Modular milling fixture for semiconductor equipment vacuum chamber inner liner panels

Abstract

The utility model belongs to semiconductor manufacturing equipment technical field especially is a kind of semiconductor equipment vacuum chamber lining board modular milling fixture, including support frame, the inside of support frame is provided with groove frame, the front of support frame is fixedly connected with controller, the front and back of support frame are evenly provided with clutch motor, the inner wall of support frame is fixedly connected with two rotating sleeve rings, the output end of two clutch motors is fixedly connected with the end of two rotating sleeve rings inner ring mutually far apart respectively, the end of two rotating sleeve rings inner ring mutually close is fixedly connected with the outer surface of groove frame, the inside of groove frame is slidably connected with sliding frame, the upper surface of sliding frame is fixedly connected with two fixed frame, by setting the cooperation structure of clutch motor and rotating sleeve ring, can drive groove frame to drive lining board to realize multi-angle rotary adjustment, cooperate second electric push rod to push the horizontal displacement adjustment of sliding frame, solved the problem that traditional fixture is difficult to be quickly aligned with milling equipment processing coordinate system.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor manufacturing equipment technology, specifically relating to a modular milling fixture for the inner liner of a vacuum chamber in semiconductor equipment. Background Technology

[0002] The modular milling fixture for inner liner plates in semiconductor vacuum chambers is a tooling system used for milling inner liner plates in semiconductor vacuum chambers. With modular design as its core, the fixture is broken down into standard functional modules such as positioning and clamping. These modules can be quickly combined through standardized interfaces to adapt to the processing of inner liner plates of different specifications. The fixture must meet requirements such as ultra-precision machining accuracy, low deformation, and compatibility with clean environments. It can improve processing efficiency and quality and is a key process equipment for the manufacturing of core semiconductor components.

[0003] However, existing modular milling fixtures for vacuum chamber liners in semiconductor equipment have significant shortcomings. After the liner is clamped, the lack of an integrated height and angle adjustment mechanism makes it difficult to quickly align with the machining coordinate system of the milling equipment. Traditional modular designs often focus only on positioning and clamping functions, neglecting the dynamic adaptation requirements of the tooling and machine tool. This forces operators to adjust the fixture posture through tedious processes such as repeated padding and manual calibration, which not only consumes a lot of time and manpower but may also introduce positioning errors due to human intervention. The lack of convenience of existing fixtures is particularly prominent when machining complex surfaces such as inclined planes and curved surfaces, which seriously affects machining efficiency and accuracy.

[0004] To address the aforementioned issues, this application proposes a modular milling fixture for the inner liner of a semiconductor device vacuum chamber. Utility Model Content

[0005] To address the aforementioned problems in the existing technology, this utility model provides a modular milling fixture for the inner liner of a semiconductor equipment vacuum chamber, which features the ability to dynamically adapt to machine tool milling.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a modular milling fixture for a vacuum chamber liner of a semiconductor device, comprising a support frame, a slot frame inside the support frame, a controller fixedly connected to the front of the support frame, a brake motor provided on both the front and back of the support frame, two rotating collars fixedly connected to the inner wall of the support frame, the output ends of the two brake motors respectively fixedly connected to the ends of the inner rings of the two rotating collars that are far apart from each other, the ends of the inner rings of the two rotating collars that are close to each other being fixedly connected to the outer surface of the slot frame, a sliding frame slidably connected inside the slot frame, two fixed frames fixedly connected to the upper surface of the sliding frame, a first electric push rod slidably connected inside each fixed frame, a first threaded pin provided above each fixed frame, the bottom end of each first threaded pin threaded through the fixed frame and in contact with the outer surface of the first electric push rod; The outer surface of the slot frame is provided with two second electric push rods. The telescopic end of each second electric push rod is fixedly connected to a connecting frame. The interior of each connecting frame is slidably connected to a sliding plate. The outer surface of each sliding plate is in contact with the inner wall of the sliding frame. The front and back of each connecting frame are provided with second threaded pins. The ends of the two second threaded pins that are close to each other are threaded through the connecting frame and extend into the interior of the sliding plate.

[0007] As a preferred embodiment of this utility model, two fixing plates are fixedly connected to both sides of the support frame, and each fixing plate is provided with a fixing pin inside.

[0008] As a preferred embodiment of this utility model, a mounting plate is fixedly connected to the back of the controller, and the back of the mounting plate is fixedly connected to the front of the support frame.

[0009] As a preferred technical solution of this utility model, each of the brake motors is fixedly connected to a fixed base on its bottom surface, and the two fixed bases are respectively fixedly connected to the front and back of the support frame on their sides that are close to each other.

[0010] As a preferred technical solution of this utility model, a protective shell is fixedly connected to the outer surface of each of the fixed seats, and each of the protective shells is sleeved on the outside of the brake motor.

[0011] As a preferred embodiment of this utility model, a reinforcing ring is fixedly connected to the outer surface of the inner ring of each rotating collar, and the side of the two reinforcing rings that are close to each other is fixedly connected to the outer surface of the slot frame.

[0012] As a preferred embodiment of this utility model, each of the first electric push rods has a protective ring fixedly connected to its telescopic end, and each of the protective rings is made of polyetheretherketone (PEEK).

[0013] As a preferred embodiment of this utility model, each of the second electric push rods has a connecting plate fixedly connected to its bottom end, and the two connecting plates are fixedly connected to the outer surface of the slot frame on their sides that are close to each other.

[0014] Compared with the prior art, the beneficial effects of this utility model are as follows: By setting a cooperative structure between the brake motor and the rotating collar, the slot frame can be driven to rotate and adjust the inner liner plate at multiple angles. With the help of the second electric push rod, the horizontal displacement of the sliding frame can be adjusted, which solves the problem that traditional fixtures are difficult to quickly align with the machining coordinate system of milling equipment. With the help of the first electric push rod, the clamping force can be precisely controlled. At the same time, the detachable fixing design of the first and second threaded pins enables the quick replacement of functional modules such as the fixing frame and connecting frame. It retains the adaptability and flexibility of modular fixtures, and eliminates the repeated padding and calibration process through the integrated electric adjustment mechanism. While improving the convenience of processing, it reduces the positioning error introduced by human operation, and provides a stable and reliable tooling guarantee for the high-precision milling of complex inner liner plates. Attached Figure Description

[0015] The accompanying drawings are provided to further illustrate the present invention and form part of the specification. They are used together with the embodiments of the present invention to explain the present invention, but do not constitute a limitation thereof. In the drawings: Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 This is a schematic diagram of the support frame in this utility model; Figure 3 This is a schematic diagram of the sliding frame in this utility model; Figure 4 This is a schematic diagram of the structure of the slot frame in this utility model; Figure 5 This is a schematic diagram of the sliding plate in this utility model; In the diagram: 1. Support frame; 2. Slot frame; 3. Fixed pin; 4. Fixed plate; 5. Mounting plate; 6. Controller; 7. Fixed base; 8. Protective shell; 9. Brake motor; 10. Reinforcing ring; 11. Rotating collar; 12. First threaded pin; 13. Protective ring; 14. First electric push rod; 15. Fixed frame; 16. Sliding frame; 17. Second electric push rod; 18. Connecting plate; 19. Connecting frame; 20. Sliding plate; 21. Second threaded pin. Detailed Implementation

[0016] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model. Example

[0017] Please see Figure 1-5 The present invention provides the following technical solution: a modular milling fixture for a vacuum chamber liner of a semiconductor device, comprising a support frame 1, a slot frame 2 is provided inside the support frame 1, a controller 6 is fixedly connected to the front of the support frame 1, a brake motor 9 is provided on both the front and back of the support frame 1, two rotating collars 11 are fixedly connected to the inner wall of the support frame 1, the output ends of the two brake motors 9 are respectively fixedly connected to the ends of the inner rings of the two rotating collars 11 that are far apart from each other, the ends of the inner rings of the two rotating collars 11 that are close to each other are fixedly connected to the outer surface of the slot frame 2, a sliding frame 16 is slidably connected inside the slot frame 2, two fixed frames 15 are fixedly connected to the upper surface of the sliding frame 16, a first electric push rod 14 is slidably connected inside each fixed frame 15, a first threaded pin 12 is provided above each fixed frame 15, and the bottom end of each first threaded pin 12 is threaded through the fixed frame 15 and contacts the outer surface of the first electric push rod 14; The outer surface of the slot frame 2 is provided with two second electric push rods 17. The telescopic end of each second electric push rod 17 is fixedly connected to a connecting frame 19. The interior of each connecting frame 19 is slidably connected to a sliding plate 20. The outer surface of each sliding plate 20 is in contact with the inner wall of the sliding frame 16. The front and back of each connecting frame 19 are provided with second threaded pins 21. The two second threaded pins 21 are threaded through the connecting frame 19 and extend into the interior of the sliding plate 20 at their closest points. In this embodiment, the controller 6 adopts a PLC programmable logic controller, which has the functions of precise control of multi-axis motion and real-time parameter adjustment. Meanwhile, the brake motor 9 adopts a servo brake motor, which can achieve stable angle adjustment and reliable locking. The first electric push rod 14 and the second electric push rod 17 both adopt high-precision ball screw electric push rods, which can meet the precise control requirements of inner liner clamping and horizontal displacement. Furthermore, the rotating collar 11 adopts a split design of inner and outer rings. The outer ring is fixed to the support frame 1, while the inner ring is connected to the slot frame 2. The structural support for angle adjustment is achieved through the relative rotation of the inner and outer rings.

[0018] Specifically, two fixing plates 4 are fixedly connected to both sides of the support frame 1. Each fixing plate 4 has a fixing pin 3 inside. In this embodiment, the support frame 1 is stably installed on the machine tool worktable by the cooperation of the fixing plate 4 and the fixing pin 3, forming a symmetrically distributed multi-point positioning structure, which enhances the overall installation rigidity of the fixture and avoids displacement deviation caused by vibration during processing.

[0019] Specifically, a mounting plate 5 is fixedly connected to the back of the controller 6. The back of the mounting plate 5 is fixedly connected to the front of the support frame 1. In this embodiment, the mounting plate 5 enables a reliable connection between the controller 6 and the support frame 1, which not only ensures the stability of the controller 6's installation position but also provides it with an independent installation reference, facilitating later disassembly, maintenance, and wiring.

[0020] Specifically, each brake motor 9 has a fixed base 7 fixedly connected to its bottom surface. The two fixed bases 7 are fixedly connected to the front and back sides of the support frame 1 respectively on their side faces. In this embodiment, the fixed base 7 provides rigid support for the brake motor 9, ensuring the coaxiality of the motor output shaft and the rotating collar 11, and improving the accuracy of angle adjustment and operational stability.

[0021] Specifically, a protective shell 8 is fixedly connected to the outer surface of each fixed base 7. Each protective shell 8 is fitted over the outside of the brake motor 9. In this embodiment, the protective shell 8 provides all-round protection for the brake motor 9, preventing the intrusion of impurities such as cutting fluid and metal chips during the processing, while reducing dust adhesion during motor operation and extending the service life of the equipment.

[0022] Specifically, a reinforcing ring 10 is fixedly connected to the outer surface of the inner ring of each rotating collar 11. The two reinforcing rings 10 are fixedly connected to the outer surface of the slot frame 2 on their sides that are close to each other. In this embodiment, the reinforcing rings 10 enhance the connection strength between the rotating collar 11 and the slot frame 2, so that the rotational torque can be transmitted evenly and avoid loosening or deformation of the connection parts caused by long-term angle adjustment.

[0023] Specifically, each of the first electric push rods 14 has a protective ring 13 fixedly connected to its telescopic end. Each protective ring 13 is made of polyetheretherketone (PEEK). In this embodiment, the protective ring 13 is in flexible contact with the inner liner plate. By utilizing the wear-resistant and low-friction properties of PEEK, the surface of the workpiece is prevented from being scratched, and the stability of the clamping is ensured, thus avoiding deformation of the thin-walled part due to rigid contact.

[0024] Specifically, each second electric push rod 17 is fixedly connected to a connecting plate 18 at its bottom end. The two connecting plates 18 are fixedly connected to the outer surface of the slot frame 2 on their sides that are close to each other. In this embodiment, the connecting plate 18 is used to achieve the vertical fixation of the second electric push rod 17 and the slot frame 2, ensuring that the extension and retraction direction of the push rod is consistent with the movement trajectory of the sliding frame 16, and avoiding the running jam caused by lateral force due to installation deviation.

[0025] The working principle and usage process of this utility model are as follows: First, the fixing pin 3 passes through the fixing plate 4, and the support frame 1 is securely installed on the machine tool worktable. Calibration is performed to ensure precise alignment of the fixture reference surface with the machine tool coordinate system. Then, the semiconductor vacuum chamber inner liner to be processed is placed on the sliding frame 16. The controller 6 is activated, and the first electric push rod 14 extends. The protective ring 13 makes flexible contact with the inner liner, using appropriate clamping force to fix the workpiece, avoiding surface damage and deformation. When the processing angle of the inner liner needs to be adjusted, the operator inputs parameters on the controller 6, and the brake motor 9 drives the inner ring of the rotating collar 11 to rotate, causing the slot frame 2 and its inner liner to rotate at multiple angles. If the horizontal position needs to be adjusted, the controller 6 controls the extension and retraction of the second electric push rod 17, pushing the connecting frame 19 and the sliding plate 20, thereby causing the sliding frame 16 to slide smoothly within the slot frame 2, completing the horizontal displacement adjustment. When processing inner liners of different specifications, the operator... Loosen the first threaded pin 12 with a tool wrench to release its restriction on the first electric push rod 14, and pull the first electric push rod 14 out of the fixed frame 15. Replace the first electric push rod 14 with a suitable one according to the thickness of the inner liner and the clamping requirements. Tighten the first threaded pin 12 to complete the fixation. For the horizontal adjustment mechanism, loosen the second threaded pin 21 on the connecting frame 19 to allow the sliding plate 20 to slide within the connecting frame 19, releasing the restriction on the sliding frame 16. After replacing the sliding frame 16 with a different specification, slide the sliding plate 20 to the limit again, and fix the connecting frame 19 and the sliding plate 20 with the second threaded pin 21 to achieve modular quick replacement. During the entire processing, the protective shell 8 tightly wraps the brake motor 9, effectively blocking impurities such as chips and cutting fluid generated during processing. The reinforcing ring 10 enhances the connection strength between the rotating collar 11 and the slot frame 2, ensuring the stability of the rotating structure. Finally, high-precision and high-efficiency milling processing of complex-shaped inner liner plates is achieved.

[0026] Finally, it should be noted that the above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A modular milling fixture for semiconductor equipment vacuum chamber inner-liner panels, characterized by: The system includes a support frame (1), a slot frame (2) is provided inside the support frame (1), a controller (6) is fixedly connected to the front of the support frame (1), a brake motor (9) is provided on both the front and back of the support frame (1), two rotating collars (11) are fixedly connected to the inner wall of the support frame (1), the output ends of the two brake motors (9) are fixedly connected to the ends of the inner rings of the two rotating collars (11) that are far apart from each other, the ends of the inner rings of the two rotating collars (11) that are close to each other are fixedly connected to the outer surface of the slot frame (2), a sliding frame (16) is slidably connected inside the slot frame (2), two fixed frames (15) are fixedly connected to the upper surface of the sliding frame (16), a first electric push rod (14) is slidably connected inside each fixed frame (15), a first threaded pin (12) is provided above each fixed frame (15), the bottom end of each first threaded pin (12) is threaded through the fixed frame (15) and contacts the outer surface of the first electric push rod (14); Two second electric push rods (17) are provided on the outer surface of the slot frame (2). Each second electric push rod (17) is fixedly connected to a connecting frame (19) at its telescopic end. Each connecting frame (19) is slidably connected to a sliding plate (20). The outer surface of each sliding plate (20) is in contact with the inner wall of the sliding frame (16). Each connecting frame (19) is provided with a second threaded pin (21) on its front and back sides. The two second threaded pins (21) are threaded through the connecting frame (19) and extend into the interior of the sliding plate (20) at their closest points.

2. A modular milling fixture for semiconductor equipment vacuum chamber interior lining panels according to claim 1, wherein: The support frame (1) has two fixed plates (4) fixedly connected to both sides, and each fixed plate (4) has a fixed pin (3) inside.

3. A modular milling fixture for semiconductor equipment vacuum chamber interior lining panels according to claim 1, wherein: The back of the controller (6) is fixedly connected to the mounting plate (5), and the back of the mounting plate (5) is fixedly connected to the front of the support frame (1).

4. A modular milling fixture for semiconductor equipment vacuum chamber interior lining panels according to claim 1, wherein: Each of the brake motors (9) has a fixed base (7) fixedly connected to its bottom surface. The two fixed bases (7) are fixedly connected to the front and back sides of the support frame (1) respectively on their sides that are close to each other.

5. A modular milling fixture for a vacuum chamber liner in a semiconductor device according to claim 4, characterized in that: Each of the fixed bases (7) has a protective shell (8) fixedly connected to its outer surface, and each of the protective shells (8) is fitted over the outside of the brake motor (9).

6. A modular milling fixture for a semiconductor equipment vacuum chamber liner as described in claim 1, characterized in that: Each of the rotating collars (11) has a reinforcing ring (10) fixedly connected to the outer surface of the inner ring, and the two reinforcing rings (10) are fixedly connected to the outer surface of the slot frame (2) on the side that is close to each other.

7. A modular milling fixture for a vacuum chamber liner in a semiconductor device according to claim 1, characterized in that: Each of the first electric push rods (14) has a protective ring (13) fixedly connected to its telescopic end, and each of the protective rings (13) is made of polyetheretherketone.

8. A modular milling fixture for a vacuum chamber liner in a semiconductor device according to claim 1, characterized in that: Each of the second electric push rods (17) has a connecting plate (18) fixedly connected to its bottom end, and the two connecting plates (18) are fixedly connected to the outer surface of the slot frame (2) on their sides that are close to each other.

Images