Horizontal footing adjustment mechanism

Abstract

The utility model relates to a horizontal foot adjusting mechanism, it belongs to the field of semiconductor wafer processing equipment, it includes bottom plate (7), the adjusted part base body (4), the lower extreme of outer hexagonal screw (1) is connected with the bottom plate (7) through the outer thread connection of its foot base (5), the foot base (5) is fixedly connected with the bottom plate (7), the upper portion outer thread connection of outer hexagonal screw (1) has horizontal adjusting bolt (2), the lower end surface of horizontal adjusting bolt (2) is in contact with the upper end surface of foot base (5) and is connected, horizontal adjusting bolt (2) outer thread is screwed into outer hexagonal nut (3) and base body (4). The utility model discloses horizontal foot adjusting mechanism, only needs to fine tune horizontal adjusting bolt to fine tune the horizontal precision of equipment base body, can save the design space of horizontal foot greatly, improves the stability of equipment precision and improves the yield of equipment processing wafer substrate product.

Description

Technical Field

[0001] This utility model relates to a horizontal foot adjustment mechanism, which belongs to the field of semiconductor wafer processing equipment, and particularly to a mechanism suitable for applications requiring high precision and stability in wafer substrate edge chamfering or polishing equipment. Background Technology

[0002] Currently available leveling mechanisms use two screws, one for pulling and the other for pushing, to adjust the levelness of the equipment base. This method has several technical problems: adjusting one screw directly affects the preload of the other screw and the force on the mechanism, thus changing the already adjusted position; operators need to repeatedly and alternately adjust the two screws to find the balance point, which is time-consuming and laborious; near the point where the "pull" and "push" states switch, i.e., the theoretical "zero force point," the mechanism may have slight gaps or elastic deformation. The stability of the entire mechanism depends on the static friction of the threaded pairs of the two screws. Under vibration, temperature changes, or long-term stress, the threaded pairs may experience slight creep or loosening. If this traditional leveling mechanism is used in wafer substrate edge chamfering or polishing equipment where high precision and stability are required, it will result in a very low wafer yield. To address the problems of poor rigidity, poor precision and stability, and time-consuming adjustment of the current pull-and-push leveling mechanism, this field continues to develop a leveling mechanism that directly passes through the equipment base, saving design space for the leveling feet and improving the stability of equipment precision. Summary of the Invention

[0003] The present invention aims to solve the above-mentioned technical problems by providing a horizontal foot adjustment mechanism. The purpose is to allow for fine adjustment of the horizontal accuracy of the equipment base body by simply adjusting the horizontal adjustment bolts, which can greatly save the design space of the horizontal feet, improve the stability of equipment accuracy, and increase the yield of wafer substrate products processed by the equipment.

[0004] To achieve the above objectives, this utility model provides a horizontal foot adjustment mechanism, which includes a base plate and an adjustable base body. Its structure is as follows: the lower end of the external hexagonal screw is connected to the base plate through a foot seat connected by its external thread, and the foot seat is fixedly connected to the base plate. The upper part of the external hexagonal screw is connected to a horizontal adjustment bolt by its external thread. The lower end face of the horizontal adjustment bolt contacts and connects with the upper end face of the foot seat. The external thread of the horizontal adjustment bolt is screwed into the external hexagonal nut and the base body.

[0005] Preferably, the aforementioned base plate is connected to the base plate by external hexagonal screws.

[0006] Preferably, the aforementioned base has an inverted T-shaped structure, and the external hexagonal screws of the base are located at the lower horizontal plate position of the base.

[0007] Preferably, the aforementioned external hexagonal nut is positioned above the base body and contacts and connects with it.

[0008] Preferably, the upper end face of the aforementioned leveling bolt is in contact with the lower end face of the screw head of the external hexagonal screw.

[0009] This utility model's leveling foot adjustment mechanism is highly suitable for situations where the space of the equipment base is very limited and the requirements for the equipment's precision and rigidity are very high. The adjusting bolt of this mechanism passes directly through the body of the component being adjusted. In contrast, traditional leveling mechanisms, when there is insufficient adjustment space, usually add an adjusting block to the outside of the equipment base and directly screw two screws onto the leveling block, adjusting the level of the equipment body by pulling and pushing. Traditional leveling mechanisms not only increase the space occupied by the adjustment mechanism, but also rely solely on the thread width of the adjusting bolt to support the equipment base body, which cannot ensure the stability of precision.

[0010] In applications requiring high precision machining, the stability of the flatness of the upper surface of the base body must be guaranteed. The key feature of this horizontal foot adjustment mechanism is that the lower surface of the horizontal adjustment bolt directly rests on the upper surface of the foot base, resulting in surface-to-surface contact and significantly improving the overall stability of the equipment. This not only increases processing efficiency but also greatly enhances product precision and yield, making it particularly suitable for equipment used in the chamfering and polishing of wafer substrate materials. Attached Figure Description

[0011] Figure 1 This is a schematic cross-sectional view of the overall structure of this utility model.

[0012] In the diagram: 1. Hex bolt; 2. Leveling bolt; 3. Hex nut; 4. Base body; 5. Foot mount; 6. Foot bolt; 7. Base plate. Detailed Implementation

[0013] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0014] like Figure 1As shown, the present invention relates to a horizontal foot adjustment mechanism, which includes a base plate 7 of existing semiconductor wafer processing equipment and a base body 4 of the adjustable component. Its structure is as follows: the lower end of an external hexagonal screw 1 is connected to the base plate 7 via a foot seat 5 connected by its external thread. The foot seat 5 and the base plate 7 are connected by an external hexagonal screw 6. The foot seat 5 has an inverted T-shaped structure, and the external hexagonal screw 6 is located at the lower horizontal plate position of the foot seat 5. A horizontal adjustment bolt 2 is connected to the upper external thread of the external hexagonal screw 1. The lower end face of the horizontal adjustment bolt 2 contacts the upper end face of the foot seat 5. The external thread of the horizontal adjustment bolt 2 is screwed into an external hexagonal nut 3 and the base body 4 of the adjusted component. The external hexagonal nut 3 is located above the base body 4 and contacts it. The upper end face of the horizontal adjustment bolt 2 contacts the lower end face of the screw head of the external hexagonal screw 1.

[0015] The assembly method of this utility model is as follows: The external hex nut 3 is screwed onto the external thread on the upper part of the horizontal adjusting bolt 2. The horizontal adjusting bolt 2 is screwed into the base body 4 with the internal thread hole. The external hex nut 3 is positioned above the base body 4 and makes contact with it. The external hex screw 1 is screwed into the internal thread hole of the horizontal adjusting bolt 2 and then installed into the internal thread hole of the foot bracket 5. The two foot bracket external hex screws 6 are then installed into the upper surface of the foot bracket 5 in sequence and screwed into the thread hole of the base plate 7, so that the foot bracket 5 is fixed on the base plate 7.

[0016] The working principle of this utility model: The base body 4 is equipped with three or more leveling feet. This leveling foot adjustment mechanism is suitable for applications requiring high rigidity and precision stability of the base body 4, where the flatness of the upper surface of the base body 4 is critical. The adjustment steps for a single leveling foot adjustment mechanism are as follows: First, loosen the hexagonal screw 1, then loosen the hexagonal nut 3. Use a hexagonal wrench to tighten the leveling bolt 2 to fine-tune the horizontal position of the base body 4. When the horizontal accuracy of the base body 4 is within the target range, tighten the hexagonal nut 3, and then tighten the hexagonal screw 1.

Claims

1. A leveling foot adjustment mechanism, comprising a base plate (7) and a base body (4) of the adjustable component, characterized in that... The structure is as follows: the lower end of the external hexagonal screw (1) is connected to the base plate (7) through the foot seat (5) connected by its external thread. The foot seat (5) is fixedly connected to the base plate (7). The upper part of the external hexagonal screw (1) is connected to the horizontal adjustment bolt (2). The lower end face of the horizontal adjustment bolt (2) is in contact with the upper end face of the foot seat (5). The external thread of the horizontal adjustment bolt (2) is screwed into the external hexagonal nut (3) and the base body (4).

2. The leveling foot adjustment mechanism according to claim 1, characterized in that... The footplate (5) and the base plate (7) are connected by external hexagonal screws (6).

3. The leveling foot adjustment mechanism according to claim 1 or 2, characterized in that... The footplate (5) is an inverted T-shaped structure, and the external hexagonal screws (6) are located on the lower horizontal plate of the footplate (5).

4. The leveling foot adjustment mechanism according to claim 1, characterized in that... The external hexagonal nut (3) is positioned above the base body (4) and is in contact with it.

5. The leveling foot adjustment mechanism according to claim 1, characterized in that... The upper end face of the horizontal adjusting bolt (2) is in contact with the lower end face of the screw head of the external hexagonal screw (1).

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