Diamond nozzle for semiconductor dicing
Patent Information
- Application Number
- CN202522195607.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-10-17
- Publication Date
- 2026-09-15
- Estimated Expiration
- 2035-10-17
AI Technical Summary
[0005]为了弥补以上不足，本实用新型提供了一种半导体切割用金刚石喷嘴，旨在改善现有技术中部分金刚石喷嘴在磨损后不易快速更换，从而延长了设备停机时间，影响生产进度的问题
1、本实用新型中，通过转动环带动固定块转动，使限位块在固定块外壁滑动并压缩弹簧，当限位块对齐限位槽时，弹簧复位推动限位块插入限位槽，实现快速安装与拆卸功能，相较于现有技术来说，改善了传统喷嘴安装结构复杂、更换不便的问题，缩短了设备停机时间，降低了生产成本，提高了生产效率。
Smart Images
Figure CN224751617U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of semiconductor processing technology, and in particular to a diamond nozzle for semiconductor cutting. Background Technology
[0002] Diamond nozzles are precision components made primarily of diamond. Utilizing the high hardness, wear resistance, and chemical stability of diamond, they are processed through a special process to form a jet channel with a specific aperture and shape. In semiconductor cutting, due to the high hardness and brittleness of semiconductor materials and the extremely high precision requirements for cutting, traditional cutting tools are prone to wear and large cutting errors. Diamond nozzles, however, can withstand the scouring of high-speed, high-pressure cutting fluid, maintaining a stable aperture and jet shape. They precisely guide the cutting fluid to cut the semiconductor material, reducing material breakage and cutting errors, and improving cutting efficiency and yield. Therefore, they have become a key tool in the semiconductor cutting process.
[0003] The diamond nozzle consists of a main support structure, a core diamond element, and a connection interface. The main body is supported by high-strength metal or ceramic. The diamond element is processed to form an inner channel with a polished inner wall. The connection interface facilitates docking with equipment. The cooperation of these structures allows the nozzle to achieve a balance between precise spraying and durability in semiconductor cutting.
[0004] In existing technologies, some diamond nozzles are subjected to the scouring of high-speed, high-pressure cutting fluid for extended periods, while also constantly rubbing against semiconductor materials. Under these dual effects, these nozzles are prone to wear, severely impacting the precision and efficiency of cutting operations and resulting in defective products. When nozzles need to be replaced due to wear, the complex nozzle installation structure and inconvenient connection to equipment pipelines, lacking a design for quick disassembly and installation, make it difficult for technicians to quickly complete the replacement work in actual operation. This significantly prolongs equipment downtime, increases production costs, and affects production schedules. Therefore, a diamond nozzle for semiconductor cutting is proposed to solve the above problems. Utility Model Content
[0005] To overcome the above shortcomings, this utility model provides a diamond nozzle for semiconductor cutting, which aims to improve the problem that some diamond nozzles in the prior art are not easy to replace quickly after wear, thereby prolonging equipment downtime and affecting production progress.
[0006] To achieve the above objectives, the present invention adopts the following technical solution: A diamond nozzle for semiconductor cutting includes a housing, a rotating ring detachably connected to the bottom end of the housing, a quick-release mechanism installed at the top end of the rotating ring, a cleaning mechanism installed inside the housing, and an orifice fixedly connected to the bottom end of the rotating ring. The quick-release mechanism includes multiple fixing blocks, the bottom ends of which are fixedly connected to the top end of the rotating ring. A limit groove is formed on the inner wall of each fixing block, and a limit component is provided on the inner wall of the housing. As a further description of the above technical solution: The limiting component includes multiple support blocks, the outer walls of which are fixedly connected to the inner wall of the housing, and a damper is fixedly connected to the outer wall of each support block. A spring is sleeved on the outside of the damper. As a further description of the above technical solution: The cleaning mechanism includes slide rails, the outer walls of multiple slide rails are fixedly connected to the inner wall of the housing, a filter screen is slidably connected to the outer walls of multiple slide rails, multiple connecting frames are fixedly connected to the bottom end of the filter screen, multiple buckles are fixedly connected to the top end of the filter screen, and multiple fastening seats are fixedly connected to the inner wall of the housing. As a further description of the above technical solution: The inner wall of the fastening seat is provided with a limiting groove 2, and the inner wall of the filter screen is provided with a sliding groove; As a further description of the above technical solution: The outer wall of the slide rail is slidably connected to the outer wall of the slide groove, and the outer wall of the buckle is slidably connected to the outer wall of the limiting groove 2; As a further description of the above technical solution: The outer wall of the damper is fixedly connected to a limiting block, and the outer walls of the multiple limiting blocks are slidably connected to the inner wall of the housing. As a further description of the above technical solution: One end of the spring is fixedly connected to the outer wall of the support block, and the other end of the spring is fixedly connected to the outer wall of the limiting block; As a further description of the above technical solution: The outer walls of the plurality of fixing blocks are slidably connected to the inner wall of the housing, and the outer wall of the limiting block is slidably connected to the outer wall of the limiting groove.
[0007] This utility model has the following beneficial effects: 1. In this utility model, the rotating ring drives the fixed block to rotate, causing the limiting block to slide on the outer wall of the fixed block and compress the spring. When the limiting block is aligned with the limiting groove, the spring resets and pushes the limiting block into the limiting groove, realizing the function of quick installation and disassembly. Compared with the prior art, it improves the problem of complex installation structure and inconvenient replacement of traditional nozzles, shortens equipment downtime, reduces production costs, and improves production efficiency.
[0008] 2. In this utility model, by pulling the connecting frame, the filter screen slides along the slide rail, causing the buckle to slide within the limiting groove, thus enabling the filter screen to be quickly pulled out and installed, facilitating cleaning and maintenance. Compared to existing technologies, this improves upon the difficulty of cleaning traditional nozzle filter components, ensuring the cleanliness of the cutting fluid, reducing impurity blockage, and improving cutting accuracy and yield. Attached Figure Description
[0009] Figure 1 This is a three-dimensional schematic diagram of a diamond nozzle for semiconductor cutting proposed in this utility model; Figure 2 This is a schematic diagram of the rotating ring structure of a diamond nozzle for semiconductor cutting proposed in this utility model; Figure 3 This is a schematic diagram of the slide rail structure for a diamond nozzle used for semiconductor cutting proposed in this utility model; Figure 4 This is a schematic diagram of the snap-fit structure of a diamond nozzle for semiconductor cutting proposed in this utility model; Figure 5 for Figure 3 Enlarged view of point A in the middle.
[0010] Legend: 1. Housing; 2. Rotating ring; 3. Quick release mechanism; 31. Fixing block; 32. Limiting groove one; 33. Limiting component; 331. Support block; 332. Damper; 333. Limiting block; 334. Spring; 4. Cleaning mechanism; 41. Slide rail; 42. Filter screen; 43. Connecting frame; 44. Buckle; 45. Fastening seat; 46. Limiting groove two; 47. Slide groove; 5. Orifice component. Detailed Implementation
[0011] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.
[0012] Reference Figure 1 , Figure 2 and Figure 5The present invention provides an embodiment of a diamond nozzle for semiconductor cutting, comprising a housing 1, which is the main structure of the entire device and serves to support and protect the internal components. A rotating ring 2 is detachably connected to the bottom end of the housing 1. The detachable connection between the housing 1 and the rotating ring 2 facilitates the replacement of worn parts. A quick-release mechanism 3 is installed at the top end of the rotating ring 2. The quick-release mechanism 3 is used to quickly disassemble and install worn parts. A cleaning mechanism 4 is installed inside the housing 1. The cleaning mechanism 4 is installed inside the housing 1 and is used to maintain the internal filter components. An orifice 5 is fixedly connected to the bottom end of the rotating ring 2. The orifice 5 is a channel for the cutting fluid to be sprayed out. Specifically, the housing 1 is the main body of the device and serves as a support and protection. The rotating ring 2 facilitates the replacement of worn parts. The quick-release mechanism 3 allows for the rapid disassembly and assembly of worn parts. The orifice 5 is the channel for the cutting fluid to be sprayed out. The cleaning mechanism 4 is used to maintain the internal filter components.
[0013] The quick-release mechanism 3 includes multiple fixing blocks 31, which are key components for quick disassembly and installation. The bottom ends of the multiple fixing blocks 31 are fixedly connected to the top of the rotating ring 2. The fixing blocks 31 are arranged around the perimeter, and each fixing block 31 is fixed to the top of the rotating ring 2. The fixing blocks 31 rotate together with the rotating ring 2. The inner wall of the fixing block 31 is provided with a limit groove 32, which is used to provide limit support. The inner wall of the housing 1 is provided with a limit component 33, which is used to limit the fixing blocks 31. The limit component 33 includes multiple... The support block 331 and the limiting component 33 are composed of multiple support blocks 331 arranged around the perimeter. The support blocks 331 correspond to the fixed block 31. The outer walls of the multiple support blocks 331 are fixedly connected to the inner wall of the housing 1. The support blocks 331 provide the installation base for the limiting component 33 to realize the limiting function. The outer wall of the support block 331 is fixedly connected to a damper 332. The damper 332 is used to reduce the vibration when the limiting block 333 moves. A spring 334 is sleeved on the outside of the damper 332. The spring 334 is used to provide the restoring force for the fixed block 31. Specifically, the bottom ends of multiple fixing blocks 31 are fixed to the top of the rotating ring 2. The fixing blocks 31 are arranged around the perimeter and rotate with the rotating ring 2. The inner wall of the fixing blocks 31 is provided with a limiting groove 32 to provide limiting support. The limiting component 33 is used to limit the fixing blocks 31. The limiting component 33 is composed of multiple support blocks 331. The support blocks 331 correspond one-to-one with the fixing blocks 31. The support blocks 331 provide the mounting base for the limiting component 33. The damper 332 can reduce the vibration when the limiting block 333 moves. The spring 334 is used to provide the restoring elastic force for the fixing blocks 31.
[0014] Reference Figure 3 and Figure 4The cleaning mechanism 4 includes slide rails 41, etc. The slide rails 41 are the tracks for the filter screen 42 to slide. The outer walls of multiple slide rails 41 are fixedly connected to the inner wall of the housing 1. The outer wall of each slide rail 41 is fixed to the inner wall of the housing 1 to provide sliding support for the filter screen 42. The filter screen 42 is slidably connected to the outer wall of the multiple slide rails 41. The filter screen 42 is slidably connected to the outer wall of the slide rails 41 through the sliding groove 47 on the inner wall. It is used to filter cutting fluid. The bottom of the filter screen 42 Multiple connecting frames 43 are fixedly connected to the bottom of the filter screen 42. The multiple connecting frames 43 facilitate the removal and installation of the filter screen 42. Multiple buckles 44 are fixedly connected to the top of the filter screen 42. The buckles 44 are fixed to the top of the filter screen 42 and are used to cooperate with the fastening seat 45 to fix the filter screen 42. Multiple fastening seats 45 are fixedly connected to the inner wall of the housing 1. The fastening seats 45 are fixed to the inner wall of the housing 1 and cooperate with the buckles 44 to fix the filter screen 42. Specifically, multiple slide rails 41 provide sliding support for the filter screen 42. The outer wall of the slide rail 41 is slidably connected to the slide groove 47. Multiple connecting frames 43 facilitate the removal and installation of the filter screen 42. The top of the filter screen 42 has multiple buckles 44. The buckles 44 slide and cooperate with the limiting groove 46 to fix the filter screen 42. The filter screen 42 is used to filter cutting fluid.
[0015] Reference Figures 3 to 5 The inner wall of the fastening seat 45 is provided with a second limiting groove 46, which is used to cooperate with the buckle 44 for limiting. The inner wall of the filter screen 42 is provided with a sliding groove 47, which is slidably connected to the outer wall of the slide rail 41, so that the filter screen 42 can slide along the slide rail 41. The outer wall of the slide rail 41 is slidably connected to the outer wall of the sliding groove 47. The outer wall of the slide rail 41 and the outer wall of the sliding groove 47 are slidably engaged, so that the filter screen 42 can slide smoothly in the housing 1. The outer wall of the buckle 44 is slidably connected to the outer wall of the second limiting groove 46. The outer wall of the buckle 44 and the outer wall of the second limiting groove 46 are slidably engaged, so as to realize the fixing and disassembly of the filter screen 42. The outer wall of the damper 332 is fixedly connected to the limiting block 333. The limiting block 333 is fixed to the outer wall of the damper 332 and moves with the damper 332, cooperating with the limiting groove 32 of the fixing block 31. Specifically, the limiting groove 46 slides with the outer wall of the buckle 44 to achieve limiting, the sliding groove 47 slides with the slide rail 41, the sliding groove 47 allows the filter screen 42 to slide smoothly along the slide rail 41, and the limiting block 333 moves with the damper 332 and cooperates with the limiting groove 32.
[0016] The outer walls of multiple limiting blocks 333 are slidably connected to the inner wall of the housing 1. The outer wall of each limiting block 333 is slidably connected to the inner wall of the housing 1 to ensure the stability of the movement of the limiting block 333. One end of the spring 334 is fixedly connected to the outer wall of the support block 331, and the other end is connected to the limiting block 333 to provide a restoring force. The other end of the spring 334 is fixedly connected to the outer wall of the limiting block 333. When the limiting block 333 moves, the spring 334 is compressed or extended to generate a reset force. The outer walls of multiple fixing blocks 31 are slidably connected to the inner wall of the housing 1. The outer wall of each fixing block 31 is slidably connected to the inner wall of the housing 1, so that the fixing block 31 can rotate inside the housing 1. The outer wall of the limiting block 333 is slidably connected to the outer wall of the limiting groove 32. The outer wall of the limiting block 333 and the outer wall of the limiting groove 32 are slidably engaged to realize the limiting and quick release functions of the fixing block 31. Specifically, the housing 1 ensures the stability of the movement of the limiting block 333. One end of the spring 334 is fixed to the outer wall of the support block 331, and the other end of the spring 334 is fixed to the outer wall of the limiting block 333. When the limiting block 333 moves, the spring 334 is compressed or extended to generate a restoring force. Multiple fixing blocks 31 can rotate inside the housing 1. The limiting groove 32 slides with the outer wall of the limiting block 333 to realize the limiting and quick-release functions of the fixing block 31.
[0017] Working principle: When the orifice 5 needs to be installed, first align the orifice 5 with the housing 1, insert the fixing block 31 into the housing 1, and then press and rotate the rotating ring 2 counterclockwise. The rotating ring 2 drives the fixing block 31 to rotate counterclockwise along the inner wall of the housing 1. When the limiting block 333 contacts the fixing block 31, the limiting block 333 will slide along the outer wall of the fixing block 31. At the same time, the fixing block 31 will squeeze the limiting block 333 to move away from the center of the housing 1. At this time, the spring 334 is compressed in the same direction. When the limiting block 333 aligns with the limiting groove 32, the spring 334 releases its elasticity and resets, pushing the limiting block 333. Insert 33 into the limiting groove 32 to complete the installation. When it is necessary to remove the orifice 5, press and rotate the rotating ring 2 clockwise. The rotating ring 2 drives the fixing block 31 to rotate clockwise along the inner wall of the housing 1. At the same time, the fixing block 31 squeezes the limiting block 333 to move away from the center of the housing 1. The spring 334 is compressed in the same direction. The limiting block 333 slides out of the limiting groove 32. When the fixing block 31 and the limiting block 333 are separated, the spring 334 releases its elastic force and supports the limiting block 333 to return to its original position. At this time, the fixing block 31 loses the constraint of the limiting block 333 and can be pulled out, thereby pulling out the orifice 5.
[0018] When the filter screen 42 needs to be cleaned, pull the connecting frame 43 downwards to pull out the filter screen 42. The filter screen 42 will slide downwards along the outer wall of the slide rail 41, and at the same time drive the buckle 44 to move downwards. Due to its own deformation, the buckle 44 will slide downwards along the outer wall of the second limiting groove 46. When the buckle 44 slides out of the fastening seat 45, the filter screen 42 is pulled out. At this time, the filter screen 42 can be cleaned. When the filter screen 42 needs to be installed after cleaning, align the filter screen 42 with the housing 1, and then push it upwards along the inner wall of the housing 1. The filter screen 42 will slide upwards along the outer wall of the slide rail 41, and at the same time drive the buckle 44 to move upwards. Due to its own deformation, the buckle 44 will slide upwards along the outer wall of the second limiting groove 46. When the buckle 44 slides into the fastening seat 45, the filter screen 42 is installed.
[0019] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.
Claims
1. A diamond nozzle for semiconductor cutting, comprising a housing (1), characterized in that: The bottom end of the housing (1) is detachably connected to a rotating ring (2), the top end of the rotating ring (2) is equipped with a quick-release mechanism (3), the inside of the housing (1) is equipped with a cleaning mechanism (4), and the bottom end of the rotating ring (2) is fixedly connected to an orifice (5). The quick-release mechanism (3) includes multiple fixing blocks (31), the bottom ends of which are fixedly connected to the top of the rotating ring (2). The inner wall of the fixing block (31) is provided with a limit groove (32), and the inner wall of the housing (1) is provided with a limit component (33).
2. The diamond nozzle for semiconductor cutting according to claim 1, characterized in that: The limiting component (33) includes multiple support blocks (331), the outer walls of the multiple support blocks (331) are fixedly connected to the inner wall of the housing (1), the outer walls of the support blocks (331) are fixedly connected to dampers (332), and springs (334) are sleeved on the outside of the dampers (332).
3. The diamond nozzle for semiconductor cutting according to claim 1, characterized in that: The cleaning mechanism (4) includes a slide rail (41), the outer walls of multiple slide rails (41) are fixedly connected to the inner wall of the housing (1), a filter screen (42) is slidably connected to the outer walls of multiple slide rails (41), multiple connecting frames (43) are fixedly connected to the bottom end of the filter screen (42), multiple buckles (44) are fixedly connected to the top end of the filter screen (42), and multiple fastening seats (45) are fixedly connected to the inner wall of the housing (1).
4. A diamond nozzle for semiconductor cutting according to claim 3, characterized in that: The inner wall of the fastening seat (45) is provided with a limiting groove (46), and the inner wall of the filter screen (42) is provided with a sliding groove (47).
5. A diamond nozzle for semiconductor cutting according to claim 4, characterized in that: The outer wall of the slide rail (41) is slidably connected to the outer wall of the slide groove (47), and the outer wall of the buckle (44) is slidably connected to the outer wall of the limiting groove (46).
6. A diamond nozzle for semiconductor cutting according to claim 2, characterized in that: The outer wall of the damper (332) is fixedly connected to a limiting block (333), and the outer walls of the multiple limiting blocks (333) are slidably connected to the inner wall of the housing (1).
7. A diamond nozzle for semiconductor cutting according to claim 6, characterized in that: One end of the spring (334) is fixedly connected to the outer wall of the support block (331), and the other end of the spring (334) is fixedly connected to the outer wall of the limiting block (333).
8. A diamond nozzle for semiconductor cutting according to claim 6, characterized in that: The outer walls of the plurality of fixed blocks (31) are slidably connected to the inner wall of the housing (1), and the outer wall of the limiting block (333) is slidably connected to the outer wall of the limiting groove (32).