Electrostatic chuck processing surface treatment apparatus

Abstract

The utility model relates to electrostatic chuck processing technical field discloses a kind of electrostatic chuck processing surface treatment devices, including device table, the top of device table is equipped with mounting bracket, the inside of the top of device table is provided with inner groove, and the inside bottom end of inner groove is respectively fixed with locating seat on both sides. The utility model is provided with locating foot, locating seat, drain pipe, drain groove, bidirectional screw rod, threaded sleeve, servo motor and movable groove, for chuck workpiece installation process, after placing chuck workpiece on the top of locating seat, then it can be driven bidirectional screw rod rotation by controlling servo motor to start, while bidirectional screw rod rotation can drive the inside of two groups of locating feet on top to move in by utilizing threaded sleeve, and can be resisted in the both ends position of chuck workpiece, chuck workpiece can be quickly fixed and positioned, by setting adjustable two groups of locating feet, it is convenient to clamp and position some different diameter size chuck workpiece.

Description

Technical Field

[0001] This utility model relates to the field of electrostatic chuck processing technology, specifically to a surface treatment device for electrostatic chuck processing. Background Technology

[0002] An electrostatic chuck is a device that uses electrostatic force to attract objects. Its core principle is to generate a uniform adsorption force through a high-voltage electrostatic magnetic field, achieving non-destructive fixation of conductors, semiconductors, and insulators. It is widely used in semiconductor manufacturing, precision optical processing, and flat panel display production. During the production and processing of electrostatic chucks, after grinding or polishing the surface, a surface treatment device is needed to remove residual particles and ensure a contamination-free adsorption surface.

[0003] However, when using the electrostatic chuck surface treatment device to clean the surface of the chuck workpiece, the process of fixing and positioning the chuck workpiece requires replacing the corresponding size of the clamp for positioning some chuck workpieces of different diameters. The operation and use process is relatively cumbersome and has shortcomings, making it inconvenient to conveniently position the chuck workpiece.

[0004] Now, a novel electrostatic chuck surface treatment device is proposed to address the above-mentioned shortcomings. Utility Model Content

[0005] The purpose of this invention is to provide a surface treatment device for electrostatic chuck processing, so as to solve the problem mentioned in the background art of inconvenient positioning of chuck workpieces.

[0006] To achieve the above objectives, this utility model provides the following technical solution: an electrostatic chuck surface treatment device, comprising a device platform, a mounting bracket fixedly mounted on the top of the device platform, an inner groove provided inside the top of the device platform, and positioning seats fixedly mounted on both sides of the bottom end of the inner groove, positioning feet provided at both ends of the top of the positioning seats, a bidirectional lead screw movably connected inside the positioning seats, and threaded sleeves threadedly connected to both ends of the bidirectional lead screw, servo motors fixedly mounted on both sides of the top of the rear end of the device platform, a movable groove provided inside the top of the positioning seats, drainage grooves provided inside the sides of the positioning seats, and a controller fixedly mounted on the top of the front end of the device platform.

[0007] As a further technical solution of this utility model, an inner pad is fixed on the inner side of the positioning foot, the top ends of the two sets of threaded sleeves respectively penetrate the interior of the movable groove and are fixedly connected to the bottom ends of the two sets of positioning feet, and the output shaft of the servo motor is fixedly connected to the rear end of the bidirectional lead screw.

[0008] As a further technical solution of this utility model, the front end of the mounting frame is provided with a door body, and fixed feet are fixed on both sides of the top of the door body. Fixed frames are fixed on both sides of the front end of the top of the mounting frame. The fixed feet and the interior of the fixed frames are hinged. A viewing panel is fixed inside the door body. A handle is fixed at the bottom of the front end of the door body.

[0009] As a further technical solution of this utility model, a second drive motor is fixedly installed at the front end of the viewing plate, and the output shaft of the second drive motor passes through the interior of the viewing plate and is fixed with a mounting head. Scrapers are fixed at the top and bottom ends of the mounting head, respectively.

[0010] As a further technical solution of this utility model, the mounting frame is provided with a mounting base inside, and a drive motor is fixedly mounted on both sides of the top of the mounting base. A protective cover is installed on the outside of the drive motor. A cylinder is fixedly mounted on the top of the mounting frame, and the output end of the cylinder passes through the interior of the top of the mounting frame and is fixedly connected to the top of the mounting base. The output shaft of the drive motor passes through the interior of the mounting base and is fixedly mounted with a brush plate. Two sets of guide rods are fixedly mounted front and rear on both sides of the top of the mounting base. Two sets of sliding sleeves are fixedly mounted front and rear on both sides of the top of the mounting frame. The top of the guide rod passes through the interior of the sliding sleeve. Water distribution pipes are fixed on both sides of the bottom of the mounting base, and several nozzles are fixedly fixed at equal intervals in a ring at the bottom of the water distribution pipes. A water pump is fixedly mounted on the rear end of the top of the mounting frame, and a water delivery pipe is fixedly mounted on the output end of the water pump. A tee is fixedly mounted on the water delivery pipe, and flexible hoses are fixedly mounted on both sides of the bottom end of the tee. The bottom ends of the two sets of flexible hoses pass through the interior of the top of the mounting frame and are fixedly connected to the rear ends of the two sets of water distribution pipes. A water pumping pipe is fixedly mounted on the input end of the water pump.

[0011] As a further technical solution of this utility model, a water collection tank is fixed inside the device platform, and drain pipes are fixed at both sides and the middle position of the bottom end of the inner tank, and the bottom end of the drain pipe penetrates the inside of the top of the water collection tank. A double-ended screw is fixed at the bottom right side of the water collection tank, and the right side of the double-ended screw penetrates the right side of the device platform and is fixed with a valve.

[0012] Compared with the prior art, the beneficial effects of this utility model are as follows: By providing positioning feet, positioning seats, drainage pipes, drainage grooves, bidirectional lead screws, threaded sleeves, servo motors, and movable grooves, during the installation of suction cup workpieces, after the suction cup workpiece is placed at the top of the positioning seat, the bidirectional lead screw can be driven to rotate by controlling the servo motor. At the same time, the rotation of the bidirectional lead screw can drive the two sets of positioning feet at the top to move inward and abut against the two ends of the suction cup workpiece, which can quickly fix and position the suction cup workpiece. By providing two sets of adjustable positioning feet, it is convenient to clamp and position suction cup workpieces of different diameters.

[0013] The device is equipped with a mounting frame, a fixing frame, fixing feet, a door, and a viewing panel. When in use, the door, which can be flipped up and down, is installed at the front end of the mounting frame. During the surface cleaning process of the suction cup workpiece, the suction cup workpiece can be quickly picked up and put down inside the device.

[0014] The device is equipped with a door, viewing panel, mounting head, scraper, and drive motor II. The suction cup workpiece is positioned at the top of the positioning seat. After the door is closed, drive motor I is activated to rotate the brush. Then, the cylinder is activated to move the brush down to the workpiece surface. The brush bristles on the brush can be used to clean residual particles on the suction cup surface. At the same time, a water pump can be activated to draw in external cleaning water, which is then delivered to the inside of the water distribution pipe through a water supply pipe, tee, and hose. The water is then sprayed onto the suction cup surface by multiple nozzles at the bottom, working in conjunction with the brush to clean it. During the cleaning process, the cleaning status of the suction cup workpiece inside the device can be checked using the viewing panel. Simultaneously, drive motor II can be activated to rotate the scraper, which can be used to scrape away water droplets splashed on the rear end of the viewing panel, keeping the viewing panel clean and facilitating real-time inspection of the suction cup's cleaning status. Attached Figure Description

[0015] Figure 1 This is a frontal cross-sectional view of the present invention.

[0016] Figure 2 This is a partial sectional view of the structure of this utility model from the side.

[0017] Figure 3 This is a top view of the positioning seat structure of this utility model;

[0018] Figure 4 This is a partial sectional view of the door structure of this utility model from the side.

[0019] In the diagram: 1. Device platform; 2. Water collection tank; 3. Inner tank; 4. Mounting bracket; 5. Mounting seat; 6. Guide rod; 7. Sliding sleeve; 8. Drive motor one; 9. Protective cover; 10. Cylinder; 11. Water distribution pipe; 12. Nozzle; 13. Brush plate; 14. Positioning foot; 15. Positioning seat; 16. Drain pipe; 17. Drain trough; 18. Two-way lead screw; 19. Threaded sleeve; 20. Servo motor; 21. Movable groove; 22. Hose; 23. Water suction pipe; 24. Water pump; 25. Fixing bracket; 26. Fixing foot; 27. Door body; 28. Viewing panel; 29. ​​Mounting head; 30. Scraper; 31. Controller; 32. T-joint; 33. Water supply pipe; 34. Drive motor two. Detailed Implementation

[0020] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0021] Please see Figure 1-4 This utility model provides an embodiment: an electrostatic chuck surface treatment device, including a device platform 1, a mounting bracket 4 fixedly mounted on the top of the device platform 1, an inner groove 3 provided inside the top of the device platform 1, and positioning seats 15 fixed on both sides of the bottom of the inner groove 3, positioning feet 14 provided at both ends of the top of the positioning seats 15, a bidirectional lead screw 18 movably connected inside the positioning seats 15, and threaded sleeves 19 threadedly connected to both ends of the bidirectional lead screw 18, servo motors 20 fixedly mounted on both sides of the top of the rear end of the device platform 1, a movable groove 21 provided inside the top of the positioning seats 15, drainage grooves 17 opened inside the sides of the positioning seats 15, and a controller 31 fixedly mounted on the top of the front end of the device platform 1.

[0022] An inner pad is fixed to the inside of the positioning foot 14. The top ends of the two sets of threaded sleeves 19 pass through the interior of the movable groove 21 and are fixedly connected to the bottom ends of the two sets of positioning feet 14. The output shaft of the servo motor 20 is fixedly connected to the rear end of the bidirectional lead screw 18.

[0023] Furthermore, the controller 31 adopts a PLC controller, and the servo motor 20 is electrically connected to the controller 31. The electrical connection relationship and control method between them are known technologies, so they will not be described in detail.

[0024] Furthermore, after the threaded engagement between the two-way lead screw 18 and the threaded sleeve 19 has been in operation for a period of time, the staff needs to perform regular maintenance.

[0025] Specifically, such as Figures 1-3 As shown, during the installation of the suction cup workpiece, after placing the suction cup workpiece at the top of the positioning seat 15, the servo motor 20 can be controlled to drive the bidirectional lead screw 18 to rotate. Simultaneously, the rotation of the bidirectional lead screw 18, using the threaded sleeve 19, drives the two sets of positioning feet 14 at the top to move inward, thus abutting against both ends of the suction cup workpiece. This allows for quick and easy fixing of the suction cup workpiece. By setting two adjustable sets of positioning feet 14, suction cup workpieces of different diameters can be clamped and positioned. Cleaning water entering the positioning seat 15 during the cleaning process can be discharged through the drainage grooves 17 on both sides.

[0026] The front end of the mounting bracket 4 is provided with a door body 27, and fixed feet 26 are fixed on both sides of the top of the door body 27. Fixed frames 25 are fixed on both sides of the front end of the top of the mounting bracket 4. The fixed feet 26 and the interior of the fixed frames 25 are hinged. A viewing panel 28 is fixed inside the door body 27. A handle is fixed at the bottom of the front end of the door body 27.

[0027] Furthermore, the visual panel 28 is made of high-transparency acrylic material;

[0028] Specifically, such as Figure 1 , Figure 2 and Figure 4 As shown, by installing a door 27 that can be flipped up and down at the front end of the mounting frame 4, the suction cup workpiece can be quickly picked up and put down inside the device during the surface cleaning process.

[0029] A drive motor 24 is fixedly mounted on the front end of the viewing plate 28, and the output shaft of the drive motor 24 passes through the interior of the viewing plate 28 and is fixed with a mounting head 29. Scrapers 30 are fixed at the top and bottom ends of the mounting head 29 respectively.

[0030] Furthermore, the drive motor 34 is electrically connected to the controller 31. The electrical connection relationship and control method between them are known technologies, so they will not be described in detail.

[0031] Specifically, such as Figure 1 , Figure 2 and Figure 4 As shown, during the cleaning process, the cleaning status of the suction cup workpiece inside the device can be checked by using the viewing plate 28. At the same time, the drive motor 24 can be controlled to start the drive scraper 30 to rotate, which can assist in scraping and cleaning the water droplets splashed on the rear end face of the viewing plate 28, keeping the viewing surface of the viewing plate 28 clean, and checking the cleaning status of the suction cup in real time.

[0032] The mounting frame 4 has a mounting base 5 inside, and a drive motor 8 is fixedly mounted on both sides of the top of the mounting base 5. A protective cover 9 is installed on the outside of the drive motor 8. A cylinder 10 is fixedly mounted on the top of the mounting frame 4, and the output end of the cylinder 10 passes through the interior of the top of the mounting frame 4 and is fixedly connected to the top of the mounting base 5. The output shaft of the drive motor 8 passes through the interior of the mounting base 5 and a brush disc 13 is fixedly mounted thereon. Two sets of guide rods 6 are fixedly mounted front and rear on both sides of the top of the mounting base 5. Two sets of sliding sleeves 7 are fixedly mounted front and rear on both sides of the top of the mounting frame 4. The top of the guide rods 6... The end of the sliding sleeve 7 is inserted through the interior of the mounting base 5. Water distribution pipes 11 are fixed on both sides of the bottom end of the mounting base 5. Several nozzles 12 are fixed at equal intervals in a ring at the bottom end of the water distribution pipes 11. A water pump 24 is installed and fixed at the rear end of the top of the mounting frame 4. A water supply pipe 33 is installed and fixed at the output end of the water pump 24. A tee 32 is installed and fixed on the water supply pipe 33. Flexible hoses 22 are installed and fixed on both sides of the bottom end of the tee 32. The bottom ends of the two sets of flexible hoses 22 are inserted through the interior of the top of the mounting frame 4 and fixedly connected to the rear ends of the two sets of water distribution pipes 11. A pumping pipe 23 is installed and fixed at the input end of the water pump 24.

[0033] A water collection tank 2 is fixed inside the device platform 1. Drain pipes 16 are fixed at the two sides and the middle of the bottom of the inner tank 3. The bottom of the drain pipes 16 penetrates the inside of the top of the water collection tank 2. A double-ended screw rod 18 is fixed at the bottom right side of the water collection tank 2. The right side of the double-ended screw rod 18 penetrates the right side of the device platform 1 and a valve is installed and fixed thereon.

[0034] Furthermore, the drive motor 8 and the water pump 24 are electrically connected to the controller 31. The electrical connection relationship and control method between them are known technologies, so they will not be described in detail.

[0035] Working principle: During the surface cleaning process of the suction cup workpiece, a door 27 that can be flipped up and down is installed at the front end of the mounting frame 4, which allows for quick loading and unloading of the suction cup workpiece inside the device. After opening the door 27 and placing the suction cup workpiece at the top of the positioning seat 15, the bidirectional lead screw 18 can be driven to rotate by controlling the servo motor 20. The rotation of the bidirectional lead screw 18 simultaneously drives the two sets of positioning feet 14 at the top to move inward using the threaded sleeve 19, which can hold the two ends of the suction cup workpiece, thus quickly fixing and positioning the suction cup workpiece. After the suction cup workpiece is installed and positioned at the top of the positioning seat 15 and the door 27 is closed, the drive motor 8 can be controlled to start and drive the brush 13 to rotate. Then, the cylinder 10 is started to move the brush 13 down to the surface of the workpiece. By using the bristles on the brush 13, the processing residue particles on the surface of the suction cup can be cleaned by brushing. At the same time, the water pump 24 can be started to draw in external cleaning water and deliver it to the inside of the water distribution pipe 11 through the water supply pipe 33, the tee 32 and the hose 22. The water is then sprayed onto the surface of the suction cup by multiple sets of nozzles 12 at the bottom, which works in conjunction with the brush 13 to clean it. During the cleaning process, the cleaning status of the suction cup workpiece inside the device can be checked by using the viewing plate 28. In addition, the drive motor 34 can be controlled to start and drive the scraper 30 to rotate, which can assist in scraping and cleaning the water droplets splashed on the rear end of the viewing plate 28, keeping the viewing surface of the viewing plate 28 clean and allowing for real-time inspection of the cleaning status of the suction cup.

[0036] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. A surface treatment apparatus for electrostatic chuck processing, comprising a device stage (1), characterized in that: The top of the device platform (1) is fixed with a mounting bracket (4). The top of the device platform (1) is provided with an inner groove (3). The bottom of the inner groove (3) is fixed with positioning seats (15) on both sides. The top of the positioning seat (15) is provided with positioning feet (14). The positioning seat (15) is movably connected with a two-way screw (18). The two ends of the two-way screw (18) are threadedly connected with threaded sleeves (19). The top of the rear end of the device platform (1) is fixed with servo motors (20). The top of the positioning seat (15) is provided with a movable groove (21). The inside of the positioning seat (15) is provided with drainage grooves (17) on both sides. The top of the front end of the device platform (1) is fixed with a controller (31).

2. The electrostatic chuck surface treatment device according to claim 1, characterized in that: The inner side of the positioning foot (14) is fixed with an inner pad, the top ends of the two sets of threaded sleeves (19) respectively penetrate the interior of the movable groove (21) and are fixedly connected to the bottom ends of the two sets of positioning feet (14), and the output shaft of the servo motor (20) is fixedly connected to the rear end of the bidirectional lead screw (18).

3. The electrostatic chuck surface treatment device according to claim 2, characterized in that: The front end of the mounting bracket (4) is provided with a door body (27), and fixed feet (26) are fixed on both sides of the top of the door body (27). Fixed frames (25) are fixed on both sides of the front end of the top of the mounting bracket (4). The fixed feet (26) are hinged to the interior of the fixed frames (25). A viewing panel (28) is fixed inside the door body (27). A handle is fixed at the bottom of the front end of the door body (27).

4. The electrostatic chuck surface treatment device according to claim 3, characterized in that: A second drive motor (34) is fixedly installed at the front end of the viewing plate (28), and the output shaft of the second drive motor (34) passes through the interior of the viewing plate (28) and is fixed with a mounting head (29). Scrapers (30) are fixed at the top and bottom of the mounting head (29).

5. The electrostatic chuck surface treatment device according to claim 1, characterized in that: The mounting bracket (4) is provided with a mounting seat (5) inside, and a drive motor (8) is fixedly mounted on both sides of the top of the mounting seat (5), and a protective cover (9) is installed on the outside of the drive motor (8). A cylinder (10) is fixedly mounted on the top of the mounting bracket (4), and the output end of the cylinder (10) passes through the interior of the top of the mounting bracket (4) and is fixedly connected to the top of the mounting seat (5). The output shaft of the drive motor (8) passes through the interior of the mounting seat (5) and a brush plate (13) is fixedly mounted thereon. Two sets of guide rods (6) are fixedly mounted on both sides of the top of the mounting seat (5) front and back, respectively. Two sets of sliding sleeves (7) are fixedly mounted on both sides of the top of the mounting bracket (4) front and back, respectively. The top end penetrates the interior of the sliding sleeve (7). Water distribution pipes (11) are fixed on both sides of the bottom end of the mounting base (5). Several nozzles (12) are fixed at equal intervals in a ring at the bottom end of the water distribution pipes (11). A water pump (24) is fixed at the rear end of the top of the mounting frame (4). A water delivery pipe (33) is fixed at the output end of the water pump (24). A tee (32) is fixed on the water delivery pipe (33). Flexible hoses (22) are fixed on both sides of the bottom end of the tee (32). The bottom ends of the two sets of flexible hoses (22) penetrate the interior of the top end of the mounting frame (4) and are fixedly connected to the rear ends of the two sets of water distribution pipes (11). A pumping pipe (23) is fixed at the input end of the water pump (24).

6. The electrostatic chuck surface treatment device according to claim 1, characterized in that: A water collection tank (2) is fixed inside the device platform (1). Drain pipes (16) are fixed at the bottom of the inner tank (3) on both sides and in the middle. The bottom end of the drain pipe (16) penetrates the top of the water collection tank (2). A double-acting screw (18) is fixed at the bottom right side of the water collection tank (2). The right side of the double-acting screw (18) penetrates the right side of the device platform (1) and is fitted with a valve.

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