A delivery pipeline and system for polishing fluid cooling

Abstract

The utility model provides a kind of for polishing liquid cooling's conveying pipeline and system, comprising: liquid conveying pipeline, for conveying polishing liquid;Heat insulation pipeline is sleeved in the outside of liquid conveying pipeline, for reducing external heat conduction to liquid conveying pipeline;Multiple support components are arranged between liquid conveying pipeline and heat insulation pipeline, multiple support components are sequentially arranged along the axial direction of liquid conveying pipeline, and liquid conveying pipeline is fixed;Multiple cooling pipelines are arranged on support component, multiple cooling pipelines are sequentially arranged along the circumferential direction of liquid conveying pipeline, and the polishing liquid in liquid conveying pipeline is cooled.The utility model has the beneficial effect that through the form that heat insulation pipeline and cooling pipeline are combined, realize the double control of heat insulation and cooling to liquid conveying pipeline, can more safely, economically and efficiently ensure the temperature stability of polishing liquid in conveying process, effectively prevent temperature excessively high, structure is simple, and it is convenient for practical application.

Description

Technical Field

[0001] This utility model belongs to the field of silicon wafer production technology, and in particular relates to a conveying pipeline and system for cooling polishing fluid. Background Technology

[0002] With the continuous advancement of science and technology in recent years, China's semiconductor industry has developed rapidly. Among them, polishing is a key link in the wafer manufacturing process, which puts forward higher requirements for process environment and material conditions, especially the strict control of the temperature stability of polishing fluid.

[0003] Currently, the supply of polishing slurry typically relies on a dedicated delivery pipeline system, whereby the Chemical Liquids Supply Building (CCSS) delivers the polishing slurry through pipelines to the relevant semiconductor manufacturing equipment within the production building (Fab) to meet the requirements of continuous process operation.

[0004] In practical applications, manufacturing processes are extremely sensitive to temperature fluctuations, typically requiring the transport temperature to be maintained within the range of 17–23°C, especially during hot seasons or in areas where equipment generates concentrated heat. Most existing technologies employ only simple insulation measures, lacking effective cooling structures. This can easily lead to abnormal temperature increases in the polishing slurry during transport, negatively impacting subsequent polishing results and chip quality. Summary of the Invention

[0005] In view of the above problems, the present invention provides a delivery pipeline and system for cooling polishing fluid, so as to solve the above or other problems existing in the prior art.

[0006] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is: a delivery pipeline for cooling polishing fluid, comprising:

[0007] Liquid delivery pipeline, used to deliver polishing fluid;

[0008] Insulated pipes installed outside liquid transport pipelines are used to reduce the conduction of external heat to the liquid transport pipelines.

[0009] Multiple support components are installed between the liquid transport pipeline and the heat insulation pipeline, and the multiple support components are arranged sequentially along the axial direction of the liquid transport pipeline to fix the liquid transport pipeline.

[0010] Multiple cooling pipes are installed on the support assembly, and these cooling pipes are arranged sequentially along the circumferential direction of the liquid delivery pipe to cool the polishing liquid inside the liquid delivery pipe.

[0011] Furthermore, the support assembly includes an inner support structure and an outer support structure connected to each other, as well as multiple fixing structures. The inner support structure is sleeved on the liquid conveying pipeline, and the outer support structure contacts and cooperates with the heat insulation pipeline so that the liquid conveying pipeline and the heat insulation pipeline are coaxially arranged. The inner support structure and the outer support structure are connected by connectors. Multiple fixing structures are arranged sequentially along the circumferential direction of the liquid conveying pipeline. The fixing structures are located on the inner support structure or on the connectors.

[0012] Furthermore, the fixing structure is a hole structure; or, the fixing structure is an arc-shaped structure with one end open, and the open end of the fixing structure faces the outer supporting structure.

[0013] Furthermore, a protective element is provided on the side of the fastener that contacts the cooling pipe.

[0014] Furthermore, the supporting components are an integral ring structure; or,

[0015] The support assembly is a split ring structure, including a first support part and a second support part. The corresponding ends of the first support part and the second support part can be detachably connected, or one end of the first support part and the corresponding end of the second support part can be hinged, and the other end of the first support part and the corresponding end of the second support part can be detachably connected.

[0016] Furthermore, the insulated pipe includes an inner pipe and an insulation sleeve covering the outside of the inner pipe. The insulation sleeve includes multiple insulation sections arranged sequentially along the axial direction of the liquid conveying pipe. The inner pipe is made of a rigid material, and the insulation sleeve is made of polyurethane, glass wool, or rock wool.

[0017] Furthermore, the cooling pipe is equipped with multiple flow guiding structures, which are spaced apart along the axial direction of the cooling pipe.

[0018] Furthermore, the radial dimension of the cooling pipe is smaller than the gap between the liquid delivery pipe and the insulation pipe, so that an air insulation layer is formed between the cooling pipe and the insulation pipe.

[0019] Furthermore, a protective layer is provided on the outside of the liquid delivery pipeline, and the material of the protective layer is glass fiber or fluororubber.

[0020] A delivery pipeline system for cooling polishing slurry includes a cooling medium supply device, a temperature detection device, a control device, and the delivery pipeline for cooling polishing slurry as described above. The cooling medium supply device is connected to multiple cooling pipes of the delivery pipeline for cooling polishing slurry. The temperature detection device is located on the liquid delivery pipe of the delivery pipeline for cooling polishing slurry. The cooling medium supply device and the temperature detection device are respectively connected to the control device. The control device controls the operation of the cooling medium supply device based on the detection data of the temperature detection device.

[0021] Due to the adoption of the above technical solution, the conveying pipeline for cooling the polishing fluid has an insulated pipe and multiple cooling pipes. By combining the insulated pipe and the cooling pipe, dual control of heat insulation and cooling of the liquid conveying pipeline is achieved, which can more safely, economically and efficiently ensure the temperature stability of the polishing fluid during the conveying process, effectively prevent the temperature from being too high, and has a simple structure that is easy to apply in practice.

[0022] Multiple cooling pipes are arranged in a ring around the liquid delivery pipes. The cooling pipes are equipped with flow guiding structures to increase the heat exchange area and create a turbulence effect, thereby significantly improving cooling efficiency, avoiding local overheating or cooling dead zones, and effectively inhibiting local scaling and stagnation of the cooling medium.

[0023] The cooling pipe is located between the liquid delivery pipe and the insulation pipe, and the radial dimension of the cooling pipe is smaller than the gap between the liquid delivery pipe and the insulation pipe, so that there is a gap between the cooling pipe and the insulation pipe. The air layer with low thermal conductivity is used to form an air insulation layer for heat insulation protection, which effectively slows down the heat conduction of the external high temperature to the outer wall of the liquid delivery pipe. Therefore, the delivery pipe for cooling the polishing fluid has multiple functions of air insulation, insulation of the insulation pipe and dynamic cooling of the cooling pipe. It effectively copes with the influence of high temperature environment on liquid temperature, ensures the temperature stability of polishing fluid during delivery, keeps its temperature within the process requirements during the delivery process, avoids chemical property changes or process instability caused by excessive temperature, and thus improves the reliability and consistency of semiconductor manufacturing process.

[0024] The system is equipped with multiple support components, which are sequentially arranged along the axial direction of the liquid delivery pipeline to position and fix the liquid delivery pipeline inside the heat-insulating pipeline. At the same time, multiple cooling pipelines are also installed on the support components, which fix each cooling pipeline at different positions to ensure that the cooling pipelines are always in contact with the liquid delivery pipeline and to cool the polishing liquid inside the liquid delivery pipeline. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of the structure of a delivery pipeline for cooling polishing fluid according to an embodiment of this utility model;

[0026] Figure 2 This is a schematic cross-sectional view of a delivery pipeline for cooling polishing fluid according to an embodiment of this utility model;

[0027] Figure 3 This is a schematic diagram of the cross-sectional structure of an insulated pipe according to an embodiment of the present invention;

[0028] Figure 4This is a cross-sectional structural diagram (overall structure) of a support component according to an embodiment of the utility model.

[0029] Figure 5 This is a cross-sectional schematic diagram of another structure (split structure) of the support component according to an embodiment of the utility model.

[0030] In the diagram: 1. Insulated pipe; 2. Liquid transport pipe; 3. Support assembly; 4. Cooling pipe; 30. Inner support structure; 31. Outer support structure; 32. Fixing structure; 33. Connector; 34. Connecting lug; 10. Insulation sleeve; 11. Inner pipe Detailed Implementation

[0031] The present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0032] Figure 1 The diagram shows a structural schematic of an embodiment of the present invention. This embodiment relates to a conveying pipeline and system for cooling polishing slurry, used for conveying polishing slurry. The conveying pipeline has a cooling pipe and a heat insulation pipe, which can prevent heat from the outside of the liquid conveying pipeline from entering the liquid conveying pipeline, and can also cool the polishing slurry in the liquid conveying pipeline, so that the polishing slurry in the conveying pipeline is kept within the required temperature range during the conveying process, improving the temperature control capability of the polishing slurry in high-temperature environments, and solving the problem that the temperature of polishing slurry and other chemical liquids rises too quickly during the conveying process in high-temperature environments, affecting the stability of the process.

[0033] A delivery pipeline for cooling polishing fluid, such as Figure 1 and 2 As shown, this is a conveying system for polishing slurry. During the conveying process, the temperature of the polishing slurry is maintained within the required temperature range, preventing the slurry from being affected by external high-temperature environments and improving temperature control during high-temperature conveying. The conveying pipeline for cooling the polishing slurry includes:

[0034] Liquid delivery pipe 2 is used to deliver polishing fluid;

[0035] The heat insulation pipe 1, which is installed outside the liquid transport pipe 2, is used to reduce the conduction of external heat to the liquid transport pipe 2, block the external heat of the liquid transport pipe 2, reduce the heat transfer of the environment in which the liquid transport pipe 2 is located, and achieve heat insulation for the liquid transport pipe 1.

[0036] Multiple support components 3 are provided between the liquid conveying pipe 2 and the heat insulation pipe 1. The multiple support components 3 are arranged sequentially along the axial direction of the liquid conveying pipe 2 to fix the liquid conveying pipe 2 and fix the liquid conveying pipe 2 inside the heat insulation pipe 1, thereby realizing the axial positioning of the liquid conveying pipe 2 inside the heat insulation pipe 1 and facilitating the installation of the cooling pipe 4.

[0037] Multiple cooling pipes 4 are installed on the support component 3. The multiple cooling pipes 4 are arranged sequentially along the circumferential direction of the liquid conveying pipe 2 to cool down the polishing liquid in the liquid conveying pipe 2. Through heat conduction between the cooling pipes 4 and the liquid conveying pipe 2, the heat of the polishing liquid is carried away, thereby cooling the polishing liquid in the liquid conveying pipe 2 and controlling the temperature of the polishing liquid in the liquid conveying pipe 2 to be maintained within the required temperature range during the conveying process.

[0038] In use, the polishing slurry is transported through the liquid transport pipe 2. When the temperature of the polishing slurry in the liquid transport pipe 2 exceeds the set temperature threshold, a cooling medium is introduced into the cooling pipe 4. During the flow of the cooling medium, heat conduction occurs between the cooling pipe 4 and the liquid transport pipe 2, cooling the polishing slurry. When the temperature of the polishing slurry in the liquid transport pipe 2 is lower than the set temperature threshold, the flow of the cooling medium in the cooling pipe 4 is stopped to prevent over-cooling of the polishing slurry and to control the temperature of the polishing slurry during transport.

[0039] The aforementioned liquid transport pipe 2 is a pipe structure. Its axial length and radial dimensions are selected according to actual needs and are not specifically required here. This liquid transport pipe 2 is used for transporting chemical liquids such as polishing fluids. Therefore, the material of the liquid transport pipe 2 is a corrosion-resistant material to extend its service life. For example, the corrosion-resistant material can be PVDF. The material of the liquid transport pipe 2 can be selected according to actual needs and is not specifically required here.

[0040] The liquid delivery pipe 2 is covered with a protective layer made of a composite functional material, such as fiberglass or fluororubber. This protective layer serves both thermal insulation and mechanical protection functions, preventing external heat from entering the polishing fluid and improving the impact resistance and service life of the liquid delivery pipe 2. This protective layer can be fixed to the outer wall of the liquid delivery pipe 2 by adhesive bonding or wrapping.

[0041] like Figure 3As shown, the aforementioned insulated pipe 1 is a pipe structure, comprising an inner pipe 11 and an insulating sleeve 10 covering the outer surface of the inner pipe 11. The inner pipe 11 serves as a supporting framework, facilitating the installation of the insulating sleeve 10 and providing installation space for the liquid delivery pipe 2 and multiple cooling pipes 4. The insulating sleeve 10 reduces the amount of heat entering the inner pipe 11 from the outside, thereby reducing the amount of heat entering the liquid delivery pipe 2, achieving insulation, and improving the overall cooling effect of the delivery pipeline used for cooling the polishing fluid. The insulated pipe 1 also protects the liquid delivery pipe 2 and the cooling pipes 4, preventing them from directly contacting the environment and extending their service life.

[0042] The inner tube 11 is made of a rigid material, which makes it less prone to deformation under external forces. This ensures that the internal space of the inner tube 11 remains relatively stable, allowing it to support the overall structure of the delivery pipeline. This prevents the installation space of the liquid delivery pipeline 2 and the cooling pipeline 4 from being affected, thus protecting the liquid delivery pipeline 2 and the cooling pipeline 4 located inside the inner tube 11. The rigid material can be a metal, such as steel, aluminum, or iron; a composite material, such as carbon fiber reinforced plastic; a polymer material, such as engineering plastics; or other rigid materials. The material of the inner tube 11 is selected based on actual needs, and no specific requirements are specified here.

[0043] The aforementioned insulation sleeve 10 is made of polyurethane, glass wool, or rock wool, selected according to actual needs; no specific requirements are specified here. The insulation sleeve 10 wraps around the outer periphery of the inner tube 11. The axial length of the insulation sleeve 10 can be adapted to the axial length of the inner tube 11. In this case, the insulation sleeve 10 is an integral structure. Alternatively, the insulation sleeve 10 comprises multiple insulation sections arranged sequentially along the axial direction of the liquid conveying pipeline 2. In this case, the insulation sleeve 10 is a split structure. Since the insulation sleeve 10 is exposed to the outdoor environment for a long time, it is prone to aging or damage. The split structure of the insulation sleeve 10 facilitates maintenance and replacement, avoiding the need to replace the entire insulation sleeve 10 when only a part of it is damaged, thus reducing manufacturing costs. When a part of the insulation sleeve 10 is damaged, only the insulation section where the damaged part is located needs to be replaced, improving the maintenance efficiency and ease of use of the insulation sleeve 10.

[0044] The insulation sleeve 10 is fixed to the outer wall of the inner tube 11 by winding. Along the axial direction of the inner tube 11, adjacent insulation sections are in close contact, preventing the inner tube 11 from being exposed to the external environment and thus weakening the insulation function of the insulation pipe 1. The thickness of the insulation sleeve 10 is calculated using the following formula during winding:

[0045]

[0046] in, The amount of heat conducted per unit time, expressed in W. The thermal conductivity of the insulation sleeve 10 is expressed in W / (m·K). The surface area of ​​the insulation sleeve 10 is in m². 2 , The temperature of the inner surface of the insulation jacket is expressed in °C. The surface temperature of the insulation jacket is expressed in °C. The thickness of the insulation sleeve 10 is in meters (m).

[0047] The radial dimension of the liquid delivery pipe 2 is smaller than that of the heat insulation pipe 1, and there is a gap between the liquid delivery pipe 2 and the heat insulation pipe 1. The support assembly 3 is installed in the gap between the liquid delivery pipe 2 and the heat insulation pipe 1 to position and fix the liquid delivery pipe 2 and the multiple cooling pipes 4. The support assembly 3 is used to axially position the liquid delivery pipe 2, fix the liquid delivery pipe 2 inside the heat insulation pipe 1, and simultaneously support and position the multiple cooling pipes 4, so that the positions of the multiple cooling pipes 4 are fixed when arranged along the circumferential direction of the liquid delivery pipe 2, so that the multiple cooling pipes 4 are coaxially arranged with the liquid delivery pipe 2, and the distance between each cooling pipe 4 and the liquid delivery pipe 2 is the same, so as to achieve a stable installation of the multiple cooling pipes 4 and the liquid delivery pipe 2, thereby achieving the stability of the overall structure of the delivery pipeline.

[0048] like Figure 4 and 5 As shown, the aforementioned support component 3 includes an inner support structure 30 and an outer support structure 31 connected to each other. The inner support structure 30 and the outer support structure 31 are coaxially arranged. The inner support structure 30 is sleeved on the liquid conveying pipe 2, and the outer support structure 31 is in contact with the heat insulation pipe 1 so that the liquid conveying pipe 2 and the heat insulation pipe 1 are coaxially arranged, and the liquid conveying pipe 2 is stably installed in the heat insulation pipe 1.

[0049] The shape of the inner support structure 30 is adapted to the cross-sectional shape of the outer wall of the liquid conveying pipe 2 so that when the inner support structure 30 is fitted onto the liquid conveying pipe 2, the inner support structure 30 and the outer wall of the liquid conveying pipe 2 are in surface contact. In order to enable the inner support structure 30 to be fitted onto the liquid conveying pipe 2, the inner support structure 30 is a ring structure with a mounting hole for accommodating the liquid conveying pipe 2, so as to realize the fitted installation of the inner support structure 30 and the liquid conveying pipe 2. The inner support structure 30 and the liquid conveying pipe 2 are clearance-fitted or interference-fitted. The inner support structure 30 provides axial positioning, fixation and support for the liquid conveying pipe 2.

[0050] The shape of the outer support structure 31 is adapted to the cross-sectional shape of the inner wall of the heat insulation pipe 1 so that the outer support structure 31 is in surface contact with the heat insulation pipe 1, and the outer support structure 31 is interference-fitted with the heat insulation pipe 1. The outer support structure 31 is fixedly installed inside the heat insulation pipe 1 and will not move due to external force, thereby fixing the support component 3 inside the heat insulation pipe 1, and thus achieving support and fixation of the liquid conveying pipe 2. The outer support structure 31 is a ring structure, and the inner support structure 30 is located inside the outer support structure 31. The radial dimension of the inner support structure 30 is smaller than that of the outer support structure 31. The inner support structure 30 and the outer support structure 31 are fixedly connected by a connector 33. One end of the connector 33 is fixedly connected to the inner wall of the outer support structure 31, and the other end of the connector 33 is fixedly connected to the outer wall of the inner support structure 30. The inner support structure 30 and the outer support structure 31 are fixedly connected together to form the overall support component 3 for support. The fixed connection method between the connector 33 and the inner support structure 30 and the connector 33 and the outer support structure 31 can be integrally formed, fixedly connected by fasteners such as screws, riveting, welding, or other fixed connection methods, depending on the actual needs. No specific requirements are specified here.

[0051] The aforementioned connector 33 can be an annular plate structure. In this structure, there is one connector 33, which is arranged along the radial direction of the inner support structure 30. Alternatively, the connector 33 can be a rod structure or a plate structure. In this structure, there are multiple connectors 33, which are arranged sequentially along the circumferential direction of the inner support structure 30. The structural arrangement of the connector 33 can be selected and set according to actual needs.

[0052] To secure the cooling pipes 4, the support assembly 3 also includes multiple fixing structures 32 for fixing the cooling pipes 4. These fixing structures 32 are arranged sequentially along the circumferential direction of the inner support structure 30, with the number of fixing structures 32 matching the number of cooling pipes 4. Each fixing structure 32 secures one cooling pipe 4, fixing the multiple cooling pipes 4 to the periphery of the liquid delivery pipe 2. This prevents the cooling pipes 4 from moving during use and ensures good contact between the cooling pipes 4 and the liquid delivery pipe 2 for heat conduction. In some feasible embodiments, the multiple fixing structures 32 are evenly spaced and uniformly distributed around the periphery of the liquid delivery pipe 2 to uniformly cool the polishing fluid within the liquid delivery pipe 2.

[0053] In some feasible embodiments, the fixing structure 32 described above can be a hole structure. The radial dimension of the fixing structure 32 is adapted to the radial dimension of the cooling pipe 4. The cooling pipe 4 passes through the hole and is fixed on the support assembly 3. In this structure, the fixing structure 32 is set on the connector 33. The connector 33 is an annular plate structure, and the fixing structure 32 is located on the side of the connector 33 closer to the liquid delivery pipe 2. This allows the cooling pipe 4 to be installed at the fixing structure 32, so that the portions of the cooling pipe 4 located on both sides of the connector 33 can contact the liquid delivery pipe 2 for heat conduction, thereby cooling the polishing liquid in the liquid delivery pipe 2.

[0054] Alternatively, in other feasible embodiments, the aforementioned fixing structure 32 is an arc-shaped structure with one open end. The fixing structure 32 is detachably connected to the inner support structure 30. The cooling pipe 4 enters the fixing structure 32 through the opening, and the fixing structure 32 clamps and fixes the cooling pipe 4. The fixing structure 32 is a U-shaped structure, and the material of the fixing structure 32 is plastic, which can produce elastic deformation. The two ends of the opening of the fixing structure 32 can open in opposite directions under the action of external force, so that the fixing structure 32 can clamp and fix cooling pipes 4 of different sizes. The fixing structure 32 is disposed on the outer peripheral side of the inner support structure 30 facing the outer support structure 31. A dovetail groove is provided on the outer peripheral side of the inner support structure 30, and a dovetail-shaped protrusion is provided on the outer side wall of the bottom of the fixing structure 32 opposite to the open end. The dovetail-shaped protrusion is inserted into the dovetail groove to connect the fixing structure 32 with the inner support structure 30. The open end of the fixing structure 32 faces the outer support structure 31. Alternatively, a threaded hole is provided on the outer peripheral side of the inner support structure 30, and the fixing structure 32 is connected to the inner support structure 30 by screws. The open end of the fixing structure 32 faces the outer support structure 31. Alternatively, a plug-in hole is provided on the outer peripheral side of the inner support structure 30, and a plug-in member is provided on the outer side wall of the bottom of the fixing structure 32 opposite to the open end. The plug-in member is plugged into the plug-in hole to connect the fixing structure 32 with the inner support structure 30. The installation method of the fixing structure 32 and the inner support structure 30 can be selected and set according to actual needs, and no specific requirements are specified here. In this structure, the connecting member 33 can be an annular plate structure, and the connecting member 33 has through holes at positions corresponding to each fixed structure 32 to facilitate the installation of each cooling pipe 4. Alternatively, the connecting member 33 can be a rod structure, and when multiple connecting members 33 are installed, the gap between two adjacent connecting members 33 corresponds to one fixed structure 32, so that the connecting member 33 will not block the fixed structure 32 and will not interfere with the installation of the cooling pipe 4.

[0055] To reduce relative movement between the fixed structure 32 and the cooling pipe 4, a protective component is provided on the side of the fixed structure 32 that contacts the cooling pipe 4. This component increases the friction between the fixed structure 32 and the cooling pipe 4. The protective component is made of silicone, fluororubber, or EPDM. The protective component can be fixedly connected to the inner side of the fixed structure 32 by adhesive bonding. Simultaneously, the protective component also reduces wear between the fixed structure 32 and the cooling pipe 4, extending the service life of the cooling pipe 4.

[0056] The aforementioned support component 3 is a ring structure. In this structure, the support component 3 is an integral structure. When the support component 3 is connected to the liquid conveying pipe 2, one end of the liquid conveying pipe 2 passes through the inner support structure 30 and the support component 3 is installed on the liquid conveying pipe 2. In this case, both the inner support structure 30 and the outer support structure 31 are integral ring structures.

[0057] Alternatively, the aforementioned support component 3 can be a split structure, comprising a first support portion and a second support portion. Both the first and second support portions are arc-shaped structures with two ends. The corresponding ends of the first and second support portions are connected to form a ring-shaped support component 3. This split structure facilitates the installation of the support component 3 on the liquid delivery pipeline 2. One of the first and second support portions may be a superior arc structure, and the other a inferior arc structure; alternatively, both may be semi-circular arc structures. The arc-shaped structures of the first and second support portions can be selected according to actual needs, and no specific requirements are specified here. In some feasible embodiments, preferably, both the first and second support portions are semi-circular arc structures. In this case, both the inner support structure 30 and the outer support structure 31 are split structures, each forming a ring structure composed of two arc-shaped structural parts.

[0058] When the support assembly 3 is a split structure, in some feasible embodiments, the corresponding ends of the first support portion and the second support portion can be detachably connected. Both ends of the first support portion are provided with connecting lugs 34, which are located on the inner circumferential surfaces of the two ends of the first support portion. The side of the connecting lug 34 facing the second support portion is on the same plane as the end face of the first support portion, and the connecting lug 34 is arranged along the radial direction of the first support portion. Similarly, both ends of the second support portion are also provided with connecting lugs 34. On the inner circumferential side of both ends of the part, the side of the connecting lug 34 facing the first support part and the end face of the second support part are located on the same plane. The connecting lug 34 is arranged along the radial direction of the second support part. Each connecting lug 34 is provided with a threaded hole or a through hole. When the first support part and the second support part are fastened to form a ring structure, the connecting lugs 34 at the corresponding ends of the first support part and the second support part are arranged face to face, and the opposing surfaces of the two connecting lugs 34 at the corresponding ends are in contact. The two connecting lugs 34 are fixedly connected by bolts or other connecting parts 33.

[0059] At either end of the first support portion, a connecting lug 34 is fixedly connected to the outer support structure 31 and the inner support structure 30 of the first support portion (the outer support structure 31 and the inner support structure 30 are arc-shaped), sealing the gap between the inner support structure 30 and the outer support structure 31. The outer end of the connecting lug 34 is flush with the outer surface of the outer support structure 31 to prevent interference between the connecting lug 34 and the inner wall of the insulation pipe 1, and also to prevent wear on the inner wall of the insulation pipe 1. The inner end of the connecting lug 34 extends beyond the inner surface of the inner support structure 30; the extension length is selected according to actual needs, but the connecting lug 34 will not interfere with the installation and use of the fixing structure 32. The fixing connection method between the connecting lug 34 and the inner support structure 30, and between the connecting lug 34 and the outer support structure 31, is preferably welding or integral molding.

[0060] Similarly, at either end of the second support, the connecting lug 34 is fixedly connected to the outer support structure 31 and the inner support structure 30 of the second support, respectively, to seal the gap between the inner support structure 30 and the outer support structure 31. The outer end of the connecting lug 34 is flush with the outer surface of the outer support structure 31 to avoid interference between the connecting lug 34 and the inner wall of the heat insulation pipe 1, and also to avoid wear on the inner wall of the heat insulation pipe 1. The inner end of the connecting lug 34 extends out of the inner surface of the inner support structure 30, and the extension length is selected according to actual needs. However, the connecting lug 34 will not interfere with the installation and use of the fixed structure 32.

[0061] The material of the connecting lug 34 is the same as that of the outer support structure 31. In order to avoid thermal bridging, an insulating gasket is provided at the contact point between the bolt and the connecting lug 34.

[0062] Alternatively, in some other feasible embodiments, one end of the first support portion and the corresponding end of the second support portion are hinged, and the other end of the first support portion and the corresponding end of the second support portion are detachably connected. In this structure, one set of corresponding ends of the first support portion and the second support portion are hinged together by a shaft, and the first support portion and the second support portion can rotate around the shaft. The other set of opposite ends are respectively provided with connecting lugs 34. The two connecting lugs 34 are fixedly connected by bolts or other connecting parts. The first support portion and the second support portion can be opened by simply opening the bolts on the two connecting lugs 34, so as to realize the quick installation and disassembly of the support assembly 3.

[0063] The aforementioned cooling pipe 4 is a pipe structure used for transporting the cooling medium. Multiple flow-guiding structures are installed within the cooling pipe 4, spaced apart along its axial direction. These flow-guiding structures break the laminar flow of the cooling medium within the cooling pipe 4, creating a turbulence zone. This improves the heat transfer coefficient and effectively suppresses local scaling and stagnation of the cooling medium. It also enhances the flow efficiency of the cooling medium within the cooling pipe 4 and its heat exchange with the liquid transport pipe 2. The flow-guiding structure is a plate-shaped rib, and its shape can be circular, square, elliptical, triangular, or other shapes, selected according to actual needs. No specific requirements are specified here. The radial dimension of the flow-guiding structure in the cooling pipe 4 does not exceed the radius of the cooling pipe 4, so as to create a turbulence zone at the flow-guiding structure. Multiple flow-guiding structures are arranged sequentially along the axial direction of the cooling pipe 4, with a certain distance between adjacent flow-guiding structures. The multiple flow-guiding structures can be equally spaced or unequally spaced, and this distance can be selected according to actual needs. No specific requirements are specified here.

[0064] When setting up multiple flow guiding structures, they can all be located on the same straight line, or two adjacent flow guiding structures can not be located on the same straight line. Two adjacent flow guiding structures can be a certain distance apart in the circumferential direction of the cooling pipe 4. The setting method of multiple flow guiding structures can be selected according to actual needs, and no specific requirements are made here.

[0065] The flow guiding structure is fixedly connected to the cooling pipe 4. The preferred method of fixed connection is integral molding. For example, for the cooling pipe 4 made of plastic, the flow guiding structure is directly formed on the inner wall of the cooling pipe 4 by injection molding or extrusion molding.

[0066] The radial dimension of the aforementioned cooling pipe 4 is smaller than the gap between the liquid conveying pipe 2 and the heat insulation pipe 1, so that there is a gap between the inner wall of the cooling pipe 4 and the heat insulation pipe 1. The air located in the gap between the cooling pipe 4 and the heat insulation pipe 1 forms an air insulation layer to provide heat insulation protection and effectively slow down the heat conduction of the external high temperature to the outer wall of the liquid conveying pipe 2.

[0067] A delivery pipeline system for cooling polishing slurry includes a cooling medium supply device, a control device, a temperature detection device, and the delivery pipeline for cooling polishing slurry as described above. The cooling medium supply device is connected to multiple cooling pipes 4 of the delivery pipeline for cooling polishing slurry, and supplies cooling medium to the cooling pipes 4. The temperature detection device is installed on the liquid delivery pipe 2 and is used to detect the temperature of the polishing slurry in the liquid delivery pipe 2. The temperature detection device and the cooling medium supply device are respectively connected to the control device. The control device receives the temperature detection value detected by the temperature detection device. The control device has a preset temperature threshold. The control device compares the received temperature detection value with the preset temperature threshold. If the temperature detection value is lower than the preset temperature threshold, the control device will detect the temperature of the polishing slurry. If the measured value is higher than the preset temperature threshold, the control device controls the cooling medium supply device to operate. The cooling medium supply device delivers cooling medium to each cooling pipe 4. The cooling medium circulates within the cooling pipe 4. Through heat conduction between the cooling pipe 4 and the side wall of the liquid delivery pipe 2, the heat of the polishing liquid in the liquid delivery pipe 2 is effectively dissipated, achieving dynamic cooling of the polishing liquid and maintaining the temperature stability and process adaptability of the polishing liquid during the delivery process. If the measured temperature value is lower than the preset temperature threshold, the control device controls the cooling medium supply device to stop operating. The cooling medium supply device stops delivering cooling medium to each cooling pipe 4 to avoid over-cooling of the polishing liquid and also reduces energy consumption during the polishing liquid delivery process.

[0068] The aforementioned cooling medium supply device includes a power unit, a cooling unit, and a storage unit. The storage unit is connected to the cooling unit, the cooling unit is connected to the power unit, the power unit is connected to the inlet end of the cooling pipe 4, and the outlet end of the cooling pipe 4 is connected to the storage unit, forming a circulating flow path for the cooling medium. Under the action of the power unit, the cooling medium in the storage unit enters the cooling pipe 4 through the cooling unit, flows out of the cooling pipe 4, and then enters the storage unit. The cooling unit is designed to cool the high-temperature cooling medium, so that the temperature of the cooling medium entering the cooling pipe 4 is lower, thereby achieving the cooling of the polishing fluid. The power unit is designed to achieve the circulating flow of the cooling medium.

[0069] In some feasible embodiments, the power unit is a circulating pump, the cooling unit is a heat exchanger, the control device is a PLC controller, and the temperature detection device is a temperature sensor. There are multiple temperature sensors, and multiple temperature detection devices are set at different positions along the axial direction of the liquid delivery pipeline 2 to detect the temperature of the polishing liquid at different positions. All multiple temperature sensors are connected to the control device, and the control device receives the detection data from each temperature sensor.

[0070] In some feasible embodiments, the cooling medium is cooling water, ethylene glycol solution, or other low-temperature stable coolant, selected according to actual needs. No specific requirements are specified here, but a medium with high specific heat capacity and good chemical stability is preferred to ensure heat transfer efficiency and system safety. The temperature of this cooling medium is 8–10°C.

[0071] Due to the adoption of the above technical solution, the delivery pipeline for cooling the polishing fluid has an insulated pipe and multiple cooling pipes. By combining the insulated and cooling pipes, dual control of heat insulation and cooling of the liquid delivery pipeline is achieved. This ensures the temperature stability of the polishing fluid during delivery more safely, economically, and efficiently, effectively preventing excessive temperature. The structure is simple and easy to apply. Multiple cooling pipes are arranged in a ring, evenly distributed around the perimeter of the liquid delivery pipeline. The cooling pipes have flow guiding structures inside, increasing the heat exchange area and creating a turbulence effect, thereby significantly improving cooling efficiency, avoiding local overheating or cooling dead zones, and effectively suppressing local scaling and stagnation of the cooling medium. The cooling pipes are located between the liquid delivery pipeline and the insulated pipe, and the radial dimension of the cooling pipes is smaller than the gap between the liquid delivery pipeline and the insulated pipe, creating a gap between them. This gap utilizes a low thermal conductivity air layer to form an air insulation layer for heat protection, effectively mitigating the effects of high external temperatures. The heat conduction of the outer wall of the liquid delivery pipeline is controlled; therefore, the delivery pipeline for cooling the polishing slurry has multiple functions, including air insulation, insulation of the insulated pipeline, and dynamic cooling of the cooling pipeline. It effectively copes with the influence of high temperature environment on liquid temperature, ensures temperature stability during the delivery of polishing slurry, and keeps its temperature within the process requirements during the delivery process. This avoids changes in chemical properties or process instability caused by excessive temperature, thereby improving the reliability and consistency of semiconductor manufacturing process. Multiple support components are provided, which are arranged sequentially along the axial direction of the liquid delivery pipeline to position and fix the liquid delivery pipeline inside the insulated pipeline. At the same time, multiple cooling pipelines are set on the support components, and the multiple support components fix each cooling pipeline at different positions, so that the cooling pipelines can always be in contact with the liquid delivery pipeline to cool the polishing slurry in the liquid delivery pipeline.

[0072] The embodiments of this utility model have been described in detail above, but the content described is only a preferred embodiment of this utility model and should not be considered as limiting the scope of implementation of this utility model. All equivalent changes and improvements made in accordance with the claims of this utility model should still fall within the patent coverage of this utility model.

Claims

1. A delivery pipeline for cooling polishing slurry, characterized in that: include: Liquid delivery pipeline, used to deliver polishing fluid; An insulated pipe is installed outside the liquid transport pipeline to reduce the conduction of external heat to the liquid transport pipeline; Multiple support components are provided between the liquid delivery pipeline and the heat insulation pipeline, and the multiple support components are arranged sequentially along the axial direction of the liquid delivery pipeline to fix the liquid delivery pipeline; Multiple cooling pipes are provided on the support assembly, and the multiple cooling pipes are arranged sequentially along the circumferential direction of the liquid delivery pipe to cool the polishing liquid in the liquid delivery pipe.

2. The delivery pipeline for cooling polishing fluid according to claim 1, characterized in that: The support assembly includes an inner support structure and an outer support structure connected to each other, as well as multiple fixing structures. The inner support structure is sleeved on the liquid delivery pipeline, and the outer support structure is in contact with the heat insulation pipeline so that the liquid delivery pipeline and the heat insulation pipeline are coaxially arranged. The inner support structure and the outer support structure are connected by a connector. The multiple fixing structures are arranged sequentially along the circumferential direction of the liquid delivery pipeline. The fixing structures are located on the inner support structure or on the connector.

3. The delivery pipeline for cooling polishing fluid according to claim 2, characterized in that: The fixing structure is a hole structure; or, the fixing structure is an arc-shaped structure with one end open, and the open end of the fixing structure faces the outer support structure.

4. The delivery pipeline for cooling polishing fluid according to claim 3, characterized in that: The side of the fastener that contacts the cooling pipe is provided with a protective component.

5. The delivery pipeline for cooling polishing fluid according to any one of claims 2-4, characterized in that: The support component is an integral ring structure; or, The support assembly is a split ring structure, which includes a first support part and a second support part. The corresponding ends of the first support part and the second support part can be detachably connected, or the corresponding ends of the first support part and the second support part are hinged, and the corresponding ends of the first support part and the second support part are detachably connected.

6. The delivery pipeline for cooling polishing fluid according to any one of claims 1-4, characterized in that: The insulated pipe includes an inner pipe and an insulation sleeve covering the outside of the inner pipe. The insulation sleeve includes multiple insulation sections arranged sequentially along the axial direction of the liquid conveying pipe. The inner pipe is made of a rigid material, and the insulation sleeve is made of polyurethane, glass wool, or rock wool.

7. The delivery pipeline for cooling polishing fluid according to claim 6, characterized in that: The cooling pipe is provided with multiple flow guiding structures, which are spaced apart along the axial direction of the cooling pipe.

8. The delivery pipeline for cooling polishing fluid according to claim 7, characterized in that: The radial dimension of the cooling pipe is smaller than the gap between the liquid delivery pipe and the insulation pipe, so that an air insulation layer is formed between the cooling pipe and the insulation pipe.

9. The delivery pipeline for cooling polishing fluid according to claim 6, characterized in that: The outer side of the liquid delivery pipeline is provided with a protective layer, which is made of glass fiber or fluororubber.

10. A pipeline system for cooling polishing slurry, characterized in that: The device includes a cooling medium supply device, a temperature detection device, a control device, and a delivery pipeline for cooling polishing fluid as described in any one of claims 1-9. The cooling medium supply device is connected to a plurality of cooling pipes of the delivery pipeline for cooling polishing fluid. The temperature detection device is located on the liquid delivery pipe of the delivery pipeline for cooling polishing fluid. The cooling medium supply device and the temperature detection device are respectively connected to the control device. The control device controls the operation of the cooling medium supply device based on the detection data of the temperature detection device.

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