A kind of CVD pyrolytic graphite coating equipment heat preservation system cutting auxiliary tool

Abstract

The utility model relates to a kind of CVD pyrolytic graphite coating equipment heat preservation system cutting auxiliary tool, belong to the field of cutting insulation material;Solve the graphite soft felt in cutting heat preservation system needs to be matched with a variety of different specifications and models cutting tool, existing cutting tool does not have the problem of versatility;Technical scheme: including cutting auxiliary tool body, cutting auxiliary tool body includes substrate, first cutting auxiliary piece, second cutting auxiliary piece and third cutting auxiliary piece are set on substrate, cutting zone is set on substrate, first cutting hole is set on first cutting auxiliary piece, second cutting hole is set on second cutting auxiliary piece, third cutting hole is set on third cutting auxiliary piece, the shape and size of third cutting hole are adapted to the air exhaust port of air extraction equipment, third cutting hole, second cutting hole, first cutting hole are communicated with cutting zone;The utility model is applied to cutting insulation material.

Description

Technical Field

[0001] This invention provides an auxiliary tooling for cutting a thermal insulation system of a CVD pyrolytic graphite coating equipment, belonging to the field of thermal insulation material cutting technology. Background Technology

[0002] When tantalum carbide coating equipment uses CVD to deposit tantalum onto the surface of graphite products, to ensure uniform deposition, the insulation felt on the extraction side needs to be designed with a uniform extraction structure. Due to the large furnace size and small extraction pipe size, the insulation felt for different layers needs to be designed with different structures. This allows the deposition gas to pass through the insulation felt from inside the insulation system, and then be reduced in diameter to a size similar to the extraction pipe. Furthermore, since the internal temperature of the insulation system in the pyrolytic graphite coating equipment reaches over 2100℃, to ensure stable operation, high-performance graphite soft felt is selected as the insulation material. However, graphite soft felt cannot be directly machined; therefore, it needs to be cut on-site during installation.

[0003] Existing cutting auxiliary tooling requires the design of specialized cutting auxiliary tooling bodies of different specifications based on the dimensions of different layers of insulation felt. Since the insulation system of the pyrolytic graphite coating equipment has a three-layer structure, three different cutting auxiliary tooling bodies are required, such as... Figure 1-3 As shown, these are the auxiliary cutting fixtures for the first, second, and third layers of the insulation system, respectively. The three sets of auxiliary cutting fixtures of different specifications correspond to the first, second, and third layers of the insulation system. When using them, the operator needs to change to different auxiliary cutting fixtures depending on the size of the graphite felt being cut. The auxiliary cutting fixtures are not universal and have low cutting efficiency. Utility Model Content

[0004] To address the technical problem that various cutting fixtures of different specifications and models are required when cutting graphite soft felt in a thermal insulation system, and that existing cutting fixtures lack versatility, this invention proposes an auxiliary fixture for cutting a CVD pyrolytic graphite coating equipment thermal insulation system.

[0005] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is as follows: an auxiliary tooling for cutting a CVD pyrolytic graphite coating equipment insulation system, including a cutting auxiliary tooling body, the cutting auxiliary tooling body including a base plate with a frame structure, a first cutting auxiliary component, a second cutting auxiliary component and a third cutting auxiliary component are detachably and fixedly connected on the base plate, the first cutting auxiliary component, the second cutting auxiliary component and the third cutting auxiliary component and the base plate form a layered structure; Several connecting plates are provided on the substrate, and a cutting area is left between each pair of connecting plates to avoid the cutting tool path when cutting graphite soft felt on site. The ends of multiple connecting plates away from the substrate form a circular hole structure. The first cutting auxiliary component has a first cutting hole. When the first cutting auxiliary component is assembled on the substrate, the second cutting hole and the first cutting hole are connected to the cutting area. The shape of the first cutting hole is consistent with the shape of the part to be cut in the first layer of insulation felt. The second cutting aid is provided with a second cutting hole. When the second cutting aid and the first cutting aid are both assembled on the substrate, the second cutting hole and the first cutting hole are connected to the cutting area. The shape of the second cutting hole is consistent with the shape of the part to be cut in the second layer of insulation felt. The third cutting auxiliary component has a third cutting hole corresponding to the circular hole structure. The shape and size of the third cutting hole are adapted to the air extraction port of the air extraction device, and the shape of the third cutting hole is consistent with the shape of the part to be cut of the third layer of insulation felt. When the third cutting auxiliary component, the second cutting auxiliary component and the first cutting auxiliary component are all assembled on the substrate, the third cutting hole, the second cutting hole and the first cutting hole are connected to the cutting area. The second cutting hole and the first cutting hole partially overlap to form a fourth air hole, and the third cutting hole and the second cutting hole partially overlap to form a fifth air hole. The fourth air hole and the fifth air hole have no overlapping area.

[0006] Furthermore, four square connecting plates are fixedly connected to the substrate. The four connecting plates are located at the four corners of the substrate, and the four connecting plates extend along their own length direction. Their extension lines converge at the geometric center point of the substrate.

[0007] Furthermore, the first cutting hole has an arc-shaped structure.

[0008] Furthermore, the second cutting hole has a square structure, and the end of the second cutting hole away from the arc-shaped edge of the second cutting auxiliary component has an arc-shaped structure. The center line of symmetry of the second cutting hole along its own length is parallel to the straight line passing through the radius of the third cutting auxiliary component.

[0009] Furthermore, the axis of the third cutting aid is on the same straight line as the normal line perpendicular to the plane of the substrate at the geometric center point of the substrate.

[0010] Furthermore, the third cutting hole has a circular structure, and the third cutting hole is coaxially arranged with the circular hole structure.

[0011] Furthermore, a first connection hole is provided on the connecting plate, and the first connection holes on multiple connecting plates are arranged in an array, and the multiple first connection holes are in the same plane.

[0012] Furthermore, the first cutting auxiliary component has multiple second connecting holes, which correspond to some of the first connecting holes, with each second connecting hole corresponding to one first connecting hole.

[0013] Furthermore, the second cutting auxiliary component has several third connecting holes, which correspond to some of the first connecting holes. Each third connecting hole corresponds to one first connecting hole, and the multiple third connecting holes correspond one-to-one with the multiple second connecting holes.

[0014] Furthermore, the third cutting auxiliary component has several fourth connecting holes, which are evenly distributed around the third cutting hole.

[0015] The advantages of this utility model over the prior art are as follows: 1. The cutting auxiliary tooling of this utility model integrates the first cutting auxiliary component, the second cutting auxiliary component and the third cutting auxiliary component on the substrate, which is easy to store. When cutting graphite soft felt with the cutting auxiliary tooling of this utility model, this set of tooling can be used to complete the operation. The operation is simple and greatly improves the operation efficiency. It is more versatile and convenient than traditional cutting auxiliary tooling.

[0016] 2. After cutting the part to be cut of the first layer of insulation felt along the first cutting hole of this utility model with a cutting tool, a first hole is formed on the first layer of insulation felt. After cutting the part to be cut of the second layer of insulation felt along the second cutting hole of this utility model with a cutting tool, a second hole is formed on the second layer of insulation felt. The second hole and the first hole partially overlap and intersect to form a fourth hole. After cutting the part to be cut of the third layer of insulation felt along the third cutting hole of this utility model with a cutting tool, a third hole is formed on the third layer of insulation felt. The third hole and the second hole partially overlap and intersect to form a fifth hole. The fifth hole and the fourth hole are completely offset. The third hole is connected to the air extraction port of the air extraction device. When the gas in the insulation system passes through the first layer of insulation felt, the second layer of insulation felt and the third layer of insulation felt in sequence, the gas path is: first hole → fourth hole → fifth hole. The cutting tool works in conjunction with the auxiliary tooling of this invention to cut the three layers of insulation felt, thereby changing the size of the gas channel from the insulation system to the exhaust port of the exhaust equipment. By reducing the size of the gas channel, the stability of the airflow in the insulation system during the exhaust process is ensured, thus guaranteeing the uniformity of the graphite coating deposition in the insulation system and improving the deposition quality.

[0017] 3. The third hole formed after the cutting tool cuts the part to be cut of the third layer of thermal insulation felt along the third cutting hole of the third cutting auxiliary component of this utility model can be adapted to the air extraction port of most air extraction equipment, without having to reduce the size of the air extraction port of the air extraction equipment in order to ensure uniform air extraction speed, thus reducing costs. Attached Figure Description

[0018] The present invention will be further described below with reference to the accompanying drawings: Figure 1 The main body of the traditional cutting auxiliary tooling for the first layer of insulation felt; Figure 2 The main body of the traditional cutting auxiliary tooling for the second layer of insulation felt; Figure 3 The main body of the traditional cutting auxiliary tooling for the third layer of thermal insulation felt; Figure 4 This is a schematic diagram of the structure of the substrate of this utility model; Figure 5 This is a schematic diagram of the structure of the first cutting auxiliary component of this utility model; Figure 6 This is a schematic diagram of the structure of the second cutting auxiliary component of this utility model; Figure 7 This is a schematic diagram of the structure of the third cutting auxiliary component of this utility model; Figure 8 This is a schematic diagram of the structure of the auxiliary tooling for cutting according to this utility model; Figure 9 This is a front view of the cutting auxiliary tooling of this utility model; Figure 10 This is a rear view of the auxiliary tooling for cutting according to this utility model; Figure 11 This is a side view of the auxiliary tooling for cutting according to this utility model; Figure 12 This is a schematic diagram of the structure after cutting three layers of thermal insulation felt using the auxiliary cutting tool of this utility model. Figure 1 ; Figure 13 This is a schematic diagram of the structure after cutting three layers of thermal insulation felt using the auxiliary cutting tool of this utility model. Figure 2 ; In the diagram: 1 is the main body of the cutting auxiliary tooling, 2 is the base plate, 3 is the first cutting auxiliary component, 4 is the second cutting auxiliary component, 5 is the third cutting auxiliary component, 6 is the connecting plate, 7 is the cutting area, 8 is the circular hole structure, 9 is the first connecting hole, 10 is the first cutting hole, 11 is the second connecting hole, 12 is the second cutting hole, 13 is the third connecting hole, 14 is the fourth air hole, 15 is the third cutting hole, 16 is the fourth connecting hole, 17 is the fifth air hole, 18 is the first hole, 19 is the fourth hole, 20 is the fifth hole, 21 is the first layer of thermal insulation felt, 22 is the second thermal insulation felt, and 23 is the third thermal insulation felt. Detailed Implementation

[0019] In this utility model, unless otherwise stated, directional terms such as "upper," "lower," "top," and "bottom" are generally used in relation to the direction shown in the accompanying drawings, or in relation to the vertical, perpendicular, or gravitational direction of the component itself; similarly, for ease of understanding and description, "inner" and "outer" refer to the inner and outer contours of each component itself, but the above directional terms are not used to limit this utility model.

[0020] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0021] like Figures 1 to 13 As shown, this utility model provides an auxiliary tooling for cutting in a CVD pyrolytic graphite coating equipment insulation system. The auxiliary tooling body 1 includes a base plate 2 with a square frame structure. A third cutting auxiliary component 5 with an annular structure, a second cutting auxiliary component 4 with a fan-shaped plate structure, and a first cutting auxiliary component 3 with an arc-shaped plate structure are detachably and fixedly connected to the base plate 2 in sequence. The first cutting auxiliary component 3, the second cutting auxiliary component 4, and the third cutting auxiliary component 5 together with the base plate 2 form a layered structure.

[0022] Multiple connecting plates 6 are fixedly connected to the substrate 2. A cutting area 7 is left between each pair of connecting plates 6 to avoid the cutting tool path during on-site cutting of graphite soft felt. The ends of the multiple connecting plates 6 away from the substrate 2 form a circular hole structure 8. The connecting plates 6 are provided with first connecting holes 9. The first connecting holes 9 on the multiple connecting plates 6 are arranged in an array and are located in the same plane. In this embodiment, four square connecting plates 6 are fixedly connected to the substrate 2. The four connecting plates 6 are located at the four corners of the substrate 2. The four connecting plates 6 extend along their own length direction, and their extension lines converge at the intersection point (geometric center point) of the two diagonals of the substrate 2. That is, the symmetrical center lines of the length direction of the four connecting plates 6 coincide with the diagonals of the substrate 2.

[0023] The first cutting auxiliary component 3 has a first cutting hole 10 and multiple second connecting holes 11. When the first cutting auxiliary component 3 is assembled on the substrate 2, the first cutting hole 10 is connected to the cutting area 7. The shape of the first cutting hole 10 is consistent with the shape of the part to be cut of the first layer of insulation felt 21. After the cutting tool cuts the part to be cut of the first layer of insulation felt 21 along the first cutting hole 10, a first hole 18 is formed on the first layer of insulation felt 21. The first hole 18 is located near the side of the insulation system. The first cutting hole 10 has an arc-shaped structure, and multiple second connecting holes 11 are distributed on both sides of the first cutting hole 10. Multiple second connecting holes 11 correspond to some of the first connecting holes 9, and each second connecting hole 11 corresponds to one first connecting hole 9.

[0024] In this embodiment, the first cutting aid 3 has two second connecting holes 11 with the same radius. The two second connecting holes 11 correspond one-to-one with the two first connecting holes 9 and cooperate with each other. The two second connecting holes 11 are located at opposite ends of the first cutting hole 10. The arc formed by connecting the centers of the two second connecting holes 11 to the center line of the first cutting hole 10 is consistent with the arc of the second cutting aid 4. More specifically, the arc formed by connecting the centers of the two second connecting holes 11 to the center line of the first cutting hole 10 coincides with the center line of the second cutting aid 4. The first cutting aid 3 is detachably and fixedly connected to the substrate 2 through the second connecting holes 11.

[0025] The second cutting aid 4 has a second cutting hole 12 and several third connecting holes 13. When the second cutting aid 4 and the first cutting aid 3 are both assembled on the substrate 2, the second cutting hole 12 and the first cutting hole 10 are connected to the cutting area 7. The second cutting hole 12 and the first cutting hole 10 partially overlap to form a fourth pore 14. The shape of the second cutting hole 12 is consistent with the shape of the part to be cut of the second layer of insulation felt. After the cutting tool cuts the part to be cut of the second layer of insulation felt along the second cutting hole 12, a second hole is formed on the second layer of insulation felt. The second hole and the first hole 18 partially overlap and intersect to form a fourth hole 19. In this embodiment, the second cutting hole 12 is generally square in shape. The center line of symmetry of the second cutting hole 12 along its own length is parallel to a straight line passing through the radius of the third cutting aid 5. Specifically, the center line of symmetry of the second cutting hole 12 along its own length is parallel to the radial center line of the third cutting aid 5. Multiple third connecting holes 13 are distributed on both sides of the second cutting hole 12; the multiple third connecting holes 13 correspond to a portion of the first connecting holes 9, with each third connecting hole 13 corresponding to one first connecting hole 9, and the multiple third connecting holes 13 corresponding one-to-one with the multiple second connecting holes 11. The end of the second cutting hole 12 away from the arc-shaped edge of the second cutting auxiliary component 4 has an arc-shaped structure. The second cutting auxiliary component 4 is detachably and fixedly connected to the substrate 2 through the third connecting holes 13. The first connecting holes 9, the second connecting holes 11, and the third connecting holes 13 cooperate with each other, so that the first cutting auxiliary component 3 and the second cutting auxiliary component 4 can be assembled together on the substrate 2.

[0026] In this embodiment, the third cutting auxiliary component 5 has two third connecting holes 13 with the same radius. The two third connecting holes 13 correspond one-to-one with the two first connecting holes 9, and the two third connecting holes 13 correspond one-to-one with the two second connecting holes 11. The two second connecting holes 11 are located at both ends of the second cutting hole 12, and the two second connecting holes 11 are located on the extension line of the center line of the second cutting hole 12 along its own width direction.

[0027] The third cutting aid 5 has a third cutting hole 15 and several fourth connecting holes 16. The shape of the third cutting hole 15 is consistent with the shape of the part to be cut in the third layer of insulation felt. After cutting the part to be cut in the third layer of insulation felt along the third cutting hole 15 with a cutting tool, a third hole is formed in the third layer of insulation felt. The third hole and the second hole partially overlap to form a fifth hole 20. The fifth hole 20 is completely offset from the fourth hole 19, that is, there is no overlapping area between the fourth hole 19 and the fifth hole 20. The third hole is connected to the air extraction port of the air extraction device. Therefore, the shape and size of the third cutting hole 15 are adapted to the air extraction port of the air extraction device. When the third cutting aid 5, the second cutting aid 4 and the first cutting aid 3 are all assembled on the substrate 2, the third cutting hole 15, the second cutting hole 12 and the first cutting hole 10 are connected. The third cutting hole 15 and the second cutting hole 12 partially overlap to form a fifth air hole 17. The fourth air hole 14 and the fifth air hole 17 do not overlap at all.

[0028] Multiple fourth connecting holes 16 are evenly distributed around the third cutting hole 15. The axis of the third cutting auxiliary component 5 is on the same straight line as the normal line perpendicular to the plane of the substrate 2 at the geometric center point of the substrate 2. The third cutting hole 15 has a circular structure and corresponds to the circular hole structure 8. Specifically, the third cutting hole 15 and the circular hole structure 8 are coaxially arranged.

[0029] Multiple fourth connecting holes 16 are arranged in an array and correspond one-to-one with multiple first connecting holes 9. Second connecting holes 11 correspond to some of the fourth connecting holes 16, and third connecting holes 13 correspond to some of the fourth connecting holes 16. The fourth cutting auxiliary component is detachably and fixedly connected to the substrate 2 through the fourth connecting holes 16. The first connecting holes 9, second connecting holes 11, third connecting holes 13, and fourth connecting holes 16 cooperate with each other to assemble the first cutting auxiliary component 3, the second cutting auxiliary component 4, and the third cutting auxiliary component 5 together on the substrate 2 for easy storage. After the third cutting auxiliary component 5, the second cutting auxiliary component 4, and the first cutting auxiliary component 3 are assembled on the substrate 2, the first cutting hole 10, the second cutting hole 12, and the third cutting hole 15 are interconnected.

[0030] In this embodiment, the third cutting auxiliary component 5 is provided with four fourth connecting holes 16.

[0031] The working principle of this utility model: In use, the first cutting aid 3 is mounted on the substrate 2 through the second connecting hole 11. The cutting tool cuts the part to be cut of the first layer of insulation felt 21 along the first cutting hole 10 of the first cutting aid 3. The angle and position of the first cutting aid 3 can be adjusted during cutting to complete the part to be cut of the first layer of insulation felt 21. After cutting the first layer of insulation felt 21, the second cutting aid 4 is replaced and mounted on the substrate 2 through the third connecting hole 13. The cutting tool cuts the part to be cut of the second layer of insulation felt along the second cutting hole 12 of the second cutting aid 4. The angle and position of the second cutting aid 4 can be adjusted during cutting to complete the part to be cut of the second layer of insulation felt. After cutting the second layer of insulation felt, the third cutting aid 5 is replaced and mounted on the substrate 2 through the fourth connecting hole 16. The cutting tool cuts the part to be cut of the third layer of insulation felt along the third cutting hole 15 of the third cutting aid 5. After assembling the cut first layer of insulation felt 21, the second layer of insulation felt, and the third layer of insulation felt, the first hole 18, the fourth hole 19, the fifth hole 20, and the third hole are connected, allowing the gas inside the insulation system to pass through the three layers of insulation felt sequentially. When the gas passes through the first layer of insulation felt 21, the second layer of insulation felt, and the third layer of insulation felt sequentially, the gas path is: first hole 18 → fourth hole 19 (formed by partial overlap and interlacing of the first and second holes) → fifth hole 20 (formed by partial overlap and interlacing of the second and third holes). When the gas enters the fourth hole 19 from the first hole 18, the gas passage narrows. The fourth hole 19 and the fifth hole 20 are completely staggered, and the gas seeps from the fourth hole 19 into the fifth hole 20, further narrowing the gas passage. This ensures the stability of the airflow within the insulation system during the extraction process, guarantees the uniformity of the graphite coating deposition within the insulation system, and thus improves the deposition quality. Finally, the gas flows sequentially from the fifth hole 20 and the third hole to the exhaust port of the extraction device, thus being extracted outside the insulation system. The fifth hole 20 is compatible with the exhaust ports of most extraction devices, eliminating the need to reduce the size of the extraction port to ensure uniform extraction speed, thereby reducing costs.

[0032] Regarding the specific structure of this utility model, it should be noted that the connection relationships between the various component modules adopted in this utility model are definite and achievable. Except as specifically described in the embodiments, their specific connection relationships can bring about corresponding technical effects and solve the technical problems proposed by this utility model without relying on the execution of corresponding software programs. The models of the components, modules, and specific components appearing in this utility model, the connection methods between them, and the conventional usage methods and expected technical effects brought about by the above-mentioned technical features, unless specifically described, are all publicly disclosed content in patents, journal articles, technical manuals, technical dictionaries, and textbooks that can be obtained by those skilled in the art before the application date, or belong to conventional technology, common knowledge, and other existing technologies in this field. There is no need to elaborate, which makes the technical solution provided in this case clear, complete, and achievable, and can reproduce or obtain corresponding physical products based on this technical means.

[0033] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this utility model.

Claims

1. An auxiliary tooling for cutting a CVD pyrolytic graphite coating equipment insulation system, characterized in that: The cutting auxiliary tooling body (1) includes a base plate (2) with a frame structure. A first cutting auxiliary component (3), a second cutting auxiliary component (4) and a third cutting auxiliary component (5) are detachably and fixedly connected on the base plate (2). The first cutting auxiliary component (3), the second cutting auxiliary component (4) and the third cutting auxiliary component (5) together with the base plate (2) form a layered structure. A number of connecting plates (6) are provided on the substrate (2), and a cutting area (7) is left between each pair of connecting plates (6) to avoid the cutting tool path when cutting graphite soft felt on site. The ends of multiple connecting plates (6) away from the substrate (2) form a circular hole structure (8). The first cutting auxiliary component (3) has a first cutting hole (10). When the first cutting auxiliary component (3) is assembled on the substrate (2), the second cutting hole (12) and the first cutting hole (10) are connected to the cutting area (7). The shape of the first cutting hole (10) is consistent with the shape of the part to be cut of the first layer of heat insulation felt (21). The second cutting aid (4) has a second cutting hole (12). When the second cutting aid (4) and the first cutting aid (3) are both assembled on the substrate (2), the second cutting hole (12) and the first cutting hole (10) are connected to the cutting area (7). The shape of the second cutting hole (12) is consistent with the shape of the part to be cut of the second layer of insulation felt. The third cutting aid (5) has a third cutting hole (15) corresponding to the circular hole structure (8). The shape and size of the third cutting hole (15) are adapted to the air extraction port of the air extraction device, and the shape of the third cutting hole (15) is consistent with the shape of the part to be cut of the third layer of insulation felt. When the third cutting aid (5), the second cutting aid (4) and the first cutting aid (3) are all assembled on the substrate (2), the third cutting hole (15), the second cutting hole (12), the first cutting hole (10) are connected to the cutting area (7). The second cutting hole (12) and the first cutting hole (10) partially overlap to form the fourth air hole (14), and the third cutting hole (15) and the second cutting hole (12) partially overlap to form the fifth air hole (17). The fourth air hole (14) and the fifth air hole (17) have no overlapping area.

2. The auxiliary tooling for cutting in the insulation system of a CVD pyrolytic graphite coating equipment according to claim 1, characterized in that: Four square connecting plates (6) are fixedly connected to the substrate (2). The four connecting plates (6) are located at the four corners of the substrate (2). The four connecting plates (6) extend along their own length direction, and their extension lines converge at the geometric center of the substrate (2).

3. The auxiliary tooling for cutting in the insulation system of a CVD pyrolytic graphite coating equipment according to claim 1, characterized in that: The first cutting hole (10) has an arc-shaped structure.

4. The auxiliary tooling for cutting in the insulation system of a CVD pyrolytic graphite coating equipment according to claim 1, characterized in that: The second cutting hole (12) has a square structure. The end of the second cutting hole (12) away from the arc edge of the second cutting auxiliary (4) has an arc structure. The center line of the second cutting hole (12) along its own length direction is parallel to the straight line passing through the radius of the third cutting auxiliary (5).

5. The auxiliary tooling for cutting in the insulation system of a CVD pyrolytic graphite coating equipment according to claim 1, characterized in that: The axis of the third cutting aid (5) is on the same straight line as the normal line perpendicular to the plane of the substrate (2) at the geometric center point of the substrate (2).

6. The auxiliary tooling for cutting in the insulation system of a CVD pyrolytic graphite coating equipment according to claim 1, characterized in that: The third cutting hole (15) has a circular structure and is coaxially arranged with the circular hole structure (8).

7. The auxiliary tooling for cutting in the insulation system of a CVD pyrolytic graphite coating equipment according to claim 1, characterized in that: A first connection hole (9) is provided on the connecting plate (6). The first connection holes (9) on multiple connecting plates (6) are arranged in an array, and the multiple first connection holes (9) are in the same plane.

8. The auxiliary tooling for cutting in the insulation system of a CVD pyrolytic graphite coating equipment according to claim 1, characterized in that: The first cutting auxiliary component (3) has multiple second connecting holes (11), and the multiple second connecting holes (11) correspond to some of the first connecting holes (9). Each second connecting hole (11) corresponds to one first connecting hole (9).

9. The auxiliary tooling for cutting in the insulation system of a CVD pyrolytic graphite coating equipment according to claim 1, characterized in that: The second cutting auxiliary component (4) has several third connecting holes (13). The multiple third connecting holes (13) correspond to some of the first connecting holes (9). Each third connecting hole (13) corresponds to one first connecting hole (9). The multiple third connecting holes (13) correspond one-to-one with the multiple second connecting holes (11).

10. The auxiliary tooling for cutting in the insulation system of a CVD pyrolytic graphite coating equipment according to claim 1, characterized in that: The third cutting auxiliary component (5) has several fourth connecting holes (16), which are evenly distributed around the third cutting hole (15).

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