A high-purity powder screening device for semiconductor material manufacturing

Abstract

The application discloses a high-purity powder screening device for semiconductor material manufacturing, which comprises a gas guide base, one end of the gas guide base is provided with an air inlet pipe, the air inlet pipe is connected with an external air pump, an upper end of the screening cylinder is provided with a cover, an upper end of the cover is provided with a feeding port, the feeding port is connected with an external conveying pipeline, a plurality of cyclone separators are arranged on the outer side of the screening cylinder, the upper end of the cyclone separator is provided with an air outlet for discharging gas, and a collecting cylinder is arranged at the lower end of the cyclone separator. The application has at least the following beneficial effects: the Venturi effect is utilized to generate stable upward airflow at the connection between the gas guide base and the screening cylinder, the vibration of the screening mechanism is coordinated, the composite screening of airflow and vibration is realized, the screening efficiency is improved, the requirement for the mesh number of the filter screen is reduced, the risk of screen blockage is reduced, meanwhile, the powder with qualified particle size is effectively separated and collected.

Description

Technical Field

[0001] This application relates to the field of semiconductor material manufacturing technology, specifically to a high-purity powder screening device for semiconductor material manufacturing. Background Technology

[0002] In the semiconductor material manufacturing process, the screening of high-purity powders is a critical step because the particle size distribution and purity of the powder directly affect the performance and reliability of semiconductor devices. Traditional screening devices mostly use mechanical vibrating screens or air classifiers, but these have the following problems:

[0003] When screening high-purity powders, mechanical vibrating screens are prone to clogging, requiring frequent shutdowns for cleaning and reducing production efficiency. Secondly, screening in the air may cause powder oxidation or environmental pollution, affecting product quality.

[0004] Therefore, there is an urgent need in the field for a device that can efficiently and stably screen high-purity powders under inert gas protection to solve the above problems. Utility Model Content

[0005] Therefore, this application provides a high-purity powder screening device for semiconductor material manufacturing to solve the problems existing in the prior art.

[0006] To achieve the above objectives, this application provides the following technical solution:

[0007] A high-purity powder screening device for semiconductor material manufacturing, comprising:

[0008] A gas guide base, one end of which is equipped with an air inlet pipe, which is connected to an external air pump, which is connected to an inert gas storage tank, and the air pump is used to introduce the gas in the inert gas storage tank into the gas guide base.

[0009] The upper end of the air guide base is connected to a sieve cylinder. The connection between the sieve cylinder and the air guide base is constricted. The upper opening diameter and the lower opening diameter of the air guide base are both smaller than the body diameter of the air guide base and the air inlet pipe. The upper end of the air guide base and the lower end of the sieve cylinder are both arc-shaped.

[0010] The upper end of the screening cylinder is equipped with a cover, and the upper end of the cover is equipped with a feed inlet. The feed inlet is connected to an external conveying pipe, and the conveying pipe conveys high-purity powder for semiconductor material manufacturing. A vibrating screen mechanism is installed on the inner side of the cover.

[0011] Several cyclone separators are installed on the outside of the screening cylinder. The upper end of the cyclone separator is opened to discharge gas, and the lower end of the cyclone separator is equipped with a collection cylinder.

[0012] Optionally, the vibrating screen mechanism includes a mounting cylinder, an mounting rod slidably connected to the outer side of the mounting cylinder, the upper end of the mounting rod being fixed to the inner wall of the cover, the mounting rod limiting the mounting cylinder to move up and down, a spring being sleeved on the outer side of the mounting rod, the two ends of the spring being fixed to the mounting rod and the mounting cylinder respectively, an asymmetric cam being provided on the upper side of the mounting cylinder, the asymmetric cam being connected to the output end of a drive motor installed on the outer side of the cover, and a filter screen being installed on the inner side of the mounting cylinder, the filter screen being used to filter high-purity powder.

[0013] Optionally, a mounting bracket is also installed at an equal angle at the lower end of the mounting cylinder, and a guide plate is installed at the lower end of the mounting bracket.

[0014] Optionally, the longitudinal section of the guide plate is inverted "V" shape.

[0015] Optionally, a compensation ring located inside the mounting cylinder is also installed on the lower side of the cover.

[0016] Optionally, a number of reinforcing rods are also fixed between the air guide base and the screening cylinder.

[0017] Compared with the prior art, this application has at least the following beneficial effects:

[0018] 1. By utilizing the Venturi effect, a stable upward airflow is generated at the connection between the air guide base and the screening cylinder. This, combined with the vibration of the vibrating screening mechanism, achieves a composite screening of airflow and vibration. This not only improves screening efficiency but also reduces the requirements for the mesh size of the filter screen, thereby reducing the risk of screen clogging. At the same time, it ensures that powder with the correct particle size is effectively separated and collected.

[0019] 2. By incorporating components such as guide plates, compensation rings, and reinforcing rods, the powder is guided to move outwards, compensating for vibration gaps and reinforcing the connection structure. This further improves the stability and sealing of the device's operation, reduces dust leakage, and facilitates efficient collection of compliant powder via cyclone separators and collection cylinders, thereby enhancing the overall practicality and service life of the device. Attached Figure Description

[0020] To more intuitively illustrate the prior art and this application, exemplary drawings are provided below. It should be understood that the specific shapes and structures shown in the drawings should not generally be regarded as limiting conditions for implementing this application; for example, based on the technical concept disclosed in this application and the exemplary drawings, those skilled in the art are able to easily make conventional adjustments or further optimizations to the addition / reduction / classification, specific shapes, positional relationships, connection methods, size ratios, etc. of certain units (components).

[0021] Figure 1 A schematic diagram of the overall structure of a high-purity powder screening device for semiconductor material manufacturing provided in this application;

[0022] Figure 2 This is a schematic cross-sectional view of the overall structure of a high-purity powder screening device for semiconductor material manufacturing provided in this application.

[0023] Explanation of reference numerals in the attached figures:

[0024] 1. Air guide base; 2. Air inlet pipe; 3. Screening cylinder; 4. Cover; 5. Feed inlet; 6. Reinforcing rod; 7. Mounting cylinder; 8. Air outlet; 9. Mounting rod; 10. Asymmetric cam; 11. Drive motor; 12. Filter screen; 13. Mounting bracket; 14. Guide plate; 15. Cyclone separator; 16. Collection cylinder; 17. Compensation ring. Detailed Implementation

[0025] The present application will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0026] This utility model provides a high-purity powder screening device for semiconductor material manufacturing, including a gas guide base 1, an air inlet pipe 2 installed at one end of the gas guide base 1, the air inlet pipe 2 being connected to an external air pump, the air pump being connected to an inert gas storage tank, and the air pump being used to introduce the gas in the inert gas storage tank into the gas guide base 1.

[0027] The upper end of the air guide base 1 is connected to a sieve cylinder 3. The connection between the sieve cylinder 3 and the air guide base 1 is constricted, that is, the diameter of the upper opening of the air guide base 1 and the diameter of the lower opening of the air guide base 1 are both smaller than the diameter of the air guide base 1 and the air inlet pipe 2. The upper end of the air guide base 1 and the lower end of the sieve cylinder 3 are both arc-shaped, so that a Venturi effect is formed between the air guide base 1 and the sieve cylinder 3. When the gas passes through the connection between the air guide base 1 and the sieve cylinder 3, its flow velocity increases and the static pressure decreases. At the same time, under the stable operation of the external air pump, a constant upward airflow is generated.

[0028] A cover 4 is installed at the upper end of the screening cylinder 3, and a feed inlet 5 is installed at the upper end of the cover 4. The feed inlet 5 is connected to an external conveying pipe, and high-purity powder for semiconductor material manufacturing is conveyed in the conveying pipe. A vibrating screen mechanism is installed on the inner side of the cover 4.

[0029] The vibrating screen mechanism includes an installation cylinder 7, an installation rod 9 slidably connected to the outside of the installation cylinder 7, the upper end of the installation rod 9 being fixed to the inner wall of the cover 4, the installation rod 9 limiting the installation cylinder 7 to move up and down, a spring being sleeved on the outside of the installation rod 9, the two ends of the spring being fixed to the installation rod 9 and the installation cylinder 7 respectively, so that the installation cylinder 7 has an automatic reset capability, an asymmetric cam 10 being provided on the upper side of the installation cylinder 7, the asymmetric cam 10 being connected to the output end of the drive motor 11 installed on the outside of the cover 4, and a filter screen 12 being installed on the inner side of the installation cylinder 7, the filter screen 12 being used to filter high-purity powder, filtering out small-diameter powder downwards;

[0030] The outer surface of the asymmetric cam 10 is asymmetrically arranged. The fan-shaped asymmetric cam 10 generates a periodic excitation force with rich harmonic components in a specific direction when rotating, which improves the vibration effect and thus increases the screening effect.

[0031] Specifically, the drive motor 11 is started, and high-purity powder is continuously introduced into the feed inlet 5. The asymmetric cam 10 drives the mounting cylinder 7 to move downward, while the spring drives the mounting cylinder 7 to return to its original position upward, so that the filter screen 12 vibrates and screens the high-purity powder. The high-purity powder that has been screened enters the screening cylinder 3. The airflow generated by the Venturi effect blows the powder that meets the flotation requirements upward, while the heavier powder enters the air guide base 1 through the Venturi pipe and is then taken out from the hole opened in the air guide base 1 for reprocessing.

[0032] The airflow generated by the synergistic Venturi effect can reduce the mesh size requirement of the filter 12, thereby avoiding frequent clogging of the large mesh size filter 12;

[0033] The lower end of the mounting cylinder 7 is also equipped with a mounting bracket 13 at an equal angle, and the lower end of the mounting bracket 13 is equipped with a guide plate 14 to prevent the filtered powder from moving directly to the Venturi pipe at the center.

[0034] The longitudinal section of the guide plate 14 is inverted "V" shape, which facilitates the guidance of high-purity powder to move outward;

[0035] A compensation ring 17 located inside the mounting cylinder 7 is also installed on the lower side of the cover 4 to compensate for the gap between the mounting cylinder 7 and the cover 4 when the mounting cylinder 7 moves up and down, thereby reducing the risk of dust leakage.

[0036] Several cyclone separators 15 are installed on the outside of the screening cylinder 3. The upper end of the cyclone separator 15 is opened with 18 to discharge the gas. The lower end of the cyclone separator 15 is equipped with a collection cylinder 16 to collect high-purity powder that meets the requirements.

[0037] Specifically, after the gas guide base 1 introduces inert gas into the sieve cylinder 3, a corresponding negative pressure will be generated at the connection between the cyclone separator 15 and the sieve cylinder 3. This negative pressure will draw in the powder that has been gasified and reached the top, and then use this negative pressure to introduce the powder into the cyclone separator 15, and then use the cyclone separator 15 to perform gas-solid separation.

[0038] Several reinforcing rods 6 are also fixed between the air guide base 1 and the screening cylinder 3 to enhance the connection stability between the air guide base 1 and the screening cylinder 3.

[0039] The technical features of the above embodiments can be combined in any way (as long as there is no contradiction in the combination of these technical features). For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described; these embodiments not explicitly written should also be considered to be within the scope of this specification.

Claims

1. A high-purity powder screening device for semiconductor material manufacturing, characterized in that, include: A gas guide base (1) is provided with an air inlet pipe (2) installed at one end of the gas guide base (1). The air inlet pipe (2) is connected to an external air pump, which is connected to an inert gas storage tank. The air pump is used to introduce the gas in the inert gas storage tank into the gas guide base (1). The upper end of the air guide base (1) is connected to a sieve cylinder (3). The sieve cylinder (3) and the air guide base (1) are connected in a contracted position. The upper opening diameter of the air guide base (1) and the lower opening diameter of the air guide base (1) are both smaller than the body diameter of the air guide base (1) and the air inlet pipe (2). The upper end of the air guide base (1) and the lower end of the sieve cylinder (3) are both arc-shaped. The upper end of the screening cylinder (3) is equipped with a cover (4), the upper end of the cover (4) is equipped with a feed inlet (5), the feed inlet (5) is connected to an external conveying pipe, the conveying pipe conveys high-purity powder for semiconductor material manufacturing, and a vibrating screen mechanism is installed on the inner side of the cover (4). Several cyclone separators (15) are installed on the outside of the screening cylinder (3). The upper end of the cyclone separator (15) is opened (18) to discharge the gas. The lower end of the cyclone separator (15) is equipped with a collection cylinder (16).

2. The high-purity powder screening device for semiconductor material manufacturing according to claim 1, characterized in that, The vibrating screen mechanism includes an installation cylinder (7), an installation rod (9) is slidably connected to the outside of the installation cylinder (7), the upper end of the installation rod (9) is fixed to the inner wall of the cover (4), the installation rod (9) limits the installation cylinder (7) to move up and down, a spring is sleeved on the outside of the installation rod (9), the two ends of the spring are respectively fixed to the installation rod (9) and the installation cylinder (7), an asymmetric cam (10) is provided on the upper side of the installation cylinder (7), the asymmetric cam (10) is connected to the output end of the drive motor (11) installed on the outside of the cover (4), and a filter screen (12) is installed on the inner side of the installation cylinder (7), the filter screen (12) is used to filter high-purity powder.

3. The high-purity powder screening device for semiconductor material manufacturing according to claim 2, characterized in that, The lower end of the mounting cylinder (7) is also equipped with a mounting bracket (13) at an equal angle, and the lower end of the mounting bracket (13) is equipped with a guide plate (14).

4. The high-purity powder screening device for semiconductor material manufacturing according to claim 3, characterized in that, The longitudinal section of the guide plate (14) is inverted "V" shape.

5. A high-purity powder screening device for semiconductor material manufacturing according to claim 2, characterized in that, A compensation ring (17) located inside the mounting cylinder (7) is also installed on the lower side of the cover (4).

6. The high-purity powder screening device for semiconductor material manufacturing according to claim 1, characterized in that, Several reinforcing rods (6) are also fixed between the air guide base (1) and the screening cylinder (3).

Images