Double-sided grinding wheel structure for silicon wafer

Abstract

The application discloses a silicon wafer double-face grinding wheel structure and belongs to the grinding wheel field.The silicon wafer double-face grinding wheel structure comprises a limiting sheet, a mounting shaft fixedly connected with the limiting sheet, a grinding sheet provided with a mounting hole, a connecting ring detachably mounted with the grinding sheet, a mounting ring fixedly connected with the connecting ring, a mounting groove arranged on the mounting ring, a limiting assembly mounted on the inner wall of the mounting groove and used for preliminarily limiting the mounting shaft, four fixing blocks movably mounted on the mounting ring and an adjusting assembly mounted on the mounting ring. The adjusting screw, the fixing block, the sliding groove and the stabilizing rod are arranged, and the rotating handle can be rotated, so that the rotating handle drives the screw to rotate, the fixing block is slidably mounted on the sliding groove and is adjusted in position under the action of the stabilizing rod, the position of the first threaded hole is adjusted to correspond to the second threaded hole in different positions on different limiting sheets, the practicability is improved, and the mounting efficiency is improved.

Description

Technical Field

[0001] This application relates to the field of grinding wheels, and more specifically, to a double-sided grinding wheel structure for silicon wafers. Background Technology

[0002] A circular bonded abrasive wheel with a central through-hole, made of abrasive and bonding resin. Grinding wheels are the most widely used and extensive type of abrasive. They rotate at high speeds and can be used for rough grinding, semi-fine grinding, and fine grinding of the outer and inner circles, planes, and various profiles of metal or non-metal workpieces, as well as for grooving and cutting.

[0003] The product structure can be referenced from a grinding wheel structure disclosed in Chinese Patent Document 201420021189. This grinding wheel structure includes at least two grinding wheels of different sizes, each of which is a cup-shaped grinding wheel. Each grinding wheel has a shaft hole at its bottom, which engages with a rotating shaft on a matching machine to achieve rotary grinding; this shaft is the base wheel. The remaining grinding wheels are fixed in conjunction with the aforementioned base wheel to form a linked grinding structure; these wheels are the linkage wheels. This utility model combines grinding wheels with different grinding functions to achieve the purpose of grinding a workpiece in a single clamping operation. Specifically, multiple cup-shaped grinding wheels are stacked and fixed to form a linked structure, thereby achieving through-shaft rotation. This allows for the simultaneous installation of right-angle grinding and sharp-angle grinding on the same workpiece, achieving two or more different grinding grits simultaneously. Furthermore, it achieves the purpose of grinding a workpiece in a single operation, while also enabling the workpiece to be processed on a machining equipment with stable dimensions and precision in a single clamping operation, thus ensuring the processing accuracy and stability of the product.

[0004] Silicon wafer grinding wheels have the advantages of high processing efficiency, minimal surface damage, wide applicability, and strong process stability.

[0005] In the prior art, the grinding wheel needs to be bolted to the mounting point on the mounting shaft of the drive equipment and correspond to the threaded hole on the mounting point. However, since the threaded hole positions on different mounting points are different, different grinding wheels also need to be matched with the corresponding threaded holes, which reduces the installation efficiency.

[0006] A double-sided grinding wheel structure for silicon wafers is now provided. Utility Model Content

[0007] The summary section of this application is intended to provide a brief overview of the concepts, which will be described in detail in the detailed description section below. This summary section is not intended to identify key or essential features of the claimed technical solutions, nor is it intended to limit the scope of the claimed technical solutions.

[0008] To address the technical problems mentioned in the background section, some embodiments of this application provide a double-sided grinding wheel structure for silicon wafers, comprising: a limiting plate; a mounting shaft fixedly connected to the limiting plate; a grinding plate with mounting holes, wherein the shape of the teeth on the grinding plate is one of square, heart-shaped, circular, triangular, arc-shaped, etc.; a connecting ring detachably mounted to the grinding plate; a mounting ring fixedly connected to the connecting ring; and a mounting groove formed on the mounting ring.

[0009] A limiting component is installed on the inner wall of the mounting groove to initially limit the mounting shaft; four fixing blocks are provided and movably mounted on the mounting ring; an adjusting component is installed on the mounting ring to adjust the position of the fixing blocks; a first threaded hole is formed on the fixing block; a second threaded hole is formed on the limiting plate; and a fixing bolt is threaded between the first threaded hole and the second threaded hole.

[0010] The grinding disc can be disassembled and installed by connecting the third and fourth threaded holes with mounting bolts. The mounting shaft, similar to a drive shaft, is mounted on a drive device. Starting the drive device rotates the mounting shaft. When the grinding disc needs to be installed onto the limiting plate, the mounting shaft is first passed through the mounting groove. The limiting plate then limits the mounting ring. Simultaneously, two limiting plates, corresponding to the mounting shaft and with the help of limiting springs, clamp and limit the mounting shaft, preventing the mounting ring from sliding against the limiting plate during installation. Next, the first and second threaded holes are aligned and connected with fixing bolts to install the mounting ring onto the limiting plate. Other mounting bolts can then be installed. Rotating the handle causes the screw to rotate, and the fixing block slides on the groove. The position of the fixing block can be adjusted by the stabilizing rod, allowing for adjustment of the first and second threaded holes on different limiting plates, thus improving practicality.

[0011] In some embodiments, the abrasive plate has a third threaded hole, the connecting ring has a fourth threaded hole, and a mounting bolt is threadedly connected between the third threaded hole and the fourth threaded hole.

[0012] In some implementations, four of the third threaded hole, the fourth threaded hole, and the mounting bolt are provided.

[0013] In some embodiments, two sleeves are symmetrically fixed to the inner wall of the mounting groove, and a sliding rod is slidably mounted on the sleeve. A limit spring is fixed between the sliding rod and the inner wall of the sleeve, and a limit plate is fixed to the sliding rod, with the limit plate corresponding to the mounting shaft.

[0014] In some embodiments, the mounting ring has a groove, the fixing block is slidably mounted on the groove, and the adjusting component is used to adjust the position of the slider on the groove.

[0015] In some embodiments, the adjusting assembly includes an adjusting screw rotatably mounted between two inner walls of the slide, and the adjusting screw is threadedly connected to a fixed block.

[0016] In some embodiments, a stabilizing rod is fixed between the two inner walls of the chute, the stabilizing rod passing through a fixed block, and the stabilizing rod is slidably mounted to the fixed block.

[0017] In some implementations, a throttle is fixedly attached to the adjusting screw.

[0018] In some implementations, the stabilizer bar is cylindrical.

[0019] In some implementations, the limiting plate is arc-shaped.

[0020] The beneficial effects of this application are as follows: by setting an adjusting screw, a fixing block, a sliding groove, and a stabilizing rod, and by rotating a handle, the screw rotates, and the fixing block is slidably installed on the sliding groove. Under the action of the stabilizing rod, the position of the fixing block can be adjusted, thereby adapting to different positions of the second threaded holes on different limiting plates to adjust the position of the first threaded hole to correspond with the second threaded hole, which improves practicality and installation efficiency. At the same time, under the action of the two limiting plates, corresponding to the mounting shaft, and under the action of the limiting spring, the mounting shaft can be clamped and limited by the limiting plates, thereby preventing the mounting ring and the limiting plates from sliding during the installation process, which would affect the installation. Attached Figure Description

[0021] The accompanying drawings, which form part of this application, are used to provide a further understanding of the application and to make other features, objects, and advantages of the application more apparent. The illustrative embodiments and descriptions of this application are used to explain the application and do not constitute an undue limitation of the application.

[0022] Furthermore, throughout the accompanying drawings, the same or similar reference numerals denote the same or similar elements. It should be understood that the drawings are schematic, and the elements are not necessarily drawn to scale.

[0023] In the attached diagram:

[0024] Figure 1 This is an overall schematic diagram based on an embodiment of this application;

[0025] Figure 2 It is a schematic diagram of a three-dimensional structure;

[0026] Figure 3 It is a sectional view;

[0027] Figure 4 This is a cross-sectional view of the connecting ring;

[0028] Figure 5 This is a schematic diagram of the three-dimensional structure of the frosted sheet;

[0029] Figure 6 yes Figure 3 A magnified structural diagram of A in the middle;

[0030] Figure 7 yes Figure 5 A magnified structural diagram of B in the diagram;

[0031] Figure 8 This is a schematic diagram showing the toothed plate as a heart shape;

[0032] Figure 9 This is a schematic diagram showing that the toothed plate is square;

[0033] Figure 10 This is a schematic diagram showing that the toothed plate is triangular;

[0034] Figure 11 This is a schematic diagram showing that the toothed plate is cylindrical.

[0035] Figure label:

[0036] 1. Grinding disc; 2. Mounting shaft; 3. Third threaded hole; 4. Fourth threaded hole; 5. Mounting bolt; 6. Limiting plate; 7. Mounting ring; 8. Connecting ring; 9. Thruster; 10. Mounting groove; 11. Mounting hole; 12. Stabilizing rod; 13. Second threaded hole; 14. First threaded hole; 15. Fixing block; 16. Fixing bolt; 17. Limiting spring; 18. Sleeve; 19. Slide rod; 20. Limiting plate; 21. Slide groove; 22. Adjusting screw. Detailed Implementation

[0037] Embodiments of this disclosure will now be described in more detail with reference to the accompanying drawings. While some embodiments of this disclosure are shown in the drawings, it should be understood that this disclosure can be implemented in various forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided to provide a more thorough and complete understanding of this disclosure. It should be understood that the accompanying drawings and embodiments of this disclosure are for illustrative purposes only and are not intended to limit the scope of protection of this disclosure.

[0038] It should also be noted that, for ease of description, only the parts relevant to the invention are shown in the accompanying drawings. Unless otherwise specified, the embodiments and features described in this disclosure can be combined with each other.

[0039] It should be noted that the concepts of "first" and "second" mentioned in this disclosure are used only to distinguish different devices, modules or units, and are not used to limit the order of functions performed by these devices, modules or units or their interdependencies.

[0040] It should be noted that the terms "a" and "a plurality of" used in this disclosure are illustrative rather than restrictive, and those skilled in the art should understand that, unless otherwise expressly indicated in the context, they should be understood as "one or more".

[0041] This disclosure will now be described in detail with reference to the accompanying drawings and embodiments.

[0042] Reference Figure 1-7 A double-sided grinding wheel structure for silicon wafers includes: a limiting plate 6, a mounting shaft 2, a grinding plate 1, a connecting ring 8, a mounting ring 7, a mounting groove 10, a limiting assembly, fixing blocks 15, an adjusting assembly, a first threaded hole 14, a second threaded hole 13, and a fixing bolt 16. The mounting shaft 2 is fixedly connected to the limiting plate 6. The grinding plate 1 has a mounting hole 11, and both ends of the grinding plate 1 are made of silicon. The connecting ring 8 is detachably mounted to the grinding plate 1. The mounting ring 7 is fixedly connected to the connecting ring 8. The mounting groove 10 is formed on the mounting ring 7. The limiting assembly is installed on the inner wall of the mounting groove 10 for initially limiting the mounting shaft 2. Four fixing blocks 15 are provided and movably mounted on the mounting ring 7. The adjusting assembly is installed on the mounting ring 7 for adjusting the position of the fixing blocks 15. The first threaded hole 14 is formed on the fixing block 15. The second threaded hole 13 is formed on the limiting plate 6. The fixing bolt 16 is threaded between the first threaded hole 14 and the second threaded hole 13.

[0043] The cross-sectional shape of the teeth on the abrasive disc is not limited to square; it can also be heart-shaped, circular, triangular, arc-shaped, etc. See reference for details. Figure 8-11 .

[0044] The grinding disc 1 has a third threaded hole 3, and the connecting ring 8 has a fourth threaded hole 4. A mounting bolt 5 is threadedly connected between the third threaded hole 3 and the fourth threaded hole 4. There are four of each of the following: the third threaded hole 3, the fourth threaded hole 4, and the mounting bolt 5.

[0045] Two sleeves 18 are symmetrically fixed to the inner wall of the mounting groove 10, and a slide rod 19 is slidably installed on the sleeve 18. A limit spring 17 is fixed between the slide rod 19 and the inner wall of the sleeve 18, and a limit plate 20 is fixed on the slide rod 19, and the limit plate 20 corresponds to the mounting shaft 2.

[0046] The mounting ring 7 has a groove 21, and the fixing block 15 is slidably mounted on the groove 21. The adjusting component is used to adjust the position of the slider on the groove 21.

[0047] The adjustment assembly includes an adjustment screw 22, which is rotatably mounted between the two inner walls of the slide groove 21, and is threadedly connected to the fixing block 15.

[0048] A stabilizing rod 12 is fixedly connected between the two inner walls of the slide 21. The stabilizing rod 12 passes through the fixing block 15 and is slidably installed with the fixing block 15. A handle 9 is fixedly connected to the adjusting screw 22. The stabilizing rod 12 is cylindrical. The limiting plate 20 is arc-shaped.

[0049] The grinding disc 1 can be disassembled and installed by threading the mounting bolts 5 into the third threaded hole 3 and the fourth threaded hole 4 respectively. The mounting shaft 2 is similar to a drive shaft and is mounted on a drive device. Starting the drive device will drive the mounting shaft 2 to rotate. When it is necessary to install the grinding disc 1 onto the limiting plate 6, the mounting shaft 2 can first be passed through the mounting groove 10. Then, under the action of the limiting plate 6, the mounting ring 7 is limited. At the same time, under the action of the two limiting plates 20, corresponding to the mounting shaft 2, and under the action of the limiting spring 17, the mounting shaft 2 can be clamped and limited by the limiting plates 20, thereby preventing the mounting ring 7 from shifting position relative to the limiting plate 6 during the installation process. To prevent sliding and affecting installation, the first threaded hole 14 and the second threaded hole 13 can be aligned and connected to the first threaded hole 14 and the second threaded hole 13 by fixing bolt 16, thereby installing the mounting ring 7 onto the limiting plate 6. Then, other mounting bolts 5 can be installed, and the handle 9 can be rotated, thereby rotating the screw. The fixing block 15 is slidably installed on the slide groove 21, and under the action of the stabilizing rod 12, the position of the fixing block 15 can be adjusted, thereby adapting to different positions of the second threaded hole 13 on different limiting plates 6. Adjusting the position of the first threaded hole 14 to correspond with the second threaded hole 13 improves installation efficiency and practicality.

[0050] The above description is merely a selection of preferred embodiments of this disclosure and an explanation of the technical principles employed. Those skilled in the art should understand that the scope of the invention involved in the embodiments of this disclosure is not limited to technical solutions formed by specific combinations of the above-described technical features, but should also cover other technical solutions formed by arbitrary combinations of the above-described technical features or their equivalents without departing from the above-described inventive concept. For example, technical solutions formed by substituting the above-described features with (but not limited to) technical features with similar functions disclosed in the embodiments of this disclosure.

Claims

1. A double-sided grinding wheel structure for silicon wafers, comprising: Limiting plate; The mounting shaft is fixedly connected to the limiting plate; The abrasive disc has mounting holes, and the shape of the teeth on the abrasive disc is one of square, heart-shaped, circular, triangular, or arc-shaped. The characteristic feature is that the silicon wafer double-sided grinding wheel structure further includes: The connecting ring is detachably mounted to the frosted plate; The mounting ring is fixedly connected to the connecting ring; The mounting slot is provided on the mounting ring; A limiting component is installed on the inner wall of the mounting slot to initially limit the mounting shaft; Four fixing blocks are provided, and they are movably mounted on the mounting ring. An adjustment component, mounted on the mounting ring, is used to adjust the position of the fixing block; The first threaded hole is made on the fixed block; The second threaded hole is made on the limiting piece; A fixing bolt is threaded between the first threaded hole and the second threaded hole.

2. The silicon wafer double-sided grinding wheel structure according to claim 1, characterized in that: The abrasive disc has a third threaded hole, and the connecting ring has a fourth threaded hole. A mounting bolt is threaded between the third threaded hole and the fourth threaded hole.

3. The silicon wafer double-sided grinding wheel structure according to claim 2, characterized in that: The third threaded hole, the fourth threaded hole, and the mounting bolt are all provided in four parts.

4. The silicon wafer double-sided grinding wheel structure according to claim 1, characterized in that: Two sleeves are symmetrically fixed to the inner wall of the mounting groove, and a sliding rod is slidably installed on the sleeve. A limit spring is fixed between the sliding rod and the inner wall of the sleeve, and a limit plate is fixed on the sliding rod, with the limit plate corresponding to the mounting shaft.

5. The silicon wafer double-sided grinding wheel structure according to claim 1, characterized in that: The mounting ring has a sliding groove, and the fixing block is slidably mounted on the sliding groove. The adjusting component is used to adjust the position of the slider on the sliding groove.

6. The silicon wafer double-sided grinding wheel structure according to claim 5, characterized in that: The adjusting assembly includes an adjusting screw, which is rotatably mounted between the two inner walls of the slide groove, and the adjusting screw is threadedly connected to the fixed block.

7. The silicon wafer double-sided grinding wheel structure according to claim 5, characterized in that: A stabilizing rod is fixed between the two inner walls of the chute. The stabilizing rod passes through the fixing block and is slidably installed with the fixing block.

8. The silicon wafer double-sided grinding wheel structure according to claim 6, characterized in that: A throttle is fixedly connected to the adjusting screw.

9. The silicon wafer double-sided grinding wheel structure according to claim 7, characterized in that: The stabilizer bar is cylindrical.

10. The silicon wafer double-sided grinding wheel structure according to claim 4, characterized in that: The limiting plate is arc-shaped.

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