A lower flange device for a fluidized bed

CN224749047UActive Publication Date: 2026-09-15NOVUSILICON CORP
View PDF 0 Cites 0 Cited by

Patent Information

Application Number
CN202521899577.0
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-09-04
Publication Date
2026-09-15
Estimated Expiration
2035-09-04

AI Technical Summary

Technical Problem

[0002]目前,普通的流化床在使用时,加热过程中基底物料的温度与加热设定温度差距较大,且基地物料在流化过程中温度均匀性较差,导致高温气相沉积过程中气体原料受热不均匀,沉积效果以及均匀性降低

Benefits of technology

[0014]By adopting the above technical solution, this utility model has the following beneficial effects: Since the heating part outside the fluidized bed cannot completely cover the cavity, and the bottom is mostly outside the heating area, while the substrate material of vapor deposition is mostly piled up at the bottom of the fluidized bed cavity, there is a certain distance between the material and the heating area. This utility model sets a columnar protrusion at the bottom of the lower flange of the fluidized bed cavity, so that the material is in the heating area and thus obtains a better heating effect, the temperature inside the material is more uniform, the deposition effect is better, and the uniformity is better; at the same time, the structure of this utility model is simple, and the internal hollow structure has a better heat preservation effect.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN224749047U_ABST
    Figure CN224749047U_ABST
Patent Text Reader

Abstract

The utility model discloses a lower flange device for fluidized bed, including the bottom disc, the top of bottom disc is equipped with the convex of columnar and is inserted into the fluidized bed cavity, the top of convex is equipped with the material surface of lower concave, the inside of convex has the air inlet channel, be equipped with the air inlet of air inlet channel bottom intercommunication on bottom disc, the top of air inlet channel communicates with material surface, and the top of air inlet channel is equipped with the stop valve, the height of convex is greater than 5cm. The utility model sets up the convex of columnar to the lower flange bottom of fluidized bed cavity, make material be in the heating area to obtain better heating effect, the temperature of material inside is more uniform, and the deposition effect is better, and the uniformity is better, and the simple structure of the utility model, and the heat preservation effect of inside hollow structure is better.
Need to check novelty before this filing date? Find Prior Art

Description

Technical Field

[0001] This utility model relates to the field of fluidized bed technology, and in particular to a lower flange device for fluidized beds. Background Technology

[0002] Currently, in the use of ordinary fluidized beds, the temperature of the substrate material differs significantly from the set heating temperature during the heating process, and the temperature uniformity of the substrate material is poor during fluidization. This results in uneven heating of the gaseous raw material during high-temperature vapor deposition, leading to reduced deposition effect and uniformity.

[0003] Therefore, it is necessary to design a lower flange device for fluidized beds to solve the above problems. Utility Model Content

[0004] The purpose of this invention is to address the shortcomings of existing technologies by proposing a lower flange device for fluidized beds.

[0005] The technical solution of this utility model is: a lower flange device for a fluidized bed, including a chassis; the top of the chassis is provided with a columnar protrusion extending into the fluidized bed cavity; the top of the protrusion is provided with a concave material surface; the interior of the protrusion has an air inlet channel; the chassis is provided with an air inlet communicating with the bottom of the air inlet channel; the top of the air inlet channel communicates with the material surface, and the top of the air inlet channel is provided with a shut-off valve; the height of the protrusion is greater than 5cm.

[0006] The material surface is composed of an inner plane, a middle inclined plane, and an outer inclined plane connected in sequence.

[0007] The diameter of the inner plane is 1-5 cm.

[0008] The angle between the central inclined plane and the horizontal plane is less than 30°.

[0009] The angle between the external inclined plane and the horizontal plane is less than 90°.

[0010] The top of the air intake channel extends 0.5-1cm beyond the inner plane.

[0011] The diameter of the air intake channel is 0.5-2cm.

[0012] The maximum depth of the recessed material surface is less than 4 cm.

[0013] The columnar protrusion is hollow inside.

[0014] By adopting the above technical solution, this utility model has the following beneficial effects: Since the heating part outside the fluidized bed cannot completely cover the cavity, and the bottom is mostly outside the heating area, while the substrate material of vapor deposition is mostly piled up at the bottom of the fluidized bed cavity, there is a certain distance between the material and the heating area. This utility model sets a columnar protrusion at the bottom of the lower flange of the fluidized bed cavity, so that the material is in the heating area and thus obtains a better heating effect, the temperature inside the material is more uniform, the deposition effect is better, and the uniformity is better; at the same time, the structure of this utility model is simple, and the internal hollow structure has a better heat preservation effect. Attached Figure Description

[0015] To make the contents of this utility model easier to understand, the present utility model will be further described in detail below with reference to specific embodiments and accompanying drawings.

[0016] Figure 1 This is a schematic diagram of the structure of this utility model.

[0017] The labels in the attached diagram are:

[0018] 1. Chassis; 2. Protrusion; 3. Material surface; 3-1. Internal plane; 3-2. Middle slope; 3-3. External slope; 4. Air intake channel; 5. Air inlet. Detailed Implementation

[0019] (Example 1)

[0020] See Figure 1 This embodiment of a fluidized bed lower flange device includes a chassis 1; the top of the chassis 1 is provided with a columnar protrusion 2 extending into the fluidized bed cavity; the top of the protrusion 2 is provided with a concave material surface 3; the interior of the protrusion 2 has an air inlet channel 4; the chassis 1 is provided with an air inlet 5 communicating with the bottom of the air inlet channel 4; the top of the air inlet channel 4 communicates with the material surface 3, and the top of the air inlet channel 4 is provided with a shut-off valve; the height of the protrusion 2 is greater than 5cm.

[0021] Furthermore, the material surface 3 is composed of an inner plane 3-1, a middle inclined plane 3-2, and an outer inclined plane 3-3 connected in sequence.

[0022] Furthermore, the diameter of the inner plane 3-1 is 1-5cm to prevent excessive accumulation of materials in the inner plane 3-1.

[0023] Furthermore, the angle between the central inclined plane 3-2 and the horizontal plane is less than 30°, thereby providing a good guiding effect for the material.

[0024] Furthermore, the angle between the outer inclined plane 3-3 and the horizontal plane is less than 90°, thereby preventing material spillage.

[0025] Furthermore, the top of the air intake channel 4 extends 3-10.5-1cm beyond the inner plane to facilitate the installation of the shut-off valve.

[0026] Furthermore, the diameter of the air intake channel 4 is 0.5-2cm, resulting in better air intake performance.

[0027] Furthermore, the maximum depth of the recessed material surface 3 is less than 4cm, making the material receiving more stable.

[0028] Furthermore, the interior of the columnar protrusion 2 is hollow, resulting in better heat preservation.

[0029] The fluidized bed lower flange device of this embodiment is provided with a columnar protrusion (2) at the bottom of the fluidized bed cavity lower flange, so that the material is in the heating zone and thus obtains a better heating effect, the temperature inside the material is more uniform, the deposition effect is better, and the uniformity is better; at the same time, the structure of this utility model is simple, and the heat preservation effect of the internal hollow structure is better.

[0030] The specific embodiments described above further illustrate the purpose, technical solution, and beneficial effects of this utility model. It should be understood that the above descriptions are merely specific embodiments of this utility model and are not intended to limit this utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A lower flange device for a fluidized bed, characterized in that: Includes a chassis (1); the top of the chassis (1) is provided with a columnar protrusion (2) extending into the fluidized bed cavity; the top of the protrusion (2) is provided with a concave material surface (3); the interior of the protrusion (2) has an air intake channel (4); the chassis (1) is provided with an air inlet (5) communicating with the bottom of the air intake channel (4); the top of the air intake channel (4) is connected to the material surface (3), and the top of the air intake channel (4) is provided with a shut-off valve; the height of the protrusion (2) is greater than 5cm.

2. The fluidized bed lower flange device according to claim 1, characterized in that: The material surface (3) is composed of an inner plane (3-1), a middle inclined plane (3-2), and an outer inclined plane (3-3) connected in sequence.

3. A fluidized bed lower flange device according to claim 2, characterized in that: The diameter of the inner plane (3-1) is 1-5 cm.

4. A fluidized bed lower flange device according to claim 2, characterized in that: The angle between the central inclined plane (3-2) and the horizontal plane is less than 30°.

5. A fluidized bed lower flange device according to claim 2, characterized in that: The angle between the external inclined plane (3-3) and the horizontal plane is less than 90°.

6. A fluidized bed lower flange device according to claim 2, characterized in that: The top of the air intake channel (4) extends 0.5-1cm beyond the inner plane (3-1).

7. A fluidized bed lower flange device according to claim 1, characterized in that: The diameter of the air intake channel (4) is 0.5-2cm.

8. A lower flange device for a fluidized bed according to claim 1, characterized in that: The maximum depth of the recessed material surface (3) is less than 4 cm.

9. A lower flange device for a fluidized bed according to claim 1, characterized in that: The columnar protrusion (2) is hollow inside.