Adjustable jig for semiconductor manufacturing

Abstract

The utility model discloses a kind of adjustable jigs for semiconductor manufacturing, relate to semiconductor manufacturing technical field.The utility model includes base, the fixed disc is fixedly connected in base top, the base and fixed disc inside are all set as cavity, several chutes are set in the top of fixed disc, further include: clamping mechanism, the clamping mechanism is arranged in fixed disc inside, the clamping mechanism includes the carousel that is set in fixed disc inside, several arc grooves are set in the carousel inside.The utility model is set by clamping mechanism, specifically is through the rotation of carousel, four limit sliding shafts will be simultaneously promoted, make four square slides mutually close, because V-shaped block is rotated in limit circular groove by protruding rod, thus can make protruding rod automatic rotation adjustment position, to be more consistent with semiconductor, reach self-adapting effect, different shape semiconductor can be clamped and fixed, satisfy different needs, subsequent other jigs are not needed to replace.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor manufacturing technology, and in particular relates to an adjustable fixture for semiconductor manufacturing. Background Technology

[0002] In the semiconductor manufacturing industry, a fixture is a specialized mechanical device or tool used to precisely fix, position, support, or guide workpieces (such as wafers, chips, and packaging substrates) to ensure the stability and consistency of the processing. Traditional semiconductor manufacturing fixtures can typically only clamp and fix semiconductors of the same shape. Since most semiconductors are round or square, clamping semiconductors of different shapes can lead to fixture incompatibility, requiring the replacement of different fixtures. This changeover process consumes a significant amount of time and reduces work efficiency. Utility Model Content

[0003] The purpose of this invention is to provide an adjustable fixture for semiconductor manufacturing. By setting a clamping mechanism, specifically by rotating a turntable, four limiting sliding shafts are simultaneously pushed, causing the four square sliders to move closer together. Since the V-shaped block rotates within the limiting groove via a convex rod, the convex rod can automatically rotate and adjust its position, thus better fitting the semiconductor and achieving an adaptive effect. This allows for the clamping and fixing of semiconductors of different shapes to meet various needs without the need for subsequent replacement of other fixtures. This solves the problem that traditional semiconductor manufacturing fixtures, when clamping semiconductors of different shapes, often result in fixtures that are difficult to adapt to, requiring the replacement of different fixtures, which consumes a lot of time and reduces work efficiency.

[0004] To solve the above-mentioned technical problems, this utility model is achieved through the following technical solution: This utility model relates to an adjustable fixture for semiconductor manufacturing, comprising a base, a fixed plate fixedly connected to the top of the base, both the base and the fixed plate having hollow interiors, and the top of the fixed plate having several sliding grooves, and further comprising: A clamping mechanism is disposed inside a fixed disk. The clamping mechanism includes a turntable disposed inside the fixed disk. The turntable has several arc-shaped grooves inside, and a limiting slide shaft is slidably connected inside each arc-shaped groove. A square slider is fixedly connected to the top of the limiting slide shaft. A V-shaped block is provided on the top of the square slider, and protruding rods are fixedly connected to both ends of the V-shaped block. A locking mechanism is provided on the right side of the base, and the locking mechanism is used to clamp and lock the semiconductor. The arc-shaped groove is arc-shaped, the limiting slide shaft slides within the arc-shaped groove, and the square slider cooperates with the groove to limit movement.

[0005] Furthermore, the square slider is slidably connected inside the groove, the bottom of the V-shaped block is fixedly connected to a limiting rotating shaft, the top of the square slider is provided with a limiting circular groove, and the square slider is rotatably connected to the protrusion through the limiting circular groove; since the V-shaped block rotates in the limiting circular groove through the protrusion, the protrusion can automatically rotate to adjust its position.

[0006] Furthermore, the top of the fixing plate is used to place the semiconductor, the outer side of the protruding rod is used to contact the edge of the semiconductor, the protruding rod cooperates with the square slider to restrict the V-shaped block on the square slider, the top of the square slider is fixedly connected to a protruding plate, and two springs are fixedly connected to the side of the protruding plate facing the V-shaped block. The side of the spring facing the V-shaped block is fixedly connected to the surface of the V-shaped block. When the V-shaped block rotates, it will compress one of the springs and stretch the other spring. When the semiconductor is released from fixing, the spring will spring back to its original position through elasticity, which is convenient for subsequent use.

[0007] Furthermore, a fixed seat is fixedly connected to the top of the inner wall of the base, and a rotating rod is rotatably connected inside the fixed seat. A bevel gear one is fixedly connected to the left side of the rotating rod, and a bevel gear two is meshed with the left side of the bevel gear one. The right side of the rotating rod passes through the base and extends to the outside. An internal hexagonal connector block is fixedly connected to the right side of the rotating rod, and a convex ring is fixedly connected to the outer surface of the internal hexagonal connector block. When the operator drives the internal hexagonal connector block to rotate clockwise using a hexagonal wrench, the internal hexagonal connector block will drive the bevel gear one to rotate through the rotating rod. At this time, the bevel gear one will drive the bevel gear two and drive the turntable to rotate.

[0008] Furthermore, the locking mechanism includes a fixing plate fixedly connected to the right side of the base, a threaded shaft fixedly connected to the right side of the fixing plate, an internal threaded locking ring threadedly connected to the outer surface of the threaded shaft, and the internal threaded locking ring contacting the surface of the convex ring; the fixing plate is used to support the threaded shaft and rotate the internal threaded locking ring clockwise so that the internal threaded locking ring contacts the convex ring on the internal hexagonal connector block, thereby locking and fixing the internal hexagonal connector block; The left side of the convex ring contacts the right side of the fixing plate, and the internal threaded locking ring cooperates with the fixing plate to clamp and fix the convex ring.

[0009] Furthermore, the right side of the rotating rod is rotatably connected to the base, and a rotating shaft is fixedly connected to the top of the second bevel gear. The rotating shaft passes through the base and extends to the bottom of the turntable for fixed connection. The rotating shaft is rotatably connected to the base. The rotating shaft is used to connect the second bevel gear and the turntable.

[0010] This utility model has the following beneficial effects: This invention features a clamping mechanism. Specifically, the rotation of the turntable simultaneously pushes four limiting sliding shafts, causing the four square sliders to move closer together. Since the V-shaped block rotates within the limiting circular groove via a convex rod, the convex rod can automatically rotate and adjust its position, thus better fitting the semiconductor and achieving an adaptive effect. This mechanism can clamp and fix semiconductors of different shapes to meet various needs without requiring subsequent replacement of other fixtures.

[0011] This invention features a locking mechanism. Specifically, after the semiconductor is clamped, the internal thread locking ring is rotated clockwise to contact the protruding ring on the internal hexagonal connector block, thereby locking and fixing the internal hexagonal connector block. This prevents the internal hexagonal connector block from rotating, thus keeping the position of the protruding rod unchanged and preventing the semiconductor from becoming loose after clamping.

[0012] Of course, any product implementing this utility model does not necessarily need to achieve all of the advantages described above at the same time. Attached Figure Description

[0013] To more clearly illustrate the technical solutions of the embodiments of this utility model, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0014] Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 This is a schematic diagram of the internal structure of the base of this utility model; Figure 3 This is a schematic diagram of the top structure of the turntable of this utility model; Figure 4 This is a schematic diagram of the overall structure of the V-shaped block of this utility model; Figure 5 This is a schematic diagram of the overall structure of the square slider of this utility model; Figure 6 This is a schematic diagram of the right side of the base of this utility model.

[0015] The attached diagram lists the components represented by each number as follows: 1. Base; 11. Fixed plate; 12. Slide groove; 13. Fixed seat; 131. Rotating rod; 132. Bevel gear one; 133. Bevel gear two; 134. Internal hexagonal connecting block; 135. Convex ring; 2. Clamping mechanism; 21. Turntable; 22. Arc groove; 23. V-block; 231. Convex rod; 232. Convex plate; 233. Spring; 234. Limiting pivot; 24. Square slider; 241. Limiting circular groove; 25. Limiting sliding shaft; 3. Locking mechanism; 31. Fixed plate; 32. Threaded shaft; 33. Internal threaded locking ring. Detailed Implementation

[0016] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present utility model.

[0017] Please see Figures 1-6 As shown, this utility model is an adjustable fixture for semiconductor manufacturing, including a base 1, a fixed plate 11 fixedly connected to the top of the base 1, both the base 1 and the fixed plate 11 having hollow interiors, and the top of the fixed plate 11 having several sliding grooves 12, and also including: A clamping mechanism 2 is disposed inside a fixed disk 11. The clamping mechanism 2 includes a turntable 21 disposed inside the fixed disk 11. The turntable 21 has several arc-shaped grooves 22 inside, and limiting slide shafts 25 are slidably connected inside the arc-shaped grooves 22. A square slider 24 is fixedly connected to the top of the limiting slide shaft 25, and a V-shaped block 23 is provided on the top of the square slider 24. Both ends of the V-shaped block 23 are fixedly connected to protruding rods 231. The rotation of the turntable 21 simultaneously pushes the four limiting slide shafts 25, causing the four square sliders 24 to move closer together. Since the V-shaped block 23 rotates within the limiting grooves 241 via the protruding rods 231, the protruding rods 231 can automatically rotate and adjust their position, thus better conforming to the semiconductor and achieving an adaptive effect. This allows for the clamping and fixing of semiconductors of different shapes to meet different needs without requiring subsequent replacement of other fixtures. Locking mechanism 3 is located on the right side of base 1 and is used to clamp and lock the semiconductor. The arc-shaped groove 22 is arc-shaped, the limiting slide shaft 25 slides in the arc-shaped groove 22, and the square slider 24 cooperates with the slide groove 12 to limit movement.

[0018] The square slider 24 is slidably connected inside the slide groove 12. The bottom of the V-shaped block 23 is fixedly connected to the limiting shaft 234. The top of the square slider 24 has a limiting circular groove 241. The square slider 24 is rotatably connected to the protruding rod 231 through the limiting circular groove 241.

[0019] The top of the fixed plate 11 is used to place the semiconductor, and the outer side of the protrusion 231 is used to contact the edge of the semiconductor. The protrusion 231 cooperates with the square slider 24 to restrict the V-shaped block 23 on the square slider 24. The top of the square slider 24 is fixedly connected to the protrusion plate 232, and two springs 233 are fixedly connected to the side of the protrusion plate 232 facing the V-shaped block 23. The side of the springs 233 facing the V-shaped block 23 is fixedly connected to the surface of the V-shaped block 23.

[0020] A fixed seat 13 is fixedly connected to the top of the inner wall of the base 1. A rotating rod 131 is rotatably connected inside the fixed seat 13. A bevel gear 132 is fixedly connected to the left side of the rotating rod 131. A bevel gear 133 is meshed with the left side of the bevel gear 132. The right side of the rotating rod 131 passes through the base 1 and extends to the outside. An internal hexagonal connector 134 is fixedly connected to the right side of the rotating rod 131. A protruding ring 135 is fixedly connected to the outer surface of the internal hexagonal connector 134.

[0021] The locking mechanism 3 includes a fixing plate 31 fixedly connected to the right side of the base 1. A threaded shaft 32 is fixedly connected to the right side of the fixing plate 31. An internal threaded locking ring 33 is threadedly connected to the outer surface of the threaded shaft 32. The internal threaded locking ring 33 contacts the surface of the convex ring 135. After the semiconductor is clamped, the internal threaded locking ring 33 is rotated clockwise so that the internal threaded locking ring 33 contacts the convex ring 135 on the internal hexagonal connector 134, thereby locking and fixing the internal hexagonal connector 134. At this time, the internal hexagonal connector 134 is prevented from rotating, so that the position of the convex rod 231 remains unchanged, and the semiconductor is prevented from becoming loose after clamping. The left side of the protruding ring 135 contacts the right side of the fixing plate 31, and the internal threaded locking ring 33 cooperates with the fixing plate 31 to clamp and fix the protruding ring 135.

[0022] The right side of the rotating rod 131 is rotatably connected to the base 1. The top of the bevel gear 133 is fixedly connected to the rotating shaft, which passes through the base 1 and extends to the bottom of the turntable 21 for fixed connection. The rotating shaft is rotatably connected to the base 1.

[0023] One specific application of this embodiment is: In use, the base 1 is first installed on the semiconductor processing table, and then the semiconductor is placed on the fixed plate 11. After placement, the operator uses a hex wrench to rotate the internal hexagonal connector 134 clockwise. The internal hexagonal connector 134 will then drive the bevel gear 132 to rotate through the rotating rod 131. At this time, the bevel gear 132 will drive the bevel gear 23 to rotate and drive the turntable 21 to rotate. The turntable 21 will then rotate counterclockwise, and under the action of the arc groove 22, it will push the limiting slide shaft 25. Since the square slider 24 slides in the slide groove 12, the limiting slide shaft 25 will drive the square slider 24 closer to the semiconductor. At this time, the four square... When slider 24 moves simultaneously, the square slider 24 will contact the edge of the semiconductor through the two protrusions 231. Since the V-block 23 rotates in the limiting groove 241 through the protrusions 231, the protrusions 231 can automatically rotate and adjust their position. When the V-block 23 rotates, it will squeeze one of the springs 233 and stretch the other spring. The cooperation of the four V-blocks 23 will clamp and fix semiconductors of different shapes to meet different needs. There is no need to replace other fixtures later. After the fixation is released, the springs 233 will spring back and reset the V-block 23 through elasticity, which is convenient for subsequent use. During the clamping process, by continuously rotating the internal hexagonal connector 134, the protrusion 231 is brought into close contact with the semiconductor, thus completing the fixation. Then, the internal threaded locking ring 33 is rotated clockwise, so that the internal threaded locking ring 33 contacts the protrusion 135 on the internal hexagonal connector 134, thereby locking and fixing the internal hexagonal connector 134. At this time, the internal hexagonal connector 134 is prevented from rotating, so that the position of the protrusion 231 remains unchanged, preventing the semiconductor from becoming loose after clamping.

[0024] In the description of this specification, references to terms such as "an embodiment," "example," "specific example," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0025] The preferred embodiments of this utility model disclosed above are merely illustrative of the present utility model. These preferred embodiments do not exhaustively describe all details, nor do they limit the present utility model to the specific implementations described. Clearly, many modifications and variations can be made based on the content of this specification. This specification selects and specifically describes these embodiments to better explain the principles and practical applications of the present utility model, thereby enabling those skilled in the art to better understand and utilize it. The present utility model is limited only by the claims and their full scope and equivalents.

Claims

1. An adjustable fixture for semiconductor manufacturing, comprising a base (1), wherein a fixed plate (11) is fixedly connected to the top of the base (1), both the base (1) and the fixed plate (11) are hollow, and the top of the fixed plate (11) is provided with a plurality of sliding grooves (12), characterized in that, Also includes: A clamping mechanism (2) is disposed inside a fixed disk (11). The clamping mechanism (2) includes a turntable (21) disposed inside the fixed disk (11). The turntable (21) has several arc-shaped grooves (22) inside. A limiting slide shaft (25) is slidably connected inside the arc-shaped grooves (22). A square slider (24) is fixedly connected to the top of the limiting slide shaft (25). A V-shaped block (23) is disposed on the top of the square slider (24). Both ends of the V-shaped block (23) are fixedly connected to protruding rods (231). Locking mechanism (3), which is located on the right side of base (1), is used to clamp and lock the semiconductor. The arc groove (22) is arc-shaped, the limiting slide shaft (25) slides in the arc groove (22), and the square slider (24) cooperates with the slide groove (12) to limit movement.

2. The adjustable fixture for semiconductor manufacturing according to claim 1, characterized in that, The square slider (24) is slidably connected inside the groove (12). The bottom of the V-shaped block (23) is fixedly connected to the limiting shaft (234). The top of the square slider (24) is provided with a limiting circular groove (241). The square slider (24) is rotatably connected to the protruding rod (231) through the limiting circular groove (241).

3. The adjustable fixture for semiconductor manufacturing according to claim 2, characterized in that, The top of the fixed disk (11) is used to place the semiconductor, the outer side of the protrusion (231) is used to contact the edge of the semiconductor, and the protrusion (231) cooperates with the square slider (24) to restrict the V-shaped block (23) on the square slider (24).

4. The adjustable fixture for semiconductor manufacturing according to claim 3, characterized in that, The top of the square slider (24) is fixedly connected to a convex plate (232), and two springs (233) are fixedly connected to the side of the convex plate (23) facing the V-shaped block (23). The side of the springs (233) facing the V-shaped block (23) is fixedly connected to the surface of the V-shaped block (23).

5. An adjustable fixture for semiconductor manufacturing according to claim 2, characterized in that, A fixed seat (13) is fixedly connected to the top of the inner wall of the base (1). A rotating rod (131) is rotatably connected inside the fixed seat (13). A bevel gear (132) is fixedly connected to the left side of the rotating rod (131). A bevel gear (133) is meshed with the left side of the bevel gear (132). The right side of the rotating rod (131) passes through the base (1) and extends to the outside. An internal hexagonal connector (134) is fixedly connected to the right side of the rotating rod (131). A convex ring (135) is fixedly connected to the outer surface of the internal hexagonal connector (134).

6. An adjustable fixture for semiconductor manufacturing according to claim 5, characterized in that, The locking mechanism (3) includes a fixing plate (31) fixedly connected to the right side of the base (1), a threaded shaft (32) fixedly connected to the right side of the fixing plate (31), an internal threaded locking ring (33) threadedly connected to the outer surface of the threaded shaft (32), and the internal threaded locking ring (33) in contact with the surface of the convex ring (135). The left side of the convex ring (135) contacts the right side of the fixing plate (31), and the internal thread locking ring (33) cooperates with the fixing plate (31) to clamp and fix the convex ring (135).

7. An adjustable fixture for semiconductor manufacturing according to claim 5, characterized in that, The right side of the rotating rod (131) is rotatably connected to the base (1), and the top of the bevel gear (133) is fixedly connected to a rotating shaft. The rotating shaft passes through the base (1) and extends to the bottom of the turntable (21) for fixed connection. The rotating shaft is rotatably connected to the base (1).

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