A main spindle box structure with segmented opening and clamping slots

Abstract

The utility model discloses a main shaft box structure of segmented opening clamping groove, it belongs to the field of semiconductor wafer processing equipment. It includes main shaft box body (1), and main shaft box body (1) is by bottom plate (10), the fixed setting of main shaft mounting hole body (9) on bottom plate (10) constitutes, wherein the two side areas of the central section of main shaft mounting hole body (9) open the symmetry two section axial grooves (6), and the two side main shaft mounting hole body (9) on each section axial groove (6) is provided with radial groove (4), and the bottom plate (10) is fixedly installed with main shaft axial positioning pin (7) under main shaft mounting hole body (9). The utility model has the characteristics of high accuracy, adjustable, shock attenuation, impact resistance, it is convenient for maintenance, and convenient replacement also have the characteristics of good precision retention, ultrahigh rigidity and good stability.

Description

Technical Field

[0001] This utility model relates to a segmented clamping groove spindle box structure, which belongs to the field of semiconductor wafer processing equipment. It is suitable for high-precision, low-torque applications of round substrate edge chamfering or polishing equipment. Background Technology

[0002] Currently, some slotted clamping spindle box structures on the market involve creating a through slot in the axial direction of the spindle mounting hole, installing the spindle, and then fixing the spindle to the spindle box radially with screws in the spindle mounting hole.

[0003] The above structure has the following technical problems: This clamping spindle box with a through slot in the spindle mounting hole has poor rigidity. The slotted structure greatly weakens the overall integrity of the box and its rigidity is not as good as that of a one-piece design. The long-term stability of the spindle box is poor, and the clamping structure may loosen under long-term cyclic loads. The preload needs to be checked regularly, which increases the maintenance difficulty for equipment operators and maintenance personnel. Furthermore, the displacement of the spindle box precision leads to a decrease in spindle machining accuracy and increases the defect rate of processed wafer substrates.

[0004] The current design of a clamping spindle box structure with a through slot in the spindle hole has problems such as poor rigidity, poor accuracy and stability, and time-consuming adjustment. The present design proposes to open a clamping slot in the middle area of ​​the spindle box mounting hole, while leaving the two ends of the spindle mounting hole without slots, in order to ensure the overall rigidity of the spindle box. Summary of the Invention

[0005] The present invention aims to solve the above-mentioned technical problems by providing a segmented spindle box structure with clamping grooves. It features high precision, adjustability, shock absorption, and impact resistance. It is easy to maintain and replace, and also has the characteristics of good precision retention, ultra-high rigidity, and good stability.

[0006] To solve the above-mentioned technical problems, this utility model is achieved through the following technical solution: A segmented spindle box structure with clamping grooves includes a spindle box body, which is composed of a base plate and spindle mounting holes fixedly disposed on the base plate. The spindle mounting holes have two symmetrical axial grooves on both sides of the central section. Radial grooves are provided on both sides of the spindle mounting holes of each axial groove. A spindle axial positioning pin is fixedly installed on the base plate directly below the spindle mounting holes.

[0007] Preferably, the upper end face of the aforementioned spindle mounting hole body is the spindle flange mounting surface, and the lower end face of the base plate is provided with a motor plate mounting hole.

[0008] Preferably, the base plate is provided with fixing holes for fixing the spindle box body to the spindle box frame in the grinding area of ​​the equipment.

[0009] Preferably, the base plate and the main shaft mounting hole are integrally formed.

[0010] Preferably, the axial groove is formed at the top of the spindle mounting hole.

[0011] Preferably, the width of the axial groove is 2-3 mm and the width of the radial groove is 2-3 mm.

[0012] Preferably, the mounting holes on the motor board are threaded holes.

[0013] This utility model adopts a segmented clamping slot spindle box structure, which is very suitable for applications requiring high machining accuracy, strong grinding rigidity, and high spindle length-to-diameter ratio, such as wafer substrate edge chamfering or grinding and polishing spindles. The design of this segmented clamping slot spindle box structure retains the high precision, adjustability, shock absorption and impact resistance of a through-hole clamping spindle box, making it easy to maintain and replace, while also having the characteristics of an integrated spindle box with good precision retention, ultra-high rigidity and stability.

[0014] This invention not only greatly improves the processing accuracy and yield of products, but also reduces the frequency and difficulty of operators and maintenance personnel to regularly check the spindle accuracy and make adjustments. It is particularly suitable for use in equipment related to the chamfering and polishing of wafer substrate materials. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the overall three-dimensional structure of this utility model.

[0016] Figure 2 This is a longitudinal sectional view of the main body of the spindle box of this utility model.

[0017] In the figure: 1. Spindle box body, 2. Spindle locking hole, 3. Fixing hole, 4. Radial groove, 5. Spindle flange mounting surface, 6. Axial groove, 7. Spindle axial positioning pin, 8. Motor plate mounting hole, 9. Spindle mounting hole body, 10. Base plate. Detailed Implementation

[0018] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0019] like Figure 1 and Figure 2As shown, this utility model discloses a segmented spindle box structure with clamping grooves. It includes a spindle box body 1, which is composed of a base plate 10 and a spindle mounting hole 9 fixedly disposed on the base plate 10. The base plate 10 and the spindle mounting hole 9 are integrally formed. Two symmetrical axial grooves 6 are formed on both sides of the central section of the spindle mounting hole 9. The axial grooves 6 are formed at the top position of the spindle mounting hole 9. The two ends of the spindle mounting hole 9 do not have axial grooves 6. Radial grooves 4 are formed on both sides of the spindle mounting hole 9 of each axial groove 6. A spindle axial positioning pin 7 is fixedly installed on the base plate 10 directly below the spindle mounting hole 9 to position the axial position of the spindle. The upper end face of the spindle mounting hole 9 is a spindle flange mounting surface 5. The lower end face of the base plate 10 is provided with a motor plate mounting hole 8. The motor plate mounting hole 8 is a threaded hole for fixing a motor seat. A servo motor is installed on the motor seat to drive the spindle. The base plate 10 is provided with fixing holes 3 for fixing the spindle box body 1 on the spindle box frame of the equipment grinding area. The width of the axial groove 6 is 2-3 mm and the width of the radial groove 4 is 2-3 mm.

[0020] The assembly process of this utility model is as follows: The spindle housing 1 is fixed to the spindle housing frame in the grinding area of ​​the equipment through the fixing hole 3. The grinding spindle is installed into the spindle hole of the spindle housing 1, and the lower end face of the spindle housing contacts the spindle axial positioning pin 7 to achieve the initial axial positioning of the grinding spindle. The spindle is pre-locked radially through the spindle locking hole 2 using four Allen screws. The upper end face of the motor seat is connected to the lower end face of the base plate 10 of the spindle housing 1 through the motor plate mounting hole 8. The coupling and other transmission components such as the servo motor are installed in sequence. After the other transmission components are installed, the taper runout and end face runout of the upper part of the spindle nose end are adjusted with a dial indicator. After the taper runout and end face runout of the upper part of the spindle nose end are adjusted to the specified range, the Allen screws at the spindle locking hole 2 on the spindle housing 1 are tightened in sequence to secure the grinding spindle to the spindle housing 1.

[0021] The specific design of this utility model is described as follows: For spindles with high precision and precision stability requirements, limited spindle mounting space, and generally large aspect ratios on wafer substrates with chamfered or polished edges, this utility model designs a spindle box structure with segmented clamping grooves in the middle area of ​​the spindle box mounting hole. The structural feature of this spindle box is that the hole body on both sides and in the center section has no grooves, ensuring the overall rigidity of the spindle box. Axial grooves, 2-3mm wide at both ends, are opened in the two sides of the center section to clamp the spindle. Furthermore, two radial grooves, each 2-3mm wide, are opened in the radial direction at both ends of the axial grooves to prevent overall deformation of the spindle box when the spindle is tightened with clamping screws. This structural design maintains the high precision and adjustability, shock absorption and impact resistance, and ease of maintenance and replacement of a through-grooved clamping spindle box, while also possessing the characteristics of an integrated spindle box with good precision retention, ultra-high rigidity, and stability.

Claims

1. A segmented spindle box structure with clamping grooves, comprising a spindle box body (1), the spindle box body (1) being composed of a base plate (10) and spindle mounting holes (9) fixedly disposed on the base plate (10), characterized in that... Two symmetrical axial grooves (6) are opened on both sides of the central section of the spindle mounting hole (9). Radial grooves (4) are opened on both sides of the spindle mounting hole (9) of each axial groove (6). A spindle axial positioning pin (7) is fixedly installed on the bottom plate (10) directly below the spindle mounting hole (9).

2. The segmented clamping groove spindle box structure according to claim 1, characterized in that... The upper end face of the spindle mounting hole body (9) is the spindle flange mounting surface (5), and the lower end face of the base plate (10) is provided with a motor plate mounting hole (8).

3. A segmented spindle box structure with clamping grooves according to claim 1 or 2, characterized in that... The base plate (10) is provided with fixing holes (3) for fixing the spindle box body (1) on the spindle box frame of the equipment grinding area.

4. The segmented clamping groove spindle box structure according to claim 3, characterized in that... The base plate (10) and the spindle mounting hole (9) are integrally formed structures.

5. The segmented clamping groove spindle box structure according to claim 1, characterized in that... The axial groove (6) is located at the top of the spindle mounting hole (9).

6. A segmented spindle box structure with clamping grooves according to claim 1 or 5, characterized in that... The width of the axial groove (6) is 2-3 mm, and the width of the radial groove (4) is 2-3 mm.

7. A segmented spindle box structure with clamping grooves according to claim 2, characterized in that... The motor board mounting hole (8) is a threaded hole.

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