiler 330 at the bottom of the column. The stripping column reboiler 330 is used to further separate hydrogen chloride in the lean liquid at the bottom of the column and improve the recovery rate of hydrogen chloride.

[0061] Furthermore, a third inlet 203 is installed in the middle of the upper part of the hydrogen chloride absorption tower 200. The third inlet 203 is connected to the second bottom outlet 320 of the hydrogen chloride desorption tower 300. A chlorosilane cryocooler 600 is installed on the connecting pipeline between the third inlet 203 and the second bottom outlet 320, allowing a portion of the lean solution output from the hydrogen chloride desorption tower 300 to enter the chlorosilane production pressure stabilizing unit, while the other portion returns to the hydrogen chloride absorption tower 200 for further absorption treatment. Thus, the lean and rich solutions are recycled between the hydrogen chloride absorption tower 200 and the hydrogen chloride desorption tower 300, effectively removing HCl components and improving the recovery rate. Furthermore, during the circulation process between the two towers, by setting up a connection with the chlorosilane production pressure stabilizing device, a constant pressure difference can be maintained between the hydrogen chloride absorption tower 200 and the hydrogen chloride desorption tower 300. This allows the chlorosilane condensate in the bottom of the hydrogen chloride desorption tower 300 to circulate to the top of the hydrogen chloride absorption tower 200 as a top chlorosilane spray, maintaining a system in which the liquid level, pressure, and temperature of the two towers are balanced.

[0062] Furthermore, this embodiment also includes a first lean-rich liquid heat exchanger 400. The first lean-rich liquid heat exchanger 400 utilizes the temperature difference between the lean liquid and the rich liquid for heat exchange, improving thermal energy utilization efficiency and reducing energy consumption. The first lean-rich liquid heat exchanger 400 is provided with a first exchanger tube-side passage and a first exchanger shell-side passage. The first exchanger tube-side passage is connected to the connecting pipeline between the first bottom outlet 220 of the hydrogen chloride absorption tower 200 and the fourth inlet 304 of the hydrogen chloride desorption tower 300, used to transport the lower-temperature rich liquid output from the hydrogen chloride absorption tower 200, thereby raising the temperature of the rich liquid and saving the heating energy consumption of the hydrogen chloride desorption tower 300. The first exchanger shell-side passage is connected to the connecting pipeline between the second bottom outlet 320 of the hydrogen chloride desorption tower 300 and the third inlet 203 of the hydrogen chloride absorption tower 200, used to transport the higher-temperature lean liquid output from the hydrogen chloride desorption tower 300, thereby cooling the lean liquid and saving the refrigeration energy consumption of the chlorosilane cryocooler 600.

[0063] Furthermore, this embodiment also includes a second lean-rich liquid heat exchanger 500, which cooperates with the first lean-rich liquid heat exchanger 400 to utilize the temperature difference between the lean and rich liquids for heat exchange, thereby improving thermal energy utilization efficiency and reducing energy consumption. The second lean-rich liquid heat exchanger 500 is equipped with a second exchanger tube-side passage and a second exchanger shell-side passage. The second exchanger tube-side passage is connected to the connecting pipeline between the output port of the first exchanger tube-side passage of the first lean-rich liquid heat exchanger 400 and the fourth input port 304 of the hydrogen chloride desorption tower 300, used to transport the lower-temperature rich liquid, further heating it and saving heating energy consumption in the hydrogen chloride desorption tower 300. The second exchanger shell-side passage is connected to the connecting pipeline between the second bottom output port 320 of the hydrogen chloride desorption tower 300 and the input port of the first exchanger shell-side passage, used to transport the higher-temperature lean liquid output from the hydrogen chloride desorption tower 300, pre-cooling the lean liquid and reducing the temperature of the lean liquid entering the first exchanger shell-side passage.

[0064] Furthermore, a second chlorosilane transfer pump 710 and a second chlorosilane cooler 720 are installed on the connecting pipeline between the output port of the second exchanger shell-side passage and the input port of the first exchanger shell-side passage to accelerate the material circulation between the two towers and to regulate the temperature of the lean liquid input to the first exchanger shell-side passage.

[0065] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely preferred examples and are not intended to limit the utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. A voltage stabilizing device for the production of chlorosilanes, characterized in that, Include: A pressurized chlorosilane storage tank (110) is connected to an HCl desorption-absorption unit and is used to store lean chlorosilane solution after hydrogen chloride removal; and the pressurized chlorosilane storage tank (110) is connected to a distillation unit; The tail gas recovery product hydrogen storage tank (120) is connected to the transmission pipeline for the recovery of hydrogen from the reduced tail gas and is used to receive the recovered hydrogen; and the tail gas recovery product hydrogen storage tank (120) is connected to the pressurized chlorosilane storage tank (110) and the pipeline of the reduction process. A first differential pressure regulating valve (130) is installed on the connecting pipeline between the pressurized chlorosilane storage tank (110) and the tail gas recovery product hydrogen storage tank (120). When the pressure of the pressurized chlorosilane storage tank (110) is lower than the set lower pressure limit, the first differential pressure regulating valve (130) controls the tail gas recovery product hydrogen storage tank (120) to pressurize the pressurized chlorosilane storage tank (110). When the pressure of the pressurized chlorosilane storage tank (110) is higher than the set lower pressure limit, the first differential pressure regulating valve (130) controls the tail gas recovery product hydrogen storage tank (120) to stop pressurizing the pressurized chlorosilane storage tank (110).

2. The chlorosilane production voltage stabilizing device as described in claim 1, characterized in that, The hydrogen storage tank (120) for the tail gas recovery product is a 0.9MPa pressurized storage tank.

3. The chlorosilane production voltage stabilizing device as described in claim 1, characterized in that, The pressurized chlorosilane storage tank (110) is provided with a first discharge port (114), and a second differential pressure regulating valve (115) is provided on the first discharge port (114).

4. The chlorosilane production voltage stabilizing device as described in claim 1, characterized in that, A first chlorosilane delivery pump (140) and a first chlorosilane cooler (150) are installed on the connecting pipeline between the pressurized chlorosilane storage tank (110) and the distillation unit.

5. A chlorosilane production tail gas treatment system, characterized in that, Include: The hydrogen chloride absorption tower (200) has at least a first inlet (201) for inputting mixed tail gas from the reduction furnace, a first top outlet (210) for outputting hydrogen, and a first bottom outlet (220) for outputting chlorosilane-rich liquid. The hydrogen chloride stripping tower (300) has at least a fourth inlet (304) connected to the first bottom outlet (220), a second top outlet (310) for outputting hydrogen chloride gas, and a second bottom outlet (320) for outputting chlorosilane lean solution. The second tower bottom outlet (320) is connected to a chlorosilane production pressure stabilizing device as described in any one of claims 1-4.

6. The chlorosilane production tail gas treatment system as described in claim 5, characterized in that, The bottom of the hydrogen chloride stripping tower (300) is also equipped with a stripping tower reboiler (330).

7. The chlorosilane production tail gas treatment system as described in claim 5, characterized in that, The hydrogen chloride absorption tower (200) is provided with a third inlet (203), which is connected to the second bottom outlet (320); and a chlorosilane cryostat (600) is provided on the connecting pipeline between the third inlet (203) and the second bottom outlet (320).

8. The chlorosilane production tail gas treatment system as described in claim 7, characterized in that, Also includes: The first lean-rich liquid heat exchanger (400) has at least a first exchanger tube-side passage and a first exchanger shell-side passage. The first exchanger tube-side passage is connected to the connecting pipeline between the first tower bottom output port (220) and the fourth input port (304); the first exchanger shell-side passage is connected to the connecting pipeline between the second tower bottom output port (320) and the third input port (203).

9. The chlorosilane production tail gas treatment system as described in claim 8, characterized in that, Also includes: The second lean-rich liquid heat exchanger (500) has at least a second exchanger tube-side passage and a second exchanger shell-side passage. The second exchanger tube path is connected to the connecting pipeline between the output port of the first exchanger tube path and the fourth input port (304); the second exchanger shell path is connected to the connecting pipeline between the second tower bottom output port (320) and the input port of the first exchanger shell path.

10. The chlorosilane production tail gas treatment system as described in claim 9, characterized in that, A second chlorosilane delivery pump (710) and a second chlorosilane cooler (720) are installed on the connecting pipeline between the output port of the second exchanger shell-side passage and the input port of the first exchanger shell-side passage.

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