Monatomic / cluster generating apparatus and gas source assembly therefor

Abstract

The utility model relates to a kind of single-atom / cluster generating device and its gas source assembly, including being set in the shell of single-atom / cluster generating device at least two gas supply bottles for containing carrier gas, one-to-one correspondence at least two first gas supply pipeline, at least two pressure reducing valve and at least two flowmeter, further include a gas exchange valve and a second gas supply pipeline;The input end of the at least two first gas supply pipeline is sealed with the gas source outlet of the at least two gas supply bottles one-to-one correspondence communication, output end is sequentially sealed with the input end of the gas exchange valve after corresponding pressure reducing valve and flowmeter, the output end of the gas exchange valve is sealed with the input end of the second gas supply pipeline, the output end of the second gas supply pipeline is sealed with the generating chamber to at least one carrier gas is delivered to the generating chamber;The pressure reducing valve is used to adjust the gas pressure of the carrier gas passing through, and the flowmeter is used to adjust the gas flow size of carrier gas.

Description

Technical Field

[0001] This utility model relates to the field of single-atom or cluster particle preparation devices, and in particular to a single-atom / cluster generating device and its gas source component. Background Technology

[0002] Nanoclusters are nanoscale structures composed of a few atoms or molecules. Due to their unique properties in terms of size effect, quantum effect, and surface activity, they have broad application potential in at least two fields: catalysis, sensors, electronic devices, and biomedicine. Their advantages are mainly reflected in high surface energy, good catalytic activity, and quantum properties in specific fields. For example, in the field of catalysis, nanoclusters can provide higher catalytic activity than bulk materials and are widely used in chemical reactions such as hydrogenation, oxidation, and desulfurization. In the field of sensors, due to their highly sensitive reaction performance, nanoclusters have become ideal materials for gas sensors and biosensors. In addition, nanoclusters have also shown great potential in electronic and optoelectronic devices, drug delivery, and other fields. In the preparation of single-atom / cluster particles, single-atom / cluster particles are typically prepared using a single-atom / cluster generating device. This device contains a generation chamber, which generates spark ablation by applying pulsed voltages to two opposing electrodes extending into the chamber. A carrier gas is supplied to the generation chamber via a gas source assembly to achieve condensation, thereby accelerating the single atoms generated during ablation and assisting in electrode spark ablation (providing a stable spark ablation environment or reacting with the ablation products to obtain the target single atom or compound). However, in traditional technologies, the gas source assembly typically provides only one carrier gas source, resulting in low versatility. If a different carrier gas source is required, the current gas cylinder must be replaced. Replacing the gas cylinder involves not only disassembling and reassembling the cylinder but also reconnecting it to the piping, making the operation complex and time-consuming. Utility Model Content

[0003] In view of the shortcomings of the prior art, the technical problem to be solved by this utility model is to provide a gas source component for a single atom / cluster generating device.

[0004] To solve the above-mentioned technical problems, the present invention provides a gas source component for a single-atom / cluster generator, used to provide carrier gas to the generator chamber of the single-atom / cluster generator. The component includes at least two gas supply cylinders for holding carrier gas, each disposed within the housing of the single-atom / cluster generator; at least two first gas delivery pipelines corresponding to the at least two gas supply cylinders; at least two pressure reducing valves; and at least two flow meters. It also includes a gas exchange valve and a second gas delivery pipeline. The input ends of the at least two first gas delivery pipelines are sealed to the gas source outlets of the at least two gas supply cylinders, and their output ends are sealed to the input end of the gas exchange valve after passing through corresponding pressure reducing valves and flow meters. The output end of the gas exchange valve is sealed to the input end of the second gas delivery pipeline, and the output end of the second gas delivery pipeline is sealed to the generator chamber to deliver at least one carrier gas to the generator chamber. The pressure reducing valves are used to adjust the gas pressure of the passing carrier gas, and the flow meters are used to adjust the gas flow rate of the carrier gas.

[0005] Furthermore, the carrier gas supplied by each gas cylinder is different.

[0006] Furthermore, the housing is provided with a gas cylinder fixing bracket for fixing the at least two gas cylinders.

[0007] Furthermore, the gas cylinder mounting bracket is located near one side of the housing wall, and this side of the housing wall is detachably connected to the frame inside the single atom / cluster generator to facilitate the installation and removal of the gas supply cylinder.

[0008] Furthermore, the at least two gas supply cylinders are disposed on the side of the gas cylinder fixing frame facing the side of the shell wall, and the at least two gas supply cylinders are arranged side by side along the height direction.

[0009] Furthermore, the pressure reducing valve and the gas cylinder fixing bracket are located on the same side of the frame. The frame is provided with a pressure reducing valve fixing bracket for fixing the pressure reducing valve, and the pressure reducing valve is located on the side of the pressure reducing valve fixing bracket facing the side wall of the shell.

[0010] Furthermore, the gas supply cylinders are configured to be four, and the four gas supply cylinders store different types of carrier gas.

[0011] Furthermore, the axis of the second gas supply line coincides with the axis of the beam outlet of the generating chamber.

[0012] Furthermore, the output end of the second gas supply pipeline is in a sealed connection with the generating chamber and is clamped to the carrier gas input end of the generating chamber by a clamp.

[0013] To solve the above-mentioned technical problems, another technical solution adopted by this utility model is: to provide a single atom / cluster generating device, including a shell, a frame disposed in the shell and a generating chamber disposed on the frame, and also including the gas source component that is in sealed communication with the carrier gas inlet of the generating chamber as described above.

[0014] In summary, the single-atom / cluster generating device and its gas source components of this utility model have at least the following beneficial effects: (1) By setting up multiple parallel carrier gas source passages and switching the carrier gas source through the gas exchange valve, it can meet the needs of more scenarios and embodiments. Moreover, multiple carrier gas sources provide commonly used carrier gases, solving the problem of needing to change the corresponding gas supply cylinder according to different carrier gases in the traditional technology. (2) The gas supply cylinder is set on the shell wall of the frame near the housing. The shell wall is detachably connected to the frame to facilitate the disassembly and assembly of the gas supply cylinder. (3) The pressure reducing valve and the gas supply cylinder are both set on the same side. It is only necessary to make one side of the shell wall detachable to facilitate the disassembly and assembly of the pressure reducing valve and the gas supply cylinder. Attached Figure Description

[0015] The accompanying drawings, which are included to provide a further understanding of this application and form part of this application, illustrate exemplary embodiments and are used to explain this application, but do not constitute an undue limitation of this application. In the drawings: Figure 1 This is a schematic diagram of an embodiment of the single-atom / cluster generating device of this utility model.

[0016] Figure 2 This is a schematic diagram of the structure behind the hidden housing in one embodiment of the single atom / cluster generating device of this utility model.

[0017] Figure 3 This is a cross-sectional view of the generation chamber in one embodiment of the single-atom / cluster generation device of this utility model.

[0018] Figure 3a yes Figure 3 A magnified schematic diagram of part B1 in the middle.

[0019] Figure 4 This is a schematic diagram of the adjustable pulley in one embodiment of the single-atom / cluster generating device of this utility model.

[0020] Figure 5 yes Figure 4 Exploded view.

[0021] Figure 6 yes Figure 5 A longitudinal sectional view.

[0022] Figure 7 This is a schematic diagram of an embodiment of the deposition apparatus of this utility model.

[0023] Figure 8 yes Figure 7 Exploded view.

[0024] Figure 9 yes Figure 8 A structural diagram from another perspective.

[0025] Figure 10 yes Figure 7 Sectional view of AA.

[0026] Figure 11 yes Figure 10 A magnified schematic diagram of part B2 in the middle.

[0027] Figure 12 These are STEM characterization images of tungsten cluster samples one, two, three, and four prepared according to an embodiment of the single-atom / cluster generating device of this utility model.

[0028] Figure 13 This is a STEM characterization image of different elements under the same parameters in one embodiment of the single atom / cluster generating device of this utility model.

[0029] The diagrams in the instruction manual are labeled as follows: 100 housing; 101 top wall; 102 bottom wall; 103 left side wall; 104 right side wall; 105 front side wall; 106 rear side wall; 107 handle; 108 heat dissipation hole; 109 mounting hole; 110 frame; 111 control box; 112 work platform; 110 adjustable pulley A; 130 connecting structure; 131 plug-in part; 132 connecting part; 1321 first connecting hole; 133 first ball; 134 second ball; 135 first ball groove; 135a first half groove; 135a second ... Half-groove 135b; Second ball groove 136; Third half-groove 136a; Fourth half-groove 136b; Stepped hole 137; Connecting sleeve 138; Third connecting hole 1381; Connecting post 139; Fixing bracket 140; Assembly cavity 141; Upper cavity opening 141a; Opening 142; Slider 143; Assembly groove 144; Movable support block 150; Slide groove 151; Adjusting component 160; Screw 161; Second connecting hole 161a; Nut 162; Pulley 170; Rotating shaft 171; Generator 200; Generating chamber 210; Chamber body 211; Top wall 212; Carrier gas inlet pipe 213; Beam outlet 214; First perforation 215a; Second perforation 215b; First electrode E1; Second electrode E2; First electrode mounting position 201; Second electrode mounting position 202; Electrode spacing adjustment assembly 220; First adjustment unit 221; First drive shaft 221a; First axial drive unit 221b; Second adjustment unit 222; Second drive shaft 222a; Second axial drive unit 222b; Electrode angle adjustment assembly 230; First angle adjustment unit 231; First base 231a; First electrode fixing ball 231b; First mounting groove 231c; Second angle adjustment unit 232; Second base 232a; Second electrode fixing ball 232b; Second mounting groove 232c; Gas source assembly 300; gas cylinder 310; gas cylinder mounting bracket 311; first gas delivery pipeline 320; pressure reducing valve 330; pressure reducing valve mounting bracket 331; flow meter 340; air exchange valve 350; Deposition apparatus 400; Deposition chamber 410; Inlet end 401; Outlet end 402; Outlet pipe 411; Inlet pipe 412; Assembly pipe 413; Collection unit 420; Collection seat 421; Fourth flange 422; Fourth inclined surface 4221; Second annular groove 4222; Collection position 423; First assembly structure 430; First sealing ring 4301; First flange 431; First inclined surface 4311; Second flange 432; Second inclined surface 4321; First clamp 433 hoop; 4331 first ring wall; 43311 first pressing surface; 4332 second ring wall; 43321 second pressing surface; 440 second assembly structure; 4401 second sealing ring; 4401a sealing ring; 4401b sealing gasket; 441 third flange; 4411 third inclined surface; 4412 first ring groove; 443 second clamp; 4431 third ring wall; 44311 third pressing surface; 4432 fourth ring wall; 44321 fourth pressing surface. Detailed Implementation

[0030] To make the objectives, technical solutions, and advantages of this application clearer, the technical solutions of this application will be clearly and completely described below in conjunction with specific embodiments and corresponding drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0031] The following disclosure provides various embodiments or examples of different features for implementing this utility model. Specific examples of components and arrangements will be described below to simplify the utility model. Of course, these are merely examples and are not intended to limit the utility model. For example, in the following description, forming a first component above or on a second component may include embodiments where the first and second components are in direct contact, or embodiments where other components may be formed between the first and second components such that the first and second components are not in direct contact. Additionally, reference numerals and / or characters may be repeated in various instances of the utility model. Such repetition is for simplification and clarity and does not in itself indicate a relationship between the various embodiments and / or configurations.

[0032] Furthermore, spatial relation terms such as "below," "under," "below," "above," and "above" may be used herein to readily describe the relationship between one element or component and another element (or component) or component (or component) as shown in the figure. In addition to the orientations shown in the figure, spatial relation terms will encompass various different orientations of the device in use or operation. The device may be positioned in other ways (rotated 90 degrees or in other orientations) and will be interpreted accordingly through the spatial relation descriptors used herein.

[0033] Furthermore, the technical parts described in this utility model and the appended claims are mainly the improved technical parts of this utility model, and do not limit the object protected by this utility model to only having these technical parts. Other known necessary components (structures and / or methods) and / or non-essential components of the protected object, other than the technical parts described in this utility model and the appended claims, are not included in this utility model and the appended claims because they do not fall within the scope of improvement of this utility model. However, this does not mean that the object protected by this utility model does not possess these known components.

[0034] Please see Figure 1 , Figure 2 and Figure 7 , Figure 1 and Figure 2 This is a schematic diagram of an embodiment of the single-atom / cluster generating device of this utility model. Figure 7This is a schematic diagram of a deposition apparatus according to an embodiment of the present invention for a single-atom / cluster generation device. In the illustrated embodiment, the single-atom / cluster generation device includes a housing 100, a control module (not shown), a single-atom / cluster generator (hereinafter referred to as generator 200), and a gas source assembly 300, all disposed within the housing 100 and in sealed communication with the generator 200. A deposition device 400, in closed communication with the generator 200, is disposed on the housing 100 at a position corresponding to the generator 200, for depositing and collecting the single-atom / cluster particles generated by the generator 200. The control module is a central control unit used to monitor and control the operating status of the cluster preparation device. For example, the control module is used to control the electrode spacing adjustment assembly 220 (described below) to adjust the spacing between the first electrode E1 and the second electrode E2 each time a single-atom / cluster is prepared. For example, the control module is also used to send an initial positioning control signal to the electrode spacing adjustment component 220 before each adjustment of the spacing between the first electrode E1 and the second electrode E2. Based on the initial positioning control signal, the electrode spacing adjustment component 220 controls the first electrode E1 and the second electrode E2 to move towards each other and touch, thereby completing the initial positioning of the first electrode E1 and the second electrode E2. For example, the control module is also used to control the delivery of the corresponding carrier gas to the generator 200 based on pre-set gas source parameter information during each preparation of a single atom / cluster.

[0035] Please see Figure 2 , Figure 3 and Figure 3aThe generator 200 is used to prepare single atoms / clusters. The generator 200 includes a generation chamber 210 in sealed communication with the gas source assembly 300, a first electrode mounting position 201 disposed within the generation chamber 210 for mounting a first electrode E1, a second electrode mounting position 202 for mounting a second electrode E2 and disposed opposite to the first electrode mounting position 201, an electrode adjustment assembly, and a power supply module (not shown). The electrode adjustment assembly includes an electrode spacing adjustment assembly 220 and / or an electrode angle adjustment assembly 230. The electrode spacing adjustment assembly 220 is used to adjust the spacing between the first electrode E1 and the second electrode E2 based on a corresponding control signal from the control module (i.e., adjusting the axial positions of the first electrode E1 and the second electrode E2 to adjust the spacing between them). The electrode angle adjustment assembly 230 is used to adjust the angles of the first electrode E1 and / or the second electrode E2 so that the axes of the first electrode E1 and the second electrode E2 coincide (aligning the first electrode E1 and the second electrode E2). The power supply module is electrically connected to the control module and is used to provide pulse power to the first electrode E1 and the second electrode E2 based on the corresponding control signal of the control module, so as to generate spark ablation between the first electrode E1 and the second electrode E2, thereby generating corresponding single atoms. The gas source component 300 is in sealed communication with the generation chamber 210. The gas source component 300 is electrically connected to the control module to deliver the corresponding carrier gas to the generation chamber 210 based on the corresponding control signal, and is used to deliver the carrier gas to the spark ablation site generated by the first electrode E1 and the second electrode E2, thereby obtaining cluster particles. The cluster particles can be single metal cluster particles generated by metal element clusters, or cluster particles formed by the combination of metal single atoms and carrier gas to form compound clusters such as oxides and hydrides.

[0036] The following sections will describe in detail the housing 100, generator 200, gas source assembly 300, and deposition device 400.

[0037] Regarding housing 100: Please continue reading Figure 1 and Figure 2 According to this embodiment, the housing 100 is configured in a generally cubical structure. A frame 110 is provided within the housing 100 for assembling the generator 200, air source assembly 300, control module, and other components thereon. The frame 110 has a control box 111 located at the lower part, which houses various electrical components such as the control module. The top of the control box 111 is configured as a work platform 112, on which at least some components such as the air source assembly 300 and generator 200 are mounted.

[0038] The housing 100 is formed by a top wall 101, a bottom wall 102, a left side wall 103 (a transverse side wall), a right side wall 104 (another transverse side wall), a front side wall 105 (a longitudinal side wall), and a rear side wall 106 (another longitudinal side wall). The left side wall 103 and the right side wall 104 constitute the transverse side walls of the housing 100, and the front side wall 105 and the rear side wall 106 constitute the longitudinal side walls of the housing 100. A viewing section 1011 is provided on the housing 100 at a position corresponding to the generating chamber 210. In the illustrated embodiment, since the generating chamber 210 is located on the working platform 112 near the front of the housing 100, the viewing section 1011 can be provided on the top wall 101 of the housing 100 directly opposite the generating chamber 210 (at the front of the top wall 101). The viewing section 1011 allows an observer to easily observe the working state of the generating chamber 210. Corresponding to the viewing section 1011, a viewing plate is provided on the top wall 101 of the generating chamber 210, allowing an observer to clearly observe the interior of the generating chamber 210 through the viewing section 1011 and the viewing plate. Handles 107 are provided on both transverse side walls (left side wall 103 and right side wall 104) of the housing 100. These handles 107 can be concave or convex, and can employ any known handle structure; this invention does not impose specific limitations. At least one side wall of the housing 100 (e.g., the right side wall 104 shown in the figure) is provided with a heat dissipation hole 108. In this embodiment, since the generating chamber 210 is located at the front of the housing 100, an assembly hole 109 for assembling the deposition device 400 is provided on the front side wall 105 of the housing 100 at a position corresponding to the generating chamber 210.

[0039] In this embodiment, in order to facilitate the handling of the single atom / cluster generating device and to ensure that the housing 100 is supported when the single atom / cluster generating device needs to be fixed, a plurality of adjustable pulleys A, such as four, are provided at the bottom of the housing 100. The four adjustable pulleys A are located at the four corners of the bottom of the housing 100. The four adjustable pulleys A have the same structure. The following description will use one of the adjustable pulleys A as an example.

[0040] Please see Figure 4 , Figure 5 and Figure 6The adjustable pulley A includes a connecting structure 130 connected to the bottom of the housing 100, a fixing frame 140 rotatably disposed at the lower end of the connecting structure 130 and having an assembly cavity 141 extending along the height direction, a pulley 170 disposed on the fixing frame 140, a movable support block 150 movably disposed within the fixing frame 140 along the height direction, and an adjusting member 160. The adjusting member 160 is used to adjust the height of the movable support block 150 so that the movable support block 150 has a supported state in which its lower end surface is lower than the lower wheel surface of the pulley 170, and a retracted state in which its lower end surface is higher than the lower wheel surface of the pulley 170. When the single-atom / cluster generator needs to be supported and fixed, the adjusting member 160 is manipulated to adjust the movable support block 150 downwards, so that the lower end surface of the movable support block 150 is lower than the lower wheel surface of the pulley 170. In this state, the lower wheel surface of the pulley 170 is suspended in the air to create a gap with the plane (e.g., the ground or platform), and the single-atom / cluster generator is in a supported state. When it is necessary to move the atom / cluster generator, the adjusting member 160 is manipulated to adjust the movable support block 150 upwards, so that the lower end surface of the movable support block 150 is higher than the lower wheel surface of the pulley 170. In this state, the pulley 170 is in contact with the plane and can slide on the plane, and the atom / cluster generator is in a pulley-operated state.

[0041] The connecting structure 130 is used for detachable connection with the housing 100, and is also used for assembly with the fixing frame 140 and the adjusting member 160. The connecting structure 130 has an insertion portion 131 that inserts into the upper cavity 141a of the assembly cavity 141, and a connecting portion 132 disposed on the upper end of the insertion portion 131 and having a planar dimension larger than the upper planar dimension of the fixing frame 140. The connecting portion 132 is used for detachable connection with the housing 100. The connecting portion 132 is configured as a connecting block, and the edge of the connecting block is provided with a first connecting hole 1321 for detachable connection with the housing 100.

[0042] The portion of the connecting block that contacts the fixing frame 140 is provided with a ball bearing structure or a bearing structure to facilitate relative rotation between the two. In this embodiment, a first ball bearing 133 is provided between the outer peripheral surface of the insertion portion 131 and the inner wall surface of the upper cavity 141a, and a second ball bearing 134 is provided between the connecting portion 132 (the lower side surface of the connecting block) and the upper end surface of the fixing frame 140. To assemble the first ball bearing 133 and the second ball bearing 134, a first semi-groove 135a is provided on the inner wall of the upper cavity 141a, and a second semi-groove 135b that mates with the first semi-groove 135a is provided on the outer wall of the insertion part 131. The first semi-groove 135a and the second semi-groove 135b form a first ball bearing groove 135, and the first ball bearing 133 is rotatably disposed in the first ball bearing groove 135. A third semi-groove 136a is provided on the upper end surface of the fixing frame 140, and a fourth semi-groove 136b that mates with the third semi-groove 136a is provided on the lower end surface of the connecting part 132. The third semi-groove 136a and the fourth semi-groove 136b form a second ball bearing groove 136, and the second ball bearing groove 136 is rotatably disposed in the second ball bearing groove 136.

[0043] In this embodiment, the adjusting member 160 is configured as a screw 161. The upper end of the screw 161 is fitted to the connecting structure 130 and is capable of rotation. The lower end of the screw 161 extends into the assembly cavity 141 and is screwed to the movable support block 150 within the assembly cavity 141. To assemble the screw 161, a stepped hole 137 is provided through the connecting structure 130 along its height direction. The small-diameter section of the stepped hole 137 extends downward through the lower end face of the connecting structure 130, and the large-diameter section extends upward through the upper end face of the connecting structure 130. The rod portion of the screw 161 passes downward through the small-diameter section and is located within the assembly cavity 141. The cap portion of the screw 161 is recessed within the large-diameter section, and the screw 161 is capable of rotation within the stepped hole 137. The upper end of the screw 161 is provided with a second connecting hole 161a. A connecting sleeve 138 is assembled in the large-diameter section. The connecting sleeve 138 is provided with a third connecting hole 1381 coaxial with the second connecting hole 161a. A connecting post 139 is provided in the second connecting hole 161a and the third connecting hole 1381. A nut 162 is also fixedly sleeved on the upper end of the screw 161. The outer circumference of the nut 162 is provided with a plurality of circumferentially spaced teeth. The nut 162 is located in the assembly cavity 141, and the upper end of the nut 162 is located at the lower end of the upper cavity opening 141a. An opening 142 is provided on the fixing frame 140 at the position corresponding to the nut 162. The opening 142 penetrates the fixing frame 140 in the transverse direction to allow the assembly cavity 141 to communicate with the outside.

[0044] The movable support block 150 is screwed to the lower end of the screw 161, and the movable support block 150 is slidably fitted into the assembly cavity 141 along the height direction. That is, the inner wall of the assembly cavity 141 is provided with sliders 143 distributed along the height direction, and the movable support block 150 is provided with a sliding groove 151 corresponding to the position of the sliders 143 for sliding engagement with them.

[0045] To facilitate the assembly of the pulley 170, an assembly groove 144 is provided on one side of the fixing frame 140. The assembly groove 144 extends downward through the fixing frame 140. The pulley 170 is disposed in the assembly groove 144 and is rotatably connected to the two side walls of the assembly groove 144 via a rotating shaft 171. To avoid obstruction of the pulley 170 and ensure that the pulley 170 can rotate freely without being blocked by the movable support block 150, an avoidance groove is provided on the movable support block 150 at the position corresponding to the pulley 170.

[0046] Those skilled in the art will understand that although one embodiment of the single-atom / cluster generating device described above employs an adjustable sliding structure, this adjustable sliding structure is merely an example and is not intended to limit the present invention. For example, in other embodiments, the single-atom / cluster generating device may also employ a known support foot structure or a known sliding structure, and no specific limitations are made here.

[0047] Regarding Generator 200: Please continue reading Figure 1 , Figure 2 , Figure 3 and Figure 3aFor example, the generator 200 includes a generating chamber 210, a first electrode mounting position 201 and a second electrode mounting position 202 disposed within the generating chamber 210 and disposed opposite to each other, an electrode spacing adjustment assembly 220, and an electrode angle adjustment assembly 230. The electrode spacing adjustment assembly 220 includes a first adjustment unit 221 and a second adjustment unit 222. The first electrode mounting position 201 and the second electrode mounting position 202 are respectively disposed on the lateral sides within the generating chamber 210, such that the first electrode E1 and the second electrode E2 mounted thereon are located within the generating chamber 210 and are respectively close to the left and right sides (lateral sides) of the generating chamber 210. After the first electrode E1 and the second electrode E2 are respectively mounted on the first electrode mounting position 201 and the second electrode mounting position 202, they can be aligned and adjusted by the electrode angle adjustment assembly 230 (i.e., the axes of the first electrode E1 and the second electrode E2 coincide), and the distance between them can be adjusted by the electrode spacing adjustment assembly 220. Both the first electrode E1 and the second electrode E2 are made of metal and have a rod-like structure with flat end faces. After installation, the two end faces are aligned. The first electrode E1 and the second electrode E2 generate single atoms through spark ablation, which condense and agglomerate under the action of the carrier gas, and are discharged through the beam outlet along with the carrier gas flow.

[0048] The generating chamber 210 includes a chamber body 211 with a top opening and a detachable top wall 212 that seals the opening. A viewing plate is mounted on the top wall 212 to facilitate observation of the internal state. A carrier gas inlet pipe 213 is provided on one side wall (rear side wall) of the generating chamber 210 corresponding to the gas source assembly 300, and the carrier gas inlet pipe 213 is used for sealed communication with the gas source assembly 300. A beam outlet 214 is provided on the side wall of the generating chamber 210 opposite to the carrier gas inlet pipe 213 (i.e., a carrier gas inlet pipe 213 and a beam outlet 214 are respectively provided on opposite side walls of the generating chamber 210), and the axis of the beam outlet 214 coincides with the axis of the carrier gas inlet pipe 213. The axes of the carrier gas inlet pipe 213 and the beam outlet 214 are perpendicular to the axes of the first electrode E1 and the second electrode E2 and intersect at the center point between the first electrode E1 and the second electrode E2 (the axes of the carrier gas inlet pipe 213 and the beam outlet 214 are perpendicular to the axes of the first electrode E1 and the second electrode E2). A beam output pipe is hermetically connected to the beam outlet 214, and the beam output pipe is used for hermetically connected to the deposition device 400 assembled on the front side wall 105 of the housing 100. In summary, the first electrode E1 and the second electrode E2 are respectively disposed on the transverse side walls of the generation chamber 210, and the carrier gas inlet pipe 213 and the beam output pipe are respectively disposed on the longitudinal side walls of the generation chamber 210.

[0049] The generating chamber 210 has a first through hole 215a on one side wall (left side wall) and a second through hole 215b on the other side wall (right side wall). The first adjustment unit 221 and the second adjustment unit 222 are respectively movably inserted through the first through hole 215a and the second through hole 215b, and the first adjustment unit 221 and the second adjustment unit 222 are dynamically sealed with the corresponding through holes.

[0050] The first adjustment unit 221 includes a first drive shaft 221a and a first axial drive unit 221b. The first drive shaft 221a is movably inserted through a first through hole 215a in the transverse side wall (left side wall) of the generating chamber 210, with its inner end extending into the generating chamber 210 and connected to the first electrode mounting position 201, and its outer end connected to the output shaft of the first axial drive unit 221b. A first dynamic sealing structure is provided between the first drive shaft 221a and the transverse side wall (first through hole 215a) of the generating chamber 210. The first dynamic sealing structure can be any known dynamic sealing structure, and no specific limitation is made herein. The first axial drive unit 221b can be an electric actuator, a combination of a motor and a lead screw, etc. The first axial drive unit 221b is electrically connected to the control module and is used to receive signals from the control module, such as initial positioning control signals and spacing adjustment signals, and to move in the corresponding direction and distance based on the corresponding signals, thereby adjusting the axial position of the first electrode mounting position 201 to achieve axial position adjustment of the first electrode E1 mounted on the first electrode mounting position 201. The second adjustment unit 222 includes a second drive shaft 222a and a second axial drive unit 222b. The second drive shaft 222a is movably inserted through a second through hole 215b in the other transverse side wall (right side wall) of the generating chamber 210, with its inner end extending into the generating chamber 210 and connected to the second electrode mounting position 202, and its outer end connected to the output shaft of the second axial drive unit 222b. A second dynamic seal structure is provided between the second drive shaft 222a and the other transverse side wall (second perforation 215b) of the generating chamber 210. The second dynamic seal structure can be any known dynamic seal structure, and no specific limitation is made herein. The control module is electrically connected to both the first axial drive unit 221b and the second axial drive unit 222b.

[0051] The electrode angle adjustment assembly 230 includes a first angle adjustment unit 231 and / or a second angle adjustment unit 232. The first angle adjustment unit 231 includes a first base 231a and a first electrode fixing ball 231b. The first base 231a is connected to the inner end of the first drive shaft 221a, and has a first mounting groove 231c with an opening facing the first electrode E1. The first electrode fixing ball 231b is rotatably disposed within the first mounting groove 231c, and the first electrode mounting position 201 is configured as a first electrode mounting hole on the first electrode fixing ball 231b. The second angle adjustment unit 232 includes a second base 232a and a second electrode fixing ball 232b. The second base 232a is connected to the second drive shaft 222a, and has a second mounting groove 232c with an opening facing the second electrode E2. The second electrode fixing ball 232b is rotatably disposed in the second mounting groove 232c, and the second electrode mounting position 202 is configured as a second electrode mounting hole disposed on the second electrode fixing ball 232b.

[0052] The first angle adjustment unit 231 further includes a first fixing member (not shown in the figure), which is connected to the first base 231a and used to fix the first electrode fixing ball 231b in the first mounting groove 231c. The second angle adjustment unit 232 further includes a second fixing member, which is connected to the second base 232a and used to fix the second electrode fixing ball 232b in the second mounting groove 232c. Both the first and second fixing members can be wing screws, which facilitates manual tightening of the screws by the operator to fix the electrode fixing ball. In addition, multiple first and second fixing members can be configured, such as three, with each of the three first and second fixing members screwed into the corresponding first mounting groove 231c or second mounting groove 232c to fix the first electrode fixing ball 231b and the second electrode fixing ball 232b at the corresponding angle.

[0053] The first angle adjustment unit 231 and the second angle adjustment unit 232 are conductive. Due to their simple machining and low cost, the first base 231a and its first electrode fixing sphere 231b, and the second base 232a and its second electrode fixing sphere 232b can all be customized and replaced as modular components according to the needs of the scenario. That is, different bowl shapes can be used to adapt to different access device requirements, and different spherical electrode fixing spheres can be used to adapt to different access electrode requirements. The first angle adjustment unit 231, the second angle adjustment unit 232, and the fixing component can be made of a low-resistance metal material. Testing has shown that this structure does not affect the conductivity between the electrodes and the power supply; after power is applied to both sides of the electrodes, breakdown discharge can be achieved to generate plasma. The resistivity range of the low-resistance metal material can be 10 Ω·cm. -8 ~10 -6 Ω·m Ohm·meter.

[0054] The assembly method of the first angle adjustment unit 231 and the second angle adjustment unit 232 is as follows: First, the first base 231a and the second base 232a are respectively shafted to the inner ends of the first transmission shaft 221a and the second transmission shaft 222a; then, the first electrode E1 and the second electrode E2 are respectively installed into the first electrode fixing ball 231b and the second electrode fixing ball 232b, and the corresponding electrode fixing balls are slightly tightened with wing screws to fix them; next, the corresponding electrode fixing balls are rotated to adjust their degrees of freedom, and the angle after the corresponding electrodes are aligned is fixed by using a clamp or manual alignment method; finally, the wing screws are tightened to lock the degrees of freedom of the corresponding electrode fixing balls and achieve fixation.

[0055] Based on the above embodiments, the electrode spacing adjustment component 220 of the generator 200 is used to adjust the spacing between the first electrode E1 and the second electrode E2 based on the corresponding control signals of the control module. Specifically, the control module sends corresponding control signals (including initial positioning control signals and distance adjustment signals) carrying corresponding spacing parameters to the first axial drive unit 221b and the second axial drive unit 222b. That is, when preparing single atoms / clusters, an initial positioning control signal is sent to the first axial drive unit 221b and the second axial drive unit 222b of the electrode spacing adjustment component 220. Based on the initial positioning control signal, the electrode spacing adjustment component 220 controls the first electrode E1 and the second electrode E2 to move towards each other and touch (0 mm apart), thereby completing the initial positioning of the first electrode E1 and the second electrode E2. Then, after the initial positioning of the first electrode E1 and the second electrode E2 is completed, the control module is also used to send a corresponding spacing adjustment signal to the electrode spacing adjustment component 220 based on the spacing parameters corresponding to the current unit / cluster preparation. The electrode spacing adjustment component 220 controls the first electrode E1 and the second electrode E2 to move backward a corresponding distance based on the corresponding spacing adjustment signal. In this embodiment, by controlling the first electrode E1 and the second electrode E2 to touch each other in each preparation of a single atom to achieve initial positioning between them, the position where the first electrode E1 and the second electrode E2 touch each other is regarded as the starting position, so as to accurately control the spacing between the first electrode E1 and the second electrode E2. After the distance adjustment is completed, the control module sends a corresponding pulse power control signal to the power module. The power module provides pulse power to the first electrode E1 and the second electrode E2 based on the corresponding pulse power control signal to generate spark ablation between the first electrode E1 and the second electrode E2, thereby producing the corresponding single atom. The control module is also used to send a corresponding gas source control signal to the gas source component 300 based on the preset gas source parameters, and control the gas source component 300 to deliver the corresponding carrier gas to the generation chamber 210, so that the single atom combines with the corresponding carrier gas to obtain the corresponding cluster particles.

[0056] Regarding the air source component 300: The gas source assembly 300 can be any known type of gas source assembly 300. For example, in one embodiment, the gas source assembly 300 can be configured to include a gas supply cylinder for holding carrier gas and a first gas delivery pipeline. The input end of the first gas delivery pipeline is in sealed communication with the gas source outlet of the gas supply cylinder, and the output end passes through the pressure reducing valve and the flow meter in sequence before being in sealed communication with the carrier gas inlet pipe 213. Specifically, the output end of the first gas delivery pipeline is in sealed communication with the generating chamber 210 through the carrier gas inlet pipe 213 to deliver carrier gas into the generating chamber 210. In this embodiment, both the pressure reducing valve and the flow meter are electrically connected to the control module and are used to adjust the gas pressure and flow rate based on set gas pressure and flow rate parameters.

[0057] Please continue reading Figure 2 In another embodiment, the gas source assembly 300 includes at least two gas cylinders 310 for holding carrier gas, at least two first gas delivery pipelines 320 corresponding to the at least two gas cylinders 310, at least two pressure reducing valves 330, and at least two flow meters 340; the gas source assembly 300 also includes a ventilation valve 350 and a second gas delivery pipeline (not shown in the figure). The input ends of the at least two first gas delivery pipelines 320 are sealed to the gas source outlets of the at least two gas cylinders 310, and the output ends are sealed to the input end of the ventilation valve 350 after passing through the corresponding pressure reducing valves 330 and flow meters 340. The output end of the ventilation valve 350 is sealed to the input end of the second gas delivery pipeline, and the output end of the second gas delivery pipeline is sealed to the generating chamber 210 to deliver at least one carrier gas to the generating chamber 210. The pressure reducing valve 330 is used to adjust the gas pressure of the passing carrier gas to prevent damage to the flow meter 340. The flow meter 340 is used to adjust the gas flow rate of the carrier gas. The pressure reducing valve 330, the flow meter 340, and the ventilation valve 350 are all electrically connected to the control module to adjust the pressure reducing valve 330, the flow meter 340, and / or the ventilation valve 350 according to different needs, thereby realizing the switching, pressure regulation, and / or flow rate regulation of the carrier gas.

[0058] Preferably, in the at least two carrier gas cylinders, each cylinder contains a different carrier gas. The carrier gas can be an inert gas such as argon, helium, nitrogen, etc., or a reactive gas such as hydrogen, methane, etc., thereby providing a carrier gas source required for various scenarios. The carrier gas can be condensed and used to accelerate the single atoms generated by ablation, and is output to the collection unit 420 in the deposition device 400 through the beam outlet 214. The carrier gas also assists in electrode spark ablation (providing a stable spark ablation environment, or reacting with the products generated by ablation to obtain the target single atom or compound). In order to quickly and efficiently discharge cluster ions into the deposition device 400, the axes of the carrier gas inlet pipe 213, the beam outlet 214, and the deposition device 400 are all coincident, and this axis is perpendicular to the axes of the first electrode E1 and the second electrode E2 and intersects at the center point of the first electrode E1 and the second electrode E2.

[0059] In this embodiment, based on the single atom / cluster ions to be prepared in different embodiments, a corresponding carrier gas source can be selected, thereby controlling the gas exchange valve 350 to switch to the path of the corresponding carrier gas source, so that the corresponding carrier gas source is delivered to the generating chamber 210.

[0060] In this embodiment, the gas source assembly 300 includes four gas cylinders 310, four first gas delivery pipelines 320 corresponding to each of the four gas cylinders 310, four pressure reducing valves 330, and four flow meters 340. The four gas cylinders 310 store different types of carrier gas or store the same type of carrier gas. In this embodiment, the ventilation valve 350 and the second gas delivery pipeline are combined into one. The input ends of the four first gas delivery pipelines 320 are sealed and connected to the gas source outlets of the four gas cylinders 310, and their output ends are sealed and connected to the input end of the ventilation valve 350 after passing through the corresponding pressure reducing valve 330 and flow meters 340. The output end of the ventilation valve 350 is sealed and connected to the input end of the second gas delivery pipeline, and the output end of the second gas delivery pipeline is sealed and connected to the carrier gas inlet pipe 213 of the generating chamber 210 to deliver at least one type of carrier gas to the generating chamber 210. The axis of the output end of the second gas supply pipeline coincides with the axis of the carrier gas inlet pipe 213. Furthermore, the axes of the output end of the second gas supply pipeline, the carrier gas inlet pipe 213, the beam outlet 214, and the deposition device 400 coincide.

[0061] In the illustrated embodiment, a gas cylinder mounting bracket 311 for securing four gas cylinders 310 is provided on the rear side of the frame 110. The gas cylinder mounting bracket 311 is located near one side wall (rear side wall 106) of the housing 100, and this rear side wall 106 is detachably connected to the frame 110 within the single-atom / cluster generator to facilitate the assembly and disassembly of the gas cylinders 310. Specifically, the four gas cylinders 310 are positioned on the gas cylinder mounting bracket 311 on the side directly opposite the rear side wall 106, and the four gas cylinders 310 are arranged side-by-side along the height direction.

[0062] The pressure reducing valve 330 and the gas cylinder fixing bracket 311 are located on the same side (rear side) of the frame 110. The frame 110 is provided with a pressure reducing valve fixing bracket 331 for fixing the pressure reducing valve 330. The pressure reducing valve 330 is located on the side of the pressure reducing valve fixing bracket 331 facing the side of the shell wall.

[0063] The second air supply pipe can be connected to the carrier gas inlet pipe 213 in a sealed manner using any existing sealed connection structure. For example, a structure similar to or the same as the sealing assembly structure (first assembly structure 430) of the inlet end 401 and inlet pipe 412 of the deposition structure described below can be used to achieve a sealed connection between the second air supply pipe and the carrier gas inlet pipe 213. Specifically, a flange is fixedly provided at the output end of the second air supply pipe, and a matching flange is provided on the carrier gas inlet pipe 213. The two flanges are detachably connected and a sealing ring is provided between them. The two flanges can be connected by threads. The two flanges can also be fastened together by a clamp to achieve axial fixation of the two flanges. The opposite sides of the two flanges each have an inclined surface that slopes outward in the opposite direction; the inner periphery of the clamp has two pressing surfaces for pressing the two inclined surfaces in a clamped state (see the description of the first assembly structure 430 of the deposition device 400 below, which will not be repeated here).

[0064] Regarding deposition unit 400: Please see Figures 7 to 11 The deposition apparatus 400 includes a deposition chamber 410 having an air inlet end 401 and an air outlet end 402, and a collection unit 420 detachably mounted on the deposition chamber 410. One end (inner end) of the collection unit 420 extends into the deposition chamber 410 and its collection position 423 faces the air inlet end 401.

[0065] The inlet 401 of the deposition chamber 410 is used to receive the single-atom / cluster beam, and the outlet 402 is used to discharge the carrier gas. The deposition chamber 410 can be configured as a tubular structure with open ends, one axial end being the inlet 401 and the other axial end being the outlet 402. The deposition chamber 410 can also be configured as a barrel-shaped structure with one open end and the other closed, the open end being configured as the inlet 401, and an outlet is provided on the side wall near the closed end, the outlet being sealed and connected to an outlet pipe 411, which serves as the outlet 402 of the deposition chamber 410. The axis of the exhaust pipe 411 is perpendicular to the axis of the deposition chamber 410. When the deposition chamber 410 is horizontally connected to the beam outlet 214, the exhaust pipe 411 is vertically downward so that it can be directly buried in a liquid, such as water, or buried in a liquid through an external pipe, thereby dissolving the escaped single atom / cluster particles and carrier gas in the liquid and avoiding pollution of the experimental environment.

[0066] In the illustrated embodiment, the inlet end 401 of the deposition chamber 410 is provided with a first assembly structure 430, which is used to assemble inlet pipes 412 of different sizes, such as different lengths. The different lengths of the inlet pipes 412 can change the distance between the inlet end 401 of the deposition chamber 410 and the beam outlet 214, thereby changing the distance between the collection unit 420 and the beam outlet 214. This allows for adjustment of the single-atom / cluster sample (hereinafter referred to as the sample) collection distance. Increasing the sample collection distance increases the flight time of single-atom / cluster particles in space. A longer flight time allows for more collisions between cluster particles and gas atoms in the air, resulting in an increase in the average particle size. Based on this, by assembling inlet pipes 412 of different lengths on the first assembly structure 430, the sample collection distance can be changed, thereby collecting samples of various distribution levels, stability, and sizes according to the needs of different embodiments.

[0067] In the illustrated embodiment, the first assembly structure 430 includes a first flange 431 disposed at the air inlet end 401 and a plurality of matching second flanges 432, wherein one of the plurality of second flanges 432 can be detachably connected to the first flange 431. The first flange 431 can be connected to the air inlet end 401 by welding. Each second flange 432 is connected to an air inlet pipe 412, and the length of the air inlet pipe 412 connected to each second flange 432 is different. In this embodiment, the air inlet pipe 412 and the outer side (the side opposite to the first flange 431) of the second flange 432 are coaxially welded together, and the second flange 432 and the corresponding air inlet pipe 412 are a non-detachable integral structure. Therefore, this integral structure can also be referred to as an air inlet pipe 412 with a second flange 432. Welding can solve the problem of poor sealing at the connection between the second flange 432 and the air inlet pipe 412, and can eliminate the need for a sealing structure. However, welding increases the number of second flanges 432 and intake pipes 412.

[0068] To address the increased number of second flanges 432 and intake pipes 412 resulting from welding, in another embodiment, the first assembly structure 430 can be configured as follows: the first assembly structure 430 includes a first flange 431 fixedly disposed at the intake end 401 and a second flange 432 detachably connected to the first flange 431. The second flange 432 can be detachably and sealingly connected to intake pipes 412 of different lengths. Similarly, the first flange 431 can be welded to the intake end 401. The difference between this embodiment and the previous embodiment is that there is only one first flange 431 and one second flange 432. The second flange 432 can be detachably connected to intake pipes 412 of different lengths, and a sealing structure is provided at the connection point with the intake pipe 412. The sealing structure can be any known sealing structure capable of sealing the connection point.

[0069] Those skilled in the art will understand that, regardless of the embodiment used, corresponding sealing structures are provided at each detachable connection to achieve the airtightness of the deposition chamber 410. For example, a first sealing ring 4301 is provided between the mating surfaces of the first flange 431 and the second flange 432 to achieve a seal between the first flange 431 and the second flange 432.

[0070] The first flange 431 and the second flange 432 can be detachably connected using known detachable connection methods. For example, the first flange 431 and the second flange 432 can be threaded together, or the first flange 431 and the second flange 432 can be axially clamped and fixed by a first clamp 433. In the threaded connection method, the outer periphery of the first flange 431 and the second flange 432 are coaxially provided with connection holes, and every two coaxial connection holes (the connection holes on the first flange 431 and the coaxial connection holes on the second flange 432) are connected together by bolts.

[0071] In the connection method using the first clamp 433, the opposite sides of the first flange 431 and the second flange 432 need to be set as inclined surfaces. Hereinafter, the inclined surface of the first flange 431 will be referred to as the first inclined surface 4311, and the inclined surface of the second flange 432 will be referred to as the second inclined surface 4321. Both the first inclined surface 4311 and the second inclined surface 4321 are inclined outwards (radially outwards) in opposite directions. The inner periphery of the first clamp 433 has a first pressing surface 43311 and a second pressing surface 43321 for pressing the first inclined surface 4311 and the second inclined surface 4321 in a clamped state. Specifically, the general structure of the first clamp 433 is similar to a known clamp structure, having a first fixing ring (semi-circular arc) and a second fixing ring. One end of the first fixing ring and the second fixing ring are hinged, and the distance between the first fixing ring and the second fixing ring is adjusted by bolts or other structures, thereby adjusting the inner radial dimension of the first clamp 433. The subtle difference from known clamp structures lies in that the first clamp 433 (first fixing ring and second fixing ring) has a first ring wall 4331 and a second ring wall 4332 spaced apart along the axial direction. The first ring wall 4331 is connected to the outer peripheral surface of the second ring wall 4332 by an outer peripheral wall. The inner peripheral edge of the first ring wall 4331 forms a first pressing surface 43311 for pressing the first inclined surface 4311, and the inner peripheral edge of the second ring wall 4332 forms a second pressing surface 43321 for pressing the second inclined surface 4321. When the first clamp 433 closes and tightens, it cooperates with the first inclined surface 4311 and the second inclined surface 4321 to push the first flange 431 and the second flange 432 to move relative to each other in the axial direction, thereby achieving axial pressing and fixing of the first flange 431 and the second flange 432.

[0072] The second assembly structure 440 is disposed on the side wall of the deposition chamber 410, and an assembly pipe 413 is hermetically connected to the side wall. The assembly pipe 413 can be welded to the side wall of the deposition chamber 410, and the axis of the assembly pipe 413 is perpendicular to the axis of the deposition chamber 410. The second assembly structure 440 is disposed on the end (outer end) of the assembly pipe 413 away from the deposition chamber 410.

[0073] The second assembly structure 440 can be configured to include a third flange 441 disposed at the outer end of the assembly tube 413, the third flange 441 being welded to the outer end of the assembly tube 413. The inner end of the collection unit 420 extends into the sedimentation chamber 410 through the assembly tube 413, the outer end of the collection unit 420 is detachably connected to the third flange 441, and a second sealing ring 4401 is provided between the outer end of the collection unit 420 and the third flange 441.

[0074] The collection unit 420 includes a cylindrical collection seat 421 and a fourth flange 422 disposed at the outer end of the collection seat 421. The inner end of the collection seat 421 extends inward through the assembly tube 413 into the deposition chamber 410, and its collection position 423 is directly opposite the air inlet end 401. The collection position 423 is used to assemble a collection substrate, such as a substrate, copper mesh, or carbon film. The outer diameter of the fourth flange 422 disposed at the outer end of the collection unit 420 is adapted to the outer diameter of the third flange 441. The fourth flange 422 and the third flange 441 are detachably connected, and the second sealing ring 4401 is disposed between the fourth flange 422 and the third flange 441.

[0075] The fourth flange 422 can be detachably connected to the third flange 441 using a known detachable connection method. For example, the fourth flange 422 and the third flange 441 can be threaded together. Alternatively, the fourth flange 422 and the third flange 441 can also be axially clamped and fixed using a second clamp 443. In the threaded connection method, both the fourth flange 422 and the third flange 441 have coaxial connecting holes on their outer peripheries, and every two coaxial connecting holes are connected together by bolts.

[0076] In the connection via the second clamp 443, the opposite sides of the third flange 441 and the fourth flange 422 are set as inclined surfaces. Hereinafter, the inclined surface of the third flange 441 is referred to as the third inclined surface 4411, and the inclined surface of the fourth flange 422 is referred to as the fourth inclined surface 4221. Both the third inclined surface 4411 and the fourth inclined surface 4221 are inclined outwards (radially outwards) in opposite directions. The inner periphery of the second clamp 443 has a third pressing surface 44311 and a fourth pressing surface 44321 for pressing the third inclined surface 4411 and the fourth inclined surface 4221 in a clamped state. Specifically, the general structure of the second clamp 443 is similar to a known clamp structure, having a third fixing ring (semi-circular arc) and a fourth fixing ring. One end of the third and fourth fixing rings is hinged, and the distance between the third and fourth fixing rings is adjusted by bolts or other structures, thereby adjusting the inner radial dimension of the second clamp 443. The subtle difference from known clamp structures lies in the fact that the second clamp 443 (the third and fourth fixing rings) has a third ring wall 4431 and a fourth ring wall 4432 spaced apart along the axial direction. The third ring wall 4431 is connected to the fourth ring wall 4432 by an outer peripheral wall. The inner peripheral edge of the third ring wall 4431 forms a third pressing surface 44311 for pressing the third inclined surface 4411, and the inner peripheral edge of the fourth ring wall 4432 forms a fourth pressing surface 44321 for pressing the fourth inclined surface 4221. When the second clamp 443 closes and tightens, it cooperates with the third inclined surface 4411 and the fourth inclined surface 4221 to push the third flange 441 and the fourth flange 422 to move relative to each other in the axial direction, thereby achieving axial pressing and fixing of the third flange 441 and the fourth flange 422.

[0077] As an example, for assembling the second sealing ring 4401, a first annular groove 4412 is provided on the side of the third flange 441 facing the fourth flange 422, and a second annular groove 4222 is provided on the side of the fourth flange 422 facing the third flange 441. The first annular groove 4412 and the second annular groove 4222 are arranged opposite to each other and their inner diameters are adapted to the outer diameter of the collecting seat 421. The second sealing ring 4401 has a sealing ring 4401a and a sealing gasket 4401b disposed on the outer periphery of the sealing ring 4401a. The two ends of the sealing ring 4401a are embedded in the first annular groove 4412 and the second annular groove 4222, and the sealing gasket 4401b is tightly fitted between the third flange 441 and the fourth flange 422.

[0078] Based on the above embodiments, the deposition device 400 has at least the following beneficial effects: (1) By setting a first assembly structure 430 at the air inlet end 401 of the deposition chamber 410, the first assembly structure 430 can assemble air inlet pipes 412 of different sizes, thereby making the sample collection distance between the collection unit 420 and the beam outlet 214 of the cluster generation device adjustable, which can increase the versatility, applicability and flexibility of the deposition device 400. (2) The first assembly structure 430 realizes the fastening and loosening of the first flange 431 and the second flange 432 through the first clamp 433. Compared with the traditional threaded connection method, it is faster to disassemble and assemble and has higher assembly efficiency. (3) The air outlet pipe 411 is arranged on the side wall of the deposition chamber 410 and its axis is perpendicular to the axis of the deposition chamber 410. When the deposition chamber 410 is horizontally connected to the beam outlet 214, the air outlet faces directly downward so as to be buried below the liquid surface.

[0079] In summary, the single-atom / cluster generating device of this utility model has at least the following beneficial effects: (1) Through the electrode spacing adjustment component electrically connected to the control module, the operator can set the spacing parameters between the two electrodes through the human-machine interaction unit. The control module adjusts the distance between the two electrodes based on the set spacing parameters, thereby obtaining cluster particles with different distribution morphologies, active site structures and different particle sizes to meet different scenarios and needs. (2) When adjusting the distance each time, the control module sends an initial positioning control signal to the electrode spacing adjustment component, so that the two electrodes move towards each other and touch, thereby completing the initial positioning of the two electrodes. This makes the movement distance control of the two electrodes more precise, so that the preparation efficiency of single-atom / cluster particles is kept in the optimal state. (3) The gas source component is equipped with multiple parallel gas supply channels. The gas source channel is switched and the flow rate is adjusted through the gas exchange valve connected to each gas supply channel, so that different carrier gases can be provided according to the needs. A pressure reducing valve and a flow meter are set on each gas source channel, which can independently control the carrier gas in a single channel, which is convenient for switching different carrier gases. In addition, the configuration of multiple carrier gas channels can avoid frequent replacement of different carrier gas cylinders. (4) An electrode angle adjustment component is configured at one end of the electrode spacing adjustment component that extends into the generation chamber. This component can adjust the coaxial alignment of the two electrodes when assembling them, thereby improving the discharge stability. At the same time, it can improve the single-atom preparation efficiency, thereby improving the generation efficiency of cluster particles. (5) The deposition device is configured to be equipped with gas inlet pipes of different lengths, so that the distance between the collection unit in the deposition device, such as the substrate, copper mesh, and carbon film, and the beam outlet can be adjusted, thereby obtaining cluster particles with different distribution morphologies, sizes, and uniformities. In summary, the single-atom / cluster generation device of this invention, whether in terms of gas source supply or single-atom / cluster ion preparation, enables the single-atom / cluster generation device of this invention to meet more needs and improves the versatility of single-atom / cluster ion preparation.

[0080] Based on the single-atom / cluster generating device described above, this utility model also discloses a method for preparing single atoms / clusters using the single-atom / cluster generating device, comprising the following steps: S101, The control module generates and sends an initial positioning control signal to the electrode spacing adjustment assembly 220; S102. Based on the initial positioning control signal, the electrode spacing adjustment component 220 controls the first electrode E1 and the second electrode E2 to move towards each other and touch, thereby completing the initial positioning of the first electrode E1 and the second electrode E2. S103. Based on the preset spacing parameters between the first electrode E1 and the second electrode E2, the control module generates and sends an electrode spacing adjustment signal to the electrode spacing adjustment component 220. S104. Based on the electrode spacing adjustment signal, the electrode spacing adjustment component 220 controls the first electrode E1 and the second electrode E2 to move backward by a corresponding distance. S105, the control module generates and sends a pulse power control signal to the power module, and controls the gas source component 300 to deliver the corresponding carrier gas to the generation chamber 210 based on the preset relevant gas source parameters, so that spark ablation is generated between the first electrode E1 and the second electrode E2 to obtain single atoms, and the single atoms combine with the corresponding carrier gas to obtain the corresponding cluster particles.

[0081] Based on the above-mentioned single-atom / cluster generation equipment, several examples of single-atom / cluster preparation methods based on different gas sources, electrode spacing, gas flow rates, and / or deposition distances are exemplified below.

[0082] Example 1 In this embodiment, argon is selected as the carrier gas. The first electrode E1 and the second electrode E2 are tungsten electrodes, and the distance between them is set to 1.5 mm. The first electrode E1 and the second electrode E2 need to be moved by 0.75 mm. The flow rate is set to 1 slm. The collection unit 420 in the deposition chamber 410 is a copper mesh carbon film, and the distance between the copper mesh carbon film and the spark ablation site is set to 5 cm (achieved by replacing the corresponding length of the inlet pipe 412).

[0083] S201, Set the constant current parameter to 100mA; S202, the control module controls the first axial drive unit 221b and the second axial drive unit 222b to move, thereby causing the first electrode E1 and the second electrode E2 to come into contact; at this time, the distance between the first electrode E1 and the second electrode E2 is 0mm (initial positioning is completed). S203. When the first electrode E1 and the second electrode E2 come into contact (this can be detected by manual observation or by setting a detection module), the control module controls the first electrode E1 and the second electrode E2 to move 0.75mm in opposite directions. S204. The control module transmits the corresponding flow rate of carrier gas to the generating chamber 210 based on the set flow parameters. S205. Apply a pulse voltage to cause spark ablation of the first electrode E1 and the second electrode E2. After using carrier gas to blow out and perform condensation growth for about 30 minutes, stop the device and take out the tungsten cluster sample one.

[0084] Example 2 The difference between this embodiment and Embodiment 1 is that the distance between the copper mesh carbon film of the required tungsten cluster and the spark ablation site is 10 cm, while all other aspects remain unchanged. After applying a pulse voltage to induce spark ablation at the first electrode E18 and the second electrode E29, and using carrier gas to blow out and allow for condensation growth for approximately 30 minutes, the device operation was stopped and the second tungsten cluster sample was removed.

[0085] Example 3 With a constant current of 100 mA, an electrode spacing of 1.5 mm, and a gas flow rate of 3 slm, copper mesh carbon films of tungsten clusters were prepared using the above-mentioned method, and the films were positioned at distances of 5 cm and 10 cm from the spark ablation site, respectively, to obtain tungsten cluster sample three and cluster sample four.

[0086] STEM characterization was performed on tungsten cluster samples one, two, three, and four, and the STEM characterization of tungsten cluster samples one, two, three, and four were obtained. Figure 12 , Figure 12 In the figure, (a) represents the STEM characterization of tungsten cluster sample one, (b) represents the STEM characterization of tungsten cluster sample two, (c) represents the STEM characterization of tungsten cluster sample three, and (d) represents the STEM characterization of tungsten cluster sample four. It is clear from the figures that, with other parameters remaining constant, increasing the collection distance increases the cluster size. Increasing the collection distance is equivalent to increasing the time the particles spend flying in space. A longer flight time allows for more collisions between cluster particles and gas atoms in the air, resulting in an increase in the average particle size.

[0087] Example 4 Example 4 describes the preparation steps of different element clusters. The parameters in Example 4 are the same as those in Example 1. The first electrode E1 and the second electrode E2 are copper electrodes.

[0088] S301, Set the constant current parameter to 100mA; S302, the module control unit moves the first axial drive unit 221b and the second axial drive unit 222b, thereby causing the first electrode E1 and the second electrode E2 to come into contact; at this time, the distance between the first electrode E1 and the second electrode E2 is 0mm (initial positioning is completed). S303. When the first electrode E1 and the second electrode E2 come into contact (this can be detected by manual observation or by setting a detection module), the control module controls the first electrode E1 and the second electrode E2 to move 0.75mm in opposite directions. S304. The control module transmits the corresponding flow rate of carrier gas to the generating chamber 210 based on the set flow parameters. S305. Apply a pulse voltage to cause spark ablation of the first electrode E1 and the second electrode E2, and use carrier gas to blow out and condense growth for about 30 minutes. Then stop the device and remove the copper cluster.

[0089] Under the same conditions, iron clusters, nickel clusters, and titanium clusters were prepared using the above-described cluster preparation method. The first electrode E1 and the second electrode E2 of the prepared copper clusters, iron clusters, nickel clusters, and titanium clusters were copper electrodes, iron electrodes, nickel electrodes, and titanium electrodes, respectively.

[0090] The prepared copper, iron, nickel, and titanium clusters were characterized by STEM to obtain STEM characteristics of different elements under the same parameters. Figure 13 , Figure 13 (a) shows the STEM characterization of copper clusters, (b) shows the STEM characterization of iron clusters, (c) shows the STEM characterization of nickel clusters, and (d) shows the STEM characterization of titanium clusters. As can be seen from the figures, the prepared samples are essentially single-atom particles and are much darker compared to the tungsten samples. The brightness of dark-field images in spherical aberration electron microscopy is mainly determined by atomic weight; that is, the heavier the element, the brighter it appears.

[0091] The above embodiments only illustrate preferred implementations of this utility model, and their descriptions are relatively specific and detailed, but they should not be construed as limiting the scope of the utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A gas source assembly for a single-atom / cluster generator, used to provide carrier gas to the generation chamber of the single-atom / cluster generator, characterized in that: The device includes at least two gas supply cylinders for holding carrier gas, housed within the casing of a single-atom / cluster generator; at least two first gas delivery pipelines corresponding to the at least two gas supply cylinders; at least two pressure reducing valves; and at least two flow meters. It also includes a gas exchange valve and a second gas delivery pipeline. The input ends of the at least two first gas delivery pipelines are sealed-connected to the gas source outlets of the at least two gas supply cylinders, and their output ends are sealed-connected to the input end of the gas exchange valve after passing through corresponding pressure reducing valves and flow meters. The output end of the gas exchange valve is sealed-connected to the input end of the second gas delivery pipeline, and the output end of the second gas delivery pipeline is sealed-connected to the generation chamber to deliver at least one carrier gas to the generation chamber. The pressure reducing valves are used to adjust the gas pressure of the passing carrier gas, and the flow meters are used to adjust the gas flow rate of the carrier gas.

2. The gas source component of the single atom / cluster generator as described in claim 1, characterized in that: Each gas cylinder provides a different carrier gas.

3. The gas source component of the single-atom / cluster generator as described in claim 1, characterized in that: The housing is provided with a gas cylinder fixing bracket for fixing the at least two gas cylinders.

4. The gas source component of the single atom / cluster generator as described in claim 3, characterized in that: The gas cylinder mounting bracket is located near one side of the housing wall, and this side of the housing wall is detachably connected to the frame inside the single atom / cluster generator to facilitate the installation and removal of the gas supply cylinder.

5. The gas source component of the single-atom / cluster generator as described in claim 4, characterized in that: The at least two gas supply cylinders are disposed on the side of the gas cylinder fixing frame facing the side of the shell wall, and the at least two gas supply cylinders are arranged side by side along the height direction.

6. The gas source component of the single atom / cluster generating device as described in claim 4, characterized in that: The pressure reducing valve and the gas cylinder fixing bracket are located on the same side of the frame. The frame is provided with a pressure reducing valve fixing bracket for fixing the pressure reducing valve. The pressure reducing valve is located on the side of the pressure reducing valve fixing bracket that faces the side wall of the shell.

7. The gas source component of the single-atom / cluster generator as described in claim 1, characterized in that: The gas supply cylinders are configured as four, and each of the four gas supply cylinders stores a different type of carrier gas.

8. The gas source component of the single-atom / cluster generation device as described in claim 1, characterized in that: The axis of the second gas supply line coincides with the axis of the beam outlet of the generating chamber.

9. The gas source component of the single-atom / cluster generation device as described in claim 1, characterized in that: The output end of the second gas supply pipeline is in a sealed connection with the generating chamber and is clamped to the carrier gas input end of the generating chamber by a clamp.

10. A single-atom / cluster generation device, comprising a housing, a frame disposed within the housing, and a generation chamber disposed on the frame, characterized in that: It also includes a gas source assembly that is in sealed communication with the carrier gas inlet of the generating chamber as described in any one of claims 1 to 9.

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