A device for removing glue for processing of single crystal silicon rod
Patent Information
- Application Number
- CN202522236705.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-10-23
- Publication Date
- 2026-09-15
- Estimated Expiration
- 2035-10-23
AI Technical Summary
[0003]操作人员在进行单晶硅棒的加工过程中,经常会使用到相对应的去胶装置,来去除单晶硅棒表面的胶层,而现有的去胶装置在实际使用的过程中,尽管具备基本的去胶功能,但是一般的去胶装置在喷淋时,喷头的位置通常是固定的,这样在喷淋时,硅棒上部分区域容易出现喷淋不均甚至喷淋不到的情况,十分影响去胶效率和除胶质量,因此需要对其进行改进
1、本实用新型通过设置活动板、圆杆、分流器、一号管道和二号管道,当驱动电机开始运行时,将使得一号转轴带动凸轮发生旋转,此时凸轮将挤压活动板,使得活动板带动圆杆在去胶箱体的限位作用下,进行水平横向运动,从而让分流器带动一号管道在二号管道的内腔进行水平向左运动,当凸轮旋转幅度超过九十度时,此时处于拉伸状态的不锈钢弹簧,将拉动活动板重新复位,这样通过在进行喷淋时调节的水平位置,确保单晶硅棒能被高速新鲜药液均匀、同步地覆盖,有效消除清洗死角,保证去胶效果和质量。
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Figure CN224749728U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of adhesive removal devices, and more specifically, to an adhesive removal device for processing single-crystal silicon rods. Background Technology
[0002] Monocrystalline silicon rods are cylindrical silicon bodies with perfect crystal lattice structures formed from high-purity polycrystalline silicon in a single crystal furnace through the Czochralski method or the zone melting method. They are the core basic materials of the semiconductor and photovoltaic industries. Their extremely high purity, absence of grain boundary defects, and excellent electrical properties ensure that the manufactured integrated circuits and solar cells have high efficiency, high reliability, and excellent stability.
[0003] During the processing of monocrystalline silicon rods, operators often use corresponding adhesive removal devices to remove the adhesive layer on the surface of the monocrystalline silicon rods. However, while existing adhesive removal devices have basic adhesive removal functions, the nozzle position is usually fixed during spraying. This can easily lead to uneven spraying or even complete neglect of certain areas on the silicon rod, significantly affecting the adhesive removal efficiency and quality. Therefore, improvements are needed. Utility Model Content
[0004] In order to overcome the shortcomings of the existing technology, this utility model provides a degumming device for processing single crystal silicon rods, which has the advantage of good spraying effect.
[0005] To achieve the above objectives, this utility model provides the following technical solution: a desizing device for processing single-crystal silicon rods, comprising a desizing chamber, a drive motor fixedly connected to the left side of the desizing chamber, a first rotating shaft fixedly sleeved at the other end of the output shaft of the drive motor, a cam fixedly sleeved at the other end of the first rotating shaft, a movable plate movably connected to the outer surface of the cam, and round rods fixedly connected to the front and rear sides of the right side of the movable plate, the other end of the round rods penetrating the desizing chamber and extending into the inner cavity of the desizing chamber and fixedly connected to a flow divider, a nozzle fixedly connected to the inner side of the flow divider, an installation tube fixedly sleeved on the right side of the desizing chamber, the left end of the installation tube penetrating the desizing chamber and extending into the interior of the desizing chamber and fixedly connected to a flow divider, a second pipe fixedly connected to the front and rear sides of the left side of the flow divider, a first pipe movably sleeved inside the second pipe, and the outer surface of the left side of the first pipe fixedly sleeved with the inner surface of the flow divider.
[0006] As a preferred embodiment of this utility model, a stainless steel spring is movably sleeved on the outer surface of the round rod, the left side of the stainless steel spring is fixedly connected to the right side of the movable plate, and the right side of the stainless steel spring is fixedly connected to the left side of the glue removal box.
[0007] As a preferred embodiment of this utility model, a metal corrugated pipe is fixedly connected to the left side of the second pipe, and the other end of the metal corrugated pipe is fixedly connected to the right side of the distributor.
[0008] As a preferred embodiment of this utility model, a power motor is fixedly connected to the left side of the glue removal box. A second rotating shaft is fixedly sleeved at the other end of the output shaft of the power motor. The other end of the second rotating shaft passes through the glue removal box and extends to the outside of the glue removal box, and a first glue removal brush roller is fixedly sleeved thereon. A first gear is fixedly sleeved on the outer surface of the second rotating shaft. A second gear is meshed with the outer surface of the first gear. A rotating rod is fixedly sleeved inside the second gear. The other end of the rotating rod passes through the glue removal box and extends to the inner cavity of the glue removal box, and a second glue removal brush roller is fixedly sleeved thereon.
[0009] As a preferred embodiment of this utility model, a valve is fixedly sleeved on the bottom right side of the glue removal box. A mounting bracket and a fixing bracket are fixedly connected to the left and right sides of the top of the glue removal box, respectively. A first motor is fixedly connected to the top of the fixing bracket. A threaded rod is fixedly sleeved on the other end of the output shaft of the first motor. The bottom end of the threaded rod passes through the fixing bracket and extends to the outside of the fixing bracket and is movably sleeved with the top of the glue removal box. A connecting plate is threaded onto the outer surface of the threaded rod. A limit rod is movably sleeved on the left side of the connecting plate. The top of the limit rod is fixedly sleeved inside the mounting bracket.
[0010] As a preferred technical solution of this utility model, a second motor is fixedly connected to the top of the connecting plate, a protective shell is fixedly connected to the outer surface of the second motor, a third rotating shaft is fixedly sleeved at the other end of the output shaft of the second motor, the bottom end of the third rotating shaft passes through the connecting plate and extends to the outside of the connecting plate and is fixedly sleeved with a rotating rod, and connecting rods are hinged to both the left and right sides of the rotating rod.
[0011] As a preferred embodiment of this utility model, the other end of the connecting rod is hinged to a clamping plate, the bottom end of the connecting plate is fixedly connected to a C-shaped frame, and the outer surface of the clamping plate is movably connected to the inner surface of the C-shaped frame.
[0012] Compared with the prior art, the beneficial effects of this utility model are as follows: 1. This utility model, by setting up a movable plate, a round rod, a diverter, a first pipe, and a second pipe, allows the first rotating shaft to rotate when the drive motor starts running. At this time, the cam will squeeze the movable plate, causing the movable plate to move horizontally under the limiting action of the degumming box. This allows the diverter to move the first pipe horizontally to the left within the cavity of the second pipe. When the cam rotates more than 90 degrees, the stainless steel spring, which is in a stretched state, will pull the movable plate back to its original position. In this way, by adjusting the horizontal position during spraying, it is ensured that the monocrystalline silicon rod can be evenly and synchronously covered by the high-speed fresh solution, effectively eliminating cleaning dead corners and ensuring the degumming effect and quality.
[0013] 2. This utility model, by setting up a second motor, a third rotating shaft, a rotating rod, a connecting rod, and clamping plates, when the second motor starts running, it will drive the third rotating shaft to rotate synchronously with the rotating rod, thereby causing the two connecting rods to move. In turn, the two clamping plates will move horizontally towards each other under the limiting action of the C-shaped frame. Finally, the two clamping plates will achieve the fixing effect of monocrystalline silicon rods of different sizes, thus improving the applicability of the device. Attached Figure Description
[0014] Figure 1 This is a schematic diagram of the structure of this utility model; Figure 2 This is a side view of the structure of this utility model; Figure 3 This is a cross-sectional structural diagram of the valve of this utility model; Figure 4 This is a cross-sectional view of the installation tube of this utility model; Figure 5 This is a cross-sectional view of the second adhesive-removing brush roller of this utility model.
[0015] In the diagram: 1. Degumming box; 2. Drive motor; 3. Shaft No. 1; 4. Cam; 5. Movable plate; 6. Round rod; 7. Diverter; 8. Pipe No. 1; 9. Pipe No. 2; 10. Diverter pipe; 11. Mounting pipe; 12. Stainless steel spring; 13. Metal corrugated pipe; 14. Power motor; 15. Shaft No. 2; 16. First degumming brush roller; 17. Gear No. 1; 18. Gear No. 2; 19. Rotating rod; 20. Second degumming brush roller; 21. Valve; 22. Fixing frame; 23. First motor; 24. Threaded rod; 25. Connecting plate; 26. Mounting frame; 27. Limiting rod; 28. Second motor; 29. Shaft No. 3; 30. Rotating rod; 31. Connecting rod; 32. Clamping plate; 33. Protective shell; 34. C-frame; 35. Nozzle. Detailed Implementation
[0016] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.
[0017] like Figures 1 to 5 As shown, this utility model provides a desizing device for processing single crystal silicon rods, including a desizing box 1. A drive motor 2 is fixedly connected to the left side of the desizing box 1. A first rotating shaft 3 is fixedly sleeved at the other end of the output shaft of the drive motor 2. A cam 4 is fixedly sleeved at the other end of the first rotating shaft 3. A movable plate 5 is movably connected to the outer surface of the cam 4. A round rod 6 is fixedly connected to the front and rear sides of the right side of the movable plate 5. The other end of the round rod 6 passes through the desizing box 1 and extends into the inner cavity of the desizing box 1 and is fixedly connected to a flow divider 7. A nozzle 35 is fixedly connected to the inner side of the flow divider 7. An installation tube 11 is fixedly sleeved on the right side of the desizing box 1. The left end of the installation tube 11 passes through the desizing box 1 and extends into the interior of the desizing box 1 and is fixedly connected to a flow divider 10. A second pipe 9 is fixedly connected to the front and rear sides of the left side of the flow divider 10. A first pipe 8 is movably sleeved inside the second pipe 9. The outer surface of the left side of the first pipe 8 is fixedly sleeved with the inner surface of the flow divider 7.
[0018] When the drive motor 2 starts running, it will cause the first rotating shaft 3 to drive the cam 4 to rotate. At this time, the cam 4 will squeeze the movable plate 5, causing the movable plate 5 to drive the round rod 6 to move horizontally under the limiting action of the glue removal box 1, thereby causing the distributor 7 to drive the first pipe 8 to move horizontally to the left in the inner cavity of the second pipe 9.
[0019] Among them, a stainless steel spring 12 is movably sleeved on the outer surface of the round rod 6. The left side of the stainless steel spring 12 is fixedly connected to the right side of the movable plate 5, and the right side of the stainless steel spring 12 is fixedly connected to the left side of the glue removal box 1.
[0020] The design of the stainless steel spring 12 ensures that the movable plate 5 has a good reset effect during subsequent movements.
[0021] Among them, a metal bellows 13 is fixedly connected to the left side of the second pipe 9, and the other end of the metal bellows 13 is fixedly connected to the right side of the diverter 7.
[0022] Due to the design of the metal bellows 13, a dynamic seal is achieved between the distributor 7 and the second pipe 9, preventing the spray liquid from escaping when the first pipe 8 expands and contracts inside the second pipe 9.
[0023] The left side of the glue removal box 1 is fixedly connected to a power motor 14. The other end of the output shaft of the power motor 14 is fixedly sleeved with a second rotating shaft 15. The other end of the second rotating shaft 15 passes through the glue removal box 1 and extends to the outside of the glue removal box 1, and is fixedly sleeved with a first glue removal brush roller 16. The outer surface of the second rotating shaft 15 is fixedly sleeved with a first gear 17. The outer surface of the first gear 17 is meshed with a second gear 18. The inside of the second gear 18 is fixedly sleeved with a rotating rod 19. The other end of the rotating rod 19 passes through the glue removal box 1 and extends to the inner cavity of the glue removal box 1, and is fixedly sleeved with a second glue removal brush roller 20.
[0024] When the power motor 14 starts running, it will drive the second rotating shaft 15 to drive the first degumming brush roller 16 and the first gear 17 to rotate synchronously, thereby driving the second gear 18, the rotating rod 19 and the second degumming brush roller 20 to rotate in the opposite direction.
[0025] Among them, a valve 21 is fixedly sleeved at the bottom right side of the glue removal box 1. A mounting bracket 26 and a fixing bracket 22 are fixedly connected to the left and right sides of the top of the glue removal box 1, respectively. A first motor 23 is fixedly connected to the top of the fixing bracket 22. A threaded rod 24 is fixedly sleeved at the other end of the output shaft of the first motor 23. The bottom end of the threaded rod 24 passes through the fixing bracket 22 and extends to the outside of the fixing bracket 22 and is movably sleeved with the top of the glue removal box 1. A connecting plate 25 is threadedly sleeved on the outer surface of the threaded rod 24. A limit rod 27 is movably sleeved on the left side of the connecting plate 25. The top of the limit rod 27 is fixedly sleeved inside the mounting bracket 26.
[0026] When the first motor 23 starts running, it will drive the threaded rod 24 to rotate. At this time, the connecting plate 25 will move vertically downward under the limiting action of the limiting rod 27.
[0027] The top of the connecting plate 25 is fixedly connected to the second motor 28, the outer surface of the second motor 28 is fixedly connected to the protective shell 33, the other end of the output shaft of the second motor 28 is fixedly sleeved with the third rotating shaft 29, the bottom end of the third rotating shaft 29 passes through the connecting plate 25 and extends to the outside of the connecting plate 25 and is fixedly sleeved with the rotating rod 30, and the left and right sides of the rotating rod 30 are both hinged with connecting rods 31.
[0028] When the second motor 28 starts running, it will drive the third rotating shaft 29 to rotate the rotating rod 30 synchronously, thereby causing the two connecting rods 31 to move.
[0029] The other end of the connecting rod 31 is hinged to a clamping plate 32, and the bottom end of the connecting plate 25 is fixedly connected to a C-shaped frame 34. The outer surface of the clamping plate 32 is movably connected to the inner surface of the C-shaped frame 34.
[0030] When the connecting rod 31 moves, the clamping plate 32 will move horizontally under the limiting action of the C-shaped frame 34.
[0031] Working principle and usage process of this utility model: First, place the monocrystalline silicon rod to be degummed between two clamping plates 32, and start the second motor 28 to drive the third rotating shaft 29 to rotate the rotating rod 30 synchronously, thereby causing the two connecting rods 31 to move. Then, under the limiting action of the C-shaped frame 34, the two clamping plates 32 move horizontally towards each other. Finally, the two clamping plates 32 achieve the fixing effect of monocrystalline silicon rods of different sizes, improving the applicability of the device. Then, start the first motor 23 to rotate the threaded rod 24. At this time, the connecting plate 25 will drive the clamping plates 32 and the monocrystalline silicon rod to move downward under the limiting action of the limiting rod 27, and finally enter the inner cavity of the degumming box 1.
[0032] Then, the liquid pump connected to the mounting pipe 11 is turned on, and the high-temperature descaling chemical solution is sent into the interior of the distributor 7 through the mounting pipe 11, the distributor pipe 10, the second pipe 9, and the first pipe 8. This allows multiple nozzles 35 to thermally spray the monocrystalline silicon rod that has moved down between the first descaling brush roller 16 and the second descaling brush roller 20. Simultaneously, the drive motor 2 is started, causing the first rotating shaft 3 to rotate the cam 4. At this time, the cam 4 presses against the movable plate 5, causing the movable plate 5 to drive the round rod 6 to move horizontally under the limiting action of the descaling box 1, thereby allowing the distributor 7 to... Pipe 8 moves horizontally to the left within the cavity of pipe 9. When the cam 4 rotates more than 90 degrees, the stainless steel spring 12, which is in a stretched state, pulls the movable plate 5 back to its original position. This allows the spray nozzle 35 to be adjusted horizontally during spraying, ensuring that the monocrystalline silicon rod is evenly and synchronously covered by the high-speed fresh liquid, effectively eliminating cleaning dead corners and ensuring the desmearing effect and quality. Finally, the power motor 14 is started, causing the first desmearing brush roller 16 and the second desmearing brush roller 20 to rotate synchronously in opposite directions, performing roller brush desmearing on the monocrystalline silicon rod.
[0033] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.
[0034] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.
Claims
1. A device for removing glue for processing of a single crystal silicon rod, comprising a glue removing box (1), characterized in that: A drive motor (2) is fixedly connected to the left side of the glue removal box (1). A first rotating shaft (3) is fixedly sleeved at the other end of the output shaft of the drive motor (2). A cam (4) is fixedly sleeved at the other end of the first rotating shaft (3). A movable plate (5) is movably connected to the outer surface of the cam (4). A round rod (6) is fixedly connected to the front and rear sides of the right side of the movable plate (5). The other end of the round rod (6) passes through the glue removal box (1) and extends into the inner cavity of the glue removal box (1) and is fixedly connected to a distributor (7). A nozzle (35) is fixedly connected to the inside of the device (7). An installation tube (11) is fixedly sleeved on the right side of the glue removal box (1). The left end of the installation tube (11) passes through the glue removal box (1) and extends into the inside of the glue removal box (1) and is fixedly connected to a diverter tube (10). A second pipe (9) is fixedly connected to the front and back sides of the left side of the diverter tube (10). A first pipe (8) is movably sleeved inside the second pipe (9). The outer surface of the left side of the first pipe (8) is fixedly sleeved with the inner surface of the diverter (7).
2. The device for removing adhesive according to claim 1, wherein: A stainless steel spring (12) is movably sleeved on the outer surface of the round rod (6). The left side of the stainless steel spring (12) is fixedly connected to the right side of the movable plate (5), and the right side of the stainless steel spring (12) is fixedly connected to the left side of the glue removal box (1).
3. The device for removing the adhesive layer according to claim 1, wherein: A metal bellows (13) is fixedly connected to the left side of the second pipe (9), and the other end of the metal bellows (13) is fixedly connected to the right side of the diverter (7).
4. The adhesive removal device for processing single-crystal silicon rods according to claim 1, characterized in that: A power motor (14) is fixedly connected to the left side of the glue removal box (1). A second rotating shaft (15) is fixedly sleeved at the other end of the output shaft of the power motor (14). The other end of the second rotating shaft (15) passes through the glue removal box (1) and extends to the outside of the glue removal box (1) and is fixedly sleeved with a first glue removal brush roller (16). A first gear (17) is fixedly sleeved on the outer surface of the second rotating shaft (15). A second gear (18) is meshed on the outer surface of the first gear (17). A rotating rod (19) is fixedly sleeved inside the second gear (18). The other end of the rotating rod (19) passes through the glue removal box (1) and extends to the inner cavity of the glue removal box (1) and is fixedly sleeved with a second glue removal brush roller (20).
5. The adhesive removal device for processing single-crystal silicon rods according to claim 1, characterized in that: A valve (21) is fixedly sleeved on the bottom right side of the glue removal box (1). A mounting bracket (26) and a fixing bracket (22) are fixedly connected to the left and right sides of the top of the glue removal box (1), respectively. A first motor (23) is fixedly connected to the top of the fixing bracket (22). A threaded rod (24) is fixedly sleeved on the other end of the output shaft of the first motor (23). The bottom end of the threaded rod (24) passes through the fixing bracket (22) and extends to the outside of the fixing bracket (22) and is movably sleeved with the top of the glue removal box (1). A connecting plate (25) is threadedly sleeved on the outer surface of the threaded rod (24). A limit rod (27) is movably sleeved on the left side of the connecting plate (25). The top of the limit rod (27) is fixedly sleeved inside the mounting bracket (26).
6. The adhesive removal device for processing single-crystal silicon rods according to claim 5, characterized in that: The top of the connecting plate (25) is fixedly connected to a second motor (28), and a protective shell (33) is fixedly connected to the outer surface of the second motor (28). The other end of the output shaft of the second motor (28) is fixedly sleeved with a third rotating shaft (29). The bottom end of the third rotating shaft (29) passes through the connecting plate (25) and extends to the outside of the connecting plate (25) and is fixedly sleeved with a rotating rod (30). The left and right sides of the rotating rod (30) are both hinged with connecting rods (31).
7. A desizing device for processing single-crystal silicon rods according to claim 6, characterized in that: The other end of the connecting rod (31) is hinged to a clamping plate (32), and the bottom end of the connecting plate (25) is fixedly connected to a C-shaped frame (34). The outer surface of the clamping plate (32) is movably connected to the inner surface of the C-shaped frame (34).