A double-shaft engraving machine for single crystal silicon micropore processing

Abstract

The utility model discloses a double -shaft engraving machine for monocrystal silicon micropore processing, and the fine carving machine aims at solving the problem that the positioning and pecking drill action of the existing monocrystal silicon micropore fine carving machine is completed by relying on single screw rod axle, and it is difficult to satisfy the accuracy of positioning and processing, and the processing quality is influenced. The fine carving machine includes fine carving machine main part, X -axis movable plate and fine carving cutter on the fine carving machine main part, and X -axis movable plate is driven with W -axis sliding plate through ball screw assembly, and the other side of W -axis sliding plate is driven with first sliding plate through linear motor, and fine carving cutter is installed on first sliding plate. The utility model discloses through single ball screw assembly is responsible for the quick positioning of fine carving cutter, then through linear motor drive fine carving cutter is used for pecking drill processing, thereby giving full play to the advantage of linear motor high speed, high accuracy, through the mode of double -shaft cooperation, ensure that high -precision cutting can be realized in the micropore processing process, and the processing quality is improved.

Description

Technical Field

[0001] This utility model belongs to the field of precision machining technology for brittle materials, specifically relating to a dual-axis precision engraving machine for machining micro-holes in single-crystal silicon. Background Technology

[0002] In modern manufacturing, monocrystalline silicon, as an important semiconductor material, is widely used in integrated circuits, solar cells, sensors, and other fields. With continuous technological advancements, the requirements for precision and efficiency in monocrystalline silicon micro-hole processing are becoming increasingly stringent. CNC engraving machines, as high-precision processing equipment, play a crucial role in monocrystalline silicon micro-hole processing. However, traditional CNC engraving machines typically rely on a single lead screw axis for positioning and drilling actions when processing monocrystalline silicon micro-holes, a design with significant limitations. The lead screw axis is prone to wear during long-term, frequent reciprocating motion, leading to a shortened lifespan. Furthermore, processing efficiency is limited by the lead screw's acceleration and backlash error. During prolonged continuous operation, the lead screw temperature rises, causing a decrease in positioning accuracy of more than 0.02 mm. This results in limited transmission accuracy of the lead screw axis, making it difficult to meet the accuracy requirements of positioning and processing under high-speed, high-precision processing demands, thus generating significant errors and affecting processing quality. Utility Model Content

[0003] (1) Technical problems to be solved To address the shortcomings of existing technologies, the purpose of this invention is to provide a dual-axis precision engraving machine for micro-hole processing of monocrystalline silicon. This machine aims to solve the problem that existing monocrystalline silicon micro-hole precision engraving machines rely on a single lead screw axis to complete positioning and drilling actions, which makes it difficult to meet the accuracy of positioning and processing, thus affecting the processing quality.

[0004] (2) Technical solution To solve the above-mentioned technical problems, this utility model provides a dual-axis engraving machine for micro-hole processing of single-crystal silicon. The engraving machine includes an engraving machine body, an X-axis movable plate and an engraving tool mounted on the engraving machine body. The X-axis movable plate is driven by a W-axis slide plate through a ball screw assembly. On the other side of the W-axis slide plate, a first slide plate is driven by a linear motor. The engraving tool is mounted on the first slide plate. An auxiliary damping cylinder is installed between the W-axis slide plate and the first slide plate.

[0005] Preferably, the ball screw assembly includes a servo motor, a threaded rod, and a ball nut threadedly connected to the threaded rod. The servo motor is fixedly connected to one end of the X-axis movable plate, one end of the threaded rod is fixedly connected to the output end of the servo motor, and the other end of the threaded rod is rotatably connected to the other end of the X-axis movable plate through a bearing. The X-axis movable plate is slidably connected to the W-axis slide plate, and the ball nut is fixedly connected to the W-axis slide plate.

[0006] Furthermore, the W-axis slide plate is fixedly connected to both sides with first guide rails, and the X-axis movable plate is fixedly connected to both sides with first sliders, with the first guide rails and first sliders slidably connected.

[0007] Furthermore, the W-axis slide plate includes a horizontal plate and a vertical plate fixedly connected to the horizontal plate, with a clearance opening on one side of the horizontal plate corresponding to the engraving tool.

[0008] Furthermore, the linear motor includes a stator end and a mover end. The stator end is fixedly connected to the vertical plate, and the mover end is fixedly connected to the first slide plate. The engraving tool is fixedly connected to the first slide plate through the first mounting base.

[0009] Furthermore, a second guide rail is fixedly connected to both sides of the horizontal plate, and a second slider is fixedly connected to both sides of the first slide plate. The second guide rail and the second slider are slidably connected.

[0010] Furthermore, there are two auxiliary damping cylinders. One end of the auxiliary damping cylinder is fixedly connected to both ends of the horizontal plate, and the other end of the auxiliary damping cylinder is fixedly connected to the first sliding plate through the second mounting base.

[0011] (3) Beneficial effects Compared with the prior art, the beneficial effects of this utility model are as follows: This invention uses a single ball screw assembly to quickly position the engraving tool. Utilizing its large stroke, the tool can be quickly moved to a position close to the machining area. Then, a linear motor drives the tool specifically for drilling, thus fully leveraging the high speed and high precision of the linear motor. Through the coordinated operation of the ball screw assembly and the linear motor, high-precision cutting is ensured during micro-hole machining, improving machining quality. Attached Figure Description

[0012] Figure 1 This is a three-dimensional structural diagram of the present invention.

[0013] Figure 2 This is a front view structural diagram of this utility model.

[0014] Figure 3 This is a schematic diagram of the installation structure of the W-shaped skateboard of this utility model.

[0015] Figure 4 This is a schematic diagram of the linear motor of this utility model.

[0016] Figure 5 This is a structural schematic diagram of the ball screw assembly of this utility model.

[0017] The markings in the attached diagram are as follows: 1. Engraving machine body; 2. X-axis movable plate; 3. Engraving tool; 4. Ball screw assembly; 5. W-axis slide plate; 6. First slide plate; 7. Linear motor; 8. Auxiliary damping cylinder; 401. Servo motor; 402. Threaded rod; 403. Ball nut; 404. First guide rail; 405. First slider; 501. Horizontal plate; 502. Vertical plate; 503. Clearance opening; 504. Second guide rail; 505. Second slider; 701. Stator end; 702. Mover end; 301. First mounting base; 801. Second mounting base. Detailed Implementation

[0018] This specific embodiment is a biaxial precision engraving machine for micro-hole processing of single-crystal silicon, and its structural schematic diagram is shown below. Figures 1-5 As shown, the engraving machine includes a main body 1, an X-axis movable plate 2 mounted on the main body 1, and an engraving tool 3. The main body 1 and the X-axis movable plate 2 are existing technologies and will not be described in detail here. The engraving tool 3 has a tool and a motor that drives the tool. The X-axis movable plate 2 drives a W-axis slide plate 5 via a ball screw assembly 4. The ball screw assembly 4 has a travel of 150mm and is responsible for rapid positioning. Utilizing the high load capacity of the ball screw, it drives the engraving tool 3 to position. On the other side of the W-axis slide plate 5, a first slide plate 6 is driven by a linear motor 7. The engraving tool 3 is mounted on the first slide plate 6 and directly driven by the linear motor 7. The precision carving tool consists of three parts to avoid backlash. The linear motor 7 has a stroke of 50mm and is specifically designed for pecking and drilling. It leverages the high acceleration and high positioning accuracy of the linear motor 7, and utilizes its high precision and small backlash to accurately position and process the material at a precise depth. During pecking and drilling, it can quickly position itself 0.01mm above the previous cutting depth before continuing to the next section of drilling, reducing idle cutting time. This can improve efficiency by 40% in micro-hole machining, enabling long-term, efficient, and stable machining. An auxiliary damping cylinder 8 is installed between the W-axis slide plate 5 and the first slide plate 6. The auxiliary damping cylinder 8 provides auxiliary damping, reducing the load on the linear motor 7.

[0019] like Figure 1 , Figure 3 and Figure 5 As shown: In this embodiment, the ball screw assembly 4 includes a servo motor 401, a threaded rod 402, and a ball nut 403 threadedly connected to the threaded rod 402. The servo motor 401 is fixedly connected to one end of the X-axis movable plate 2. One end of the threaded rod 402 is fixedly connected to the output end of the servo motor 401. The other end of the threaded rod 402 is rotatably connected to the other end of the X-axis movable plate 2 through a bearing. The X-axis movable plate 2 is slidably connected to the W-axis slide plate 5. The ball nut 403 is fixedly connected to the W-axis slide plate 5. The servo motor 401 drives the threaded rod 402 to rotate. During the rotation, the threaded rod 402 can drive the ball nut 403, the W-axis slide plate 5, and the engraving tool 3 to move up and down.

[0020] like Figure 3 and Figure 5 As shown: In this embodiment, the W-axis slide plate 5 is fixedly connected to both sides of the first guide rail 404, and the X-axis movable plate 2 is fixedly connected to both sides of the first slider 405. The first guide rail 404 and the first slider 405 are slidably connected. The W-axis slide plate 5 and the X-axis movable plate 2 are installed in parallel with high-rigidity guide rails to ensure the stability of the engraving tool 3, improve the surface roughness of the machined surface, and extend the tool life.

[0021] To facilitate the installation of the W-axis slide plate 5, such as Figure 1 and Figure 3 As shown: In this embodiment, the W-axis slide plate 5 includes a horizontal plate 501 and a vertical plate 502 fixedly connected to the horizontal plate 501. A clearance opening 503 corresponding to the engraving tool 3 is provided on one side of the horizontal plate 501. The clearance opening 503 can avoid the engraving tool 3 when the W-axis slide plate 5 moves downward, thereby reducing the overall thickness.

[0022] like Figure 3 and Figure 4 As shown: In this embodiment, the linear motor 7 includes a stator end 701 and a mover end 702. The stator end 701 is fixedly connected to the vertical plate 502, and the mover end 702 is fixedly connected to the first sliding plate 6. The engraving tool 3 is fixedly connected to the first sliding plate 6 through the first mounting base 301. The stator end 701 can drive the mover end 702 to move, thereby ensuring that the engraving tool moves up and down.

[0023] To ensure smooth sliding between the horizontal board 501 and the first sliding plate 6, such as Figure 3 and Figure 4 As shown: In this embodiment, the horizontal plate 501 is fixedly connected to the second guide rail 504 on both sides, and the first slide plate 6 is fixedly connected to the second slider 505 on both sides. The second guide rail 504 and the second slider 505 are slidably connected. The horizontal plate 501 and the first slide plate 6 are installed in parallel with high-rigidity guide rails to ensure the stability of the engraving tool 3, improve the surface roughness of the machined surface, and extend the tool life.

[0024] To better reduce the load on the linear motor 7 and prevent tilting, such as Figure 1 and Figure 2 As shown: In this embodiment, there are two auxiliary damping cylinders 8. One end of the auxiliary damping cylinder 8 is fixedly connected to both ends of the horizontal plate 501, and the other end of the auxiliary damping cylinder 8 is fixedly connected to the first sliding plate 6 through the second mounting base 801.

[0025] Working principle: A single ball screw assembly 4 is responsible for the rapid positioning of the engraving tool 3. Utilizing its large stroke, the engraving tool 3 can be quickly moved to a position close to the machining area. Then, the linear motor 7 drives the engraving tool 3 specifically for pecking and drilling, thus fully leveraging the advantages of the linear motor's high speed and high precision. Through the dual-axis collaborative work of the ball screw assembly 4 and the linear motor 7, high-precision cutting is ensured during micro-hole machining, improving machining quality. This reduces equipment maintenance costs, reduces wear on the threaded screw 402 by more than 80%, and extends equipment life. The linear motor 7 is only used during pecking and drilling, reducing energy consumption by 50% compared to full operation.

[0026] All technical features in this embodiment can be freely combined according to actual needs.

[0027] The above embodiments are preferred implementations of this utility model. In addition, this utility model can also be implemented in other ways. Any obvious substitutions without departing from the concept of this technical solution are within the protection scope of this utility model.

Claims

1. A dual-axis engraving machine for micro-hole processing of monocrystalline silicon, the engraving machine comprising an engraving machine body (1), an X-axis movable plate (2) mounted on the engraving machine body (1), and engraving tools (3), characterized in that: The X-axis movable plate (2) is driven by the ball screw assembly (4) to drive the W-axis slide plate (5). The other side of the W-axis slide plate (5) is driven by the linear motor (7) to drive the first slide plate (6). The engraving tool (3) is installed on the first slide plate (6). An auxiliary damping cylinder (8) is installed between the W-axis slide plate (5) and the first slide plate (6).

2. The dual-axis engraving machine for micro-hole processing of single-crystal silicon according to claim 1, characterized in that, The ball screw assembly (4) includes a servo motor (401), a threaded rod (402), and a ball nut (403) threadedly connected to the threaded rod (402). The servo motor (401) is fixedly connected to one end of the X-axis movable plate (2). One end of the threaded rod (402) is fixedly connected to the output end of the servo motor (401). The other end of the threaded rod (402) is rotatably connected to the other end of the X-axis movable plate (2) through a bearing. The X-axis movable plate (2) is slidably connected to the W-axis sliding plate (5). The ball nut (403) is fixedly connected to the W-axis sliding plate (5).

3. The dual-axis engraving machine for micro-hole processing of single-crystal silicon according to claim 2, characterized in that, The W-axis slide plate (5) is fixedly connected to both sides of the first guide rail (404), and the X-axis movable plate (2) is fixedly connected to both sides of the first slider (405). The first guide rail (404) and the first slider (405) are slidably connected.

4. The dual-axis engraving machine for micro-hole processing of single-crystal silicon according to claim 1, characterized in that, The W-axis slide plate (5) includes a horizontal plate (501) and a vertical plate (502) fixedly connected to the horizontal plate (501). A clearance opening (503) corresponding to the engraving tool (3) is provided on one side of the horizontal plate (501).

5. The biaxial engraving machine for micro-hole processing of single-crystal silicon according to claim 4, characterized in that, The linear motor (7) includes a stator end (701) and a mover end (702). The stator end (701) is fixedly connected to the vertical plate (502), and the mover end (702) is fixedly connected to the first slide plate (6). The engraving tool (3) is fixedly connected to the first slide plate (6) through the first mounting base (301).

6. The biaxial engraving machine for micro-hole processing of single-crystal silicon according to claim 5, characterized in that, The horizontal plate (501) is fixedly connected to the two sides of the second guide rail (504), and the first slide plate (6) is fixedly connected to the two sides of the second slider (505). The second guide rail (504) and the second slider (505) are slidably connected.

7. The biaxial engraving machine for micro-hole processing of single-crystal silicon according to claim 6, characterized in that, The number of auxiliary damping cylinders (8) is two. One end of the auxiliary damping cylinder (8) is fixedly connected to both ends of the horizontal plate (501), and the other end of the auxiliary damping cylinder (8) is fixedly connected to the first sliding plate (6) through the second mounting base (801).

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